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5x Optical System Product Description

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5X OPTICAL SYSTEM 1. Description MicroLas 5x optical subsystems are manufactured for integration into workstations. Configurations consist of an attenuator module, deflection mirrors, telescope lenses, homogenizer optics, field lenses and a projection lens (imaging lens). Each system's design can also include observation optics with CCD cameras, an optional beam profiling monitor, as well as additional sensors and actuators. 2. Specifications Optics Subsystem for Integration OperatingWavelength 248 nm or 308 nm Field Size (mm²) 15.2 x 1.1 (other sizes on request) Energy Density (mJ/cm²) with LSX 200K (248 nm) 1220 with LSX 200C (308 nm) 1400 Field Size at Mask (mm2) 75 x 6 mm2 Inhomogeneity 2.5% (2 sigma) Projection Lens 5x/18 NA = 0.13 Field of View: 18 mm Resolution: 2 microns (diffraction-limited) Concentricity <= 0.7° Mask Field Observation (mm²) 3.5 x 2.6 Substrate Field Observation (μm²) 600 x 450 All specifications are typical data and are subject to change without prior notice in order to provide the best product possible. 3. Options Beam profiler package Pupilometer monitor optics Power meter-Port with mirror on manual slide Depolarizer Focus monitor LTS PLUS lens temperature stabilization Laser distance sensor Field enlargement mirror Base honeycomb table Mask stage Mask holder Figure 1 shows the main components and modules of the 5X beam delivery system. For a better overview, the beam paths of the observation and illumination modules as well as energy detectors and beam profilers have been omitted. Figure 1: Layout of 5X beam delivery system Key to Layout A B C D E F G H I J of 5X beam delivery system Laser Movable deflection mirror Power meter position Attenuator Mirror #1 Mirror #2 Telescope Mirror #3 Dual beam homogenizer Partition wall with condenser lens K L M N O P R S T Mirror #4 Mirror #5 Mirror #6 Field lens Mask Mirror #7 Mirror #8 Objective Substrate Figure 2: Overview of 5X beam delivery system (view away from laser device) Key to Overview of 5X beam delivery system (view away from laser device) A Attenuator B Telescope C Homogenizer D Objective Figure 3: Overview of 5X beam delivery system (view towards laser device) Key to Overview of 5X beam delivery system (view towards laser device) A Laser device B Attenuator electronics module C Field lens