Transcript
More Precision capaNCDT // Capacitive displacement sensors and systems
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Compact capacitive single channel measurement system
capaNCDT 6110
- Compact and robust construction - High temperature stability - Nanometre repeatability - Suitable for all conductive materials -2 4V (9 – 36V) standard power supply for industrial applications - Ideal for OEM applications - Suitable for practically all sensors
System construction The capaNCDT 6110 single channel capacitive electronics is an extremely compact and low cost controller, compatible with all Micro Epsilon capacitive sensor ranges. Designed to be robust and simple to use, it is ideally suited to integration into OEM applications and simple single channel end user requirements. With all items available from stock, the user can quickly select the most suitable sensor range and cable length to be used with the capaNCDT 6110 electronics. For higher volume applications, the capaNCDT 6110 can be used as a base specification for modification to user specific requirements. The flexible 9-36V DC power supply, enables the capaNCDT 6110 series to also be used in mobile applications. Measurement output values are selectable 0-10V or +/-5V DC and high temperature stability and resolutions are achieved. A measuring system consists of: Capacitive displacement sensor Sensor cable Controller Supply and signal output cable
Accessory: Power supply
Oscillator
9...36V Voltage conditioning
fOSC 31kHz
5-pin connector Signal
Demodulator
Preamplifier
Sensor cable
Sensor
19
Controller type
DT6110
DT6110/ECL2
Resolution static
0.01 % FSO
0.01 % FSO
Resolution dynamic
0.015 % FSO (1kHz)
0.015 % FSO (1kHz)
Bandwidth
1 kHz (-3dB)
1 kHz (-3dB)
Linearity (typ.)
±0.05% FSO
±0.05% FSO
Max. sensitivity deviation
±0.1% FSO
±0.1% FSO
Long term stability
<0.05% FSO/month
<0.05% FSO/month
Synchronous operation
no
no
Insulator measurement
no
no
Temperature stability Temperature range (operation)
Sensor Controller
200ppm
200ppm
-50 ... + 200 °C
-50 ... + 200 °C
+10 … +60°C
+10 … +60°C
Temperatur range (storage)
-10 … +75°C
-10 … +75°C
Supply
24VDC/55mA (9 ... 36V)
24VDC/55mA (9 ... 36V)
Output
0 … 10V (short-circuit-proof), optional: ±5V, 10 … 0V
0 … 10V (short-circuit-proof), optional: ±5V, 10 … 0V
Sensors
suitable for all sensors
suitable for all sensors
Sensor cable
CC cable ≤ 1m CCm cable = 1.4m CCg cable = 2m
CC cable ≤ 2m CCm cable = 2.8m CCg cable = 4m
FSO = Full Scale Output
12
5.5
76
Mounting holes for M4 screws
1
9.
12
Ø
16.5
24
6
26.5
53
5.5
8.3
Accessories
20
Sensor cable Description Temperature stability Outer diameter
capaNCDT
Cable CCx,x / CCx,x/90
Cable CCmx,x / CCmx,x/90
Cable CCgx,x / CCgx,x/90
Low-outgassing cable up to 4m length, for applications in clean rooms
Low-outgassing cable up to 4.2m length, for applications in clean rooms, UHV and EUV
Robust cable up to 8m length, for industrial applications
-100°C to +200°C
-100°C to +200°C
-20°C to +80°C (permanent) -20°C to +100°C (10,000 h)
3.1mm ±0.1mm
2.1mm ±0.1mm
3.1mm ±0.1mm
Bending radius 3x cable diameter during installation; 7x cable diameter for movement; 12x cable diameter recommend at continous movement Connector type C/90 Sensor cable with connector type C Ø4
8
Cable with connector type B for sensors CS1 / CS1HP / CS2 / CSE2 / CS3 / CS5 / CS10
Type Standard 1m
27 CCx,xC 37
2 x straight connector CCmx,xC
• Ø3.1 ±0.1 (CC/ CCg)
1.4m Ø2.1 ±0.1 (CCm )
•
•
17.5
•
•
2m
1 x straight / 1 x 90° connector 8.6 CCgx,xC CCx,xC/90 CCmx,xC/90 CCgx,xC/90 13.7
•
•
• 16
•
•
8m
CCx,xB/90
•
•
CCmx,xB/90
CCgx,xB/90
•
•
•
•
•
•
• •
•
• •
•
•
•
• •
6m
Ø5,4 Ø6
•
•
4.2m
1 x straight / 1 x 90° connector
CCgx,xB
•
•
4m
CCmx,xB
•
•
3m
• •
•
2.8m
2 x straight connector CCx,xB
16,9
Version
13,1
Cable with connector type C for sensors CS005 / CS02 / CS05 / CSE05 / CS08 / CSE1
Ø7
Ø9.5
Ø6
Ø5.4
Standard length 1m
•
• •
• •
• •
Connector type C/90
Sensor cable with connector type C
Ø4
8.6
16,9
8
27 37
13,1
Ø7
Ø9.5
Ø6
Ø5.4
Standard length 1m
13.7 17.5
Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm )
16
Sensor cable with connector type B
