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MegaPure 50, Model 304 Chemical Distribution System Operations & Maintenance Manual June 2013 322-00155-000REV001 EQUIPMENT REFERENCE NUMBER Information contained in this manual relates to the equipment listed below. Any questions or comments directed to Mega Fluid Systems, Inc. regarding equipment should reference the model and serial numbers.  MegaPure 50, Model 304 Chemical Distribution System Part Number 202-00280-ACAE REV001 This manual contains unpublished confidential and proprietary information of Mega Fluid Systems, Inc. No part of this publication may be reproduced, stored in a retrieval system, or transmitted in any form or by any means electronic or mechanical, including photocopying and recording for any purpose other than the purchaser’s use without the written permission of Mega Fluid Systems, Inc.  MegaPure 50, Model 304 Chemical Distribution System Operations & Maintenance Manual Part Number 322-00155-000REV001 REVISION HISTORY t Revision 322-00155-000REV001 History Original publication. Date June 2013 TRADEMARKS & WARRANTY The following terms, used throughout this publication, are registered or unregistered trademarks of Mega Fluid Systems, Inc.: MegaPure™, MegaBlend™, MegaFlow™, MegAdapt™, MegaSafe™, MegAlert™, MegaView™, MegaLink™, and MegaTrend™ OTHER TRADEMARKS The following are trademarks or registered trademarks of their respective companies or organizations:  MicroLogix™, SLC 505™, PanelView™, PanelView 550™, PanelView 600™, and PanelView 1000™, ™ are trademarks of Allen-Bradley Company, Inc.  Microsoft Windows® is a registered trademark of the Microsoft Corporation.  Adobe® Reader® is a registered trademark of Adobe Systems, Incorporated WARRANTY AND WARRANTY PERIOD Seller warrants that all products provided hereunder will be free from defects in material and workmanship under normal use and service. This warranty does not extend to any equipment which is misused, abused, improperly or inadequately maintained, or altered or modified without Seller’s express consent. This warranty does not extend to any defect which arises as a result of causes external to the product (such as power or air conditioning failure) which are not covered by warranty or which arise out of the installation or use of parts not authorized by Seller. Except as otherwise agreed by Seller in writing, this warranty does not extend to any custom products which have been produced to Buyer’s specification. The foregoing warranty shall extend for the following period:  Equipment — One (1) year parts & labor beginning at acceptance.  Spare Parts/Repairs — Ninety (90) days from date of shipment.  Consumable Products — Consumable products (filter elements, O-rings, etc.), are not covered under warranty by Seller. Note: ii An important part of the warranty provision is that the Customer completes a reasonable amount of preventive maintenance (PM). Mega Fluid Systems, Inc. provides a PM schedule within this Operations & Maintenance Manual. June 2013 DISCLAIMER Except as provided in Section 13.1 of the Terms and Conditions of Sale, seller makes no warranties, expressed or implied, with respect to the products sold hereunder and specifically disclaims the implied warranties of merchantability and fitness for particular purpose. REMEDY In the event any product fails to comply with the warranty set forth in Section 13.1 of the Terms and Conditions of Sale, Seller’s sole obligation and Buyer’s sole remedy, shall be for Seller, at its option, to repair or replace the defective product, exclusive of all shipping costs. Any such repair or replacement shall be at no charge to Buyer. EXCLUSION OF CONSEQUENTIAL DAMAGES Notwithstanding anything to the contrary contained herein, seller shall not, under any circumstances, be liable to buyer for consequential, incidental, special or indirect damages arising out of or related to this agreement or the transactions contemplated hereunder, even if seller is apprised of the likelihood of such damages. LIMITATION OF LIABILITY In no event shall seller’s liability, whether based on an action or claim in contract tort (including, without limitation, negligence and, to the extent permitted by law, strict liability) or otherwise, to buyer arising out of or related to this agreement exceed the aggregate price of the products purchased by buyer hereunder as of the date such action or claim was filed. Mega Fluid Systems, Inc. 9398 SW Tualatin-Sherwood Rd. Tualatin, Oregon 97062 USA Copyright ©2013 Mega Fluid Systems, Inc. All Rights Reserved June 2013 iii iv June 2013 Contents 1. INTRODUCTION ............................................................................................................................... 1-1 About This Manual ...........................................................................................................................................................1-2 Overview of Contents ............................................................................................................................................1-2 . . Printing a Hard Copy from Acrobat ...................................................................................................................1-3 System Overview..............................................................................................................................................................1-4 Feature Overview ....................................................................................................................................................1-4 Components ......................................................................................................................................................................1-5 System Cabinet .........................................................................................................................................................1-5 Chemical Dosing Package.......................................................................................................................................1-5 Piping ...........................................................................................................................................................................1-5 . . . . . . 2. SAFETY ................................................................................................................................................ 2-1 Messages & Symbols.........................................................................................................................................................2-2 Safety Messages.........................................................................................................................................................2-2 Safety Hazard Symbols ............................................................................................................................................2-3 General Safety Information ............................................................................................................................................2-4 Electrical Work Guidelines ............................................................................................................................................2-5 Emergency Machine Off (EMO) Procedure................................................................................................................2-6 . . . . . . EMO Circuitry Description ..................................................................................................................................2-7 Removing All Power........................................................................................................................................2-7 Resetting an EMO Button ..............................................................................................................................2-7 Lockout/Tagout.................................................................................................................................................................2-8 Implementing Lockout/Tagout ..............................................................................................................................2-8 Removing Lockout/Tagout.....................................................................................................................................2-8 Material Safety Data Sheets (MSDS) ............................................................................................................................2-9 Key Failure Points...........................................................................................................................................................2-10 Chemical Exposure ................................................................................................................................................2-10 . . . . . . Electrical Exposure ...............................................................................................................................................2-11 Spill Mitigation .................................................................................................................................................................2-12 Safety Interlocks..............................................................................................................................................................2-13 Manual Mode Warning ..................................................................................................................................................2-14 Safety Components........................................................................................................................................................2-15 . . . . 3. INSTALLATION.................................................................................................................................. 3-1 Facility Requirements.......................................................................................................................................................3-2 Installation Procedure......................................................................................................................................................3-3 System Location and Site Inspection ...................................................................................................................3-3 June 2013 v . . . Table of Contents MegaPure 50, Model 304 System Inspection.....................................................................................................................................................3-3 . Mechanical Inspection .....................................................................................................................................3-3 Electrical Inspection.........................................................................................................................................3-4 System Placement.....................................................................................................................................................3-4 System Commissioning ...........................................................................................................................................3-5 . . Mechanical Connections.................................................................................................................................3-5 Electrical Connections ....................................................................................................................................3-6 Pre-Startup Testing ..................................................................................................................................................3-6 System Configuration ..............................................................................................................................................3-7 DI Water Startup and Leak Testing.....................................................................................................................3-8 System Testing ..........................................................................................................................................................3-8 . . . . Alarm Test ........................................................................................................................................................3-9 Communications Test.....................................................................................................................................3-9 Chemical Startup and Testing................................................................................................................................3-9 Automatic and Solenoid Valves...................................................................................................................................3-11 Device Reference List....................................................................................................................................................3-12 . . . 4. SEQUENCE OF OPERATION........................................................................................................... 4-1 Sequence of Operations Overview..............................................................................................................................4-2 Pump and Start-Up of the Supply Drums ...........................................................................................................4-2 Dispense to the Process Tools .............................................................................................................................4-3 Station Shutdown .....................................................................................................................................................4-3 . . . . 5. SYSTEM OPERATION ....................................................................................................................... 5-1 Operating Procedures .....................................................................................................................................................5-2 Starting the System ..................................................................................................................................................5-2 . . Shutting the System Down ...................................................................................................................................5-3 Initial Chemical Start-up (Automatic Operation) .............................................................................................5-3 Drum Start-up Operation ......................................................................................................................................5-3 . . Manual Start-up Operation ...................................................................................................................................5-4 System Shutdown and Restart ..............................................................................................................................5-4 Restarting After an EMO Shutdown or Unexpected Loss of Power...........................................................5-5 Responding to Alarms .............................................................................................................................................5-5 . . . Leak Condition Alarm.....................................................................................................................................5-5 Drum Empty Alarm ........................................................................................................................................5-6 PLC MicroLogix™ 1000 Overview..............................................................................................................................5-7 PLC MicroLogix 1000 Button Descriptions.......................................................................................................5-7 . . 6. ALARMS AND WARNINGS .............................................................................................................. 6-1 Software Interlocks ..........................................................................................................................................................6-2 Critical Interlocks.....................................................................................................................................................6-2 Warnings ....................................................................................................................................................................6-2 vi . . . June 2013 MegaPure 50, Model 304 Table of Contents Interlock Alarms ......................................................................................................................................................6-3 7. MAINTENANCE.................................................................................................................................. 