General Brochure 2ce-ihwh-5

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Industrial Instruments General Catalogue Industrial Instruments General Catalogue INDEX 3 Stereo Microscopes Parallel Optics Type – SMZ25 / SMZ18 / SMZ1270 / SMZ1270i / SMZ800N Greenough Type – SMZ745 / SMZ745T / SMZ445 / SMZ460 / SMZ-2 Upright Microscopes Inverted Metallurgical Microscopes Polarizing Microscopes Multi-purpose Zoom Microscopes Parallel Optics Type – LV150N / LV150NA / LV100ND / LV100NDA / L300N / L300ND / L200N / L200ND – MA200 / MA100 / MA100L – LV100NPOL / Ci POL – AZ100 / AZ100M 6 Digital Cameras for Microscopes – DS-Ri2 – DS-Fi3 Microscope Camera Control Unit– DS-L4 Digital Microscopes / Super High Vertical Resolution Non-Contact 3D Surface Profilers Digital Microscopes – ShuttlePix P-400Rv 3D Surface Profilers – BW-D500 Series / BW-S500 Series Objective Lenses Objective Lenses – CFI60 -2 / CFI60 / CF&IC Near-infrared Objective Lenses – NIR / NIR-C For Incorporation into Microscopes / Wafer Loaders Modular Focusing Units – IM-4 / LV-IM / LV-FM / LV-FMA Dynamic Auto-Focus Unit – LV-DAF Compact Reflected Microscopes – CM Series Wafer Loaders – NWL200 Series CNC Video Measuring Systems CNC Video Measuring Systems – NEXIV VMA / VMR / VMZ-R / VMR-H Series CNC Confocal Video Measuring Systems – NEXIV VMZ-K Series Measuring Microscopes – MM-200 / MM-400 / MM-800 Profile Projectors / Data Processing System Profile Projectors – V-12B / V-20B Data Processing Software – E-MAX 7 8 Zoom Ratio Zoom Range Total Magnification*1 (Standard combination*2) W.D.*3 9 SMZ25 SMZ18 SMZ1270 SMZ1270i SMZ800N 25 : 1 18 : 1 12.7 : 1 8:1 0.63–15.75× 0.75–13.5× 0.63–8× 1–8× 3.15–945× 3.75–810× 3.15–480× 5–480× 60mm 60mm 70mm 78mm (6.3–157.5×) (7.5–135×) (6.3–80×) (10–80×) Camera : Available / : Not available Greenough Type 10-11 12 Measuring Microscopes Data Processor – DP-E1A Metrology Software – U-DP Autocollimators / DIGIMICRO Autocollimators – 6B-LED / 6D-LED The highly cost-effective SMZ series offer outstanding optical performance, flexible system expandibility, and superb operability. 4-5 Industrial Microscopes Microscope Camera Microscope Camera SMZ Series Stereo Microscopes DIGIMICRO – MF-1001 / MF-501 / MH-15M Optical Flat / Optical Parallel / Standard 300mm Scale 13 14 15 SMZ745 SMZ745T Zoom Ratio Zoom Range Total Magnification*1 (Standard combination*2) SMZ445 SMZ460 SMZ-2 7.5 : 1 4.4 : 1 4.3 : 1 5:1 0.67–5× 0.8 –3.5× 0.7 –3× 0.8–4× 4–70× 3.5–60× 4–120× 3.35–300× (6.7–50×) W.D.*3 115mm Camera (SMZ745T only) (8–35×) (7–30×) 100mm (8–40×) 77.5mm : Available / : Not available *1: Depending on combination of Eyepiece and Objective lens. *2: Combination of Eyepiece 10× and Objective lens 10×. *3: Objective lens 1× or no Auxilliary Objective lens. 2 Please refer to individual product brochures for further details. 3 ECLIPSE Series Industrial Microscopes Nikon's Industrial Microscopes utilize the CFI60 -2 optical systems, highly evaluated for its unique concept of high NA combined with long W.D. Upright Microcopes (General model) Inverted Metallurgical Microscopes LV150N LV150NA LV150NL* MA200 LV100ND LV100NDA With its unique, solid-box structure, the MA200 offers high stability, durability, and a smaller footprint than conventional models. Model offers various observation methods with reflected/transmitted illumination. Stand and illumination units are selectable according to observation methods and purpose of use. LV150N Observation Method EPI BF DF DIC FL POL : Available / 2-Beam : Not available EPI BF DF DIC POL FL Ph-C 2-Beam Observation Method DIA • Episcopic / Diascopic