Transcript
Hilco
®
Industrial
AVAILABLE IMMEDIATELY By Order of
31555 West Fourteen Mile Road, Suite 301 Farmington Hills, Michigan 48334 USA Ph +1 248-254-9999 • Fx +1 248-254-9995
www.hilcoind.com
A Hilco Global Company Vested in Your Success
Hilco
®
Industrial
AVAILABLE IMMEDIATELY
asset locations ni 49-2, YAcHiMAtAni YAcHiMAtA-SHi, cHiBA 289-1103 JAPAn 1108-1, HiSHidA SHiBAYAMA-MAcHi SABU-gUn, cHiBA 289-1602 JAPAn
For more inFormation or inspection, please contact BRiAn Lee +1 847.313.4748
[email protected] RoBeRt LUPARdo +1 201.957.5586
[email protected]
300mm Tools 1 – DNS ELECTRONICS MODEL LA-3000F 300MM FLASH LAMP ANNEALER, S/N ZE51620100 (2006) 1 – TEL MODEL FORMULA 1S-H 300MM DIFFUSION FURNACE, S/N P0000485090 (2005) 1 – EBARA MODEL FREX 300E 300MM TUNGSTEN CMP SYSTEM, S/N PZB51229WX (2005) 1 – EBARA MODEL EAC300BI-T 300MM BEVEL POLISHER, S/N SBB4012WX (2005) 1 – KLA MODEL OMNIMAP RS-100C 300MM RESISTIVITY MEASUREMENT SYSTEM, S/N 10064392 (2006) 1 – RIGAKU MODEL WAFER X-300 300MM X-RAY FLUORESCENCE ANALYSIS TOOL SYSTEM, S/N BR71011 (2005)
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To schedule an auction, please call Hilco Industrial at 1-877-37-HILCO (44526)
300MM TOOLS • 200MM ETCHERS, FURNACES & CLEANING MACHINES 200mm eTchers
2 – TOKYO OUKA KAGAKU MODEL TCE-2802 BP ETCHERS, S/Ns T-9607438, T-9607439, (2) Main Chambers, Rorze RR304L90-514001 Robot, Lambda PS-1103 UPS, Edwards IQDP80 Pump, Edwards QMB500 Pump, and Kyosan RFK10ZF RF Generator 1 – TOKYO ELECTRON MODEL TE-8500S ETCHER, S/N K85632 (1996), SMC Chiller Model INR-431-54E, Lambda UPS Model PS 1205, Edwards Pump Model STP-H600C2, Edwards Pump Model iQDP80 2 – TOKYO ELECTRON KYUSYU LTD MODEL CLEAN TRACK MARK8 ETCHERS, S/Ns MD-826912, MD-826911 (Both 1996) 3 – TOKYO ELECTRON KYUSYU LTD MODEL UNITY 2E-855LL ETCHERS, S/Ns U00617, U00618, U00919 (To 1999) 1 – TOKYO ELECTRON MODEL UNITY2E-855DD DRM ETCHER, S/N U01391 (2000), Software Version: 2.91-REV213-NIT-4.00b, (4) Edwards Vacuum Pump Systems 8 – TOKYO ELECTRON MODEL TE-8500S ETCHERS, S/Ns K85631, K85677, K85634, K85755, K85678, K85633, K85681, K85680 (All 1996), SMC Chiller Model INR-431-54E, Lambda UPS Model PS 1205, Edwards Pump Model STP-H600C2, Edwards Pump Model iQDP80
200mm Furnaces