7-1 Safety Precautions ............................................................................................................................................................7-3 General System Maintenance.........................................................................................................................................7-4 Removing and Isolating Components ..................................................................................................................7-4 Removing and Isolating Electrical Components ................................................................................................7-5 . . . . Compact Flash Card ...............................................................................................................................................7-7 Pressure Reducing Regulators...............................................................................................................................7-7 Preventive Maintenance ..................................................................................................................................................7-8 Maintenance Schedule .............................................................................................................................................7-8 . . . Preparation ........................................................................................................................................................7-8 Equipment ..........................................................................................................................................................7-8 Weekly Preventive Maintenance Procedures ............................................................................................................7-9 Visual System Inspection.........................................................................................................................................7-9 Verifying the Device Settings...............................................................................................................................7-10 Monthly Preventive Maintenance Procedures .........................................................................................................7-12 Checking Pump Operation...................................................................................................................................7-12 Checking Leak Detectors.....................................................................................................................................7-12 Quarterly Preventive Maintenance Procedures ......................................................................................................7-15 Testing Alarms ........................................................................................................................................................7-15 . . . . . . . . Valves and Pressure Gauges ...............................................................................................................................7-16 Electrical Solenoid Valves (EV)....................................................................................................................7-16 Automatic Valves (AV)..................................................................................................................................7-17 Check Valves (CV).........................................................................................................................................7-17 Manual Valve (MV) ........................................................................................................................................7-18 Pressure Relief Valve .....................................................................................................................................7-18 Gas Line Maintenance ...................................................................................................................................7-19 Semi-Annual Preventive Maintenance Procedures .................................................................................................7-22 Fittings.......................................................................................................................................................................7-22 . . Checking the Fittings .....................................................................................................................................7-22 Replacing Fittings ............................................................................................................................................7-23 Rebuilding Pumps ...................................................................................................................................................7-24 . Isolating and Removing Pumps....................................................................................................................7-24 Annual Preventive Maintenance Procedures............................................................................................................7-26 Lithium Battery .......................................................................................................................................................7-26 . . Replacing the Lithium Battery .....................................................................................................................7-26 Disposing the Lithium Battery.....................................................................................................................7-27 Replacing the Filters...............................................................................................................................................7-28 Pulsation Dampener ..............................................................................................................................................7-30 June 2013 vii . . Table of Contents MegaPure 50, Model 304 EMO Testing ..........................................................................................................................................................7-31 Completing Preventive Maintenance Procedures ...................................................................................................7-32 Cabinet Cleaning ....................................................................................................................................................7-32 Maintenance Forms ........................................................................................................................................................7-33 . . . Work Order Form ...............................................................................................................................................7-34 Preventive Maintenance Form ...........................................................................................................................7-35 Device Settings Record Sheet ............................................................................................................................7-37 8. SCHEMATICS...................................................................................................................................... 8-1 Legend.........................................................................................................................................................................8-3 P&ID Schematic ........................................................................................................................................................8-5 Electrical Schematic .................................................................................................................................................8-7 Facility Schematic......................................................................................................................................................8-8 . . . . 9. PARTS LIST ......................................................................................................................................... 9-1 GLOSSARY ....................................................................................................................... GLOSSARY-1 INDEX ....................................................................................................................................... INDEX-1 viii June 2013 Chapter 1: Introduction This chapter contains the following information: About This Manual ........................................................................................1-2 Overview of Contents .............................................................................1-2 Printing a Hard Copy from Acrobat .........................................................1-3 System Overview ..........................................................................................1-4 Feature Overview ...................................................................................1-4 Components .................................................................................................1-5 System Cabinet ......................................................................................1-5 Chemical Dosing Package ......................................................................1-5 Piping .....................................................................................................1-5 June 2013 1-1 Introduction MegaPure 50, Model 304 About This Manual This manual presents installation, operation, and maintenance information for the MegaPure 50 Chemical Distribution System, Model 304. For information not contained in this manual, contact Mega Fluid Systems, Inc., Customer Service. Overview of Contents 1-2 Chapter Description Introduction Describes the manual’s content and conventions. Contains helpful hints for using this manual. Provides a brief overview of the MegaPure 50, Model 304’s function. Safety Contains important safety precautions and warnings. Explains conventions for usage of notice, caution, warning, and danger messages employed throughout the manual. Installation Provides information necessary for installing the MegaPure 50, Model 304. Sequence of Operations Describes the functional operations of the system. System Operation Includes step-by-step procedures for operating the MegaPure 50, Model 304. Alarms and Warnings Contains a list and description of all hardware and software alarms and warnings incorporated into the design of the MegaPure 50, Model 304. Provides a list of possible causes for each alarm and suggests corrective actions. Maintenance Outlines Mega Fluid Systems, Inc. recommended preventive and corrective maintenance program for the MegaPure 50, Model 304. Contains troubleshooting, calibration, and adjustment procedures. Schematics Provides MegaPure 50, Model 304 facility requirements, fluid flow, electrical, and mechanical schematics. Parts List Contains recommended spare parts and consumables lists. Glossary Provides definitions for terms, abbreviations, and acronyms which might be unfamiliar. June 2013 MegaPure 50, Model 304 Introduction Printing a Hard Copy from Acrobat Mega Fluid Systems, Inc. manuals print to 8.5” x 11”, however, 11” x 17” schematics are also included. To print a hard copy of the manual with all pages printing to the correct size, perform the following steps. 1. In Acrobat, select File > Print. The Print dialog opens. Figure 1-1. Print Dialog Example 2. Select the Choose Paper Source by PDF page size check box. 3. Click the OK button to print a hard copy of the manual. Note: June 2013 If your printer does not print to 11” x 17” size paper, your manual will print to 8.5” x 11” only. 1-3 Introduction MegaPure 50, Model 304 System Overview The MegaPure 50 Chemical Distribution System, Model 304 uses a drum and filtration circuit to supply chemical to multiple use points when a demand signal is received. When a supply drum is placed in service, the filter is primed, then chemical is “available” for distribution to points of use on demand. When a drum is detected as empty, the system automatically switches over to the standby drum, and an alarm is activated so that the operator can place a new drum in service. The station remains in standby mode (pump off) until (1) it receives a signal demanding slurry or (2) when the station is in EMO condition. After the drum has been put on line and the filter primed, the system will be available to distribute chemical upon a demand signal. Feature Overview The MegaPure 50 Chemical Distribution System, Model 304 includes the following features: 1-4 • Photoelectric leak detection and alarm • Cabinet door interlocks • Manual valve isolation of Teflon inlet and outlet lines and pump • Pulsation dampener • Cartridge filter (10”) • Separate NEMA rated fiberglass controls compartment • Black Magic communications interface capable • Dual drum with auto-changeover • Non-intrusive empty drum detection • 44” x 24” x 60” footprint June 2013 MegaPure 50, Model 304 Introduction Components System Cabinet The cabinet is made of a polypropylene wrapped steel frame with polypropylene panels. The doors are transparent to provide visual access to the instrumentation readouts and equipment behind the doors. The panels and doors provide easy access to critical areas and the plumbing design allows defective parts to be easily removed and replaced. The cabinet floor slopes to the drain to improve leak detection and promote drainage. Secondary containment protects against unwanted chemical release. Chemical Dosing Package The chemical dosing package (including flow meters, valves, and check valves) allows the system to blend slurry, water, and chemicals for making polishing slurry according to specifications. Piping A variety of pipes are used in the MegaPure 50 Chemical Distribution System, Model 304 system. Nitrogen (N2) and clean dry air (CDA) are sent through stainless steel pipes until they arrive at the cabinet’s chemical section where they are routed through Teflon™. Chemicals flow through 1⁄2”, 3⁄4”, and 1" Teflon™ tubing or piping. PVC doublecontainment is used on all chemical lines exterior to the cabinet in order to minimize the possibility of leaks. June 2013 1-5 Introduction 1-6 MegaPure 50, Model 304 June 2013 Chapter 2: Safety This chapter contains the following information: Messages & Symbols ...................................................................................2-2 Safety Messages ....................................................................................2-2 Safety Hazard Symbols ..........................................................................2-3 General Safety Information ...........................................................................2-4 Electrical Work Guidelines ............................................................................2-5 Emergency Machine Off (EMO) Procedure ...................................................2-6 EMO Circuitry Description.......................................................................2-7 Removing All Power .........................................................................2-7 Resetting an EMO Button .................................................................2-7 Lockout/Tagout .............................................................................................2-8 Implementing Lockout/Tagout.................................................................2-8 Removing Lockout/Tagout ......................................................................2-8 Material Safety Data Sheets (MSDS) ............................................................2-9 Key Failure Points.......................................................................................2-10 Chemical Exposure...............................................................................2-10 Electrical Exposure ...............................................................................2-11 Spill Mitigation ............................................................................................2-12 Safety Interlocks .........................................................................................2-13 Manual Mode Warning ................................................................................2-14 Safety Components ....................................................................................2-15 June 2013 2-1 Safety MegaPure 50, Model 304 Messages & Symbols Safety hazards are those situations that might harm or severely injure a person or equipment through the normal operation of the MegaPure 50 Chemical Distribution System, Model 304. These safety hazards are present due to the electrical, mechanical, or chemical operating characteristics of the system. Safety Messages Some operations in this manual may be dangerous to the operator and/or the facilities. This manual contains DANGER, WARNING, CAUTION, or NOTICE messages. Compliance with these hazard messages prevents unnecessary risks while working. The following is an example of the four hazard level messages used in the manual. DANGER DANGER MESSAGE! Indicates an imminently hazardous situation which, if not avoided, WILL result in death or serious injury. WARNING WARNING MESSAGE! Indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury. CAUTION CAUTION MESSAGE! Indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injuries, such as minor cuts, abrasions, slipping, tripping, noise, and vibrations. CAUTION may also be used to alert against unsafe practices. NOTICE NOTICE MESSAGE! Indicates a statement of company policy directly or indirectly related to the safety of personnel or protection of property. NOTICE often highlights specific actions or steps that must be followed to avoid damage to the equipment or its ability to function. 2-2 June 2013 MegaPure 50, Model 304 Safety Safety Hazard Symbols The hazard symbols used in this manual, their descriptions, and proper precautions are listed in Table 2-1. Table 2-1. Safety Hazard Symbol Descriptions Symbol Description Chemical hazard A skull and cross bones graphic within a triangle indicates chemical hazards (e.g., chemicals dispensing from the system). Wear the proper Personal Protective Equipment (PPE) to avoid injury. Refer to site MSDS for chemical specific information. Electrical hazard — Type 3 A downward lightning arrow graphic within a triangle indicates electrical hazards. Electrical hazards may require using the lockout/tagout procedure (refer to Implementing Lockout/Tagout (page 2-8). Noise hazard A headphone graphic within a triangle indicates sound and noise hazards. Hearing protection is required. Wear the proper PPE to avoid personal injury. Mechanical hazard A hand pinched between two circles within a triangle indicates mechanical hazards (e.g., equipment that could pinch or entangle hands and fingers). Mechanical hazards may require using the lockout/ tagout procedure. Protective equipment required A human form within a triangle indicates personal protective equipment is required (e.g., when working with chemicals). Wear the appropriate PPE to avoid personal injury. Heavy Object Hazard A human form lifting an object indicates heavy object hazards (e.g., equipment may tip over or requires mechanical assistance to lift or move). Use appropriate mechanical aids. June 2013 2-3 Safety MegaPure 50, Model 304 General Safety Information A user must have proper system and safety training before operating any Mega Fluid Systems, Inc. equipment. The following list describes several precautions required to safely operate the system. 2-4 • Maintain compliance with all local, state, and federal regulations, ordinances, laws, etc., that require handling all processing solutions, chemicals, and acids, as well as all wastes produced by this system. • All personnel must have proper training in related safety procedures. • Do not allow unauthorized or untrained personnel in the area of the system. • Personal Protective Equipment (PPE) is required. Wear the appropriate PPE to avoid personal injury. Follow requirements listed in the MSDS for the appropriate chemical. Follow all site specific rules for PPE. • Treat all chemical exposures as potentially serious. Neutralize and irrigate the exposed area and seek first aid immediately as outlined in the MSDS. • Treat all chemical spills or leaks as hazardous and clean up immediately. • Use extreme caution when working with electrical equipment. Always assume high voltage exists; use lockout and tagout procedures during maintenance. June 2013 MegaPure 50, Model 304 Safety Electrical Work Guidelines Electrical work on Mega Fluid Systems, Inc. equipment is classified by type as defined in the SEMI S2-0200 Safety Guidelines for Semiconductor Manufacturing Equipment. All electrical hazard tasks of Type 3 or higher are identified in this manual. A brief description of each electrical hazard type is provided below for reference. Type 1 — Equipment is fully de-energized. Lockout and tagout procedures should be used. Type 2 — Equipment is energized. Energized circuits are covered or insulated. Type 3 — Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are no greater than 30 volts RMS, 42.2 volts peak, 60 volts dc, or 240 volt-amps in dry locations. Type 4 — Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are greater than 30 volts RMS, 42.2 volts peak, 60 volts DC, or 240 volt-amps in dry locations. Potential exposures to radio frequency (rf) currents, whether induced or via contact, exceed the limits set in S2-0200 Safety Guidelines for Semiconductor Manufacturing Equipment, Appendix 5, Table A5-1. June 2013 2-5 Safety MegaPure 50, Model 304 Emergency Machine Off (EMO) Procedure The Emergency Machine Off (EMO) button (as shown in Figure 2-1) is a mechanism used for immediately shutting down the system. Pressing the EMO button interrupts system power and stops all functions of the system. To shut down the system: 1. Locate the Emergency Machine Off (EMO) button on the system. 