Ø5,4 Ø6
Connector type B/90
Standard length 1m
27
37
30.5
20.5
Ø7
27
Ø9.5
Ø7
Ø9.5
25
37
Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm ) Ø7 Ø10
Accessories
capaNCDT
MC2.5 Micrometer for sensor calibration, range 0 - 2.5mm, Resolution 0.1µm. Suitable for sensors CS005 to CS2 MC25D Digital micrometer for sensor calibration, range 0 - 25mm, adjustable offset (zero). Suitable for all sensors. HV/B Vacuum feed through triaxial UHV/B Vacuum feed through triaxial for ultra-high vacuum cable with connector PC6200-3/4Sensor Power-/trigger cable, 4 pin, 3mtype B
6110
6200
6500
• • • •
• • • • • •
• • • •
•
• •
Connector type B/90
Standard length 1m
27 5 pin, 5m CA5 Preamplifier cable 37
• 20.5
Ø7
SC6000-1,0 Synchronization cable, 5 pin, 1m
25
Ø9.5
Ø7
Ø9.5
SCAC3/5 Signal output cable, analog, 5 pin, 3m
27
30.5
SCAC3/4 Signal output cable, (necessary for multi channel applications), 4 pin, 3m
PS2020 Power supply for DIN rail mounting; Input 230VAC (115VAC); Output 24VDC / 2.5 A; L/W/H 120x120x40mm 37 Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm ) Ø7 Ø10
•
•
21
UHV/B Vacuum feed triax weldable (Art.-no. 0323346)
HV/B Vacuum feed through (Art.-no. 0323050)
25
2
-9
-1
UHV/B Vacuum feed triax screwable (Art.-no. 0323370)
ø13.50h6
ø9.4
ø13.50h6 Max. leak rate 1x10e-9 mbar · l s-1, compatible withWS11 connector type B Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B
1.75
ø9.4
WS11
ø9.4
Weld seam
25
ø9.4
Weld seam
1.75
25
M9x0.5 M9x0.5
ø34 (flange ø34standard (flange standard CF16) CF16)
6
-1
25
25
UHV/B Vacuum 13.5 feed triax with flange CF16 (Art.-no. 0323349) 13.5
ø9.4
1.75
Max. leak rate 1x10e mbar · l s , compatible with connector type B UHV/B Vacuum feed triax screwable (Art.-no. 0323370)
Max. leak rate 1x10e feed mbar · triax l s , compatible with connector type B UHV/B Vacuum with flange CF16 (Art.-no. 0323349)
6
WS11
Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B ø13.50h6 WS11
-7 Max. leak rate 1x10e mbar · l s-1, compatible with connector type B max. 17
-7
ø9.4
9 9
ø13.50h6
25
1.75
Ø14
Ø8.8 Ø8.8
max. 17
2
Ø14
WS12 WS12
34
M10x0.75
M9x0.5 M9x0.5
UHV/B Vacuum feed triax weldable (Art.-no. 0323346)
M10x0.75 HV/B Vacuum feed through (Art.-no. 0323050)
M9x0.5 M9x0.5
34
Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B
SCA3/5 Signal output cable (Art.-no. 2902112)
SCA3/4 Signal output cable (Art.-no. 2902104) Cable length ±1%
approx. 35.6
Ø8.9 Ø7
10 approx. 35.6 100
43.5
Cable length ±1% 100
CA5 Preamplifier cable (Art.-no. 2903180)
SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Cable length ±1%
Cable length ±1%
11
CA5 Preamplifier cable (Art.-no. 2903180)
Cable length ±1%
10 Ø7
approx. 35.6 10 approx. 35.6
Ø8.9
Ø7 Ø7
Ø8.9
approx. 35.6
CA5 Preamplifier cable (Art.-no. 2903180) approx. 35.6
Cable length ±1%
10 approx. 35.6 Ø7
Ø4.9 ±0.25 Ø4.9 ±0.25 Ø4.9 ±0.25
Ø7
Ø8.9
SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Cable length ±1% 10
Ø8.9
Ø7
Ø8.9
Cable length ±1% 10
Ø4.3 ±0.25 Ø4.3 ±0.25
43.5
100
43.5 SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Ø8.9
150
10 approx. 35.6
Ø4.3 ±0.25
11
Ø5.5 ±0.3 Ø5.5 ±0.3
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881)
Ø5.5 ±0.3
Ø11.5
Ø9 Ø9
Ø11.5
approx. 35.6
150
Cable length ±1%
Cable length ±1%
11 Ø9
10
Cable length ±1%
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881)
Ø11.5
approx. 35.6
Ø4.3 ±0.25 Ø4.3 ±0.25 Ø4.3 ±0.25
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881) 10
10
50
150
Cable length ±1%
SCA3/5 Signal output cable (Art.-no. 2902112)
Ø8.9 Ø7
Ø4.3 ±0.25 Ø4.3 ±0.25
approx. 35.6
Cable length ±1%
Ø4.3 ±0.25
Ø7
approx. 35.6
50
SCA3/5 Signal output cable (Art.-no. 2902112)
Ø8.9 Ø7
Ø7 10
10 Ø8.9
Cable length ±1%
50
Cable length ±1%
SCA3/4 Signal output cable (Art.-no. 2902104) Ø7
Ø8.9
Ø8.9
SCA3/4 Signal output cable (Art.-no. 2902104)
Modifications reserved / Y9761319-F021025GKE
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[email protected] ∙ www.micro-epsilon.com
Micro-Epsilon UK Ltd. No.1 Shorelines Building · Shore Road · Birkenhead · CH41 1AU Phone +44 (0) 151 355 6070 · Fax +44 (0) 151 355 6075
[email protected] · www.micro-epsilon.co.uk