2 – KOKUSAI MODEL DJ-853V LPCVD-POLY FURNACES, S/Ns T2DC1-10673-6, T2DC1-10674-2, CX3000 Controller, 8" Wafer Size, Heater 200V 225A, Controller 100V 30A, Clean Unit 200V 30A 2 – KOKUSAI MODEL DJ-853V DIFFUSION FURNACES, S/Ns T1DC3-00054-2, T2DC1-10673-7, 8" Wafer Size, Loading System, Furnace System, Gas Control System, Pressure Control System, Burning System, and Pump Status Unit has Controller Version CX3000 4 – KOKUSAI MODEL DD853V FURNACES, S/Ns T2DD1-15294-2, T2DD3-15795-1, T2DD1-15295-1, T2DC1-10673-51, 8" Wafer Size, H2 Annealing, Loading System, Furnace System, Gas Control System, Pressure Control System, and Burning System, Controller is CX3000, Clean Unit 200V/10A 4 – TOKYO ELECTRON MODEL ALPHA-808SDN (8S) FURNACES, S/Ns 300009665157, 300009675159, 300009675226, 300009675227 (All 1996), Furnace Unit, Pump, Utility Box, Valve Box, Heater Chamber, O2 Analyzer 5 – TOKYO ELECTRON TOHOKU LTD. MODEL ALPHA808SC (8S) FURNACES, S/Ns 300009685224, 300009685225, 300009685151, 300009685150, 300009775407 (To 1997), Furnace Unit, Pump, Utility Box, Valve Box, Heater Chamber, O2 Analyzer 1 – TOKYO ELECTRON MODEL ALPHA-8SE-Z FURNACE, S/N M00000175461 (2001), Software Version 3.10 R0003
200mm cleaning machines
2 – MARUWA MODEL HF1-200-3FV-1C 200MM CLEANING MACHINES, S/Ns 96E-55004, 96E-55004B (1996) 2 – MARUWA MODEL PCS-1700 200MM CLEANING MACHINES, S/Ns 96E-55008A, 96E-55008B (Both 1996), Clean System and Quartz Tube/Plate System 1 – MARUWA MODEL PCS-2100S-OC 200MM CLEANING MACHINE, S/N 96E-55009 (1996), Clean System and DIW System 4 – MARUWA MODEL AQW-200-1FV-0C WET TUBE CLEANING MACHINE, S/N 96E-55006-D, 96E-55006A-C, 96E-55006B, 96E-55006-C (All 1996)
Partial Listing Only, Please Visit Our Website
www.hilcoind.com For Complete Lot Catalog
For more information, please visit us on the web at www.hilcoind.com
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200MM ION IMPLANTERS, STEPPER SYSTEMS & MISCELLANEOUS TOOLS miscellaneous 200mm Tools
3 – CANON MODEL ANELVA L-1060 SVII PLUS-1 SPUTTERING SYSTEMS, S/N EVP-29986, EVP-29987, EVP-29989 (All 1996), Main Unit, UPS, (2) Edwards Pumps Model iQdP80 (3) Cryo Compressors Model CRC 874, Power Rack, Operation Rack 4 – NOVELLUS MODEL PEP IRIDIA 200MM ASHER MACHINES, S/Ns M860880, M86130, M86131, M860770 (To 2002), 208VAC, 50 Hz, 50A, 3 Phase, Yaskawa XU-RCM4700 Rev.3 Robot, Yaskawa XU-CM4700 Robot, (2) Edwards iQDP80 Vacuum Pump Systems and (2) Edwards QMB500 Vacuum Pump Systems 3 – TOKYO ELECTRON KYUSYU LTD MODEL CLEAN TRACK ACT 8 KRF DEVELOPER AND COATERS, S/Ns MD-9290744, MD-9280243, MD-9290678 (To 1999), Software Version 1.18.003 2 – TOKYO ELECTRON MODEL CLEAN TRACK MARK 8 ILINE DEVELOPER AND COATERS, S/Ns MD-826803, MD-8271210 (To 1997), Software Version MK80723 2 – TOKYO ELECTRON MODEL MB2-730 CVD SYSTEMS, S/Ns MCJ-116, MCJ-132 (Both 1997), MB2 Main System, (5) Ebara Dry Pumps, Power Rack, Power Distribution, Chiller, (2) User Interface Racks 4 – WATKINS-JOHNSON MODEL WJ-1000 