Gas Mass Flowmeters Micro Flow(μf) Selection Guide

Transcript

CP-PC-1333E Gas Mass Flowmeters Micro Flow (μF) Selection Guide Presenting the world's most advanced mass flow measurement devices, for use in applications from the gas supply source Please read the "Terms and Conditions" from the following URL before ordering or use: http://www.azbil.com/products/bi/order.html Other product names, model numbers and company names may be trademarks of the respective company. [Notice] Specifications are subject to change without notice. No part of this publication may be reproduced or duplicated without the prior written permission of Azbil Corporation. Yamatake Corporation changed its name to Azbil Corporation on April 1, 2012. 1-12-2 Kawana, Fujisawa Kanagawa 251-8522 Japan URL: http://www.azbil.com 10th Edition: Issued in Nov. 2014-SK/AZ (11) CP-PC-1333E to the end of the pipe. INTRODUCING MASS FLOWMETERS Th e rma l g a s ma s s fl o w me a s u re me n t u s i n g a ME MS ( mi c ro e l e c t ro me c h a n i c a l s ys t e ms ) fl o w s e n s o r h e l p s u s e rs i mp ro ve q u a l i t y a n d s a ve e n e rg y. 300:1 2,000,000 Proven reliability in 2,000,000 actual applications units installed Note: Features of the μF sensor are described below. Functions differ by model. Sensor structure 1.7 mm Diaphragm Rr A Ru Rh A’ ・Ultra-miniature structure Rd ・High resolution (1 mm/s) Silicon chip ・High speed response, unaffected by changes Silicon chip Heater (Rh) Section A−A’ 0.5mm in pressure and temperature Measurement principle Temperature profile When there is no gas flow, the temperature distribution around the heater is symmetric. When gas starts to flow, the temperature upstream of the heater begins to decrease, while the temperature downstream increases, causing a distortion of the symmetric temperature distribution. This temperature difference causes a difference in resistance in a temperature sensor (a thin platinum film), and is used to calculate the mass flow rate (flow rate x density). Temperature profile FLOW No gas flow When gas is flowing Examples of product structure CMS series section drawing CML series section drawing CMG series section drawing Proportioning valve Bypass capillary Converter unit Detector unit Orifice plate Fluid outlet Flow direction [Micro Flow sensor] 1 Energy-saving management for compressed air and nitrogen gas CMG series Unit consumption management for burner air-fuel ratio MVF series Energy conservation management CMF series Metered distribution and management of medical gases CML series Unit consumption managementand metered distribution of city gas and industrial gases CMP series Metered distribution of city gas MCS series Chip pickup detection OUT IN Built-in filter Wire mesh (honeycomb) [Micro Flow sensor] Wire mesh for flow rectification [Micro Flow sensor] ・Sensor is located on the pipe wall. ・No need for a straight pipe section with low pressure loss (models with built-in flow rectifier) ・Wide measurement range Points to keep in mind 1 4 1 2 1 4 1 2 1 1 12 2 1 2 2 2 3 4 6 2 3 4 6 1 8 Laughing gas Helium Hydrogen Butane Propane 4 m 3/h to 150 m 3/h 12 1 2 Methane 200 L/min to 12000 L/min 1 6 City gas 0.5 L/min to 2000 L/min 1 2 2 3 4 Argon (B) Carbon dioxide Flow rate range Oxygen Pipe size 2302 m 3/h to 16839 m 3/h 200 L/min to 160 m 3/h 160 m 3/h to 1600 m 3/h 160 m 3/h to 1600 m 3/h −0.5 to ＋0.5 L/min 0 to 0.5 L/min −3 to ＋3 L/min 0 to 3 L/min Mass flow controller / Gas flow rate control MPC series Replacement of float type flowmeter (purgemeter) Auxiliary devices MQV series Tooling burner air-fuel ratio control, and fuel battery evaluation equipment 1 8 1 4 1 2 0.5 L/min to 20 L/min 0.2 L/min to 1000 L/min MQV series section drawing [Micro Flow sensor] chip Restriction Advantages Industrial gas management by department; experimentation and research MCF series (1.7 mm square x 0.5 mm thick) Cavity