Transcript
ERX SERIES
5.5 to 10kV, 3.3 to 15kW Industrial E-Beam Power Supplies DESCRIPTION UNIPOWER’s High Voltage Division ERX Series E-Beam power supplies are switchmode units incorporating the latest in high frequency, high power switching technology. Each power level of this 5.5 to 10kV family of power supplies is neatly packaged in a single rack-mountable chassis with approximate dimensions of 10½”H x 19”W (max) x 22” Deep. These robust power supplies were designed with modularity for ease of field maintenance.
2006/95/EC
Operation of the power supplies can be accomplished locally via the front panel controls or remotely via a rear panel mounted control connector. Three additional jacks STANDARD MODELS are provided for interface to external source MODEL OUTPUT OUTPUT OUTPUT POLARITY modules. Certain commands or signal are VOLTAGE CURRENT POWER operative in both modes. For example, the ERX-5.5-600N-STD 5.5kV 600mA 3.3kW Negative local HV OFF/RESET push-button switch is ERX-10-600N-STD 10kV 600mA 6kW Negative operative in both local and remote modes. ERX-10-1000N-STD
10kV
1000mA
10kW
10kV 1500mA 15kW Management options are designed with the ERX-10-1500N-STD challenges of Thin Film Deposition in minds. These power supplies can be configured for FEATURES rapid arc detection with typical shutdown in <25us. Arc quenching mode with recovery IGBT Switching Technology time as fast as 5ms, or arc counting where Integrated Filament Regulation excessive arcing results in latched fault to Emission Current Regulation allow the HVPS to ride through expected Arc Management process arcs, but maintain the ability to react Air Insulated High Voltage Section to unexpected transient conditions. Low Stored Energy Air Cooled Chassis Any of the models can be customized to suite Light Weight an end user’s unique specifications. Typical Instrumented Front Panel options include customized control panels, Remote Controlled Operation filament power supplies, 1 or 2 gun filament modules, specialized metering, bias supplies and auxiliary gun conversion kits.
ONE-YEAR WARRANTY SAFETY COMPLIANCE
UL 601010/ EN601010
Negative Negative
Contact UNIPOWER to discuss your application and define the right part number for your specific need.
www.unipowerco.com NORTH AMERICA CALL: +1-954-346-2442 • EUROPE CALL: +44 (0)1903 768200
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SPECIFICATIONS
Typical at Nominal Line, Full Load and 25°C Unless Otherwise Noted.
BASE MODEL Output (HV)
ERX-5.5-600N
ERX-10-600N
ERX-10-1000N
1000mA
1500mA
10kW
15kW
DC Output Voltage
0-5.5kV
Output Current
600mA
600mA
Max. Output Power
3.3kW
6kW
ERX-10-1500N
0-10kV
Polarity
Negative
Ripple(rms)
<0.05% (50V)
Regulation
±0.1% (±10V)
Regulation
±0.1% (±10V)
Output (Filament) Output Voltage
0.7V rms
Output Current
0-35A rms
Frequency
33kHz ±10%
Duty
not available
Continuous
Regulator
±3% Filament Current ±1% Emission Current
Ripple/Noise (pk-pk)
<1%
Input Voltage Range
230VAC (+10/-15%)
Current
20A
Phases
1
208VAC (±10%) 22A
37A
56A
3
Line Frequency
47-63Hz
User Interface High Voltage Output
Coaxial Cable with Shielded Ground
Remote Control
25-pin D Type
External Source
3 x 9-pin D Type
Mains AC Input
Main power - power cable, phase orientation not critical
Mechanical / Environmental Dimensions w x h x d inches (mm) Weight
19 x 10.5 x 22 (483 x 267 x 559) 50lbs / 18.7kg
Operating Temp.
55lbs / 20.5kg
65lbs / 24.3kg
0°C to +40°C
Storage Temp.