2. Press this button to immediately interrupt system power. - OR - Figure 2-1. Emergency Machine Off (EMO) Button CAUTION EMO BUTTON MUST BE ACCESSIBLE! Never disable or cover an EMO button. This can prevent the system from being stopped in the event of an emergency. 2-6 June 2013 MegaPure 50, Model 304 Safety EMO Circuitry Description If the EMO button is pressed, all electrical power DOWNSTREAM from the EMO switch is shut off. Refer to the Schematics (page 8-1) for power routing details. CAUTION ELECTRICAL HAZARD! Pressing the EMO button is not a safe alternative to the prescribed lockout/tagout procedure. Removing All Power To remove all power, toggle the AC Disconnect Switch to the Off position. AC Disconnect switch Figure 2-2. AC Disconnect Switch Location Resetting an EMO Button To reset an EMO button, pull it out until it pops back to its original position. For instructions on restoring power to the system after an EMO shutdown, see Restarting After an EMO Shutdown or Unexpected Loss of Power (page 5-5). June 2013 2-7 Safety MegaPure 50, Model 304 Lockout/Tagout The lockout/tagout procedure is required to prevent the unexpected energization of the system. WARNING LOCK OUT/TAG OUT SYSTEM! To ensure the safety of personnel, the system should be locked and tagged out before maintenance procedures are performed. Implementing Lockout/Tagout 1. Bleed off the pressure or flush all lines carrying hazardous chemicals before locking the valve in the required position and/or blanking the line. 2. Turn off or return all operating controls to the neutral mode. 3. Relieve, disconnect, restrain, or otherwise render safe residual or stored energy such as capacitors, gas, steam, water pressure, air, and hydraulic. 4. Place the AC Disconnect switch in the Off position. 5. Place and lock a padlock on the disconnect switch. 6. Attach a lockout tag to the switch which indicates the system is locked out for service purposes and identifies those employees authorized to remove the lock and tag. 7. Test the valve or switch to ensure the control cannot be moved to the activated position. 8. Ensure all energy sources have been de-energized on dual or multi-energy source operations prior to beginning work. 9. Retest the controls of the individual machine or equipment to verify the operation is positively off. Removing Lockout/Tagout 1. Inspect the machine or equipment to ensure all components, including safeguards, are in place and personnel are in the clear before reactivation. 2. Remove the padlock and notify the affected employee(s) when work is complete and the machine or equipment is ready to be reactivated. 2-8 June 2013 MegaPure 50, Model 304 Safety Material Safety Data Sheets (MSDS) Material Safety Data Sheets (MSDS) contain important information about the toxicity, corrosiveness, and flammability of hazardous materials.Therefore, it is highly recommended that data sheets specific to the chemicals used in the system be acquired from the chemical manufacturer and placed in a visible location in the vicinity of the system. June 2013 2-9 Safety MegaPure 50, Model 304 Key Failure Points Chemical Exposure The following procedures (but not limited to) may place the operator at risk of chemical exposure: CAUTION CHEMICAL HAZARD! Performing maintenance on the key failure points may expose the operator to hazardous chemicals. Wear proper PPE. Refer to MSDS for site-specific chemical information. 2-10 • Changing out an empty supply drum or tote. • Sampling system chemistry. • Flushing the system. • Checking for leaks. • Performing a particle count. • Transporting chemicals to the system. • Filling the pipes with air. • Clean flushing the drums/totes and pipes. • Changing pumps, valves, filters, pressure switches, etc. • Handling PPE after use. June 2013 MegaPure 50, Model 304 Safety Electrical Exposure The following procedures (but not limited to) may place the operator at risk of electrical exposure: WARNING ELECTRICAL HAZARD — TYPE 3! Performing maintenance on the key failure points may expose the operator to electrical hazards. Use caution when performing procedures that may involve contact with electrical components. Use lockout/tagout procedures when appropriate. June 2013 • Testing system communications. • Testing the interlock systems (if present). • Testing the chemical demand signal. 2-11 Safety MegaPure 50, Model 304 Spill Mitigation The MegaPure 50 Chemical Distribution System, Model 304 is designed to minimize the possibility of an unwanted chemical release. The cabinet is designed to contain 110% of the total piping volume plus the total contents of the largest reservoir. If the cabinet is breached, there is a possibility of a chemical spill. In the event of an unwanted chemical release, use the following steps as a guideline. 1. Treat all chemical spills as hazardous. 2. Notify the proper site authority. 3. Follow all site specific rules for chemical spills. 4. Follow all information contained in the MSDS. 5. If possible, contain the spill with absorbent barriers. 6. If possible, neutralize the spill according to MSDS information. DANGER CHEMICAL HAZARD! Treat all chemical spills as extremely hazardous. Notify the proper site authority of any chemical spill. Refer to the applicable MSDS for special protection information and spill procedures/disposal requirements. 2-12 June 2013 MegaPure 50, Model 304 Safety Safety Interlocks Safety interlocks are incorporated into the design of the system to ensure user safety. The system’s electrical doors are interlocked so the system automatically shuts down when the doors are opened. This automatic shutdown reduces the possibility of operator injury. Door interlocks are wired in the same circuit as the EMO switch and cause the same power shutdown. June 2013 2-13 Safety MegaPure 50, Model 304 Manual Mode Warning In Manual mode, the user assumes control of the system. It is possible to open a combination of valves that could create an unsafe condition or cause damage to the system. Only technicians and service personnel familiar with the equipment should attempt to operate the system in Manual mode. CAUTION USE CAUTION IN MANUAL MODE! Placing the system in Manual mode allows combinations of valves to be opened or closed that may be outside the scope of the equipment design. The user assumes all responsibility for running the system in Manual mode. 2-14 June 2013 MegaPure 50, Model 304 Safety Safety Components The MegaPure 50 Chemical Distribution System, Model 304 includes several components that help ensure safe operation. June 2013 • The flow and pressure equipment have regulators and pressure switches that activate an alarm if the flow and pressure do not meet preset requirements. These regulators and alarms protect the equipment and users from unsafe pressure or flow levels. • Sensors detect fill liquid or air in the tubing, faulty pumps, and low to high pressure levels. When a problem is detected by these sensors, an alarm or warning is activated and the system is shut down if the problem is critical. • Pressure switches monitor low and high pressure settings. An alarm is activated if readings fall below the low setpoint or exceed the high setpoint. • Each station has hand sprayers used to clean out the cabinet or components with DI water. • Differential Pressure Switch sensors monitor cabinet pressure (exhaust). 2-15 Safety 2-16 MegaPure 50, Model 304 June 2013 Chapter 3: Installation This chapter contains the following information: Facility Requirements ...................................................................................3-2 Installation Procedure ...................................................................................3-3 System Location and Site Inspection ......................................................3-3 System Inspection ..................................................................................3-3 Mechanical Inspection ......................................................................3-3 Electrical Inspection .........................................................................3-4 System Placement ..................................................................................3-4 System Commissioning ..........................................................................3-5 Mechanical Connections...................................................................3-5 Electrical Connections ......................................................................3-6 Pre-Startup Testing.................................................................................3-6 System Configuration .............................................................................3-7 DI Water Startup and Leak Testing .........................................................3-8 System Testing .......................................................................................3-8 Alarm Test ........................................................................................3-9 Communications Test .......................................................................3-9 Chemical Startup and Testing.................................................................3-9 Automatic and Solenoid Valves ..................................................................3-11 Device Reference List.................................................................................3-12 June 2013 3-1 Installation MegaPure 50, Model 304 Facility Requirements All air, gas, electrical, and fluid connections must be established before the system is initially started. Facility connections requirements are listed in the schematics and summarized in the following table. Service Average Capacity Maximum Capacity DI Water Supply 241.3 kPa, 15 LPM 241.3 kPa, 16 LPM 1/2” PFA Flaretek Bulkhead DI Water Return 241.3 kPa, 16 LPM 241.3 kPa, 15 LPM 3/8” PFA Flaretek Bulkhead Nitrogen Supply 620.5 kPa, 15.8 SLPM 620.5 kPa, 15.8 SLPM 3/8” SS Swagelok Bulkhead CDA Supply 620.5 kPa, 240.7 SLPM 620.5 kPa, 240.7 SLPM 3/8” SS Swagelok Bulkhead Process Drain 344.7 kPa, 15 LPM 344.7 kPa, 16 LPM 3/4” PP FNPT Full Coupling Gravity Drain Gravity Fed Gravity Fed 3/4” PP FNPT Half Coupling -0.0249 kPa, 1713 LPM -0.0249 kPa, 2569 LPM 120VAC Single Phase 60 HZ 0.2A 120VAC Single Phase 60 HZ 1.8A Exhaust Power Communication 3-2 Chem Demand (24VDC & 0VDC Supplied from Customer); Ready (Dry Contacts) Connection 3” Flange Connector 3/4” FNPT Chem Demand (24VDC & Customer Field Drilled & Applied Connector 0VDC Supplied from Customer); Ready (Dry Contacts) June 2013 MegaPure 50, Model 304 Installation Installation Procedure The following installation procedure is provided in order to ensure the safe and proper installation and commissioning of Mega Fluid Systems, Inc. systems. System Location and Site Inspection The following items must be verified in order to ensure the work area is safe and clean prior to any work being done by the field installation crew. • Work area is clean and free of any chemical spills or contamination. • Work area is clear of all obstacles, equipment, or hazardous conditions which might prevent safe access to the system. • Work area has power outlets and can accommodate the systems required for installation. System Inspection The following items must be verified in order to ensure that no gross damage occurred to the system during shipment to the work site and that the system is sound and ready for use in a production environment. Mechanical Inspection Verify the following mechanical functions of the system before use: June 2013 • Cabinet is clean, including the top. • No scratches or cracks are present in cabinet. • No broken welds on frame, internal or external. • No unprotected frame or metal exposed. Check under cabinet. • Panels, doors, hinges, and hood are not broken or damaged. • Back panels are attached and no bolts are broken. • Welds on standouts, mounting blocks, and pump stands are not broken or damaged. • Feet are properly aligned and able to adjust height. • Plenum louver is easy to move. • Flare fittings are tight. • Swagelok fittings are tight and checked with No Go gap gauge. • Piping is labeled with correct label and flow direction. • Valves are correctly tagged. 3-3 Installation MegaPure 50, Model 304 • Regulators are correctly tagged. • Gauges are correctly tagged. • Interlock, chemical warning, and caution stickers are on all doors. Electrical Inspection Verify the following electrical functions of the system before use: • DIN rails are mounted squarely and securely. • EV blocks on back panel are mounted securely. • Terminal blocks are mounted securely. • Wire troughs are mounted squarely and securely. • Wire terminals are tight. • Connectors are labeled and secured with heat shrink tubing. • Sensors are mounted and secured. • All groups of cables/wires leaving wire trough are wrapped with spiral wrap. • The WAGO-System-I/O is wired correctly, as per the Electrical Schematic (page 8-7). System Placement The typical system placement procedure ensures equipment is properly set up for normal operation. CAUTION HEAVY OBJECT HAZARD! Installing or removing the system requires mechanical assistance. Use proper equipment in order to minimize the risk of personnel injury. 1. Set system in place according to site layout. 2. Adjust leveling legs so that cabinet base is approximately six inches (but no more than eight inches) from the floor. Adjust leveling legs, as necessary, to level the cabinet. 3. If required, install seismic mounts on legs of cabinet. Refer to the local building codes for seismic mount requirements. 4. Repeat the placement procedure for each system component. 3-4 June 2013 MegaPure 50, Model 304 Installation System Commissioning The typical system commissioning procedure includes verifying that proper mechanical and electrical connections are made to the system, and no cracks, misalignment, or stress is placed on the interconnecting plumbing. Mechanical Connections 1. Connect cabinet and process drain to facilities drain. See Facility Requirements (page 3-2) for the connection type. 2. Connect CDA and N2 supplies to the correct inlet valves. See Facility Requirements (page 3-2) for the connection type. 3. Connect DI water supply and return lines to the correct bulkheads. See Facility Requirements (page 3-2) for the connection type. 4. Route double-containment to the correct bulkheads. 5. Connect slurry lines to the correct internal plumbing. See Facility Requirements (page 3-2) for the connection type. 6. Ensure the exhaust duct is composed of flame retardant polypropylene or better rated chemical-resistant material, if necessary. 7. Connect exhaust, or ensure facility installation is correct. Ensure exhaust is handled and treated according to applicable safety and pollution regulations according the MSDS. WARNING CHEMICAL HAZARD! The exhaust effluent may contain chemical (vapor or liquid). It should be handled and treated accordingly for compliance to safety and pollution control regulations. 8. Verify exhaust flow using the differential pressure switch on the front of the system. 9. Connect ¼” stainless steel (SS) lines from the exhaust manifold to the differential pressure switch. June 2013 3-5 Installation MegaPure 50, Model 304 Electrical Connections CAUTION ENSURE POWER IS OFF BEFORE WORK! Turn facilities power off before connecting electrical lines to the system. Use Lockout/Tagout Procedures. 1. Connect the facility electrical supply to the AC disconnect. See Electrical Schematic (page 8-7) for reference. 2. Ensure all communications wiring is in place and connections have been terminated. 3. Ensure signal interconnects and communication wires have been pulled to all external equipment associated with the system. Pre-Startup Testing The typical safety testing is done before DI water is introduced to the system. This procedure requires the system to be powered up. CAUTION ELECTRICAL HAZARD — TYPE 3! Live circuits may be exposed and accidental contact is possible. Use extreme caution in order to avoid electrical shock. 1. Start the system. 2. Test all EMO switches. 3. Test other equipment safety features. 4. Ensure the correct PLC input LED on the system illuminates when the sensor is tested. See Electrical Schematic (page 8-7) for reference. 5. Check screens for correct display changes. 6. Ensure drains work properly by testing with DI water. 7. Test all leak detectors and liquid sensors. Calibrate liquid sensors, if necessary. 3-6 June 2013 MegaPure 50, Model 304 Installation System Configuration The typical system configuration procedure verifies the functionality of system components. This procedure requires the system to be powered up. CAUTION ELECTRICAL HAZARD — TYPE 3! Live circuits may be exposed and accidental contact is possible. Use extreme caution to avoid electrical shock. 1. Check all manual valves, needle valves, and ball valves for ease of operation. 2. Set all manual valves, needle valves, and ball valves to proper alignment (open or closed). See Device Reference List (page 3-12). 3. Ensure all check valves are correctly aligned. DANGER PRESSURE HAZARD! Open the door to the gas compartment only. Leave all other cabinet doors closed to protect yourself from potential hazards. 4. Close all cabinet doors while configuring gas line components. 5. Set regulators, relief valves, and flow regulators to correct settings. Record all device settings. See Device Reference List (page 3-12). 6. Ensure the system is On. 7. Place the unit in manual mode. 8. Toggle each valve in the order displayed on the P&ID Schematic (page 8-5). For each valve, ensure: • The correct valve opens, indicated by the pop-out indicator. • The correct solenoid is activated, indicated by the light on the solenoid. The solenoid is identified on the Electrical Schematic (page 8-7). • The proper output is activated. See the P&ID Schematic (page 8-5) or ensure pressure switches are at correct settings. • Ensure the correct PLC input LED illuminates when the sensor is tested. Refer to the Electrical Schematic (page 8-7). • Record all device settings. • Check PanelView screens for correct display changes. 9. Record all pump and filter specifications. June 2013 3-7 Installation MegaPure 50, Model 304 DI Water Startup and Leak Testing The typical DI water startup and leak testing is performed before the chemical startup. This procedure requires the system to be powered up. CAUTION ELECTRICAL HAZARD — TYPE 3! Live circuits may be exposed and accidental contact is possible. Use extreme caution to avoid electrical shock. 