Ambient temperature sensor (Rr) Wire mesh for flow rectification Space Major applications FLO W Downstream temperature sensor (Rd) Upstream temperature sensor (Ru) Diaphragm Fluid inlet Appearance CMS series Symmetric structure measures reverse flow as well. Symmetric Wide 300:1 range Very low age deterioration High repeatability repeatability Mass flow measurement without the need to compensate for changes in temperature and pressure compensation required High speed 2ms response Model No. Nitrogen Fe at ures of the M i cro F l ow s ens or Air Mass flowmeter / Gas flowmeter ・Corrosive gases cannot be measured ・Low tolerance for foreign matter deposition (filter installation required) Auxiliary devices MFF 25 series For oil mist and dust (MCF models only) to MFF 300 series For dust (not for oil mist) to FC series For dust (not for oil mist) to 1 4 2 2 6 2 6 300 L/min to 13800 L/min 160 m 3/h to 1600 m 3/h 160 m 3/h to 1600 m 3/h 2 Gas mass flow meter Ai r f l owm e t e r CMS series MCF series The ultimate compact mass flowmeter, with both high functionality and a 100:1 measurement range! SUS /SUS316 model Model Applicable gas Flow rate range: L/min (standard) Accuracy Measurement range Minimum flow rate Operating pressure Operating temperature Output Communications Power supply Pipe size / connection standard Straight pipe length Material SUS/SUS316 model Hydrogen/helium model Air/nitrogen, oxygen, argon, carbon dioxide, city gas 13A (45/46MJ), methane, propane, butane Hydrogen, helium 200/500 (air) 0.5/2/5/20/50 (air) 10/50/200 Hydrogen/helium model 500/1000/2000 ±5% RD ±3% RD 100：1 500：1 −0.07 to ＋1 MPa −10 to ＋60℃ 0--5V / 1--5V / 4--20 mA output, selectable using keys on the CMS body RS-485 (optional for SUS316, hydrogen and helium models) 12 to 24V dc Rc1/4,Swl,VCR Rc1/2,Swl,VCR Rc 1/4,Swl,VCR Rc 1/2,Swl,VCR Not required if pipe size is uniform. Gas-contacting parts: SUS304 or SUS316, fluororubber Weight Gas-contacting parts: SUS316L, fluororubber 1400 ｇ 800 ｇ MCF015 MCF025 MCF040 MCF050 MCF008 Model No. Air/nitrogen. (Note that gas must be dry, without corrosive components such as chlorine, sulfur and acid. It must also be clean, without dust or oil mist.) Gas types 0 to 3000 0 to 500 / 0 to 1000 0 to 6000 0 to 12000 0 to 200 Flow rate range［L/min (normal)］*1 ± 3% FS Measurement accuracy 50:1 Measurement range 100:1 Minimum flow rate −10 to +60 ℃ (without condensation) Temperature -25A (1B)Rc,G,NPT 40A (1 1/2B)Rc,G,NPT 50A (2B)Rc,G,NPT 15A (1/2B)Rc,G,NPT 8A (1/4B)Rc,G,NPT Pipe size Aluminum alloy Body material Denatured PPO Case material −0.07 to +1.0 MPa Operating pressure range 24V dc, 120 mA max. / Battery(Battery model) Power supply 4 to 20 mA, allowable load resistance 300 Ω max. Output signal (instantaneous flow rate) RS- 485 (Modbus, option) Communications One open collector output (rating 30V dc, 50 mA), with output type selectable from event function. Event output Selectable from pulse output for integration*2, instantaneous flow rate high/low limit alarm, integration count up/down, or alarm output. Event function IP65. (Rating is based on JIS C 0920 and IEC529. For purposes of installation indoors, device is waterproof and dustproof.) Protective structure 400 g 400 g 500 g 700 g 1100 g Mass Notes: *1. The unit L/min (normal) refers to the volumetric flow rate adjusted for 0℃, 101.325 kPa. *2. Integrated pulse output specifications (selectable by settings) ・ Pulse width: 50 ms, 250 ms, 500 ms ・ Pulse weight: Model No. Pulse weight (L/pulse) 10, 100, 1000 MCF008 1400 ｇ 800 ｇ (2000 g for 500 L type) A superb way to save energy when using compressed air or nitrogen. MCF015 (2000 g for 2000 L type) MCF025 MCF040 MCF050 Application example Detecting air leakage Wide measurement range of 100:1 allows detection of minute gas leak flows. Integrated flow-rate C management function supports unit gas consumption management. C N g it r o en , ox yge 100, 1000, 10000 100, 1000, 10000 og en liu , he m, e tc ta CE se ML rie s in uild lb u a io ns d i iv is I n d d di v an gs se MS r ie . s nts me s e ar t e p n li n d l ua c t io i v id d u Ind d pr o n a e Ss r ie s ual nts n e ivid o Ind partm ducti e d pro d an s line ori Leakage check method Substantial reduction of air leakage by determining the leakage quantity — generally said to be around 30% — and repairing the leaks. CM p Va ￥ ＄ nk m n mu ic a t io ns y nb t io t e m is i s q u n sy c /a io l a y v is is p p e r a d l su t Da ntra ce Instantaneous flow rate Line stop 1 Read the instantaneous flow rate from the flowmeter. 2 Plot the instantaneous Leakage quantity flow rate using a PC. Cost management for production line or whole department Knowing the total flow quantity and cost for an area, and budgeting by area, is sure to increase cost consciousness and enable measurement of cost reduction efforts. ze r Co 3 10, 100, 1000 Application example Industrial gas flow rate management and consumption cost allocation by department yd r n, h 10, 100, 1000 F M Cr i e s se Supply of appropriate quantities Since the air quantity used by equipment can be checked to know if it is appropriate, waste can be reduced by restricting the air supply to an appropriate quantity. 4 Mi c ro F l ow v o r t e x f l owm e t e r Gas flow monitor CMG series MVF series Flowmeters that provide optimal control of burner air/fuel ratio or unit consumption management (DC type only) Model Applicable gas Flow rate range： m3/h(normal) Air model Air City gas model City gas 13A 4/10/30/80/150 4/10/30/80/150 80/150 Propane model Propane Butane model Butane 2/4/10/25/50 1/3/8/20/40 ±4% RD Accuracy Measurement range Minimum flow rate Operating pressure Operating temperature Output Power supply Pipe size Connection type Straight pipe length Material 10：1 30:1 0 to 100 kPa 0 to 100 kPa 0 to 990 kPa −10 to ＋60℃ 1--5V/4--20mA, selectable by model number 24V dc / 100V ac / 200V ac, selectable by model number 0 to 100 kPa 40A/50A JIS10k RF 15A/25A/40A/50A Rc thread 0 to 100 kPa 15A/25A/40A/50A Rc thread 15A and 25A: not required. 40A, 50A: 10 cm to 40 cm 1 /4 B and 1B: die cast aluminum（ADC12） / B and 1B: die cast aluminum（ADC12） SCS13 1 / B and 2B: cast aluminum alloy（AC4A） 11/2 B and 2B: cast aluminum alloy（AC4A） IP54 (JIS C 0920) dustproof and splash-proof structure 9 to 10 kg 850 to 2000 ｇ 850 to 2000 ｇ 850 to 2000 ｇ 850 to 2000 ｇ 14 1 2 Protective structure Weight Applicable gas Flow rate range: m3/h (normal) at pressure of 0.5 MPa Accuracy Measurement range Minimum flow rate (at a pressure of 0.5 MPa) ±6% RD Sample applications Wide 100:1 measurement range overturns common beliefs about vortex gas flowmeters. Temperature/pressure compensation functions are integrated. Air/nitrogen, oxygen, argon, carbon dioxide, city gas 13A (45/46MJ), propane, butane, other inert gases. 1280 2826 4352 9364 Volumetric flow rate: ±2% RD. After temperature and pressure compensation: ±3.5% RD 100：1 2.3 m3/h (normal) Operating pressure Operating temperature Output Communications Power supply Pipe size Connection type Straight pipe length Material Protective structure Weight 5.2 m3/h (normal) 7.9 m3/h (normal) 17.1 m3/h (normal) 0 to 1.0 MPa −15 to ＋60℃ 4--20 mA and integrated pulse output RS-485 24V dc 2B (50A) 3B (80A) 4B (100A) 6B (150A) Wafer connection 10D (at upstream elbow) Gas contacting parts: SCS13A, SUS304 and fluororubber. Case: Aluminum alloy IP67 waterproof structure 6.3 kg 6.6 kg 9 kg 17 kg Measurement principle Energy management Flow rate monitoring for burner Through-hole R r rde o ec t l ue a An F ted log t us mb io rat ing Air nitor o e m c i v de tp ou Ind ica to ou log Vortex generator * rm Ala tor ica Air ut * a An ce na Co a An t tpu fur ion μF (Micro Flow) sensor rm Ala s ga ra teg n s/i ou ator ne c a i t d tan te in a Ins wr flo r rne Bu r ile Bo tpu ou log