Transcript
CENTER FOR MICROANALYSIS OF MATERIALS LASER AND SPECTROSCOPY FACILITY
Gaertner ellipsometer model L116C Operation instructions MAKE SURE YOU SIGNED UP FOR TIME ON THE ON-LINE SCHEDULE FOR THIS INSTRUMENT BEFORE USING IT.
LOG YOUR USAGE IN THE LOGBOOK.
1) Check the laser shutter to make sure it’s closed (Figure 3). 2) Turn the key switch on the head of the ellipsometer (Figure 1). 3) Make sure the mode switch is in the AS (auto-setting) position (Figure 2). 4) Set the polarizer to 45º (Figure 3). 5) If needed adjust the arms of the ellipsometer to the desired incidence angle releasing the set screw (black) and pulling back the knob (silver) on the back of each arm (Figure 4). Lock the arm back in position by tightening the set screw. SUPPORT THE ARM WITH YOUR FREE HAND WHEN CHANGING ANGLES. Make sure to enter the correct incidence angle on the measurement panel form of the program, when taking data (Figure 9). 6) Place sample centered on the sample table (Figure 5). 7) Looking in the microscope, align the centers of both cross hairs, using the tilt adjustment knobs under the sample table (Figure 6). If only one cross hair is visible, switch the knob on the side of the microscope (Figure 7). If it is still not
visible, or if it is faint or blurred, adjust the height of the sample table turning the height adjustment knob until the second cross hair becomes visible (Figure 6). 8) Open the laser shutter. 9) Maximize the intensity of laser beam on the detector using the height adjustment knob (Figure 6). If the intensity is too low or too high to allow maximizing, turn the analyzer (Figure 8) a few degrees to bring signal close to 60% and then maximize it using the height adjustment knob. 10) Flip the mode switch (Figure 2) to A (auto measure). 11) Start the program GEMP on the computer. If you have doubts on how to use the program, its manual is next to the ellipsometer in a green binder (Figure 9). If your doubt persists, contact a staff member for help. The following steps are meant only to refresh your memory as to the most used features of the program, for a more complete overview of its capabilities refer to the manual. a. When the program starts, click the continue button on the next two screens it shows. b. To make a measurement, click on the measurement and calculation button. Feed the known parameters and the first guesses on the measurement panel form, and click the appropriate action button. c. Remember to set the correct Angle of Incidence to match the ellipsometer arms position. 12) To measure the next sample, or a different spot of the same sample, close the laser shutter (Figure 3), change or adjust the sample, and proceed from 7) above. 13) After you finish using the instrument: a. Close the laser shutter. b. Toggle the mode switch to AS position (Figure 2). c. Save your data to the disk. d. Turn off the key switch on the side of the instrument. e. Close the GEMP program. f. Remove your samples and cover the instrument with the plastic cover.
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