APCVD SYSTEMS, S/Ns 5712, 5818, 5753, 5761 (To 2000) 1 – MODEL PEAV900E METAL EVAPORATOR (2012), Main Unit, Edwards Pump Model IQDP80, Helix Technology Cryo Compressor Model CTI9600, Telemark Power Supply Unit Model TT-10, Cheng Ten Electric Transformer Model Dry Type, Telemark Desposition Controller Model MDC360 1 – RUDOLPH INSTRUMENTS MODEL F3/D FOCUS ELLIPSOMETER MACHINE, S/N 10740 (1996), 2D/3D Mapping, Laser: 6328A Wavelength HeNe Laser with Rotating Compensator Measure Method, Software Operating System OS2 4 – MARUWA 200MM DRYERS, Model QSR-1500S-4V-1C S/Ns 96E-55007A, 96E-55007B, Model QSR-2000W-2C S/N 96E-55005A, 96E-55005B (All 1996) 2 – NEC MODEL SL473 200MM WAFER LASER MARKING MACHINES, S/N 0044 (2003), with C4000 Double Arm Axis, Touch Screen Controller; S/N 0531 (1999), with C4000 Rorze Robot 1 – NIKON MODEL 9VA STAGE SYSTEM, 9'VA
200mm ion implanTer sysTems
4 – VARIAN MODEL E220 ION IMPLANTER SYSTEMS, S/Ns 37326, ES193554, 37338, ES193614 (To 2000) 2 – SEN MODEL NV-GSD-HE HIGH ENERGY ION IMPLANTERS, S/Ns SS9H6600, S96H3500 (To 1999), Wafer Size: 8", Injector Module, Disk Module, Source Module, End Station Module, Linac Module, Facility, FEM Module, Q Lens Power Supply, (3) Dry Pumps, Cryo Compressor, Main Chiller, Cryo Pump Exchange Tool, Control Console, Source Isolation Transformer 3 – SEN MODEL NV-GSD III-LE HIGH CURRENT ION IMPLANTERS, S/Ns SS9B4900, SS9D9400, SS9B3600 (All 1999), Wafer Size 8", Beam Module, Disk Module, Source Module, End Station Module, D.I. Water Unit, (2) Dry Pumps, Cryo Compressor, Main Chiller, Plasma Shower Control Unit, Isolation Transformer, Load Lock Controller, AMU Controller
200mm sTepper sysTems
2 – NIKON MODEL 4425I 200MM STEPPER SYSTEMS, S/Ns 1107078, 1107098 (Both 1996), (x2.5), 2.5:1 Reduction, Reticle Size 6", with Software Computer Type Vax Station 4000 96, Dual Chamber Type S11, Chamber Temp 23 5 – NIKON MODEL NSR-2205EX14C 200MM STEPPERS, S/Ns 7573012, 7573104, 7573092, 7573023, 7277008 (To 1999), 6" Reticle Size, Field Size 22 x 22mm, Reduction 5:1, Wafer Size 8", 208V, 3 Phase, 50Hz, Computer Type DMCC, Laser Type: Cymer ELS5400, Exposure Wavelength: KRF 248.4nm 3 – NIKON MODEL NSR2205: 14E2 200MM STEPPERS, S/Ns 1409124, 1409133, 1409136 (To 1996), Step and Repeat System, Resolution 0.35um, 6" Reticle Size, 200mm Wafer Size, 1/5 Reduction, 22 x 22mm Step Pitch 1 – NIKON MODEL NSR2205EX12B 200MM STEPPER, S/N 7270029 (1997), 6" Reticle Size, Field Size 22 x 22mm, Reduction 5:1, Wafer Size 8", 208V, 3 Phase, 50Hz, Computer Type Vax Station 4000 96, Laser Type: Cymer ELS5400, Exposure Wavelength: KRF 248.4nm, with Projection and Illumination Optical System, and with Dual NEMA Box Type Chamber Model EXA-4