Sensing unit nd / ei us rat eo w tan d flo n ta e Ins grat e int r *Alarm warns of high/low flow rate. Downstream of a vortex generator situated in a gas flow, a vortex proportional to the flow velocity is generated. As shown in the figure, there is a hole in the vortex generator through which gas flows due to the action of the vortex. This flow is measured by a μF (Micro Flow) sensor capable of high-speed measurement of both direct and reverse flow. Consequently, vortex flowmeters can now achieve a 100:1 measurement range instead of the 15:1 range of the older piezoelectric vortex types. In addition, the integrated temperature and pressure sensors make the MVF indispensable for gas energy management. There is no need to install separate temperature/pressure compensation devices, contributing to total cost reduction. Measurement ranges compared (for 80A pipe size, 0.5MPa) Flow velocity 0.3m/s 29 to 2826 Yamatake's MVF0800 90 to 9000 Ultrasonic wave For leakage in low load operations 600 to 9000 Unused range in practice Vortex (piezoelectric type) 800 to 8000 Differential pressure type Flow velocity 30m/s Sample applications Burner air-fuel ratio control, city gas and industrial gas energy management 5 6 Medical gas meter H i g h- f l o w m a s s f l o wm e t e r / G a s m e t e r CMF series CML series CMP series Ideal for medical gas management and metered distribution. Conforms to JIS T 7101 medical-use pipe specifications. (CMF015 type only) CMF015 Model Applicable gas Flow rate range: L/min (standard) Accuracy Measurement range Minimum flow rate Operating pressure Operating temperature Output Communications Power supply Pipe size Connection type Straight pipe length Material Protective structure Weight CMF015 CMF050 Oxygen, nitrogen, artificial air/synthetic air, laughing gas 200 (oxygen) 500 (oxygen) 2666 (oxygen) CMF015： ±3% RD CMF050： ±2% RD 100：1 100：1 0 to 0.7 MPa −10 to ＋60℃ 160：1 800：1 0 to 1.0 MPa −25 to ＋60℃ 4--20mA and integrated pulse output RS-485 (standard) 12 to 24V dc 1/2 B (15A) 85 to 264V ac 2B (50A) JIS10K RF Not required Gas contacting parts: SUS304/SCS13A and fluororubber. Case: aluminum alloy IP65 Waterproof structure 21 kg Gas contacting parts: SUS303/316 and fluororubber. Case: polycarbonate Indoor specifications 2.7 kg 3.5 kg Application example Ad v a n t a g e 2 CML series Air/nitrogen, oxygen, argon, carbon dioxide, city gas 13A (45/46MJ), propane, butane. Model Applicable gases Flow rate range: m3/h (normal) Accuracy Measurement range Minimum flow rate Operating pressure Operating temperature Output Communications Power supply Pipe size Connection type Straight pipe length Material Protective structure Weight 160 (air) 400 (air) 650 (air) CMP series CMP series Air/nitrogen, city gas 13A (45/46MJ), city gas 12A, propane. 1600 (air) 160 (13A) 400 (13A) ±2% RD 650 (13A) 1600 (13A) ±1% RD 160:1 1280:1 320:1 0 to 1.0 MPa 0.01 to 1.0 MPa −25 to ＋60℃ 4-- 20 mA and integrated pulse output 4--20 mA and integrated pulse output RS-485 −− 85V ac to 264V ac Built-in battery 2B (50A) 3B (80A) 4B (100A) 6B (150A) 2B (50A) 3B (80A) 4B (100A) 6B (150A) 21 kg CMP series Flow rate comparison between upstream and downstream enables the detection of leakage. as rk al g etwo dic n Me very i del JIS10K RF flange Not required Gas contacting parts: SUS304/SCS13A. Case: aluminum alloy IP65 waterproof structure 29 kg 45 kg 15 kg 24 kg 24 kg 29 kg 45 to 66 kg ● Thanks to reduced size and weight, a crane is not required for installation. rotaly 183 kg → CMP 44 kg (150A) ● Optional piping layout is possible in 4 flow directions. ● Straight pipe length is not required. Application example H ard w tal i osp ng nni pla y r e live De emot g r rin by o t ni mo CML series r ot aly met er Ad v a n t ag e 1 Comparison with receipt CMF050 CMP series Medium pressure gas meter for metered distribution of city gas Monitoring of gas consumption in a