1. Provide clean DI water in source containers (totes/drums). 2. Ensure the system is On. 3. In manual mode, fill system with DI water. 4. Check the entire system for leaks. Fix any leaks that may occur. 5. Set and record all timers, runtime setpoints, and alarm setpoints. 6. Set the system recipe(s). 7. Calibrate the flowmeters. Record the K-factor for each flowmeter. 8. Calibrate the analytical devices. Record the settings. 9. Run the system in automatic mode, simulating a POU consumption. 10. Return the system to normal automatic operation and observe the system for a period that represents a complete cycle of functions. System Testing The typical system testing is performed before the chemical startup. This procedure requires the system to be powered up. CAUTION ELECTRICAL HAZARD — TYPE 3! Live circuits may be exposed and accidental contact is possible. Use extreme caution to avoid electrical shock. 3-8 June 2013 MegaPure 50, Model 304 Installation Alarm Test 1. Test all critical alarms. With the system running, trigger the alarms and ensure the system stops pumping chemical. 2. Test all process alarms. When the system is running, trigger the alarms and verify the portion of the system associated with the alarm stops. Some alarms may require a brief setup to simulate certain portions of a process. 3. Test all warnings. When the system is running, trigger the alarms and ensure the alarm sounds but does not shut down any part of the system. Communications Test 1. Ensure no communication or other system alarms may interfere with the communication test. 2. Initiate a chemical demand or other communication parameter and ensure the systems interact in accordance with the signal being sent. The system receiving the signal should respond by performing a function or returning a status signal to the host system. 3. Return systems to normal automatic operation and observe the communications for a period that represents a complete cycle of functions. 4. Perform this test for each component connected to the MegaPure 50, Model 304. Chemical Startup and Testing The typical chemical startup and testing is performed to complete the installation procedure. This procedure requires the system to be powered up. CAUTION ELECTRICAL HAZARD — TYPE 3! Live circuits may be exposed and accidental contact is possible. Use extreme caution to avoid electrical shock. CAUTION USE PROPER PPE WHEN HANDLING CHEMICAL! Potentially hazardous chemicals may be present in the system during the Chemical Startup and Testing. Wear proper PPE to avoid injury. 1. Drain the DI water from the system. Purge the system with N2, as required. June 2013 3-9 Installation MegaPure 50, Model 304 2. Connect the source chemical(s). 3. Run the system in automatic mode with chemical(s). Monitor the system closely for leaks. 4. Flush the chemical(s) to the drain. Continue flushing and particle count testing until system specifications are met. 5. Qualify the system through system readings or qualified laboratory analysis. Record all results, including blend ratio, volumes, and analytical specifications. 6. Perform a final system checkout and qualification. 3-10 June 2013 MegaPure 50, Model 304 Installation Automatic and Solenoid Valves The following is a complete list of automatic valves (AVs) and their associated solenoid valves (EVs) for the MegaPure 50, Model 304. Table 3-1. MegaPure 50, Model 304 Automatic and Solenoid Valves P&ID Location AV EV Designation Designation Description Comments Pg. 2 AV1 SV-1 Chemical Discharge Isolation Valve NC Pg. 2 AV2 SV-2 Filter Degassing Isolation Valve NC Pg. 2 AV3/AV5 SV-3 Pump Pneumatic Supply Selection Valve / Drum Blanket Isolation Valve NC-NO / NC Pg. 2 AV4A/B SV-4 Drum #1 Supply Isolation Valve / Drum #2 Supply Isolation Valve NC / NO Pg. 2 SPARE SV-5 Spare Pg. 2 SPARE SV-6 Spare Pg. 2 SPARE SV-7 Spare Pg. 2 SPARE SV-8 Spare Pg. 2 SPARE SV-9 Spare Pg. 2 SPARE SV-10 Spare Pg. 2 SPARE SV-11 Spare Pg. 2 SPARE SV-12 Spare Pg. 2 SPARE SV-13 Spare Pg. 2 SPARE SV-14 Spare Pg. 2 SPARE SV-15 Spare Pg. 2 SPARE SV-16 Spare June 2013 3-11 Installation MegaPure 50, Model 304 Device Reference List The following is a complete device reference list for the MegaPure 50, Model 304. Table 3-2. Device Reference List P&ID Location Type Number State Description 1/F6 AV 1 NC Valve, Diaphragm, Pneumatic,2-way, Chemical Discharge Isolation 1/C6 AV 2 NC Valve, Diaphragm, Pneumatic, 2-way, Filter Degassing Isolation 1/C10 AV 3 NC/NO Valve, Diaphragm, Pneumatic, 3-way, Pump Pneumatic Supply Selection 1/D15 AV 4A NC Valve, Diaphragm, Pneumatic, 2-way, Drum #1 Isolation 1/D14 AV 4B NO Valve, Diaphragm, Pneumatic, 2-way, Drum #2 Isolation 1/F12 AV 5 NC Valve, Diaphragm, Pneumatic, 2-way, Drum Blanket Isolation 2/G15 BV 1 Closed Valve, Ball, 2-way, N2 Supply Isolation 2/G10 BV 2 Closed Valve, Ball, 2-way, CDA Supply Isolation 1/D10 Dampe ner #1 ----- Dampener, Pulsation, Pump P1 1/A15 Drum #1 ----- Drum, Chemical Supply, Principle 1/A14 Drum #2 ----- Drum, Chemical Supply, Redundant 1/D7 FL 1 ----- Filter, Principle 2/F13 FR 1 Field Set Flow Regulator, Manual, Pneumatic Compartment Purge 2/F12 FR 2 Field Set Flow Regulator, Manual, Drum Blanket 1/A9 LD 1 NC Sensor, Leak, Process Cabinet 1/D13 LS 1 NO Sensor, Proximity, Drum Empty 1/E6 LS 2 NO Sensor, Proximity, Filter Degassing Line 1/C15 MV 1A Closed Valve, Diaphragm, Manual, 2-way, Drum #1 Supply Isolation 1/C14 MV 1B Closed Valve, Diaphragm, Manual, 2-way, Drum #2 Supply Isolation 1/B12 MV 2 Closed Valve, Diaphragm, Manual, 2-way, Pump P1 Inlet Isolation 1/E10 MV 3 Closed Valve, Diaphragm, Manual, 2-way, Pump P1 Exit Isolation 1/B11 MV 4 Closed Valve, Diaphragm, Manual, 2-way, Pump P1 Drain Isolation 3-12 Comment June 2013 MegaPure 50, Model 304 Installation Table 3-2. Device Reference List (continued) P&ID Location Type Number State Description 1/F7 MV 5 Closed Valve, Diaphragm, Manual, 2-way, Filter FL1 Vent Isolation 1/C7 MV 6 Closed Valve, Diaphragm, Manual, 2-way, Filter FL1 Drain Isolation 1/E9 MV 7 Closed Valve, Diaphragm, Manual, 2-way, Filter FL1 Inlet Isolation 1/G6 MV 9 Closed Valve, Diaphragm, Manual, 2-way, Chemical Supply Isolation 1/G15 MV 10 Closed Valve, Diaphragm, DI Water Supply Isolation 1/F15 MV 11 ----- Hand sprayer 1/F13 MV 12 Closed Valve, Diaphragm, Manual, 2-way, Pump P1 Flush Isolation 1/G14 NV 1 Closed Valve, Needle, Manual, 2-way, DI Water Return Attenuation - Isolation 1/C11 P 1 ----- Pump, Chemical Dispense, Principle 2/D14 PG 1 ----- Gauge, N2 Supply to Solenoids 2/F14 PG 2 ----- Gauge, N2 Supply to Drum Blanket 2/G9 PG 3 ----- Gauge, CDA Supply to Pump P1 1/E5 PG 4 ----- Gauge, Filter FL1 Exit Pressure Indicator 1/E8 PG 5 ----- Gauge, Filter FL1 Inlet Pressure Indicator 1/F10 PSH 6 -.1” H2O Switch, Vacuum, Exhaust 2/C14 REG 1 70 PSIG Regulator, Pressure, N2 Supply to Solenoids 2/F14 REG 2 1 PSIG Regulator, Pressure, N2 Supply to Drums 2/G9 REG 3 60 PSIG Regulator, Pressure, CDA Supply to Pump P1 2/D13 RV 1 80 PSIG Relief Valve, N2 Supply to Solenoids Overpressure 2/F12 RV 2 2 PSIG Relief Valve, N2 Drum Blanket Overpressure 2/G7 RV 3 70 PSIG Relief Valve, Pump P1 Pneumatic Supply Overpressure June 2013 Comment 3-13 Installation 3-14 MegaPure 50, Model 304 June 2013 Chapter 4: Sequence of Operation This chapter contains the following information: Sequence of Operations Overview................................................................4-2 Pump and Start-Up of the Supply Drums ................................................4-2 Dispense to the Process Tools ...............................................................4-3 Station Shutdown ...................................................................................4-3 June 2013 4-1 Sequence of Operation MegaPure 50, Model 304 Sequence of Operations Overview The MegaPure 50 Chemical Distribution System, Model 304 uses a drum and filtration circuit to supply chemical to multiple use points when a demand signal is received. When a supply drum is placed in service, the filter is primed, then chemical is “available” to be distributed to points of use on demand. When a drum is detected to be empty, the tool automatically switches over to the standby drum, and an alarm is activated so that the operator can have a new drum placed in service The station remains in standby mode (pump off) until (1) it receives a signal demanding chemical or (2) when the station is in EMO condition. The system will be available to distribute chemical upon a demand signal after the drum has been put on line and the filter primed. The Allen Bradley brick PLC MicroLogix™ 1000 controls the operating, sensing, and safety of the unit. It is located in a purged control compartment in the cabinet. The following sections elaborate in detail the full sequence of operations. Pump and Start-Up of the Supply Drums The supply drums are connected to the MegaPure 50, Model 304 by means of two sets of supply quick connect couplers. The drums are placed on line by selecting A, B, or A/B from the front panel. The on-line drum will be pumped to prime the filters and then the pump will turn off. A signal is sent to the use points that chemical is available. The signal indicates the on-line drum is available to pump chemical to the use points when a demand signal is received from the tool requiring chemical. Upon receipt of a demand signal, the pump will turn on, the output valve will open, and chemical will be pumped through a single-pass filtration circuit to the system initiating the chemical demand. When the on-line drum is sensed to be empty, the station annunciator will alarm and the Drum Empty button will flash to notify the operator the drum is empty. The system will automatically switch the “Stand-By” drum to “On Line” status and continue pumping chemical until the demand is met. The operator will change out the empty drum. If the on-line drum is sensed to be empty and the “Stand-By” drum is empty, the station annunciator will alarm and the Drum Empty button light will remain lit to notify the operator that both drums are empty. The system will shut down and send a message to the use points that chemical is not available. The operator will need to replace the empty drums and placed on line by selecting A, B, or A/B from the front panel. 4-2 June 2013 MegaPure 50, Model 304 Sequence of Operation Dispense to the Process Tools The MegaPure 50, Model 304 remains in stand-by mode with its pump off until a chemical demand signal is received. Once a demand signal is received, the pump will turn on and dispense chemical through the output filter to the distribution points until the demand signal is removed or an EMO occurs. Station Shutdown A chemical dispense station shutdown will be caused by the EMO or critical alarm as described in the Alarms and Warnings (page 6-1) chapter. A critical alarm will cause the station's buzzer to sound, all valves to close, the pumps to turn off, and the appropriate remote alarms to actuate. The alarm condition must be addressed, and the Silence button and Reset button pressed to continue operation. EMO activation will remove all power from the tool. The EMO push button will have to be pulled out to restore power to the tool. All starts and restarts will require the station to execute the complete start-up sequence. June 2013 4-3 Sequence of Operation 4-4 MegaPure 50, Model 304 June 2013 Chapter 5: System Operation This chapter contains the following information: Operating Procedures ...................................................................................5-2 Starting the System ................................................................................5-2 Shutting the System Down......................................................................5-3 Initial Chemical Start-up (Automatic Operation) ......................................5-3 Drum Start-up Operation.........................................................................5-3 Manual Start-up Operation......................................................................5-4 System Shutdown and Restart................................................................5-4 Restarting After an EMO Shutdown or Unexpected Loss of Power .........5-5 Responding to Alarms ............................................................................5-5 Leak Condition Alarm .......................................................................5-5 Drum Empty Alarm ...........................................................................5-6 PLC Micrologix™ 1000 Overview..................................................................5-7 PLC Micrologix 1000 Button Descriptions ...............................................5-7 June 2013 5-1 System Operation MegaPure 50, Model 304 Operating Procedures The instructions in this section are primarily for operators monitoring the MegaPure 50, Model 304. The procedures for responding to alarms and troubleshooting are included in this section. Starting the System Start the system by performing the following steps. Note: A restart is required after a power outage. Refer to the Restarting After an EMO Shutdown or Unexpected Loss of Power (page 5-5) section before restarting the system. 1. Toggle the AC disconnect switch to the On position. 2. Ensure that the EMO button is disengaged (pulled out). 3. Place the Drum switch in the A/B position. 4. Place the Man/Auto switch in the Auto position. 5. Turn the key switch from the Off position to the On position. 6. Press the Start button. If the system fails to start, check the following items: 5-2 • AC disconnect is in the On position. • EMO button is disengaged (pulled out). • All doors and electrical cabinet are closed. • Power is supplied to the system (the green Start button has been pressed). June 2013 MegaPure 50, Model 304 System Operation Shutting the System Down Perform the following steps to shut down the system. NOTICE FLUSH AND PURGE MAY BE REQUIRED! If the system is shut down for an extended period of time, complete a full flush and purge. 1. Press the EMO button. 2. Toggle the AC Disconnect switch to the Off position. Initial Chemical Start-up (Automatic Operation) Once facility connections have been established, the system is prepared for initial chemical start-up. This section describes the procedures for placing the MegaPure 50, Model 304 in Automatic mode. 1. Close the electrical cabinet and the chemical compartment doors prior to start-up. 2. Ensure the main electrical disconnect is in the On position and the key is in the On/Off key switch. 3. Place the keyswitch in the On position. 4. Continue with the Drum Start-up Operation (page 5-3). Drum Start-up Operation Perform the following steps to start drum operation. 1. Place the Drum switch to A, B, or A/B. 2. Press the Start Drum button. The system will start by priming the filters. An available signal is sent to the Point-of-Use (POU) systems once the filters are primed. When a demand signal is received, the pump will turn on, the output valve will open, and chemical will be pumped through a single pass filtration circuit to the tool initiating the chemical demand. June 2013 5-3 System Operation MegaPure 50, Model 304 Manual Start-up Operation Perform the following steps to start the system in Manual mode. 1. Toggle the AC disconnect switch to the On position. 2. Verify that the EMO button is disengaged (pulled out). 3. Place the Man/Auto switch in the Man position. 4. Turn the key switch from the Off position to the On position. System Shutdown and Restart Several conditions or activities may lead to system shutdown. For “normal” or planned system shutdown, perform the following procedure. 1. Turn the key switch to the Off position. 2. Toggle the AC disconnect switch to the Off position. The following lists the common situations leading to system shutdown and the steps for restarting. Cause of Shutdown System Restart EMO Activation Reposition the EMO in the normal position and follow initial startup procedures, either conducting the initial filtration or selecting the bypass option. Main Electrical Disconnect OFF Place the switch in the On position and follow the initial start-up procedures, either conducting the initial filtration or selecting the bypass option. Facility Power Interruption Verify all switches are in the On position and follow the initial startup procedures, either conducting the initial filtration or selecting the bypass option. Any Door Interlocks Activated Disengage the activated interlock (close any open doors) and follow the initial start-up procedures, either conducting the initial filtration or selecting the bypass option. Hood Interlock Activated Disengage the activated interlock and follow the initial start-up procedures, either conducting the initial filtration or selecting the bypass option. Specific Critical Alarm Activation Determine the cause of the alarm and correct it. Follow the initial start-up procedures, either conducting the initial filtration or selecting the bypass option 5-4 June 2013 MegaPure 50, Model 304 System Operation Restarting After an EMO Shutdown or Unexpected Loss of Power If the system shuts down while performing an operation, it will not continue where it left off after the restart. Perform the following procedure when restarting the system after an unexpected shutdown. • If the system shut down due to the EMO switch, pull the EMO button out. • If the system shut down due to the door interlocks, verify all doors are closed. • If the system shut down due to the exhaust interlock: a. Check the exhaust system for proper operation. b. Check the exhaust high and low pressure setpoints. c. • Restart the system by following the procedure outlined in Starting the System (page 5-2). If the system has been inactive with chemical in the lines for an extended period of time, it may be desirable to manually flush the filters. a. Place the system in Automatic mode by following the procedure outlined in Initial Chemical Start-up (Automatic Operation) (page 5-3). Responding to Alarms Alarms are activated when one or both of the supply drums are empty or if a leak condition is present. The audible annunciator will sound and the Drum Empty button will flash on and off if one drum is empty and remain solid if both drums are empty. Leak Condition Alarm A leak condition exists if the audible annunciator sounds but the Drum Empty button remains unlit. Responding to a Leak Alarm: 1. Press the Silence button to silence the audible annunciator. 2. Locate and repair the leak condition. 3. Press the Reset button to reset the leak alarm. June 2013 5-5 System Operation MegaPure 50, Model 304 Drum Empty Alarm Responding to a Drum Empty Alarm: 1. Press the Silence button to silence the audible annunciator. 2. Replace the supply drum(s). 3. Press the Drum Empty button. 4. Press the Reset button to reset the drum alarm. If the problem still exists the alarm will be reactivated. 