Illuminator Stage • 3×2 Stage (stroke 75×50mm) • 6×6 Stage (stroke 150×150mm) • 3×2 Stage (stroke 75×50mm) • 6×4 Stage (stroke 150×100mm) Stage *See the "LV-N Series" brochure for other compatible stages. *See the "LV-N Series" brochure for other compatible stages. BF: Brightfield DF: Darkfield DIC: Differential Interference Contrast FL: Flourescence POL: Polarizing 2-Beam: Two-Beam Interferometry Ph-C: Phase-Contrast MA100L DF DIC S-POL FL DIA EPI BF DF DIC S-POL : Available / FL : Not available : Not available • Episcopic / Diascopic • Episcopic • MA2-SR Mechanical Stage (stroke 50×50mm) • MA-SR Rectangular 3-plate Stage (stroke 50×50mm) • MA-SP Plan Stage • Ti-SM Attachable Mechanical Stage CH (stroke 126×80mm) BF: Brightfield DF: Darkfield DIC: Differential Interference Contrast S-POL: Simple Polarizing FL: Flourescence *Only BF, DIC, and S-POL are available for LV150NL Upright Microcopes (Large-sized stage model) Polarizing Microscopes Multi-purpose Zoom Microscopes L300N L300ND L200N L200ND LV100NPOL Ci POL AZ100 AZ100M Stage with stroke 350×300mm is available. Suitable for ø300mm wafer observation. Stage with stroke 200×200mm is available. Suitable for ø200mm wafer observation. High quality polarizing microscopes with superb optical performance that accommodate various observation needs. Multizoom AZ100 and AZ100M combine the advantages of stereoscopic and metallographic microscopes. EPI BF DIA L300ND DF DIC S-POL FL L200ND EPI BF DIA * *L300ND only : Available / • L300N : Episcopic • L300ND : Episcopic / Diascopic • 14×12 Stage (stroke: 350×300mm) : Not available DF Please refer to individual product brochures for further details. DIC S-POL FL * * *L200ND only : Available / • L200N : Episcopic • L200ND : Episcopic / Diascopic • 8×8 Stage (stroke: 200×200mm) BF: Brightfield DF: Darkfield DIC: Differential Interference Contrast S-POL: Simple Polarizing FL: Flourescence 4 BF : Available / • Episcopic Stage EPI : Not available Illuminator Illuminator MA100 and MA100L are compact, inverted microscopes designed for brightfield and simple polarizing observations. LV100ND : Available / Observation Method MA100 MA100L LV100NPOL Observation Method EPI BF POL DIA EPI BF DF DIC S-POL FL DIA : Available / : Not available AZ100 : Not available : Available / : Not available Illuminator • Episcopic/ Diascopic • Episcopic/ Diascopic Stage • LV100NPOL : High precision rotating stage for polarizing observation • Ci POL : Rotating stage with stage clamp • 6×6 Stage (stroke 150×150mm) for episcopic • 6×4 Stage (stroke 150×100mm) for diascopic BF: Brightfield POL: Polarizing DF: Darkfield DIC: Differential Interference Contrast S-POL: Simple Polarizing FL: Flourescence 5 Digital Sight Series Digital Cameras for Microscopes An all-new, one-of-a-kind digital microscope that can either be portable to accommodate any sample size or docked on a stand to take high-magnification images and perform various measurements. The Stand-Alone Model is capable of high-definition image acquisition without a control unit. Microscope Camera Stand-Alone Model Microscope Camera DS-Ri2 DS-Fi3 Capable of expressing images as is, this microscope digital camera offers high resolution, color reproduction, and frame rate. Three main features of the previous models, high-resolution, high sensitivity and low noise, and high-speed live display are offered in 1 camera. 