hospital Consumption volume can be monitored per time (day, week or month). Flowmeters with a 1 / 1280 measurement range and high ±1% RD accuracy. Metered distribution of industrial gas 1/1280 measurement range makes an accurate integrated count possible. Powerful monitoring capabilities for unit consumption and leakage. ry cto Fa A Ad v a n t a g e 3 Installation in each hospital ward, floor and medical department enables detailed monitoring of gas consumption. ry cto Fa ed ion t ter Me tribu ter dis wme flo ine el Pip s lier pp su as B G ry cto Fa 7 C 8 C hip pick up detection mass -flow sen sor Ma s s f l o w c o n t ro l l e r MCS series MPC series 5ms ultra high-speed response. At only 9g, compact and lightweight Air/nitrogen, oxygen Applicable gas Flow rate range: L/min (standard) Accuracy Response time Operating pressure Operating temperature Output Power supply Pipe size Straight pipe length Material Weight 0 to ＋3 −3 to ＋3 −0.5 to ＋0.5 0 to ＋0.5 Flow rate control range 1s max. (setting ±2%) 300 kPa max. For detecting chip pickup, the MCS produces a larger output differential between chip and no-chip conditions than a standard pressure sensor. 0.2mm dia. nozzle, 1005 chip, output upon pickup MCS series Mass flow sensor ４.５ 1/8 Rc Not required Gas-contacting parts: brass (Ni-plated), stainless steel, Teflon, and fluororubber 300 g ple m exa ion e t a nt ac me furn tru Ins reflow for Output ［Ｖ］ Vertical movement Suction pressure: high Flow rate: high ３ The MCS produces a larger output differential than pressure sensors ２.５ ２ １.５ Standby condition When a chip has been picked up (suction supplied) Air MCS Pressure sensor ０.５ Miniature chip N2 Signal level of MCS １ Pickup nozzle ・ R e f l o w f u rn a c e ・Die bonder   e tc Structure drawing Signal level of pressure sensor ４ ３.５ Air tube 50 to 300 kPa 500 kPa −10 to ＋50℃ 0--5V dc / 1--5V dc (only models with analog input/output function), external contact input (2 points) 0--5Vdc / 1--5Vdc (only models with analog input/output function), event output (2 points) Smart Loader connection (standard), RS-485 communications (option) 24V dc Furnace chamber gas density control Installation example for miniature chip pickup detection 2 to 100% FS Sample applications MCW400 4ch type Sample applications Ej ector-e q u ip p e d pi ckup h e a d 4 to100% FS Response Operating differential pressure range Pressure resistance Operating temperature Input Output Communications Power supply Pipe size / connection standard Straight pipe length Material Weight Separate flow rate range can be set for each channel, with display and event output. 20.0 (air) ±2% FS Accuracy Supply power (DC24V) to MCS series MCW100 1ch type 0.500 (air) Flow rate range: L/min (standard) ±5% FS Multi-c h a n n e l i ndi c a t or f or MC S s er i e s MCW series Standard gas model Air/nitrogen, argon, carbon dioxide 2.00 5.00 (air) (air) Model Applicable gas 0 to ＋10 ±5% FS ±6% FS 5ms max. (95% response to a step state flow rate change) −100 to ＋200 kPa 0 to ＋50℃ 1--5V output (non-linear) 12 to 24V dc M5 female (brass insertion) Not required Gas contacting parts: PPS resin, ceramic and brass. Cover: PC (polycarbonate) 9g World's smallest (48mm square × 73.7mm deep) and lightest (300g) mass flow controller ０ ０ ０.１ ０.２ ０.３ ０.４ ０.５ ０.６ ０.７ ０.８ ０.９ １ co ity r lle ro nt l a e rat sign w g Flo ttin e s ns O2 de Time ［sec］ Sample applications for physical, chemical, and medical devices ・Air samplers ・Atmospheric air measuring devices ・Gas detectors ・Gas analyzers ・Oxygen density meters  etc. ic her r osp or ai m t o d A In air 9 ng ti llec Co be tu ・Home oxygen therapy equipment ate wr Flo ntrol co on cti se rie ate w r ion Flo dicat in p Su S MC Ga s m ix in g c o n t r o l Su c t io n flo w r a t e c o n t r o l S MC m pu s oor Ind air sor res mp Co film nyge ble Ox rmea pe e ate devic wr Flo tting se se rie s ・Gas sensor ・Gas analyzer ・ O