5-6 June 2013 MegaPure 50, Model 304 System Operation PLC MicroLogix™ 1000 Overview The MegaPure 50, Model 304 includes an PLC MicroLogix 1000 Operator Interface control system. This interface enables the operator to control all system operations through the use of panel buttons. For example, pressing the Start Drum button will start a purge and then place the drum(s) online. Detailed information about the PLC MicroLogix 1000 interface is provided below. PLC MicroLogix 1000 Button Descriptions All PLC MicroLogix 1000 interface button functions are described in the following table. Table 5-1. PLC MicroLogix 1000 Button Descriptions Button Description Use the Drum Switch to set the drum configuration. Setting to A/B will allow the MegaPure 50, Model 304 to automatically switch between Drum A and B. Setting to A or B will only allow the MegaPure 50, Model 304 to use the A or B drum. Use the Auto/Manual Switch to toggle the system between automatic and manual modes of operation. The MegaPure 50, Model 304 should remain in automatic mode when in normal operation. Press the Start Drum button to initiate a purge and place the first drum online. Use the Chem Dispense light to determine when the MegaPure 50 Chemical Distribution System, Model 304 is dispensing chemical. The light will remain solid when there is a chemical demand from the POUs, a drum is online, and no alarm conditions are present. June 2013 5-7 System Operation MegaPure 50, Model 304 Table 5-1. PLC MicroLogix 1000 Button Descriptions (continued) Button Description Use the Drum Empty button to determine when a drum is empty. The Drum Empty light will blink when one drum is empty and will remain solid when both drums are empty. Press the Silence button to silence the audible annunciator. The alarm condition must be remedied or the audible annunciator will reactivate. Press the Reset button to reset active alarm conditions. The alarm condition(s) must be remedied before the system is reset. 5-8 June 2013 Chapter 6: Alarms and Warnings This chapter contains the following information: Software Interlocks .......................................................................................7-2 Critical Interlocks ....................................................................................7-2 Warnings ................................................................................................7-2 Interlock Alarms......................................................................................7-3 June 2013 6-1 Alarms and Warnings MegaPure 50, Model 304 Software Interlocks A software interlock is a computer-controlled lock/alarm under which a device may or may not be allowed to operate. Software interlocks are incorporated in order to ensure the safety of the operator and to protect the product being processed. An active alarm indicates the interlock is currently tripped, but has not been acknowledged. The audible annunciator, is sounded when active alarms exist. When an operator presses the acknowledge key, the audible annunciator is turned off, and the alarm is lowered to the acknowledged state. When the operator presses the reset key, the alarm is reset. If the condition which caused the interlock has not been corrected, the alarm is reactivated. The MegaPure 50 Chemical Distribution System, Model 304 has two types of alarms: critical interlocks and warnings. Critical Interlocks Critical interlocks are activated by situations that require immediate attention and threaten the performance of the system. Critical interlocks cause a shutdown of the system and pose a potentially dangerous situation to the operator and system if not addressed promptly. Warnings Warnings are activated by those situations that do not need immediate attention, but could escalate into a more serious problem if ignored. 6-2 June 2013 MegaPure 50, Model 304 Alarms and Warnings Interlock Alarms The following table lists all interlocks, provides a list of possible causes, and suggests actions to be taken in order to correct the condition which has caused the interlock. Table 6-1. Interlocks List Interlock Tag Possible Cause Required Action Leak in compartment. 1. Check cabinet for source of leak. 2. Repair leak. 3. Clean and dry cabinet. Audible Annunciator Activated Leak detector faulty. Verify leak detector operation and replace, if necessary. Low voltage to leak detector. Check voltage (24 VDC). Both slurry drums/totes empty. 1. Replace slurry drums/totes. 2. Verify one drum alarm was activated. Drum Empty Light on and Audible Annunciator Activated Drums not online. Verify drums are online if full. Air in the slurry. 1. Check plumbing for loose fittings or bad seals. 2. Check drum connections for proper fit. 3. Verify dip tubes correctly placed. June 2013 Level sensor incorrectly placed. Check placement. Level sensor incorrectly set. Calibrate level sensor. Level sensor faulty. Replace level sensor. Low voltage to level sensor. Check voltage (24 DC). Wiring to the SLC terminal blocks faulty. Verify I/O signals. 6-3 Alarms and Warnings MegaPure 50, Model 304 Table 6-1. Interlocks List (continued) Interlock Tag Possible Cause Required Action One slurry drums/tote is empty. Replace slurry drum/tote. Drum not online. Verify drum are online if full. Air in the slurry. 1. Check plumbing for loose fittings or bad seals. 2. Check drum connection for proper fit. Drum Empty Light Blinking and Audible Annunciator Activated 6-4 3. Verify dip tubes correctly placed. Level sensor incorrectly placed. Check placement. Level sensor incorrectly set. Calibrate level sensor. Level sensor faulty. Replace level sensor. Low voltage to level sensor. Check voltage (24 DC). Wiring to the SLC terminal blocks faulty. Verify I/O signals. June 2013 Chapter 7: Maintenance The procedures in this chapter are used during general preventative maintenance procedures but also apply when troubleshooting component problems. Read and follow the Safety Precautions (page 7-3) section before attempting any preventative maintenance or troubleshooting procedures. Safety Precautions........................................................................................8-3 General System Maintenance .......................................................................8-4 Removing and Isolating Components .....................................................8-4 Removing and Isolating Electrical Components ......................................8-5 Compact Flash Card ...............................................................................8-7 Pressure Reducing Regulators ...............................................................8-7 Preventive Maintenance ...............................................................................8-8 Maintenance Schedule ...........................................................................8-8 Preparation.......................................................................................8-8 Equipment ........................................................................................8-8 Weekly Preventive Maintenance Procedures ................................................8-9 Visual System Inspection........................................................................8-9 Verifying the Device Settings ................................................................8-10 Monthly Preventive Maintenance Procedures .............................................8-12 Checking Pump Operation ....................................................................8-12 Checking Leak Detectors......................................................................8-12 Quarterly Preventive Maintenance Procedures ...........................................8-15 Testing Alarms......................................................................................8-15 Valves and Pressure Gauges ...............................................................8-16 Electrical Solenoid Valves (EV) ......................................................8-16 Automatic Valves (AV)....................................................................8-17 Check Valves (CV) .........................................................................8-17 Manual Valve (MV) .........................................................................8-18 Pressure Relief Valve .....................................................................8-18 Gas Line Maintenance....................................................................8-19 Semi-Annual Preventive Maintenance Procedures .....................................8-22 Fittings..................................................................................................8-22 Checking the Fittings ......................................................................8-22 Replacing Fittings ...........................................................................8-23 Rebuilding Pumps.................................................................................8-24 Isolating and Removing Pumps ......................................................8-24 June 2013 7-1 Maintenance MegaPure 50, Model 304 Annual Preventive Maintenance Procedures...............................................8-26 Lithium Battery......................................................................................8-26 Replacing the Lithium Battery .........................................................8-26 Disposing the Lithium Battery .........................................................8-27 Replacing the Filters .............................................................................8-28 Pulsation Dampener .............................................................................8-30 EMO Testing.........................................................................................8-31 Completing Preventive Maintenance Procedures........................................8-32 Cabinet Cleaning ..................................................................................8-32 Maintenance Forms ....................................................................................8-33 Work Order Form..................................................................................8-34 Preventive Maintenance Form ..............................................................8-35 Device Settings Record Sheet ..............................................................8-37 7-2 June 2013 MegaPure 50, Model 304 Maintenance Safety Precautions Review all of the following safety messages before performing any maintenance procedures. Compliance to safety warnings prevent unnecessary risks to operators and equipment. WARNING CHEMICAL HAZARD! The exhaust effluent may contain chemical (vapor or liquid). It should be handled and treated accordingly for compliance to safety and pollution control regulations. Supplemental exhaust may be required for maintenance tasks. ELECTRICAL HAZARD — TYPE 3! Risk of exposure to hazardous electrical current. Use extreme caution while performing preventive maintenance procedures in order to avoid accidental contact with energized parts. NOTICE USE PROPER LIGHTING! Use portable lighting (lighting level of minimum 30 foot-candles) when completing service. WARNING CHEMICAL HAZARD! Wear acid-resistant gloves, chemical safety goggles and fullface shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS during preventive maintenance procedures. Refer to the site MSDS for chemicalspecific information. CAUTION LOUD NOISE HAZARD! Use hearing protection when pumps are on and any pump access panel is open. June 2013 7-3 Maintenance MegaPure 50, Model 304 General System Maintenance All routine maintenance is performed from the front of the system. The rear system panels are not intended to be removed for maintenance. Removing and Isolating Components Use this procedure as a guideline for removing a component from the system for maintenance or replacement. • Read all safety notices before beginning any procedures. • Always wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. • Use lockout/tagout devices, as required. • Isolate and relieve potential energy before opening lines or attempting electrical maintenance. • Follow site specific requirements and procedures. Equipment Required • MSDS for all system chemistry. • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. • Chemical absorbent pads and wipes, and other safety equipment as recommended on the MSDS. • Appropriate chemical waste container as recommended on MSDS. • Auxiliary lighting. • Appropriate tool set. • Replacement components. 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the MSDS and site regulations. NOTICES SHUT DOWN POWER FOR ELECTRICAL MAINTENANCE! Always shut off power before performing electrical procedures. 7-4 June 2013 MegaPure 50, Model 304 Maintenance CAUTION PRESSURE HAZARD! Relieve pressure in lines before loosening fittings. 2. Place the system into manual operating mode. 3. Preferably, shut down power to the system. It may be necessary to shut down electrical power after relieving pressure in the lines if automatic valves must be toggled. 4. Lockout/tagout the A/C disconnect switch. 5. Close the component isolation valves. 6. Toggle or open valves to release pressure in the line. 7. Lock out the isolation valves. 8. Remove the component. 9. Repair or replace the component. 10. Use a hand sprayer to clean or remove any chemical in the cabinet interior. 11. Remove lockout/tagout devices and open isolation valves. 12. Restore system power. 13. Perform necessary tests in Manual mode to ensure procedure was executed correctly. 14. Return system to Auto mode. Removing and Isolating Electrical Components Use this procedure as a guideline for removing and isolating electrical components. June 2013 • Read all safety notices before beginning any procedures. • Always wear protective gear as recommended on the MSDS. • Use lockout/tagout devices, as required. • Isolate and relieve potential energy before opening lines or attempting electrical maintenance. • Follow site specific requirements and procedures. 7-5 Maintenance MegaPure 50, Model 304 Equipment Required • MSDS for all system chemistry. • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. • Chemical absorbent pads and wipes, and other safety equipment as recommended on the MSDS. • Appropriate chemical waste container as recommended on MSDS. • Auxiliary lighting. • Appropriate tool set. • Replacement components. 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. CAUTION ELECTRICAL HAZARD — TYPE 3! Disconnect power and lockout/tagout to remove electrical hazard before performing any electrical procedures. NOTICE OBTAIN APPROPRIATE APPROVAL! Electrical procedures require the system to be shut down. Obtain appropriate approval and notify affected personnel before proceeding. 2. Lockout/tagout the A/C disconnect switch. 3. Complete the replacement. 4. Remove lockout/tagout device. 5. Start up the system. 7-6 June 2013 MegaPure 50, Model 304 Maintenance Compact Flash Card The PLC is supplied with an Allen-Bradley Industrial Compact Flash card. The Compact Flash contains a copy of the current program. In the event of corrupt memory, the system program automatically loads from the Compact Flash and resumes operation. Program changes are not automatically sent and uploaded to the Compact Flash card. A Controls Engineer must download any changes to the Compact Flash. The downloading must occur when then PLC is in the program mode. Note: Program mode shuts down the entire system. Pressure Reducing Regulators Reducing regulators control the incoming pressure to an exact pressure no matter what happens to the incoming pressure. The regulator design is based on a diaphragm and needle through a hole principle. As the regulator knob is adjusted, the tapered needle going through the hole gets larger. The diaphragm moves to compensate for any changes in incoming CDA/N2 pressure. The attached gauge has an accuracy of +/-5%. The flow is manually adjusted. Figure 7-1. Regulator Example Indications of a premature regulator failure are an inability to maintain a stable pressure value, fluctuating pressure value, the regulator creeps (up or down), or the gauge needle sticks, and then jumps up or down. When a regulator fails it remains in the open position, or may stop regulating and then open. If an external leak is developed, the downstream pressure is bled off to the atmosphere. June 2013 7-7 Maintenance MegaPure 50, Model 304 Preventive Maintenance Effective Preventive Maintenance (PM) maintains the system in optimal working order and ensures that the warranty extends to the equipment. This section provides a recommended PM schedule and includes weekly, monthly, quarterly, semiannual, and annual PM procedures. Retain copies of the completed preventive maintenance schedule to provide a history of the maintenance performed. Maintenance Schedule Prior scheduling of Preventive maintenance activities helps prevent unexpected downtime and disrupting the distribution system. Follow site specific procedures for notifying affected personnel before performing preventive maintenance. Typical site requirements include: • obtaining a work order • notifying the appropriate personnel, and • applicable safety monitoring stations. Preparation Prior to starting preventive maintenance, review all appropriate procedures. Ensure all equipment is available, work permits are approved, and all affected personnel have been notified. Before replacing any components, ensure the components are on hand. Review all site requirements and procedures, including spill procedures, buddy systems, and PPE. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Review site MSDS for each chemical used in the system. Equipment Gather all required equipment before performing maintenance procedures. The recommended equipment is listed each preventive maintenance section in this chapter. 7-8 June 2013 MegaPure 50, Model 304 Maintenance Weekly Preventive Maintenance Procedures Perform the following preventive maintenance procedures as part of the weekly maintenance schedule (Table 7-2, on page 35). Visual System Inspection A thorough visual inspection verifies the system is operating correctly and alerts the operator to potential maintenance required. Maintenance issues identified during the visual inspection should be reported and either corrected, or scheduled, at the earliest possible maintenance. Complete an informal inspection daily. A complete visual inspection requires opening the s; follow all chemical and electrical hazard precautions. Follow all site-specific policies during the procedure. Equipment Required • MSDS for all system chemistry. • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. • Chemical absorbent pads and wipes, and other safety equipment as recommended on the MSDS. • Appropriate chemical waste container as recommended on MSDS. • Auxiliary lighting. Use the following list as a guideline for a visual inspection, however, this list may not be all-inclusive. 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2. General system area. a. Check area for leaks or spills. Correct according to site procedures. b. Check area for hazardous conditions. Correct according to site procedures. 3. System exterior. a. Ensure doors and electrical cabinet are closed. b. Ensure system is on. c. June 2013 Check double containment lines for evidence of leaks. Repair leaks, as necessary. 7-9 Maintenance MegaPure 50, Model 304 d. Ensure system exhaust is operating within the exhaust setpoints. Exhaust setpoints are field set and are located on the exhaust pressure switch in the corner of the gas compartment. 