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OKI TRI-AXIS ACCELEROMETER MODULE ML8952 OKI Electric Industry Co., Ltd. WP Business Development WP Business division Silicon Manufacturing Company CONFIDENTIAL CONTENTS What’s tri-axis accelerometer ? Typical applications Outline of ML8952 Specification Roadmap of OKI motion sensor Demonstration of free fall detection CONFIDENTIAL What’s What’s tri-axis tri-axis accelerometer? accelerometer? ACCELERATION VIBRATION It can detect…. TILT 3D MOTION SHOCK CONFIDENTIAL Typical Typical Applications Applications PERSONAL MOBILE GAMES SECURITY INDUSTRIAL COMUNICATION DEVICES Electric Compass Correction Safeguard Protection of HDD (freefall detection) Display Controller Input Controller Robot Posture Controller Anti-theft alarms - motorcycles - ATM (automatic teller machines) etc. Burglary alarms Fault Vibration Detector Seismograph (Earthquake sensor) Tilt Angle Compensation for Projector Pedometer Electric Level 3D Mouse Control Car Navigation System (Cell phones, PDA, Watch) Emerging Potential for MEMS-based Tri-Axis Accelerometers CONFIDENTIAL Application Applicationto toelectronic electroniccompass compasscorrection correction • Introduction of a mobile phone with GPS and electronic compass in 2002 The mobile phone had to remain at an even level with the ground * Tri-axis accelerometer (tilt sensor) clears this problem Electronic ElectronicCompass Compass OKI tri-axis tri-axis accelerometer accelerometer GPS + earth’s earth’smagnetic magnetic field fieldsensor sensor Cell phones , PDA signal signal processing processingunit unit Drawing up a road map ! * Existing earth’s magnetic field sensors have compass error depending on an operating tilt-angle. CONFIDENTIAL Package PackageFeature Featureof ofML8952 ML8952 (Commercial (CommercialDevice) Device) 1.9 0.8 1.55 6.2 9 10 11 12 0.8 ML8952 6.3 R 0.15 8 7 6 5 4 13 14 15 16 17 1 x 0.45 2.0 x 2.0 3 2 1 18 BOTTOM VIEW TOP VIEW 1.0 (mm) SIDE VIEW LCC 18 pin package Size: 6.3 mm(W) x 6.2 mm(D) x 1.2 mm(H) (world's thinnest) Pb Free & Halogen Free CONFIDENTIAL 1.5 x 0.45 Feature FeatureDifferences Differencesbetween betweenType TypeAAand andType TypeB’ B’ Feature ML8950 (Type A) (Tech. Eval. Purpose) ML8952 (Type B’) (Commercial Device) Package Size 5.0 x 5.0 x 1.4 (mm) 14-pin LCC 6.3 x 6.2x 1.2 (mm) 18-pin LCC Calibration No internal EEPROM for calibration data Calibration data is stored on internal EEPROM (factory stored) SPI and I2C SPI 3-wire serial I/F (SIOCLK, SIODT, SIOST) 4-wire serial I/F (SIOCLK, SIDT, SODT, SIOST) CLK Frequency CLK Frequency ~ 1.53 MHz (SPI), ~ 400KHz (I2C) ~12MHz (EEPROM: ~ 1MHz) No automatic temperature compensation Automatic temperature compensation for its sensitivity and offset value using a built-in temperature sensor and the calibration data. CPU Interface Only measurement controlled by external MPU Logic Control Circuit Including automatic measurement mode, controlled by an internal CLK. When a G variation is detected, a interrupt signal is triggered to host CPU. No interrupt function Including a programmable level-interrupt that can be triggered by freefall detection (0G), shock detection (G over threshold setting) or by sensing motion depending on the G variation. No time-averaging function Including time-averaging function that can minimize the output data spread by time-averaging measured data per unit time. The given measurement times are 4, 16 and 64, which can be chosen suitable for customers applications. CONFIDENTIAL An Anexample exampleof ofapplications applications --HDD HDDdamage damageprotection protection-- ☆Our accelerometer is useful for HDD damage protection systems Acceleration (Absolute value) 加速度（絶対値表示） ・No gravity (static acceleration) detection （~ 0G） → offers retraction of a HDD’s head to safe position by detecting no gravity during falling ・ Collision/vibration (dynamic acceleration) detection → features fast response time upon collision （＜10msec）. Possible to stop the access safely resulting in avoidance of structive damage. Sample waveform 落下時の加速度イメージ After collision 2.0 Steady state 1.0 Falling 0.0 経過時間 Elapsed time Automatic detection mode issues automatic interrupt signal to HOST CPU +α when set value is exceeded. 