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To schedule an auction, please call Hilco Industrial at 1-877-37-HILCO (44526)
ATE • TEST & MEASUREMENT • WAFER INSPECTION & HANDLERS auTomaTed TesT equipmenT (aTe)
3 – LTX FUSION MX TESTERS, MODELS MX-40 AND MX-20 1 – TERADYNE MODEL EAGLE ETS600 ETS TEST SYSTEM 5 – TERADYNE MODEL ULTRAFLEX SEMICONDUCTOR TEST SYSTEMS 13 – TERADYNE TESTERS: (2) GEN 3 RF, (5) VHFAC, (5) GEN 4, (1) GEN 5 1 – 1 TOKYO ELECTRONICS MODEL ESPIER-1000 CDM TESTER 1 – 1 TOKYO ELECTRONICS MODEL 8612 LATCH UP TESTER, S/N 1014 (1994), 8612-2 ESD Pulse Generator
TesT and measuremenT
1 – YOKOGAWA MODEL 3087-21 TEMPERATURE RECORDER, S/N 45RA1073 (1985) 2 – TEKTRONIX 350MHZ OSCILLOSCOPES, Model 2465A, S/N 302789 (1987), Model TDS644A, S/N B010688 1 – KEYENCE MODEL IT2-50 IR METER, S/N M521188 (1996) 2 – AGILENT MODEL 4145B SEMICONDUCTOR PARAMETER ANALYZERS, S/Ns 2830J01697, 2830J01517 (To 1989) 1 – KUWANO MODEL DV-810 DIGITAL MULTIMETER, S/N 4A38 (1985) 1 – HEWLETT PACKARD / AGILENT MODEL HP4062UX SEMICONDUCTOR PARAMETER IC TESTER ANALYZER, S/N 2848J00656 (1996) 1 – ADVANTEST MODEL TR6120A PROGRAMMABLE DC STANDARD POWER DISTRIBUTION UNIT, S/N 92840113 (1990), 1-1000V, 1-100mA 1 – ADVANTEST MODEL TR6878 DIGITAL MULTI METER, S/N 93830049 (1990) 1 – AGILENT MODEL 4145A SEMICONDUCTOR PARAMETER ANALYZER, S/N 2422J01882 1 – HEWLETT PACKARD / AGILENT MODEL 16500A LOGIC ANALYZER, S/N 2650J00576 (1988) 2 – WAVETEK MODEL 859 PULSE GENERATORS, S/Ns BJ93114572, BG92030702 (To 1998) 1 – SONY MODEL LT100 DIGITAL GAUGING MULTI AXIS UNIT, S/N 100179 1 – PROSTAT MODEL PSK-310 ESD SYSTEM 1 – KLA-TENCOR MODEL FLX-5200 AUTOMATED THIN FILMS MEASUREMENT SYSTEM, S/N 4189 (1992)
WaFer inspecTion and handlers
1 – JEOL MODEL JDLM-6601E DIGITAL SCANNING LASER MICROSCOPE, S/N LS160009-1 (1999), Mainframe, Monitor, System Controller Kit with Table 1 – HITACHI MODEL S-8820 SCANNING ELECTRON MICROSCOPE, S/N 8338-08 (1996), Main Body, (2) Dry Pumps, Control Unit, Power Supply Unit 1 – KLA-TENCOR MODEL EV-300 200MM SCANNING ELECTRON MICROSCOPE, S/N eV37IQC823021 (2002), Main Unit, Power Rack, Console, (2) Pumps, Power Supply 1 – OLYMPUS MODEL BH2-UMA OPTICAL INSPECTION MICROSCOPE, S/N 31471 (1988), with Nikon NEO SPlan Objectives: 10x, 20x, 50x, 100x and (1) Nikon Neo DPlan 150x Objective Scope, Olympus TGH Power Supply Transformer 2 – OLYMPUS MODEL AL-2100 200MM WAFER INSPECTION SYSTEMS, S/Ns 310002, 106045 (To 2003), with Sony CCD Camera, Ranges: 1.5x, 2.10x, 3.20x, 4.50x, 5.10x all BD Type 1 – HITACHI MODEL IS-2500 ASSET WAFER INSPECTION SYSTEM INSPECTION MACHINE, S/N 972326 2 – KLA-TENCOR MODEL 5200XP 200MM WAFER INSPECTION SYSTEMS, S/Ns 2202, 2092 (To 1999) 1 – KLA-TENCOR MODEL VIPER KLA2410 200MM AUTOMATED MACRO-DEFECT WAFER INSPECTION SYSTEM, S/N V24010774 (2000) 1 – RUDOLPH INSTRUMENTS MODEL F3/D FOCUS ELLIPSOMETER MACHINE, S/N 10745 (1996), 2D/3D Mapping, Laser: 6328A Wavelength HeNe Laser with Rotating Compensator Measure Method 5 – ASYST MODEL DP4200SI AUTO HANDLER LOADERS, S/Ns 1001191A10-046, 1001191A10-048, 1001191A10-047, 1001191A10-049, 1001191A10-045 (All 2000), O/C Protect, Miezoh OCR Reader, 8" Open Cassette x 4 Load Port, PRI – Robot Maker 1 – TECHNOS CO. LTD. MODEL SMAT200 X-RAY MICROANALYZER, S/N 132R-048 (2000) 1 – SUMITOMO PRECISION MODEL KC-200A CARRIER CLEANER, S/N 00005328-000 (1999), NEC PC Model PC9821xb10/JB, Monitor, PC Rack 1 – TOKYO SEIMITSU MODEL A-PM-90A HP3 FULL AUTO PROBER SYSTEM, S/N F01006BL (1996) 2 – FUJITSU MODEL MITR-2K CARRIER EXCHANGER UNITS, S/Ns 9608004, 9608002 (Both 1999) 5 – FUJITSU MODEL EITR CARRIER EXCHANGER UNITS, S/Ns 8008-100, 047s-050, N/A (To 2001) 1 – METRICON MODEL PC-2010 PRISM COUPLER, S/N 22270 (1996) 1 – CANON MODEL AWEX-258W (441) WAFER REVERSER UNIT, S/N 90-199048 (2002) 1 – KLA-TENCOR MODEL P-20H LONG SCAN PROFILER, S/N 7960188 (1996) 1 – KLA-TENCOR MODEL SFS-6420 SURFACE PARTICLE COUNTER, S/N 0696-295 (1996)
For more information, please visit us on the web at www.hilcoind.com
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MISCELLANEOUS SUPPORT EQUIPMENT miscellaneous supporT equipmenT
5 – APPLIED MATERIALS MODEL MIRRA3400-AS2000 200MM WAFER POLISHERS, S/N 401805, 401804, 404140, 404294, N/A (All 2003), Main Unit Model Mirra3400, Main Unit Model AS2000, FABS, LTA, FABS PDU Rack, System Controller, Back-Side Rack, Cassette Tank, Soft Supply Unit, DHF Supply Unit, DIW Booster 1 – APPLIED MATERIALS MODEL MIRRA3400 200MM POLISHER, S/N L447 (1999), Main Unit, System Controller, DIW Booster, (2) Monitor Racks, Cassette Tank, Induction Motor, UPS Module 3 – DNS ELECTRONICS MODEL AS2000 200MM STANDALONE POST CMP CLEANERS, S/Ns 59530-5177, 57530-5058, 59530-5176 (To 1999), Main Body, Underwater Loader Unit, Unloader Unit, Master Controller, Drain Pan with Leak Sensor 3 – DNS ELECTRONICS 200MM WAFER CLEANING MACHINES, Model FC 821-L S/Ns 60630-2689, 59630-2615 Model WS-820L 200MM S/N 59520-2775 (To 2001) 1 – BUEHLER MODEL ECOMET6 GRINDER POLISHER, S/N 513-E6G-318 (1995) 1 – LOGITECH MODEL 1PM52 LAPPING AND POLISHING MACHINE, S/N 60-07-99 (1999), Digital Display Controller 1 – ESPEC MODEL TPC-412M