4. System operation. a. Ensure system is in normal operating mode (automatic or manual). b. Check alarm status. Acknowledge all alarms. c. Review alarm and maintenance log. 5. Chemical section of system. a. Check cabinet floor and system piping for leaks and spills. Correct according to site procedures. b. Check chemical inlets and outlets on cabinet and drums for leaks or loose fittings. Correct according to site procedures. c. Check system components for corrosion or chemical residue. Correct according to site procedures. 6. Electrical section of system. a. Check system power. b. Ensure data highway connections are solidly connected. c. Check wiring compartment for corrosion, burns, or irregular odor. Correct according to site procedures. d. Check for loose wire connections. Correct according to site procedures. Verifying the Device Settings Obtain the latest device settings list for the system (Device Reference List (page 3-12)). Investigate deviations in the device settings before resetting values. Inspecting the device settings requires opening the s and taking the proper precautions to avoid chemical and electrical hazards. Equipment Required 7-10 • MSDS for all system chemistry. • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. • Auxiliary lighting. • Device Settings Record Sheet • Flow Schematics or P&ID June 2013 MegaPure 50, Model 304 Maintenance 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2. Locate each device on the Device Settings List, and compare the actual setting with the recorded setting. Use the P&ID to aid in locating each device. P&ID Schematic (page 8-5) 3. Record all deviations from the previously recorded settings on the Device Settings Record Sheet (page 7-37). 4. Consult with the Process Engineer to verify that deviations require correction. 5. Correct deviations, as required. June 2013 7-11 Maintenance MegaPure 50, Model 304 Monthly Preventive Maintenance Procedures Perform the following preventive maintenance procedures as part of the monthly maintenance schedule (Table 7-2, on page 35). Checking Pump Operation Pumps can malfunction due to poor maintenance (i.e., missing preventive maintenance based on runtime). Lack of maintenance can cause internal parts to fail. Other reasons for failure include running dry for long periods of time, dead heading, ingesting foreign objects, dried slurry particles, poor rebuilding techniques, or bad CDA/N2. Figure 7-2. Bellows Pump Checking the pump operation requires opening the system and taking proper precautions to avoid chemical and electrical hazards. Ensure the pump operates correctly by running the system. Should the pump need repair or replacement, refer to Isolating and Removing Pumps (page 7-24) for pump maintenance procedures. Checking Leak Detectors Leak detectors are a 24 VDC, Teflon-coated, paperless sensor. They are wired in a failsafe configuration. The leak detector should be correctly placed in the mounting bracket. Malfunction can occur due to bad wiring or it can stick. On the puck-style leak detector, a leak is indicated if the red LED is displayed. The bit LED goes out if there is a leak because the voltage drops, therefore, a spark is not created if the system chemical is flammable. 7-12 June 2013 MegaPure 50, Model 304 Maintenance Float-style leak detector Puck-style leak detector Figure 7-3. Type of Leak Detector Checking leak detectors requires taking the proper precautions to avoid chemical and electrical hazards. Equipment Required • MSDSs for all system chemistry. • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. • Chemical absorbent pads and wipes, and other safety equipment as recommended on the MSDS. • Appropriate chemical waste container as recommended on MSDS. • Auxiliary lighting. • Electrical schematics. 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. WARNING CHEMICAL HAZARD! Leak detectors are placed at the most likely spot to sense leaks. Chemical may be present. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information. June 2013 7-13 Maintenance MegaPure 50, Model 304 WARNING CHEMICAL HAZARD! The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to comply with safety and pollution control regulations. Supplemental exhaust may be required for maintenance tasks. 2. The leak detector LED should be green, indicating no leak. The corresponding input LED on the PLC should also be lit. 3. Spray a small amount of water on the leak detector with the hand sprayer. The LED should change to red, indicating a leak. The corresponding input LED on the PLC should turn off. • If the sensor does not change, test the wiring with another leak detector. • If the replacement sensor functions, the first sensor was faulty. • If the replacement sensor does not function, check leak detector wiring. 4. Replace the leak detector or repair the wiring, if required. 7-14 June 2013 MegaPure 50, Model 304 Maintenance Quarterly Preventive Maintenance Procedures Perform the following preventive maintenance procedures as part of the quarterly maintenance schedule (Table 7-2, on page 35). Testing Alarms Alarms in the system indicate critical errors, process problems and information. The proper functioning of all critical alarms helps ensure the safe operation of the system. Testing the alarms requires opening the s and taking proper safety precautions to avoid chemical and electrical hazards. See the Alarms and Warnings (page 6-1) chapter for a listing of all alarms. Trigger alarms using the actions described in the Possible Reason column. . NOTICE NOTIFY ALL APPROPRIATE PERSONNEL AND OBTAIN APPROVAL BEFORE TESTING ALARMS! Triggering critical alarms may alert fab security and safety personnel, and possibly cause an evacuation. Notify affected personnel and obtain all required approval before testing alarms. WARNING CHEMICAL HAZARD! The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to meet compliance with safety and pollution control regulations. Supplemental exhaust may be required for maintenance tasks. June 2013 7-15 Maintenance MegaPure 50, Model 304 Valves and Pressure Gauges Numerous types of valves are used to control the flow of chemical, DI water, slurry, CDA/ N2 throughout the system. The valves include: • automatic • manual • diverter • check • needle • ball • relief • pressure relief valve • flow indicator control valve, and • electric solenoid. Automatic valves control process flow. Solenoid valves control the flow of CDA/N2 to the automatic valves. Manual valves, ball valves, and needle valves are used for isolation and shutoff. Diverter valves are used for samples and slipstreams. Check valves protect supply lines from contamination. Relief valves protect gas lines from over-pressurization. Electrical Solenoid Valves (EV) The electrical solenoid valves are not activated when the computer bit LED is Off and the associated valve LED is Off. Both LEDs are illuminated with the computer commands the EV and AV to activate. EVs include a button for manual activation. Top label corresponds to top valve. Bottom label corresponds to bottom valve. Figure 7-4. Electrical Solenoid Valves Example 7-16 June 2013 MegaPure 50, Model 304 Maintenance Malfunction occurs due to air leaking around the seals, chattering, weak local LED brightness, liquid from the exhaust, or the EV activates but does not fully shut off the associated AV. Refer to the Electrical Schematic (page 8-7) to match EV to AV devices. Automatic Valves (AV) Automatic valves operate by sending a 24 volt signal to the selected EV. The EV solenoid opens and the CDA/N2 flows to the selected AV. The AV valves are controlled by incoming CDA/N2 pressure, regulators, relieve valves, EVs, and air lines. Malfunction occurs if there are air line leaks, air line connector leaks, the air pressure is too low to hold the AV open, internal diaphragm leaks occur, or the return spring has lost its tension. Figure 7-5. Automatic Valves Example To troubleshoot the electrical or pneumatic command, put the AV in computer Manual mode to confirm correct output card and EV operation, and then check the air line for leaks with the local pressure gauge online, or move the air line to a different valve to confirm the valve is operating correctly when other factors are running normally. Check Valves (CV) Liquid check valves operate with a disk or ball system and are used to ensure that fluid is flowing in the correct direction. Figure 7-6. Check Valve Example Check valves are placed where back streaming could cause cross contamination of chemicals, slurry, CDA/N2, or water. The directional arrow is stamped in ink on the label so carefully observe the direction to prevent installing a valve backwards. June 2013 7-17 Maintenance MegaPure 50, Model 304 Manual Valve (MV) Manual valves operate by hand. Figure 7-7. Manual Valve Example Pressure Relief Valve Pressure relieve valves are located on the gas lines to protect devices on the line. The test is completed by increasing the inlet pressure with the regulator until the pressure is just above the bypass value. The seat retracts against the spring and gas escapes. Over time the seat material may stick and must be exercised to remain functional (refer to Adjusting the Relief Valves (page 7-20). Adjustable spring Fully contained o-ring seal Seal prevents leakage. Sealing efficiency increase with increased pressure up to cracking pressure. Metal-tometal poppet stop supports spring load, prevents sticking. Locking screw maintains settings Adjusting screw sets cracking pressure When system pressure overcomes spring force, poppet opens. As pressure continues to rise, variable orifice between poppet and body increases, allowing greater flow. Figure 7-8. Pressure Relief Valve Examples A failing pressure relief valve results in complete failure of downstream devices, injury may occur, and the devices must be replaced. 7-18 June 2013 MegaPure 50, Model 304 Maintenance Gas Line Maintenance All components on each gas line should be checked for proper operation to prevent high gas pressure hazards and low pressure operation failures. Gas line maintenance includes checking the operation of the regulators, pressure switches, relief valves, and flow regulators. Checking the gas line components requires opening the gas cabinet doors. All other doors must remain closed. Checking the gas line components may expose the operator to pressure hazards. Placing the system in Manual mode disrupts distribution. Equipment Required • MSDS for all system chemistry. • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. • Auxiliary lighting. • Device Reference List (page 3-12) • 4 mm Allen wrench. Checking the Gas Line Components 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. DANGER PRESSURE HAZARD! Open the door to the gas compartment only. Leave all other cabinet doors closed to protect from potential hazards. 2. Open the gas cabinet door. Ensure all other cabinet doors remain closed. Open doors may expose the operator to potential hazards. 3. If the line is equipped with a low-pressure switch, check the low-pressure switch before checking the high pressure switch or other components: a. Decrease the regulator pressure until it is less than the low-pressure switch setting. b. It may be necessary to vent the line to reach the low-pressure switch setting. Vent the line by operating a valve in Manual mode, running a pump, or opening a vent line valve to drain. c. June 2013 Ensure the low pressure alarm is activated at the correct line pressure. The alarm may be equipped with up to a 10 second delay. Provide adequate time for the alarm to activate. 7-19 Maintenance MegaPure 50, Model 304 d. If the alarm is not activated at the correct pressure, adjust or replace the pressure switch. 4. If the line is equipped with a high-pressure switch: a. Increase the regulator pressure until it is greater than the high-pressure switch setting. b. Ensure the high-pressure alarm is activated at the correct line pressure. The alarm may be equipped with up to a ten second delay. Provide adequate time for the alarm to activate. c. If the alarm is not activated at the correct pressure, adjust or replace the pressure switch. Adjusting the Relief Valves The relief valve is a device used in the CDA/N2 compartment to prevent high pressure buildup in the air lines. The relief valve will crack and relieve the air line when pressure exceeds the setpoint for the device. Also see Valves and Pressure Gauges (page 7-16). 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. DANGER PRESSURE HAZARD! Open the door to the gas compartment only. Leave all other cabinet doors closed to protect the operator from potential hazards. Release line pressure before replacing components. 2. Open the gas cabinet door. Ensure all other cabinet doors remain closed. Open doors may expose the operator to potential hazards. 3. Remove the allen lock nut with a 4 mm allen wrench. 4. Set the regulator pressure 1–2 psi below the relief valve setpoint. NOTICE DO NOT COMPLETELY REMOVE ADJUSTMENT NUT! Avoid removing the adjustment nut from valve body as it is difficult to replace. 7-20 June 2013 MegaPure 50, Model 304 Maintenance 5. Tighten the adjustment nut to increase pressure; loosen the adjustment nut to decrease pressure. Do not remove the adjustment nut from the valve body, it is difficult to replace. The nut is correctly adjusted when the relief valve begins leaking air 1–2 psi below the relief valve setpoint. Remove the allen wrench from the adjustment nut to verify the flow of gas. 6. Install the locking allen nut. 7. Set the pressure regulator to the desired relief pressure. 8. Test with the CDA/N2 pressure at the desired setting. 9. Repeat the procedure until the desired setting is achieved. 10. Increase the regulator pressure until it is 1–2 psi below the relief valve setting. The relief valve should begin to release gas. 11. Increase the regulator pressure until it is at the relief valve setting. The relief valve should be at full release. It the relief valve is activated at the correct pressure, adjust or replace the relief valve. 12. Return all components to their original device settings on the device list. 13. Repair or replace pressure switches, as required. 14. Repair or replace relief valves, as required (refer to Adjusting the Relief Valves (page 7-20). June 2013 7-21 Maintenance MegaPure 50, Model 304 Semi-Annual Preventive Maintenance Procedures Perform the following preventive maintenance procedures as part of the semi-annual maintenance schedule (Table 7-2, on page 35). Fittings Flare and threaded fittings can loosen due to system vibrations. Teflon fittings should be hand-tightened to prevent the development of leaks. Stainless steel fittings should be checked with a NO-GO gap gauge. Record the location of any fittings that require tightening. Inspecting the fittings requires opening the s. Take the proper precautions to avoid chemical and electrical hazards. Place the system in Manual mode and open all drain fittings to relieve all pressure from the chemical lines before replacing fittings. Equipment Required • MSDS for all system chemistry. • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. • Chemical absorbent pads and wipes, and other safety equipment as recommended on the MSDS. • Appropriate chemical waste container as recommended on MSDS. • Auxiliary lighting. • Flow schematics. Checking the Fittings 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. WARNING ELECTRICAL HAZARD — TYPE 3! Risk of exposure to hazardous electrical current. Use extreme caution when performing preventive maintenance procedures to avoid accidental contact with energized parts. 7-22 June 2013 MegaPure 50, Model 304 Maintenance CAUTION PRESSURE HAZARD! Relieve pressure in lines before loosening and replacing fittings. 2. Ensure all fittings are tight. Loose plastic fittings should be hand tightened. Stainless steel fittings should be checked with a NO-GO gap gauge. Over-tightening the fittings may strip the threads. If the fitting leaks after it is tightened, replace it. NOTICE AVOID OVERTIGHTENING FITTINGS! Overtightening fittings may strip the fitting threads. Fittings should be hand tightened. 3. Place the system in Automatic operation and check for leaks. Replacing Fittings 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2. Place the system into manual operating mode. 3. Flush and purge the pipes in the area of the repair. 4. Vent the line pressure by opening valves to the drain or exhaust. 5. Close the closest isolation valves in order to isolate the fitting. 6. Lockout/tagout the isolation valves. 7. Remove the leaking fitting and the necessary plumbing. 8. Replace the leaking fitting and install removed plumbing. 9. Remove the lockout/tagout devices. 10. Open the isolation valves. 11. In Manual mode, fill the repaired area with liquid (or gas) and check for leaks. • If the fitting leaks, ensure the fitting is tight. • If the fitting still leaks, return to Step 3. 12. Flush and purge the pipes in the area of the repair. June 2013 7-23 Maintenance MegaPure 50, Model 304 Rebuilding Pumps Refer to the specific pump manufacturer literature for rebuilding pumps. Follow procedure steps for isolation and removing pumps before rebuilding any pump. Isolating and Removing Pumps Use this procedure to safely isolate and remove pumps from the system. Some pump adjustments do not require disabling the system. However, in most cases, repairs require removing the system from operation and preparing it for repair in a safe manner. If the system must be powered down for repair, follow the company electrical lockout/tagout procedures. In the event pump P1 should need repair or replacement, the following procedure will apply: 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. WARNING OBTAIN PRIOR APPROVAL! If pump removal affects distribution, obtain the appropriate approval before proceeding. Notify all affected personnel. WARNING CHEMICAL HAZARD! Removing pumps may expose the user to hazardous chemicals. Wear acid-resistant gloves, chemical safety goggles and fullface shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Use extreme caution when removing pumps. Refer to the site MSDS for chemicalspecific information. 2. Turn the Man/Auto switch to Man mode. 3. Turn the key switch to the Off position. 4. Turn the main power AC disconnect switch to the Off position and proceed with local lockout/tagout procedures. 5. Close and Lockout/Tagout MV2 and MV3. Ensure AV3 is closed. 7-24 June 2013 MegaPure 50, Model 304 Maintenance NOTICE LOCK OUT/TAG OUT! Lockout denotes using an apparatus to prevent manual valve operation. 6. Open MV4 and allow to gravity drain for one minute. 7. Remove the pump from the system for repair or replacement. 8. Use hand sprayer to clean or remove any chemical still visible in the cabinet interior 9. Replace P1 and close MV4. 