1G -α +α 0G CONFIDENTIAL Static StaticOutput OutputCharacteristic Characteristicof ofAccelerometer Accelerometer 200.0 Vx Vy Vz Output [bit] 150.0 Z 100.0 50.0 0.00 -50.0 -100.0 -150.0 -200.0 0 30 60 90 120 150 180 210 240 270 300 330 360 Angle [deg] X < y-axis Rotation > Y CONFIDENTIAL Structure Structureof ofOKI’s OKI’sPiezoresistivity PiezoresistivityAccelerometer Accelerometer Overview Beam Z AL Pad SOI SiO2 (BOX) Cross-section Piezoresistance X SOI Waf. Si Sub. Weight Y Acceleration On Weight Strain/tension On Beams Resistance Change Change in resistance can be read as proportional to acceleration CONFIDENTIAL Basic BasicPrinciple Principleof ofAcceleration AccelerationDetection Detection R1 R2 +- R3 R4 + - R1 beam beam R4 R3 R3 R2 R4 stretch strain resistance increase(+) compression strain resistance decrease(-) Z axis acceleration Rx1 Rx2 Ry1 Ry2 Rz3 Rz4 Rz1Rz2 Resistance Change due to mechanical Stress Vout E X(Y) axis acceleration beam R1 R2 Vout E - beam Fz Fx(y) R1 R3 + - R4 R2 + Ry3Ry4 Rx3 Rx4 Bridge Circuits Rx1- Rx4 X direction Ry1 - Ry4 Y direction Rz1 - Rz4 Z direction CONFIDENTIAL Advantages Advantages World’s Thinnest Package --- LCC:1.2 mm Typical Easy of Use --- Serial Digital Interface (SPI) --- Application Development Tool available (I/F board and Software) Environment --- Available in Pb Free & Halogen Free A lot of functions -- Logic control supports several operational modes competitors Type PKG Size (mm3) Interface Detection Range Operating Temp. Range( C) OKI Piezoresist. Piezoresist. 6.3 x 6.2 x 1.2 Digital +/- 2g -20~ +70 Hitachi Metal Hokuriku Electric Ind. Piezoresist. Piezoresist. 4.8 x 4.8 x 1.3 Analog +/- 2g -25~ +75 Piezoresist. Piezoresist. 5 x 5.6 x2.0 Analog +/- 2g 0~ +60 ST Micron capacitance 7 x 7 x 1.8 Digital +/- 2g -40~ +85 ADI capacitance 5.0x 5.0 x2.0 Analog +/- 2g 0~ +70 MEMSIC Thermal Analog +/- 2g -40~ +70 5.0 x 5.0 x 2.0 CONFIDENTIAL ML8952 ML8952Specification Specification CHARACTERISTICS SPECIFICATION (typ.) UNIT Supply Voltage +2.5 to +3.3 (analog) +1.8 to +3.3 (Digital) V Detection range +/- 2 g Detection (Acceleration) Resolution (Angle) 10 mg/bit 0.5 (Average) Non linearity +/- 5 %FS Off-axial sensitivity +/- 10 %FS Response frequency DC~100 Hz > 5000 g -20 to +70( -4 to + 158 ) C (deg F) Shock survivability Operating Temp. Range /bit Current consumption 2.5 (Max) mA @RT Stand-by Current 10.0 (Max) uA @70 C PKG Size (Typical) Interface 6.3 (W) x 6.2 (D) x 1.2 (H) serial Digital I/F (SPI) CONFIDENTIAL mm Short-range Short-rangeDevelopment DevelopmentPlan Planof ofOKI OKIAccelerometer Accelerometer -- Major Majortarget: target:Mobile-phone Mobile-phone-year 2006 2005 Target Fall Model Spring Model Type B (1.0mm-thick-PKG) Fall Model 2007 Spring Model - 6.3 x 6.2 x 1.0mm ES: Jun. 2005~ - Built-in EEPROM MP: Dec. 2005~ - 4-wire-SPI - Freefall detection/ wake-up function - Time-averaging function Type B’ (1.2mm-thick PKG, High shock-resistance version) - 6.3 x 6.2 x 1.2mm ES: Apr. 2005~ MP: Sep. 2005~ Type-D (Electronic Compass) * To be Sequentially Developed for the future - 3D Earth Magnetic Field Sensor+ 3D Accelerometer - 6.3 x 6.2 x 1.2mm(preliminary) ES: Winter 2005~ Type-C (Small size version) - 4.8 x 4.8 x 1.2mm - Built-in EEPROM - 4-wire-SPI - Freefall detection/wake-up function - Time-averaging function MP: Summer 2006~ ES: Summer 2006~ MP: Winter 2006~ Type-E (5D Motion Sensor) - 2D Gyro sensor +3D Accelerometer ES: Winter 2006~ MP: Summer 2007~ CONFIDENTIAL Roadmap Roadmap of ofOKI OKIMotion MotionSensor Sensor(Long-range) (Long-range) -- More Morehighly highlyfunctional functionalMEMS MEMSsensors sensorsplus plusICs ICs-Se ns or Co rr ec AMP, LPF ARM tio n, Si g U8 na lP EEPROM Flash FERAM 6-axis 6-axismotion motionsensor sensor Teak ro c es si ng - High-end posture controller Te ch (robot, vehicle) no lo gy 3-axis 3-axisangular angularvelocity velocitysensor sensor 3-axis 3-axisaccelerometer accelerometer - - DSC DSC, ,Video Videocamera: camera: correction of correction ofdistortion distortionwith withhand handmotion motion - -Toy robot Toy robot - -Detection Detectionof ofaabicycle bicycleturn turnover over - -Game controller Game controller - -Electronic Electroniccompass compasscorrection correction CONFIDENTIAL Oki OkiProvides ProvidesTotal TotalSilicon SiliconSolutions Solutionsfor forCustomer’s Customer’sNeeds Needs Long LongTerm TermPartnership Partnershipwith withCustomers Customers THANK YOU CONFIDENTIAL