PRESSURE – TEMPERATURE AND HUMIDITY CHAMBER SYSTEM, S/N 40042 (1991), Balanced Press – Temperature and Humidity Control, 50/60 Hz, Temp Range 105 – 162.2° C, 75 – 100% RH, 4.0kg, Inside Dimensions 29.5 XL 30 cm 1 – ESPEC MODEL SH-240 TEMPERATURE AND HUMIDITY CHAMBER HUMIDIFIER, S/N 91002529 (1995), Balanced Temperature and Humidity Control, AC 100V, 50/60 Hz, Max. 15A, Temp Range 40 – 130° C, 30 – 95% RH, Heater 0.5kw, Humidity Heater 0.4 kw, Refrigerator 0.35kw 4.0kg, Inside Dimensions W 30 X H 30 X D 24 cm, Outside Dimensions W 44 X H 89 X D 74cm, Weight 80kg 2 – ESPEC MODEL STH-120 FORCED CIRCULATION & VENTILATION SYSTEMS, S/Ns 80001273, 80001274 (Both 1995), Balanced Temperature and Humidity Control, Temp Range 20 – 300° C, Heater, Inside Dimensions W 36 X H 24 X D 33 cm, Outside Dimensions W 48 X H 43.5 X D 64cm 2 – HITACHI LASER DUST MONITORS, Model TS 6500 S/N 969180 (1996), Model TS 1500 S/N 846875, Main Body 460 (W) x 735 (D) x 220 (H) 1 – PLASTIC MOLD PACKAGE DEVICE DECAPSULATOR, Model PA102, S/N 89110112 (1990) 1 – DALTON MODEL 490 DRYER, S/N 1311-6-0035-4 (1999), Type: DOC, Efficiency: 70-200° C, Cycles: 50, 200V 2 – THE FUJITA CORP. EM BOARD LACK UNITS 1 – THE FUJITA CORP. EM TESTER, S/N 934-06-020 (1989) 1 – MISONIX MODEL FE-WS6 DOWN FLOW WORK STATION, S/N WS03361104 (2005), Approximately 4'W 1 – UENO MODEL 497 WET BENCH, S/N 011003-15-01 2 – OSHITARI MODEL SCOX-1500HY-S OVENS, S/Ns 920547, 930134 (To 1993) 1 – DALTON MODEL 442 DRYER, S/N 1311-6-0035-5 (1999), Type: DOC, 70-200° C, Cycles: 50 1 – KEMITRONICS MODEL E-280 UV ERASER SYSTEM, S/N 204970 (2002) 1 – TOKYO DENKI SANGYO CO. MODEL CV/CC PAE35-10 POWER SUPPLY, S/N 26010246 1 – HAKUTO MODEL 7100 LCA, S/N 907512, Tool #BSKK07
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To schedule an auction, please call Hilco Industrial at 1-877-37-HILCO (44526)
OVER 35 OFFICES THROUGHOUT NORTH, CENTRAL & SOUTH AMERICA, EUROPE, MIDDLE EAST, ASIA, AUSTRALIA
Hilco
®
Industrial
AVAILABLE IMMEDIATELY
By Order of
asset locations ni 49-2, YAcHiMAtAni YAcHiMAtA-SHi, cHiBA 289-1103 JAPAn 1108-1, HiSHidA SHiBAYAMA-MAcHi SABU-gUn, cHiBA 289-1602 JAPAn For more inFormation or inspection, please contact BRiAn Lee +1 847.313.4748
[email protected] RoBeRt LUPARdo +1 201.957.5586
[email protected] Follow Us on:
HILCO Industrial is a division of Hilco Global • Headquarters 5 Revere Drive, Ste. 206 • Northbrook, IL 60062 • All rights reserved Printed in USA • BOS2398 • IL License #444.000215 • Please visit our website at www.hilcoind.com to review our complete terms and conditions.
A Hilco Global Company Vested in Your Success