10. Remove lockout apparatus and open MV2 and MV3. Pump P1 is now available for service. June 2013 7-25 Maintenance MegaPure 50, Model 304 Annual Preventive Maintenance Procedures Perform the following preventive maintenance procedures as part of the annual maintenance schedule (Table 7-2, on page 35). Lithium Battery The PLC uses a replaceable lithium battery for backup RAM power. This battery provides backup for approximately two (2) years. The BATT LED on the front of the processor illuminates when the battery voltage has fallen below the threshold level, and the PLC Battery Low alarm is activated. The battery can be either replaced as part of the Annual Preventive Maintenance (Table 7-2, on page 35), or when the battery alarm is activated. Figure 7-9. Lithium Battery Replacing the battery requires the system to be completely powered down. A capacitor on the processor card maintains the program in RAM for approximately 20 minutes. If the procedure exceeds this limit, the program may be lost from RAM. Equipment Required • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. • Replacement battery • Battery disposal equipment. Replacing the Lithium Battery 1. Remove power from the PLC power supply. WARNING CHEMICAL AND FIRE HAZARD! Read Guidelines for Handling Lithium Batteries for information regarding handling and disposing of lithium batteries. 7-26 June 2013 MegaPure 50, Model 304 Maintenance NOTICE REMOVE POWER FROM THE SYSTEM! Do not remove the processor from the PLC chassis until all power is removed from the PLC power supply. a. Obtain authorization to shut the system down. b. Toggle the A/C disconnect switch to Off. c. Lockout/tagout the A/C disconnect switch. 2. Remove and replace the battery. 3. Dispose of the battery (refer to Disposing the Lithium Battery (page 7-27)). 4. When all maintenance procedures are complete, restore power to the PLC power supply. a. Remove the lockout/tagout devices. b. Toggle the A/C disconnect switch to On. c. Start up the system. 5. If the system does not start up correctly, repeat procedures to ensure connections are routed correctly. Disposing the Lithium Battery WARNING FIRE HAZARD! Do not incinerate or dispose batteries in general trash collection. They may explode or rupture. Check state and local regulations dealing with the disposal of lithium or nickel cadmium batteries. You are legally responsible for the hazards created by improper battery disposal. The PLC provided on the MegaPure 50, Model 304 is supplied with a lithium battery that must be replaced it becomes depleted. Carefully inspect the depleted battery casing for damage and/or signs of electrolyte leakage. June 2013 7-27 Maintenance MegaPure 50, Model 304 Replacing the Filters Filters catch large particles being pumped through systems. An indication of clogged filters is an increase in differential pressure. Equipment Required • MSDS for all system chemistry. • PPE required by site and recommended on MSDS, including, but not limited to: protective clothing, eye shields, gloves, and hearing protection. • Chemical absorbent pads and wipes, and other safety equipment as recommended on the MSDS. • Lockout/Tagout Equipment. • Appropriate chemical waste container as recommended on MSDS. • Container (1 liter or larger) for the filters. • Auxiliary lighting. Cartridge change-out can now be done with minimal contact to the used cartridge. Mykrolis’ Chemlock cartridges are locked into the bowl with a 1/4-turn. By turning the locking ring, the cartridge is pushed securely into the housing head; the cartridge cannot be dislodged during operation. For cartridge removal, do not grab the cartridge body, simply unscrew the locking ring and the cartridge will disengage from the housing head. This minimizes exposure to chemicals. 1. Wear the proper PPE. Refer to the MSDSs and site regulations. WARNING CHEMICAL HAZARD! The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to comply with safety and pollution control regulations. Supplemental exhaust may be required for maintenance tasks. 2. Turn the main power AC disconnect switch to the Off position and proceed with local lockout/tagout procedures. 3. Close MV7 and MV9. 4. Lockout denotes using an apparatus to prevent manual valve operation. 5. Open MV6 and allow to gravity drain for one minute. 6. Replace FL1 and close MV6. Use hand sprayer to clean or remove any chemical still visible in the cabinet interior. 7-28 June 2013 MegaPure 50, Model 304 Note: Maintenance Filters are mounted with the bowl up on slurry systems and with the bowl down on chemical systems. 7. Insert the cartridge into the bowl. 8. Twist the filter 1/4-turn to lock. 9. Attach the bowl to the head. 10. Tighten the locking ring to seat the double O-rings. Use a housing wrench to ensure proper tightening. 11. Remove lockout apparatus and open MV7 and MV9. June 2013 7-29 Maintenance MegaPure 50, Model 304 Pulsation Dampener Dampeners require very little maintenance. There is no need for lubrication. However, the PTFE bellows must be replaced every second time the diaphragms in the pumps are replaced. As with any pumping system, wear is dependent on many factors including material, temperature, chemicals, fluid abrasiveness, and system design. Periodic inspection of the dampeners and fasteners should be conducted to visually check for signs of over-pressurization, fatigue, stress, or corrosion. Body housings and fasteners must be replaced at first indication of deterioration. CAUTION REPLACE NUT AND BOLT FASTENERS Replace nut and bolt fasteners at each re-assembly with fasteners of equal grade/strength value. Do not re-use old nuts and bolts. After the initial torque of fasteners, bolts will usually lose up to 20% of their strength when re-torqued. Failure to replace both nuts and bolts upon re-assembly will void the pulsation dampener product warranty. CAUTION DO NOT USE IF FASTENERS CORRODED Do not use the dampener if the fasteners (nuts and bolts) are corroded. Check for fastener corrosion frequently, especially in atmospheres containing salt or corrosive chemicals, or if dampener leakage has occurred. 7-30 June 2013 MegaPure 50, Model 304 Maintenance EMO Testing The EMO provides the operator with a means to shut down the system in emergency situations. Activating the EMO shuts the system down and disrupts distribution. - OR - Figure 7-10. Emergency Machine Off (EMO) Button Equipment Required • MSDS for all system chemistry. • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2. Press the EMO button. Ensure the system completely powers down. 3. Restart the system. June 2013 7-31 Maintenance MegaPure 50, Model 304 Completing Preventive Maintenance Procedures Perform the following preventive maintenance procedures as part of the Completing Preventive Maintenance schedule (Table 7-2, on page 35). Cabinet Cleaning Clean the cabinet after all other PM procedures are completed. Cabinet cleanliness is necessary for accurate visual inspections. Cleaning the cabinet requires opening the s and taking proper precautions to avoid chemical and electrical hazards. Follow all site-specific procedures during the cabinet cleaning. NOTICE CLEAN THE CABINET LAST! Cleaning the front of the cabinet and the s should be completed after all other PM procedures are done to avoid repeating the procedure. Equipment Required • MSDS for all system chemistry. • Acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. • Chemical absorbent pads and wipes, and other safety equipment as recommended on the MSDS. • Appropriate chemical waste container as recommended on MSDS. • Auxiliary lighting. • DI water or 10% IPA solution. 1. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2. Rinse all chemical residue from the cabinet interior using the hand sprayers or wipes saturated in 10% IPA solution. 3. Thoroughly dry the cabinet interior. 4. Wipe the cabinet exterior clean. 5. Dispose of all wipes according to site requirements and MSDS recommendations. 7-32 June 2013 MegaPure 50, Model 304 Maintenance Maintenance Forms The following is a list of the forms included in this section: June 2013 • Work Order Form • Preventive Maintenance Form • Device Settings Record Sheet 7-33 Maintenance MegaPure 50, Model 304 Work Order Form The following example can be used for notifying and scheduling system service. Table 7-1. Work Order Form Example Work Order #: System ID: Location: Serial Number: Technician: Chemical: Start Date: End Date: Frequency (circle one): Weekly/Monthly/Quarterly/Semiannual/Annual 7-34 June 2013 MegaPure 50, Model 304 Maintenance Preventive Maintenance Form The preventive maintenance form is a comprehensive list which includes all recommended preventive maintenance items. The list is divided into weekly, monthly, quarterly, semiannual, and annual sections. As each item in the list is completed, record any values or comments in the Comments column. Record any values or comments in the Comments column. Initial each item in the list as it is completed. When the preventive maintenance is complete, follow the instructions for returning the equipment to Automatic operation. Obtain the appropriate signatures, as required, by site-specific policies and procedures. Table 7-2. Preventive Maintenance List Preventive Maintenance Task Comments Initials Weekly 1. Complete the Visual System Inspection procedure. Record all issues. 2. Check all system Device Settings. Refer to the Device Settings List. Investigate and record any deviations from normal settings. 3. Go to Completing Preventive Maintenance in this form to complete weekly preventive maintenance steps. Monthly 1. Complete pump maintenance. a. Pump P1 operation. b. If required, repair, replace or schedule pump maintenance. 2. Check the leak detectors for proper operation. Adjust sensors as needed. 3. Go to Completing Preventive Maintenance in this form to complete monthly preventive maintenance steps. Quarterly 1. Verify operation of all critical alarms. 2. Check operation of regulators, pressure switches, relief valves, and flow regulators. 3. Go to Completing Preventive Maintenance in this form to complete quarterly preventive maintenance steps. Semiannual 1. Tighten all system fittings. Refer to Fittings (page 7-22). a. Record loose fittings. b. Repair or replace leaking fittings or schedule maintenance. Record fittings repaired or replaced. 2. Rebuild pump P1. Refer to Rebuilding Pumps (page 724). If 2nd diaphragm rebuild, replace PTFE bellows in Pulsation Dampener also. June 2013 7-35 Maintenance MegaPure 50, Model 304 Table 7-2. Preventive Maintenance List (continued) Preventive Maintenance Task Comments Initials Signature Date 3. Go to Completing Preventive Maintenance in this form to complete semi-annual preventive maintenance steps. Annual 1. Replace lithium battery. Refer to Lithium Battery (page 7-26). 2. Replace filter(s). Refer to Replacing the Filters (page 728). 3. Inspect Pulsation Dampeners and fasteners to visually check for signs of over-pressurization, fatigue, stress, or corrosion. Replace body housings and fasteners at first indication of deterioration. Refer to Pulsation Dampener (page 7-30). 4. Verify operation of EMO. Refer to EMO Testing (page 731). 5. Go to Completing Preventive Maintenance in this form to complete annual preventive maintenance steps. Completing Preventive Maintenance 1. Clean front of cabinet and s. Use DI water or 10% IPA solution only. Refer to Cabinet Cleaning (page 7-32). 2. Close the cabinet doors and electrical hood. 3. Cancel the alarm bypass if activated. 4. Ensure the system is ready for Automatic operation. 5. Return the system to Automatic operation. Preventive Maintenance Sign-off Personnel Technician 1: Technician 2: Supervisor: 7-36 June 2013 MegaPure 50, Model 304 Maintenance Device Settings Record Sheet Work Order #: System: Serial Number: Technician: Chemical: Start Date: End Date: Table 7-3. MegaPure 50, Model 304 Device Settings P&ID Location Type Number State Description 1/F6 AV 1 NC Valve, Diaphragm, Pneumatic,2-way, Chemical Discharge Isolation 1/C6 AV 2 NC Valve, Diaphragm, Pneumatic, 2-way, Filter Degassing Isolation 1/C10 AV 3 NC/NO Valve, Diaphragm, Pneumatic, 3-way, Pump Pneumatic Supply Selection 1/D15 AV 4A NC Valve, Diaphragm, Pneumatic, 2-way, Drum #1 Isolation 1/D14 AV 4B NO Valve, Diaphragm, Pneumatic, 2-way, Drum #2 Isolation 1/F12 AV 5 NC Valve, Diaphragm, Pneumatic, 2-way, Drum Blanket Isolation 2/G15 BV 1 Closed Valve, Ball, 2-way, N2 Supply Isolation 2/G10 BV 2 Closed Valve, Ball, 2-way, CDA Supply Isolation 1/D10 Dampe ner #1 ----- Dampener, Pulsation, Pump P1 1/A15 Drum #1 ----- Drum, Chemical Supply, Principle 1/A14 Drum #2 ----- Drum, Chemical Supply, Redundant 1/D7 FL 1 ----- Filter, Principle 2/F13 FR 1 Field Set Flow Regulator, Manual, Pneumatic Compartment Purge 2/F12 FR 2 Field Set Flow Regulator, Manual, Drum Blanket 1/A9 LD 1 NC Sensor, Leak, Process Cabinet 1/D13 LS 1 NO Sensor, Proximity, Drum Empty 1/E6 LS 2 NO Sensor, Proximity, Filter Degassing Line 1/C15 MV 1A Closed Valve, Diaphragm, Manual, 2-way, Drum #1 Supply Isolation 1/C14 MV 1B Closed Valve, Diaphragm, Manual, 2-way, Drum #2 Supply Isolation 1/B12 MV 2 Closed Valve, Diaphragm, Manual, 2-way, Pump P1 Inlet Isolation June 2013 Initials 7-37 Maintenance MegaPure 50, Model 304 Table 7-3. MegaPure 50, Model 304 Device Settings (continued) P&ID Location Type Number State Description 1/E10 MV 3 Closed Valve, Diaphragm, Manual, 2-way, Pump P1 Exit Isolation 1/B11 MV 4 Closed Valve, Diaphragm, Manual, 2-way, Pump P1 Drain Isolation 1/F7 MV 5 Closed Valve, Diaphragm, Manual, 2-way, Filter FL1 Vent Isolation 1/C7 MV 6 Closed Valve, Diaphragm, Manual, 2-way, Filter FL1 Drain Isolation 1/E9 MV 7 Closed Valve, Diaphragm, Manual, 2-way, Filter FL1 Inlet Isolation 1/G6 MV 9 Closed Valve, Diaphragm, Manual, 2-way, Chemical Supply Isolation 1/G15 MV 10 Closed Valve, Diaphragm, DI Water Supply Isolation 1/F15 MV 11 ----- Hand sprayer 1/F13 MV 12 Closed Valve, Diaphragm, Manual, 2-way, Pump P1 Flush Isolation 1/G14 NV 1 Closed Valve, Needle, Manual, 2-way, DI Water Return Attenuation - Isolation 1/C11 P 1 ----- Pump, Chemical Dispense, Principle 2/D14 PG 1 ----- Gauge, N2 Supply to Solenoids 2/F14 PG 2 ----- Gauge, N2 Supply to Drum Blanket 2/G9 PG 3 ----- Gauge, CDA Supply to Pump P1 1/E5 PG 4 ----- Gauge, Filter FL1 Exit Pressure Indicator 1/E8 PG 5 ----- Gauge, Filter FL1 Inlet Pressure Indicator 1/F10 PSH 6 -.1” H2O Switch, Vacuum, Exhaust 2/C14 REG 1 70 PSIG Regulator, Pressure, N2 Supply to Solenoids 2/F14 REG 2 1 PSIG Regulator, Pressure, N2 Supply to Drums 2/G9 REG 3 60 PSIG Regulator, Pressure, CDA Supply to Pump P1 2/D13 RV 1 80 PSIG Relief Valve, N2 Supply to Solenoids Overpressure 2/F12 RV 2 2 PSIG Relief Valve, N2 Drum Blanket Overpressure 2/G7 RV 3 70 PSIG Relief Valve, Pump P1 Pneumatic Supply Overpressure 7-38 Initials June 2013 Chapter 8: Schematics This chapter contains the following information: Legend ...................................................................................................9-3 P&ID Schematic......................................................................................9-5 Electrical Schematic ...............................................................................9-7 Facility Schematic...................................................................................9-8 June 2013 8-1 Schematics 8-2 MegaPure 50, Model 304 June 2013 MegaPure 50, Model 304 Schematics Legend 16 14 15 12 13 11 10 9 8 7 6 5 4 3 2 1 7/17/2012 6:51:35 AM BASIC VALVE H REGULATOR CONFIGURATION CONFIGURATION 2 WAY TANKS/VESSELS COMPONENTS - DISCRETE INSTRUMENT VESSEL REDUCING, SELF CONTAINED 3 WAY P = PURGE 4 WAY REDUCING, LINE SENSING CHG 003-UPDATE BORDER WITH NEW LOGO FUNCTION DIAMOND F = FLUSH SIZE BUBBLE NOTES: UNLESS OTHERWISE SPECIFIED FLOW ARROW DRUM BACK PRESSURE, LINE SENSING F DIAPHRAGM PAGE SYMBOLS ACTUATORS ACTUATORS MANUAL MANUAL PNEUMATIC EXAMPLE SPARGER PI STRAINER REGULATOR, REDUCING, SELF CONTAINED, HAND ADJUSTED, PRESSURE INDICATOR VALVE, 3 WAY, DIAPHRAM, PNEUMATICALLY OPERATED TANK COMPONENTS STATIC MIXER PRESSURE LIMIT CLOSED EXAMPLE P = PURGE PI LIMIT OPEN TANK DAMPNER INDICATORS STROKE LIMITERS LINE FUNCTION DIAMOND E F = FLUSH - OFF PAGE CONNECTOR - SPECIAL NOTE - REV D SPRAY HEAD MECHANICAL MIXER MISCELLANEOUS SYMBOLS VB SPECIALTY VALVES Navigation Key: SHEET NUMBER VORTEX BUG VENTURI # CAP NOTE NUMBER CHECK PUMPS REDUCER BALL CHECK CENTRIFUGAL PNEUMATIC COMPONENT DOUBLE CONTAINMENT UNLESS OTHERWISE SPECIFIED: ALL DIMS IN MM [INCHES]. DO NOT SCALE DRAWING. QUICK CONNECT RELIEF DIAPHRAGM HALF COUPLING SOLENOID VALVE FLOW CONTROL P AND ID, LEGEND, MEGA SBD ENGINEER DI GUN A B TITLE SKIN TOP PERISTALTIC C GRID NUMBER NEEDLE B H JUNCTION GLOBE E 07/17/12 SAMPLE DRAIN BALL D 1" TF BACK PRESSURE, SELF CONTAINED DIAPHRAGM C FILTER DE-GASSING TEE F DATE FCB DESCRIPTION G TYPE GATE DRAWN BY ECO 003 CP32775 PROCESS DIRECTION ARROW SUMP G REV LINE SYMBOLS T.GRAVES BULKHEAD REF DATE 02/12/08 101819 SIZE DWG NO A REV B 343-00003-000 003 FILE 16 June 2013 15 14 13 12 11 10 9 8 7 6 5 4 3 SHEET 2 1 OF 2 1 8-3 Schematics MegaPure 50, Model 304 16 14 15 13 12 11 10 9 8 7 5 6 4 3 2 REV 1 DRAWN BY ECO 003 CP32775 INSTRUMENT SYSMBOLS H COMPONENT DESIGNATOR AI AV CV FC FE FI FR FT HV LS* MV PC PCV PE PI PR PRV PT QI SC SI SV TA* WT YS CONFIGURATION DISCRETE INSTRUMENT SHARED DISPLAY SHARED CONTROL G COMPUTER FUNCTION PROGRAMMABLE LOGIC CONTROLLER F FUNCTION FIELD MOUNTED PRIMARY LOCATION, NORMALLY ACCESSABLE TO OPERATOR E G ELECTRIC SIGNAL HYDRAULIC SIGNAL NOTES: UNLESS OTHERWISE SPECIFIED CAPILLARY TUBE ELECTROMAGNETIC OR SONIC SIGNAL (GUIDED) F ELECTROMAGNETIC OR SONIC SIGNAL (NOT GUIDED) INTERNAL SYSTEM LINK (SOFTWARE OR DATA LINK) MECHANICAL LINK OPTIONAL BINARY SYMBOLS E PNEUMATIC BINARY SIGNAL PROCESS DESIGNATOR A B C D E F G H K M N P Q S T W DESIGNATION EXPANSION XXX XXX XXX ADDED IF MORE THAN ONE COMPONENT DESIGNATION APPLY EXAMPLE B PNEUMATIC SIGNAL ELECTRIC BINARY SIGNAL AUXILLARY LOCATION, NORMALLY INACCESSABLE TO OPERATOR C UNDEFINED SIGNAL (ON-OFF) PRIMARY LOCATION, NORMALLY INACCESSABLE TO OPERATOR XXXX XXXX XXXX XXXX H INSTRUMENT SUPPLY OR CONNECTION TO PROCESS *H(HIGH),HH(HIGH/HIGH) L(LOW),LL(LOW/LOW) AUXILLARY LOCATION, NORMALLY ACCESSABLE TO OPERATOR D 07/17/12 DESCRIPTION LINE TYPE ANALYSIS INDICATOR PNEUMATIC VALVE CHECK VALVE FLOW CONTROLLER FLOW ELEMENT FLOW INDICATOR FLOW REGULATOR FLOW TRANSMITTER HAND VALVE LEVEL, SENSOR MANUAL VALVE PRESSURE CONTROLLER PRESSURE CONTROL VALVE PRESSURE ELEMENT PRESSURE INDICATOR PRESSURE REGULATOR PRESSURE RELIEF, VALVE PRESSURE TRANSMITTER QUANTITY, INDICATOR SPEED CONTROLLER SPEED INDICATOR SOLENOID VALVE TEMPERATURE ALARM WEIGHT TRANSMITTER PRESENCE, SENSOR FCB DATE TYPICAL AV CONTROL SCHEME ALAYTICAL BLEND CHEMICAL DRAIN USER CHOICE FILTRATION CDA HUMIDIFIED N2 TEMPERATURE CONTROL METROLOGY N2 IPW SAMPLE SLURRY TITRATOR DI WATER D Navigation Key: AIR SUPPLY SHEET NUMBER # NOTE NUMBER GRID NUMBER C B INSTRUMENT, SHARED DISPLAY, PRIMARY LOCATION, ACCESSIBLE TO THE OPERATOR TITLE P AND ID, LEGEND, MEGA SBD A A SIZE DWG NO REV B 343-00003-000 003 SHEET 16 8-4 15 14 13 12 11 10 9 8 7 6 5 4 3 2 2 OF 2 1 June 2013 MegaPure 50, Model 304 Schematics P&ID Schematic June 2013 8-5 Schematics 8-6 MegaPure 50, Model 304 June 2013 MegaPure 50, Model 304 Schematics Electrical Schematic 16 15 14 13 12 11 10 9 8 7 5 6 3 4 2 1 3/27/2013 3:17:05 PM REV DRAWN BY ECO 001 CP34383 H DATE DAB 3/13/13 H DESCRIPTION -INITIAL RELEASE 0V 24VDC -4 VIO -5 BRN INPUTS NOT USE -5 BRN NOT USE -4 DC COM G 1/0 -5 GB1 -4 GB1 1 (A2) START DRUM CR1 -5 G 1 BLU -203 A RED -206 BLK -5 RED -207 -5 G BLU -210 BLU -211 SIGNAL FROM CUSTOMER SIGNAL TO CUSTOMER CR107 CR200 158 (A1) 157 251 (A2) (11) 1/19 1 1/18 