-20°C to +85°C
Altitude
7500ft (2286m)
Humidity
5 to 95% RH non-condensing
Polution Degree
IEC884 - indoor use
Safety
UL/IEC/EN61010-1
Contact UNIPOWER to discuss your application and define the right part number for your specific need. UNIPOWER NORTH AMERICA • 3900 Coral Ridge Drive, Coral Springs, Florida 33065, USA • Tel: +1-954-346-2442 • Fax: +1-954-340-7901 •
[email protected] UNIPOWER EUROPE • Parkland Business Centre, Chartwell Road, Lancing, BN15 8UE, ENGLAND • Tel: +44(0)1903 768200 •
[email protected]
ERX SERIES E-BEAM POWER SUPPLIES - 3
CONTROL INTERFACE
Typical at Nominal Line, Full Load and 25°C Unless Otherwise Noted.
BASE MODEL ERX-5.5-600N Front Panel Controls (Local) Mains Circuit Breaker
ERX-10-600N
ERX-10-1000N
single pole
ERX-10-1500N
three-pole
HV - ON
Push Button - White
HV - OFF
Push Button - Green
Local Filament ON
Push Button - White
Voltage Set Emission Current Set
not available Potentiometer
Potentiometer - 10 turns
not available
Meters & Indicators (Local) Voltage (3.5 digit LCD)
10.0kV
Current (3.5 digit LCD)
600mA
1000mA
Power On
YES
Remote Mode
YES
Interlock Open
YES
Arc
YES
Over-current
YES
Fault
YES
Ready for High Voltage
YES
High Voltage On
YES
1500mA
25-pin D Type Connector (Remote) Outputs 24V DC Fused Output
YES
HV – On Response
YES
Fault Response
YES
kV Monitor
0-10V = 1-5KV
mA Monitor
0-6V = 0-600mA
Filament Current Monitor
0-10V = 1-10kV 0-10V = 0-600mA
0-10V = 0-1000mA
0-10V = 0-5kV
0-10V = 0-1500mA
not available
Inputs 24V Remote Command
YES
24V on Command Filament ON/OFF Command
YES (24V DC = ON)
not available
9-pin D Type Connector (sources A, B & C) Interlock
on 25-pin D
YES - Contact Closure Required
HV “ON” Response
on 25-pin D
YES
BNC Jack Remote Emission Current Reference
YES
not available
Contact UNIPOWER to discuss your application and define the right part number for your specific need. UNIPOWER NORTH AMERICA • 3900 Coral Ridge Drive, Coral Springs, Florida 33065, USA • Tel: +1-954-346-2442 • Fax: +1-954-340-7901 •
[email protected] UNIPOWER EUROPE • Parkland Business Centre, Chartwell Road, Lancing, BN15 8UE, ENGLAND • Tel: +44(0)1903 768200 •
[email protected]
ERX SERIES E-BEAM POWER SUPPLIES - 4
MECHANICAL EXAMPLE - 6kW ERX
Contact UNIPOWER to discuss your application and define the right part number for your specific need. UNIPOWER NORTH AMERICA • 3900 Coral Ridge Drive, Coral Springs, Florida 33065, USA • Tel: +1-954-346-2442 • Fax: +1-954-340-7901 •
[email protected] UNIPOWER EUROPE • Parkland Business Centre, Chartwell Road, Lancing, BN15 8UE, ENGLAND • Tel: +44(0)1903 768200 •
[email protected]
Contact UNIPOWER to discuss your application and define the right part number for your specific need. © 2015 UNIPOWER LLC
This document is believed to be correct at time of publication and Unipower LLC accepts no responsibility for consequences from printing errors or inaccuracies. All specifications subject to change without notice.
UNIPOWER NORTH AMERICA • 3900 Coral Ridge Drive, Coral Springs, Florida 33065, USA • Tel: +1-954-346-2442 • Fax: +1-954-340-7901 •
[email protected] UNIPOWER EUROPE • Parkland Business Centre, Chartwell Road, Lancing, BN15 8UE, ENGLAND • Tel: +44(0)1903 768200 •
[email protected]
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ERX SERIES E-BEAM POWER SUPPLIES - 5