x y g e n d e n s i ty m e te r ・ M e a s u re m e n t e q u i p m e n t l tro for sick building on c ity s y n d ro m e nt l ua tro t q con   et c. n a t d te ns Co gra 1. Inte 2. e ob d st Ga asure e m ing or ct s lle sen o C be u t ・Welding machine ・ I n c u b a to r ・ U s e f o r v a ri o u s e x p e ri m e n ts   et c. ion ct Su mp u p sB Ga sA Ga xe Mi d ga s 10 Dig it al mass f low controller MQV series The world's fastest high-speed control (300ms) also offers exceptionally high accuracy Hydrogen / Helium gas model Standard gas / Small flow rate model Model No. Standard full-scale flow rate MQV9005 5 mL/min (standard) MQV9020 20 mL/min (standard) Gas types Control Pressure Control range Response (at std. differential pressure) Accuracy (at standard temperature and differential pressure; Q is flow rate) Operating differential pressure range Max inlet pressure Operating temp. Input Output Comminucations Power supply Matl. of gas-contacting parts Connection method Weight MQV9200 200 mL/min (standard) MQV9500 0.500 L/min (standard) MQV0002 2.00 L/min (standard) MQV0005 5.00 L/min (standard) MQV0020 MQV0050（B,C） MQV0100 20.0 L/min 50.0 L/min 100.0 L/min (standard) (standard) (standard) Air/nitrogen (N2), Air/nitrogen (N2), oxygen (O2), argon (Ar), carbon dioxide (CO2), city gas 13A (LNG: 45MJ/m3), oxygen (O2), city gas 13A (LNG: 46MJ/m3), methane 100% (CH4), propane 100% (C3H8), butane 100% (C4H10). argon (Ar). The gas must be dry, without corrosive components (chlorine, sulfur, acid). carbon dioxide It must also be clean, without dust or oil mist. (CO2), 300 kPa max. Pressure 400 kPa max. Max inlet pressure Operating temp. Input Output Comminucations Power supply 1/4" Swl, 1/4" VCR Rc 1/4", 1/4" Swl, 1/4" VCR, 9/16-18 UNF Control range Response (at std. differential pressure) Accuracy (at standard temperature and differential pressure; Q is flow rate) 24V dc, current consumption 300 mA max. SUS316, Teflon, Fluolorubber 1/4" Swl, 1/4" VCR Rc 1/4", 1/4" Swl, 1/4" VCR, 9/16-18 UNF Approx. 1.1 kg Approx. 1.2 kg Weight Approx. 1.2 kg Sample applications MQV0050 （J,K） MQV0200 MQV0500 50.0L/min (standard) 200L/min (standard) 500L/min (standard) Air/nitrogen (N2), oxygen (O2), argon (Ar), carbon dioxide (CO2), city gas 13A (LNG: 45MJ/m3), city gas 13A (LNG: 46MJ/m3), methane 100% (CH4), propane 100% (C3H8), butane 100% (C4H10). The gas must be dry, without corrosive components (chlorine, sulfur, acid). It must also be clean, without dust or oil mist. 1 to 100% FS 0.7s for SP ±2% FS (typ.) (When control is started from fully closed condition, and when the setpoint is changed while control is in performed.) Gas flow rate control for vacuum Air/fuel ratio control glass-forming burner used in manufacturing of backlights, halogen lamps, etc. ・Evaporation coating ・Sputtering ・Plasma cleaning Bu rne o r N .1 (None) O2 Pressure B e urn o r N .2 V N2 Ar Air rie s Various test equipment Control of furnace internal atmosphere ・Evaluation equipment ・Gas analyzers ・Incubators ・Baking furnaces for electronics parts ・Gas carburizing furnaces ・Baking and annealing furnaces r ato ub Inc d lve so n Dis xyge er o et m O2 PHter me g rizin rbu Ca Air bon 500ms PL C ng rizi rbu ce Ca urna f O2 gas as nt g Car Time required for the controlled flow rate to reach the setpoint V ies as re su e es Pr aug g Controlled flow MQ r se lG Fue Control start Setting er mb cha se (Condition: power supply voltage = 24.0V) 0.5 MPa (gauge) −10 to ＋50℃ −10 to ＋60℃ 0-5V dc / 1-5V dc / 0-20 mA dc / 4-20 mA dc (selectable) 0-5V dc / 1-5V dc / 0-20 mA dc / 4-20 mA dc (selectable) (1) Dedicated PC loader connection (2) RS-485 communications (3-wire system) 24V dc, current consumption 400 mA max. 24V dc, current consumption 500 mA max. SUS316, Teflon, Fluolorubber Rc 1/2", 1/2" Swl, 3/8" VCR, 3/4-16 UNF Approx. 