1 A 1/17 -5 BLU -209 1/16 BRN 1 G 101 102 103 MAINT. BLU -100 BLU -101 BLU -102 BLU -103 -5 BRN -5 BRN -5 BRN -5 BRN SW3 MAINT/AUTO PB3 START DRUM 2 NOTES: UNLESS OTHERWISE SPECIFIED 1 PB4 SILENCE PB5 4 -106 BLU 104 105 106 (2) WHT -104 (2) WHT -105 WHT N/O-HC -5 -4 BLK RED (4) BLK (1) RED WHT N/O-HC -5 BLK (4) BLK -4 RED (1) RED (2) WHT -106 WHT N/C -5 SHD (4) BLK -4 RED (1) RED (11) (14) -107 BLU -5 -108 BLU -109 BLU -110 BLU 109 110 111 BLU -108 A XOO -5 LS2 FILTER BURP LD1 CABINET LEAK BRN CHEM DEMAND BRN SW1A OOX BLU -110 BLU -111 112 -5 BRN -5 BRN -5 BRN -5 BLK -4 RED SW1B E CR107 DRUM A SELECTED (OPTIONAL) BLU -109 F ALL FUSES 250VAC RATED LS1 DRUM EMPTY CR107 108 ALL WIRES 18AWG UNLESS OTHERWISE SHOWN 2 (#) DENOTES CONNECTOR TERMINAL DESIGNATION RESET 3 DRUM B SELECTED PB6 DRUM EMPTY SW4 PHOTOHELIC D KEYED NOTES: 1 113 1/15 -5 BRN EMPTY DRUM B BRN BLU -208 - + 0/11 SILENCE -5 0/10 CHEM DISPENSE BLU 0/9 SONALERT -105 BLU -113 BLU 0/8 C -4 VAC VDC VIO -104 BLU -112 BLU 1/14 -5 100 VIO 1/13 BLK -4 1/12 RED -205 -103 BLU 1/11 -5 0/7 EV4 BLK -102 BLU -111 BLU 0/6 EV3 RED -204 0/5 EV2 -5 0/4 EV1 D BLK 1/10 G -4 VAC VDC VIO 1/9 BRN BLU -202 0/3 RESET -5 1/8 VIO BRN 0/2 (H) (G) -4 1/7 VIO 1 1/6 -201 (A1) VAC VDC E -4 1/5 CR201 VIO 0/1 (A2) (A1) VAC VDC INTERLOCK OVERRIDE CR201 CR200 1/4 HANDSHAKE OUT CR200 0/0 -200 -101 BLU DC COM VIO 1/3 GRN GB1 VAC VDC F GB1 1/2 BRN SUPPR1 -100 BLU OUTPUTS 1/1 -4 DC IN + 24V - VIO G VIO JUMPER TO BE REMOVED WHEN INSTALLING ADDITIONAL (OPTIONAL) EMO 2 CLOSED CONTACTS = AUTO MODE. 3 OPEN CONTACTS = AUTO SWITCHING. C -4 VIO UNLESS OTHERWISE SPECIFIED: ALL DIMS IN MM [INCHES]. DO NOT SCALE DRAWING. B 250 (14) TITLE SCHEMATIC, ELECTRICAL MEGAPURE 50, MODEL 304 ---ENGINEER DATE D. BECK A REF 3/13/13 ---- SIZE DWG NO A REV B 217-00495-000 001 FILE 16 June 2013 15 14 13 12 11 10 9 8 7 6 5 4 3 SHEET 2 1 OF 1 1 8-7 Schematics MegaPure 50, Model 304 Facility Schematic 8-8 June 2013 Chapter 9: Parts List Part Number Part Description Qty Valves 101-25024-000 VLV,MAN,BALL,3/8COMP,SST 2 101-25026-000 VLV,PRESS RELIEF,3-50PSI,1/4,SST 1 101-25027-000 VLV,PRESS RELIEF,50-150PSI,1/4,SST 2 370-22071-000 VALVE ASSY, SOLENOID, 1/8” 1 370-00500-000 VLV, AOV, 3-WAY DIAPH W/VI, 1/4OR x 3/8FLR, FURON UPM 1 370-25191-000 VLV, AOV, 2-WAY 3/8FLARE, PFA 1 370-25011-000 VLV, AOV, 2-WAY, 3/4FLR, PFA 1 370-25195-000 VLV, AOV, 2-WAY, 3/4FLR, PFA 1 370-25102-000 VLV, MAN, 2-WAY 3/8FLR, PFA 3 370-25068-000 VLV, MAN, 3/4FLR, PFA 4 370-25098-000 VLV, MAN, DIAP, 1/2 OR, 1/4 TURN, 1/2FLR, PFA 1 370-25118-000 VLV, MAN, NEEDLE, 3/8FLR, PFA 1 370-25144-000 VLV,CHECK,3/8FLR,PTFE 1 100377 FLTR,MEDIA,100 MICRON 1 380-25024-000 PUMP, BELLOWS, ASTI PFD2-316U (U=KALREZ O-RING), 0-5 GPM, 3/ 4”FLR I/O, KALREZ SEALS 1 380-25016-000 PULSE DAMPER,1,STR/ELB,PFA, 1 120-38006-003G LIGHT BULB, LED, GREEN, 12V/24V AC/DC, ROCKWELL 800B-16mm 1 120-38006-003W LIGHT BULB, LED, WHITE, 12V/24V AC/DC, ROCKWELL 800B-16mm 1 120-32013-000 POWER SUPPLY, 24VDC, 2.5A, DIN RAIL MOUNT, CE, RoHS 1 120-22103-000 PROCESSOR,MICROLOGIX 1000,32I/ 1 120-34506-000 SURGE PROTECTOR, 120VAC 1 120-22220-000 ACTUATOR,PROX SNSR,FLG MNT 1 121-25066-000 SWITCH,PUSH-PULL,1NCLB,JUMBO,MNTD,RED 1 121-22016-000 SWITCH,SEL,3 POSN,KNOB,ALCO 1 100181 PHOTOHELIC,SW/GAGE,0-3,H20,10 1 108-22007-000 GAUGE, PRESS, 0-60PSI, 2.5"FACE, 1/4” MNPT-SST-BOTTOM PORT 1 102-25023-000 REG, 1/4” 0-100PSI,100# 2 102-25026-000 REG, 1/4” 0-50PSI,15 PSI GAUGE. 1 Hardware Electrical Switches Gauges June 2013 9-1 Parts List 9-2 MegaPure 50, Model 304 June 2013 Glossary A-B — Allen-Bradley Company, Inc. ABPR — Automatic Back Pressure Regulator. The ABPR system regulates the slurry pressure in the global loop. An alternate method of controller back pressure is to hold the BPR valve at a constant setting while modulating a set of variable speed supply pumps. Acid — Acid Compound that reacts with metal to evolve hydrogen, reacts with a base to form salt, dissociates in water to yield H2 ions, and has a pH of less than 7. Al203 — Aluminum Oxide (Alumina). Also known as corundum and emery and used as an abrasive. Alkali — Chemical substance that is soluble in water, neutralizes acids, and forms salts with them. An alkali has a pH of more than 7. Amorphous — Lacking a crystalline structure; literally without shape. Having a random atomic arrangement without a three dimensional structure. Analog — System or device that represents data variation by a measurable physical quality. Active — Describes a device that is online and currently dispensing. Aspirated Drain — System where suction facilitates thorough and rapid draining. Atomize — To reduce to fine particles or spray. ATRS — Auto-Titration/Replenishment System. Automode — A station that can operate automatically. AV — Automatic Valve. Base — Compound that reacts with acids to form salts and has a pH of more than 7. BCDS — Bulk Chemical Distribution System. Blend Tank — Tank or station where different slurry or chemical components are combined and mixed in specific ratios. BPR — Back Pressure Regulator. June 2013 Glossary - 1 Glossary MegaPure 50, Model 304 BV — Ball Valve. BPV — Back Pressure Valve. CDA — Clean Dry Air. CDU — Chemical Dispense Unit. Refers to the Mega Tote/Drum assembly that supplies slurry to the polishers. Centipoise — Unit of measurement for viscosity (also see Poise). CompactLogix — A PLC that controls equipment operation. ControlNet — Communication protocol for sending and receiving data from the corresponding Megaflow systems (from PLC to PLC). CPU — Central Processing Unit. CSS — Chemical Safety Shutdown. A function that remotely shuts down all system operations in an emergency. CV — Check Valve. Data Highway Plus — Allen-Bradley communication protocol. Day Tank — Tank to which blended chemicals are transferred prior to dispensation to the global loop. Deionized — Substance from which all atoms or groups of atoms that have acquired an electrical charge have been removed. Density — Measure of a quantity such as mass or electric charge per unit volume. DeviceNet — Communication Protocol for collecting inputs from the field and sending outputs to the field (PLC to I/O). DH+ — Data Highway Plus (Data Highway Plus for definition). D.I. (or DI) — Deionized. Digital — Processing, operating on, storing, transmitting, representing, or displaying data in the form of numerical digits, as in a digital computer. Distribution Tank — Tank from which chemical is dispensed directly to a point of use system or to multiple systems via a global loop. Glossary - 2 June 2013 MegaPure 50, Model 304 Glossary EMO — Emergency Machine Off. A function when activated, immediately shuts all control power to output devices. Does not disconnect main power. Ethernet — System for exchanging messages between computers on a local area network using coaxial, fiber optic, or twisted-pair cables. EV — Solenoid Electrical Valve part identification code. Fab — Wafer fabrication facility. Force — Software function that allows the programmer to energize or de-energize an input or output independent of the program logic. FRPP — Fire Resistant Polypropylene. Global Loop — Distribution loop used to supply chemical or slurry to point of use systems. GPM — Gallons per Minute. GUI — Graphical User Interface. HC — High Capacity. Heterogeneous — Composed of parts of different kinds. Homogeneous — Composed of parts of the same kind. This term is properly applied to a chemical element and compounds but not to mixtures or solutions. Hydrometer — Instrument for measuring the specific gravity of liquids. Hygrometer — Instruments for measuring relative humidity. I/O — Hardware or software that controls the passage of information into and out of a computer or computer component. IPA — Isopropanol Alcohol. IPW — Industrial Process Water. KTx Card — Allen-Bradley communication interface card. Ladder Logic — A PLC program written in a format resembling an electrical ladder diagram. LAN — Local Area Network. Network of personal computers and peripheral devices linked by cable and able to share resources. June 2013 Glossary - 3 Glossary MegaPure 50, Model 304 LPM — Liters Per Minute. l/m — Liters per Minute. Loop — Piping system that returns to the point of dispensation. MOS — Metallic Oxide Semiconductor. MSDS — Material Safety Data Sheet. MTBF — Mean Time Between Failure. MV — Manual Valve. N2 — Nitrogen. NPP — Natural Polypropylene. NPT — National Pipe Thread. OFA — Oil Free Air. ORP — Oxidation Reduction Potential. Offline — Indicates the device is not running automatically and available for manual control (e.g., valves). PanelView — Refers to Allen-Bradley PanelView operator terminals (PanelView 550, 600, 1000, etc.). PanelView operator terminals provide machine control and monitoring functions for most Mega Fluid Systems, Inc. equipment. Pause — Describes the operational mode that temporarily stops the system blend and distribution process. Pause can be initiated automatically or manually through the touchscreen. PFA — Perfluoroalkoxy. pH — The acidity or alkalinity of a solution. Equal to the log of the reciprocal of the hydrogen ion concentration measured in gram moles/liter. In practical terms the pH scale extends from 0 -14. PID — Proportional Integral Derivative. A PID controller corrects the error between a measured process variable and a desired setpoint by calculating and then outputting a corrective action that can adjust the process accordingly. The PID controller calculation (algorithm) involves three separate parameters; the Proportional, the Integral and Derivative values. The Proportional value determines the reaction to the current Glossary - 4 June 2013 MegaPure 50, Model 304 Glossary error, the Integral determines the reaction based on the sum of recent errors and the Derivative determines the reaction to the rate at which the error has been changing. The weighted sum of these three actions is used to adjust the process via a control element such as the position of a control valve. PLC — Programmable Logic Controller. Electronic device that controls machines and processes. It uses a programmable memory to store instructions and execute specific functions that include On/Off control, timing, counting, sequencing, arithmetic, and data handling. PPE — Personal Protective Equipment. Point of Use — Any wafer fabrication system that draws chemical from the global loop. Poise — Unit of measurement for viscosity. Water = 0.01 poise. POU — Point of Use. Primary — Describes the main slurry/dispense station. The primary station contains a power disconnect, main controller and a PanelView Plus touchscreen. PSI — Pounds per Square Inch. PT — Pressure Transmitter. PTFE — Polytetraflourethelene. Pycnometer — Vessel used to measure the specific gravity of liquids or solids. Recipe — User-defined series of steps which specifies the type (either slurry, chemical 1, chemical 2, or DI water/UPW) and amount (measured either by weight or volume) of chemical to be added to the blend/mix tank. Repeatability — The ability of an instrument to give the same output or reading under repeated, identical conditions. RIO — Remote I/O (also see I/O). RV — Relief Valve. scfm — Standard Cubic Feet per Minute. Secondary — Describes the redundant slurry/dispense station. Setpoint — An operational boundary or specific limit (can be either high or low) which the system is not to exceed. June 2013 Glossary - 5 Glossary MegaPure 50, Model 304 SF — Stabilized Filtration. SG — Specific Gravity. SGU — Specific Gravity Units. SLC — Small Logic Controller. Trademark of Allen-Bradley Company, Inc. Slurry — Liquid mixture of water and an insoluble solid material. SMS — Slurry Metrology System. Specific Gravity — Ratio of the density of a substance to the density of water at specified conditions. SQL — Structured Query Language. Computer language for specifying database inquiries. SS — Stainless Steel. Stabilized Filtration — Constant flow through the filtration loop to maximize filter effectiveness. Standby — Describes a station or device that is started but not currently dispensing or blending. TIP — Tool Interface Panel Trending — Collection of system operations data for performance analysis and record-keeping purposes. Tare — Deduction from the gross weight to allow for receptacle/packaging. Tool — Any device, storage container, work station, or process machine used in a clean room. UPW — Ultra-Pure Water. Viscosity — Property of a fluid caused by molecular attraction that causes it to resist flow or movement in response to external force applied to it. Viscosity is affected by temperature. VMB — Valve Manifold Box. XMTR — Transmitter. Glossary - 6 June 2013 Index A ABPR 10-1 acid 10-1 acknowledge alarm 5-5 Active 10-1 Al203 10-1 alarms responding to 5-5 testing 7-15 alkali 10-1 amorphous 10-1 analog 10-1 aspirated drain 10-1 atomize 10-1 ATRS 10-1 automatic valve 7-17 Automode 10-1 AV 10-1 B base 10-1 battery lithium 7-26 disposal 7-27 replacement procedure 7-26 BCDS 10-1 blend tank 10-1 BPR 10-1 BPV 10-2 BV 10-2 cabinet 7-32 Compact 7-7 compact flash card 7-7 CompactLogix 10-2 component isolation and removal 7-4 component troubleshooting 7-9 components electrical replacement 7-5 ControlNet 10-2 CPU 10-2 CSS 10-2 CV 10-2 D D.I. 10-2 danger messages explained 2-2 data highway plus 10-2 day tank 10-2 deionized 10-2 density 10-2 device settings record sheet 7-37 DeviceNet 10-2 DH+ 10-2 DI 10-2 differential pressure gauge 7-16 digital 10-2 distribution tank 10-2 C cabinet 1-5 cleaning procedure 7-32 cabinet cleaning 7-32 caution messages explained 2-2 CDA 10-2 CDU 10-2 centipoise 10-2 check valve 7-17 Chemical 1-5 chemical exposure 2-4 handling 2-4 leaks 2-4 spills 2-4 chemical hazard messages explained 2-3 chemicals spill mitigation 2-12 cleaning June 2013 E electrical safety type 1 hazard defined 2-5 type 2 hazard defined 2-5 type 3 hazard defined 2-5 type 4 hazard defined 2-5 work guidelines 2-5 electrical component isolation and removal 7-5 electrical components replacement 7-5 electrical components, removing 7-5 electrical equipment safety when working with 2-4 electrical hazard messages explained 2-3 electrical solenoid valve 7-16 emergency machine off verification procedure 7-31 Index - 1 Index emergency machine off (EMO) procedure 2-6 EMO 10-3 circuitry description 2-7 resetting an EMO button 2-7 verification procedure 7-31 EMO procedure 2-6 equipment features 1-5 equipment features 1-5 cabinet 1-5 piping 1-5 ethernet 10-3 EV 10-3 F fab 10-3 facility requirements 3-2 filters replacing 7-28 fittings inspection 7-22 replacement 7-23 force 10-3 FRPP 10-3 G gas line preventive maintenance procedure 7-22 gas lines component check 7-19 global loop 10-3 GPM 10-3 GUI 10-3 H HC 10-3 heavy object hazard messages explained 2-3 heterogeneous 10-3 homogeneous 10-3 how to alarm deactivate the 5-2 alarms, test the 7-15 battery, replace the 7-26, 7-27 cabinet, clean the 7-32 chemical startup and test 3-9 components, remove 7-4 DI water & leak test the system 3-8 electrical components, remove 7-5 EMO, test the 7-31 filters, replace the 7-28 fittings, check the 7-22 fittings, replace the 7-23 June 2013 MegaPure 50, Model 304 gas line, check components of the 7-19 install the system 3-3 leak detector, check the 7-12 manual, set to 5-3 place the system 3-4 prestartup test the system 3-6 pump, check the 7-12 pump, isolate and remove a 7-24 relief valves, adjust the 7-20 restart 5-5 system turn off the system turn off the 5-3 system, configure 3-7 system, start 5-2 turn off alarm 5-5 hydrometer 10-3 hygrometer 10-3 I I/O 10-3 initial system startup 5-2 installation 3-1 procedure 3-3 chemical startup and testing 3-9 DI water startup and leak testing 3-8 pre-startup testing 3-6 system commissioning 3-5 system configuration 3-7 system inspection 3-3 system location and site inspection 3-3 system placement 3-4 system testing 3-8 interlocks software critical 6-2 LD1 LEAK 6-3 warnings 6-2 IPA 10-3 IPW 10-3 K key failure points 2-10 KTx card 10-3 L l/m 10-4 ladder logic 10-3 LAN 10-3 leak detector check 7-12 lithium battery 7-26 disposal 7-27 Index - 2 Index replacement procedure 7-26 lockout/tagout 2-8 loop 10-4 LPM 10-4 M maintenance preparation 7-8 semiannual 7-26 manual mode 5-3 manual mode warning 2-14 manual valve 7-18 material safety data sheets 2-9 mechanical hazard messages explained 2-3 MOS 10-4 MSDS 2-9, 10-4 MTBF 10-4 MV 10-4 N N2 10-4 notice messages explained 2-2 NP 10-4 NPT 10-4 O OFA 10-4 Offline 10-4 overview equipment features 1-5 facility requirements 3-2 system 1-4 P PanelView 10-4 PanelView 550 key descriptions 5-7 Pause 10-4 personal protective equipment 10-4, 10-5 PFA 10-4 pH 10-4 piping 1-5 PLC 10-5 PLC Micrologix 1000 overview 5-7 point of use 10-5 poise 10-5 POU 10-5 pressure reducing regulator 7-7 pressure relief valve 7-18 preventative maintenance 7-8 June 2013 MegaPure 50, Model 304 Preventive 7-8 preventive maintenance list 7-35 semiannual 7-26 Primary 10-5 procedures operating manual operation 5-3 responding to alarms 5-5 restarting after EMO shutdown 5-5 shutdown 5-3 startup 5-2 protective clothing required messages explained 2-3 PSI 10-5, 10-6 PTFE 10-5 pump isolation and removal procedure 7-24 pump 1 operation check 7-12 pycnometer 10-5 R recipe 10-5 regulator 7-7 pressure reducing 7-7 relief valve adjustment 7-20 removing all power 2-7 repeatability 10-5 replacement electrical components 7-5 resetting an EMO button 2-7 RIO 10-5 RV 10-5 S safety caution messages explained 2-2 chemical exposures 2-4 chemical handling 2-4 chemical hazard messages explained 2-3 chemical spills 2-4 danger messages explained 2-2 danger, warning, caution & notice messages 2-2 electrical type 1 hazard defined 2-5 type 2 hazard defined 2-5 type 3 hazard defined 2-5 type 4 hazard defined 2-5 work guidelines 2-5 electrical hazard messages explained 2-3 general 2-4 heavy object hazard messages explained 2-3 Index - 3 Index interlocks 2-13 key failure points 2-10 material safety data sheets 2-9 mechanical hazard messages explained 2-3 messages 2-2 MSDS 2-9 notice messages explained 2-2 protective clothing required messages explained 2-3 required safety precautions 2-4 safety hazards explained 2-2 spill mitigation 2-12 warning messages 2-2 warning messages explained 2-2 working with electrical equipment 2-4 safety information lockout/tagout 2-8 safety components 2-15 safety interlocks 2-13 scfm 10-5 Schematics 8-1 Secondary 10-5 semiannual preventive maintenance procedures 7-26 setpoint 10-5 SF 10-6 SG 10-6 SGU 10-6 shut down system 5-3 shutdown procedure 5-3 SLC 10-6 slurry 10-6 SMS 10-6 specific gravity 10-6 spill mitigation 2-12 SQL 10-6 SS 10-6 stabilized filtration 10-6 Standby 10-6 start manual mode 5-3 starting the system 5-2 startup procedure 5-2 system overview 1-4 facility requirements 3-2 MegaPure 50, Model 304 turn system on 5-2 U UPW 10-6 V valves 7-16 automatic 7-16 ball 7-16 check 7-16 electrical solenoid 7-16 flow indicator 7-16 manual 7-16 pressure relief 7-18 relief adjustment 7-20 valves diverter 7-16 viscosity 10-6 VMB 10-6 W warning manual mode 2-14 warning messages explained 2-2 work order form 7-34 T tare 10-6 TIP 10-6 tool 10-6 trending 10-6 troubleshooting gas line 7-19 turn off alarm 5-5 turn system off 5-3 June 2013 Index - 4

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