3.5 kg Flow rate characteristics graph 11 um acu 100 kPa max. QV Input Output Comminucations Power supply Matl. of gas-contacting parts Connection method Weight SUS316, Teflon, fluororubber, borosilicate glass, silicon M Operating differential pressure range Max inlet pressure Operating temp. MQV0200 200 L/min (standard) 0.5 MPa (gauge) −10 to ＋60℃ 0-5V dc / 1-5V dc / 0-20 mA dc / 4-20 mA dc (selectable) 0-5V dc / 1-5V dc / 0-20 mA dc / 4-20 mA dc (selectable) (1) Dedicated PC loader connection (2) RS-485 communications (3-wire system) Connection method Standard gas / Middle flow rate model Control MQV9500 MQV0005 MQV0010 MQV0050 50.0 L/min 0.500 L/min 5.00 L/min 10.00 L/min (standard) (standard) (standard) (standard) Hydrogen (H2), helium (He). The gas must be dry and not contain corrosive components (chlorine, sulfur, acid). It must also be clean, without dust or oil mist. 300 kPa max. Matl. of gas-contacting parts Rc 1/4", 3/8" Swl, 9/16-18 UNF MQV9050 50.0 mL/min (standard) 1 to 100% FS 500ms for SP ±2% FS (typ.) 0.3s for SP ±2% FS (typ.) (When control is started from fully closed condition, and when setting is changed while control is performed.) Control range Response (at std. differential pressure) Accuracy (at standard temperature and differential pressure; Q is flow rate) Operating differential pressure range ±2% FS (80%FS Q 100%FS) ±1% FS (0%FS Q 80%FS) 0.5 MPa (gauge) −10 to ＋60℃ 0-5V dc / 1-5V dc / 0-20 mA dc / 4-20 mA dc (selectable) 0-5V dc / 1-5V dc / 0-20 mA dc / 4-20 mA dc (selectable) (1) Dedicated PC loader connection (2) RS-485 communications (3-wire system) 24Vdc, current consumption 300mA max. SUS316, Teflon, fluororubber, SUS316, Teflon, Fluolorubber borosilicate glass, silicon Approx. 1.1 kg Model No. Standard full-scale flow rate Gas types Control 2 to 100% FS 1 to 100% FS (see Table 1 below) 0.5s for SP ±2% FS (typ.) 0.3s for SP ±2% FS (typ.) (When control is started from fully closed condition, and when the setpoint is changed while control is in performed.) ±1% FS MQV9020 20.0 mL/min (standard) Model No. Standard full-scale flow rate Gas types me rich or ns se V MQ ies r se en l ntia ote n p lator o b u r Ca calc er oll ntr Co (time) 12 We offer a variety of solutions related to gas flow measurement. Mist separators and filters for Micro Flow sensors C a l i b r a ti o n s e r v i c e s Filters for protection against oil mist in gas and welding fumes from piping work. Model No.: MFF25S, MFF25L (for MCF air flowmeters only) Air, nitrogen / 2B 750/1500 300/750 6600 13800 0.98 MPa Die-cast zinc or die-cast aluminum 0.41/0.45 kg Weight 4000/6000 0.93 MPa Max. operating pressure Housing material 2B Rc thread Connection type Flow rate range: L/min (normal) 11/2B 1B 1 /4B 1 Pipe size 0.45/0.81 kg Stainless steel 3.3 kg 1.76/2.10 kg 4.3 kg Model No.: MFF300 Air, nitrogen, argon, carbon dioxide, city gas 50A (2B) Pipe size 80A (3B) 160 650 400 Housing SGP, SS400 Element Cellulose/resin coating L type: 21 kg, Y type: 22 kg Weight 1600 0.98 MPa Max. operating pressure Material 150A (6B) Y type: straight, L type: elbow Mounting position Flow rate range: L/min (normal) 100A (4B) JIS10k RF Connection type L type: 42 kg, Y type: 44 kg L type: 47 kg, Y type: 50 kg L type: 90 kg, Y type: 101 kg Applications: eliminating pipe rust, and welding fumes Pipe size: 2 to 6B Air, nitrogen, argon, carbon dioxide, city gas 50A (2B) Pipe size 80A (3B) 160 Max. operating pressure Material Weight Taking advantage of its design and production technologies as a flowmeter manufacturer, azbil is now offering calibration services, including JCSS (Japan Calibration Service System) calibration, pick-up and return calibration, and on-site calibration. We use JCSS traceability to ensure customer satisfaction. On-site calibration service (available in Japan only) 100A (4B) Dummy pipe 650 400 150A (6B) 1600 0.5 MPa (0.3 MPa when used for gas industry) SS400, SGP FC250 Housing Cellulose/resin coating Element 14 kg 31 kg 49 kg Mounting position for calibrating flowmeter Flow direction Loop calibration at the factory where the flowmeter is installed, with the usual operational configuration of the equipment, including connected indicators, etc. is available. This is the optimal calibration for meeting quality requirements for ISO, GMP, and HACCP. We calibrate not only flowmeters, but also other measuring equipment, such as thermometers, hygrometers, and normal or differential pressure gauges. There’s no need to change calibration contractors for different types of measuring equipment—azbil would be pleased to do all your calibrations. Bypass pipe Y-branch strainer Example of piping used for periodic calibrations Pick-up and return calibration service JCSS calibration service With this service, we take your flowmeter to our testing facilities for high-accuracy calibration that is traceable to national measurement standards. This service is worthwhile when on-site calibration is difficult because of the installation conditions or environment of the flowmeter, or when calibration with especially high accuracy is needed. Another advantage is that, if a problem is found in the course of calibration, immediate adjustment or repair is available for Yamatake Micro Flow products and Kimmon products. On behalf of the Japanese government, and in compliance with Japan's measurement law, Accredited Calibration Laboratories provide this calibration service to meet national standards. ACS calibrates devices using secondary measurement standards/calibrators, which are evaluated by the primary measurement standards of Advanced Industrial Science & Technology (AIST), representing national standards. A calibration certificate with the JCSS logo is issued with the calibration results. National measurement standards National Institute of Advanced Industrial Science and Technology (AIST) /Metrology Institute of Japan (MIJ) Primary measurement standards JIS10k FF Connection type Flow rate range: L/min (normal) Ask for calibration by azbil, for long-term flowmeter reliability. Traceability System Model No.: FC (manufactured by azbil group company Kimmon Manufacturing Co., Ltd.) Compatible gases azbil offers calibration services. Our technicians would be pleased to visit your factory or office to calibrate azbil products. On-site calibration significantly reduces the trouble and labor costs involved in removing flowmeters for calibration elsewhere. For your convenience, our service schedule is flexible. Applications: eliminating oil mist, pipe rust, and welding fumes Pipe size: 2 to 6B Compatible gases We have 78 service offices in Japan. Flowmeter accuracy varies at different times depending upon the application, conditions and environment. It is risky to assume that your flowmeter's measurement is always as accurate as when you bought it. Long-term measurement reliability is necessary, especially for efficiency calculations, energy-saving evaluations, and business transactions. For that reason, regular flowmeter calibration is recommended for long-term use. Applications: elimination of oil mist, pipe rust, and welding fumes Pipe size: 1/4 to 2B Compatible gases Do you know how accurate your existing flowmeter measurements are? 92 kg J C S S c a l i b ra t ion service Calibration Service Center, Azbil Kimmon Co., Ltd. JCSS accredited calibration laboratory Laboratory, System Division, Hirai Co., Ltd. Secondary measurement standards/Calibrators Azbil Corporation Fujisawa Technology Center Calibrators MRA-JCSS accredited calibration laboratory Calibration Service Center, Business Planning Division, Azbil Kimmon Co., Ltd. Secondary measurement standards/Calibrators Azbil Corporation Shonan Factory Calibrators Kimmon Manufacturing Co., Ltd. Shirakawa Factory Calibrators MRA-JCSS accredited calibration laboratory Laboratory, System Division, Hirai Co., Ltd. Gas mass flowmeters to be calibrated 13 14