16.25 megapixel Color 5.9 Highresolution Frame Rate Max Recordable Pixels ShuttlePix P-400Rv Digital Microscopes megapixel Color Motorized Focusing Stand + Touch Panel Monitor Through the intuitive operation of touching icons or using the screen stylus, precise image capturing and simple measurement are now possible. One-touch EDF EDF images can be easily acquired by selecting the start and end positions on the sample. Highresolution 45fps (1636×1088) 30fps (1440×1024) 4908×3264 2880×2048 Simple Stand Handheld Set *See the "Digital Sight series" catalog for other cameras. Microscope camera control unit Imaging software DS-L4 NIS-Elements series DS-Fi3 can be optionally connected to theDS-L4 tabletstyle control unit, eliminating the need and space requirements of a desktop PC. DS-L4 has a large number of built-in security for network connectivity. Image Stitching Stitches together images acquired from multiple fields of view to create one image. This all-in-one set features a battery operated zoom camera head and a compact simple reflection stand, both of which can be taken anywhere to capture high-resolution images. The lightweight, ergonomic camera head allows for easy handling for all users. BW-D500 Series/ BW-S500 Series Super High Vertical Resolution Non-Contact 3D Surface Profilers Nikon's proprietary scanning-type optical interference measurement technology achives 1pm height resolution. Nikon offers variety application, lustrous surfaces, such as silicon wafer, glass and metallic deposition surfaces. Scene Mode Optimal imaging parameters for each sample type and observation method can easily be set through the icons. High Speed Model BW-D500 Series Wafer/IC Metal, Ceramic/Plastic Circuit board Flat Panel Display Height Resolution (algorithm) 1pm Step Height Measurement Reproducibility Variety of Tool Features σ: 8nm (8µm Step height measurement) Number of Pixels Enables easy measurements directly on images, with input of lines and comments. These can also be written and saved with the image,and measurement data can also be output. EDF (Extended Depth of Focus) Create a single, all-in-focus image from images of differing focus. Measurement (two-point distance) High Pixel Resolution Model BW-S500 Series Height Measurement Time Field of view 510×510 2,046×2,046 1,022×1,022 4s (10µm scan) 38 s (10µm scan) 16 s (10µm scan) < 2,015×2,015µm* < 4,458×4,448µm* B W- S 5 07 * The range can be extended by changing the relay lens or by stitching. Measurement function Position and size comparison functions Drawing functions Polished ceramic sur face 6 Please refer to individual product brochures for further details. Metal Etching Sur face Please refer to individual product brochures for further details. Lens Glass Glossy paper 7 Objective Lenses CFI60-2 / CFI60 / CF&IC Nikon's CFI60 -2/CFI60 /CF&IC optical systems are highly evaluated for its unique concept of high NA combined with long working distance. These lenses have further evolved to achieve the apex in long working distance, correct chromatic abserration, and optimized lens weight. Modular Focusing Units IM-4, LV-IM/LV-IMA, LV-FM/LV-FMA BF: Brightfield DF: Darkfield POL: Polarizing S-POL: Simple Polarizing DIC: Differential Interference Contrast UV-FL: UV Flourescence FL: EPI Flourescence Model T Plan EPI Plan (Semi-apochromat) TU Plan Fluor EPI Universal Plan Fluor (Semi-apochromat) TU Plan Apo EPI Universal Plan Apo (Apochromat) TU Plan Fluor EPI P Polarizing Universal Plan Fluor (Semi-apochromat) TU Plan EPI ELWD Long Working Distance Universal Plan (Semi-apochromat) T Plan EPI SLWD Super Long Working Distance Plan (Semi-apochromat) TU Plan Fluor BD Universal Plan Fluor (Semi-apochromat) TU Plan Apo BD Universal Plan Apo (Apochromat) TU Plan BD ELWD Long Working Distance Universal plan (Semi-apochromat) L Plan EPI (Achromat) LU Plan Apo EPI / Universal Plan Apo (Apochromat) LU Plan Apo BD Universal Plan Apo (Apochromat) L Plan EPI CR LCD Substrate Inspection Plan (Achromat) *Offers valid while supplies last CF IC EPI Plan Plan (achromat) CF IC EPI Plan Apo Plan Apo (Apochromat) CF IC EPI Plan ELWD Long Working Distance Plan (Achromat) CF IC EPI Plan SLWD Super Long Working Distance Plan (Achromat) CF IC EPI Plan TI DIC Plan CF IC EPI Plan DI DIC Plan Magnification NA W.D. (mm) 1× 2.5× 5× 10× 20× 50× 100× 50× 100× 150× 5× 10× 20× 50× 100× 20× 50× 100× 10× 20× 50× 100× 5× 10× 20× 50× 100× 50× 100× 150× 20× 50× 100× 40× 150× 150× 20× 50× 100× 100× 2.5× 5× 10× 20× 50× 100× 50× 100× 150× 20× 50× 100× 10× 20× 50× 100× 2.5× 5× 10× 20× 50× 100× 0.03 0.075 0.15 0.3 0.45 0.8 0.9 0.8 0.9 0.9 0.15 0.3 0.45 0.8 0.9 0.4 0.6 0.8 0.2 0.3 0.4 0.6 0.15 0.3 0.45 0.8 0.9 0.8 0.9 0.9 0.4 0.6 0.8 0.65 0.95 0.9 0.45 0.7 0.85 0.85 0.075 0.13 0.3 0.46 0.8 0.95 0.95 0.95 0.95 0.4 0.55 0.8 0.21 0.35 0.45 0.73 0.075 0.13 0.3 0.4 0.55 0.7 3.8 6.5 23.5 17.5 4.5 1.0 1.0 2.0 2.0 1.5 23.5 17.5 4.5 1.0 1.0 19.0 11.0 4.5 37.0 30.0 22.0 10.0 18.0 15.0 4.5 1.0 1.0 2.0 2.0 1.5 19.0 11.0 4.5 1.0 0.3 0.42 10.9–10.0 3.9–3.0 1.2–0.85 1.3–0.95 8.8 22.5 16.5 3.1 0.54 0.3 0.4 0.3 0.2 11 8.7 2 20.3 20.5 13.8 4.7 10.3 9.3 7.4 4.7 3.4 2.0 : Available / BF DF POL S-POL DIC UV-FL FL A A A A A A A A A A A A A B B B 20× 50× 20× 50× NA LV-IM/LV-IMA LV-FM/LV-FMA Manual / Motorized Manual / Motorized 30mm 30/20mm 30/20mm LV-IMA LV-DAF Hybrid Auto-focus features a wide focus range and fast tracking ability. A wide range of observation methods are supported, including brightfield, darkfield, and DIC. Reflective and transparent samples can both be observed. Detection System Split Projection System/ Contrast Detection System Near Infrared LED (λ=770nm) AF Light Source Focal Time within 0.7 sec (Obj. lens: 20×, Distance from focal position: 200µm) Observation Brightfield, Darkfield, Polarizing, DIC Compact Reflected Microscopes CM Series A A Ultra-compact reflected microscopes designed for integration into production lines to observe on monitors. CM-5A CM-10A/CM-10L Camera Mount Compatible Objectives Illumination Optical System CM-20A/CM-20L 1× 3 Wave Length (n.m) Parfocal Distance (mm) 25.0 20.0 24.0 *2 19.0 *2 1,064/532 1,064/532 1,064/532 1,064/532 95 95 95 *3 95 *3 1× 4 NWL200 Series Wafer Loaders W.D. (mm) 0.5× A series: CF IC EPI Plan objectives / L series: CFI60 -2/ CFI60 EPI Plan objectives Koehler illumination (high-quality telecentric illumination) Attachment Surfaces *A: Set prism position at A / B: Set prism position at B CM-30A2/CM-30L2 C-mount (ENG-mount possible with option) Tube Lens Magnification : Not available LV-FMA Dynamic Auto-Focus Unit NIR / NIR-C 0.40 0.42 0.40 0.42 IM-4 Manual Vertical Stroke Achieves high transmission of 90% or more at visible range and 1,064 nm. Significantly improved machining accuracy at a small size with low power. Suitable for Semiconductor and LCD by laser repair. Magnification Suitable for incorporating into systems, these focusing units enable the mounting of a universal illuminator and a motorized nosepiece. Type A A A A A A A A B B B Near-infrared Objective Lenses Model NIR,*1 Near-Infrared Plan NIR-C,*1 Near-Infrared Plan (glass thickness correction range 0.3–1.1mm) For Incorporation into Microscopes Nikon's proprietary technology ensures reliable loading of ultra-thin 100µm wafers. The NWL 200 series achieve highly reliable loading, suitable for inspection of next-generation semiconductors. Wafer Diameter Thickness (standard) Thickness (option) ø200mm / ø150mm / ø125mm 300um 300–100um Surface, back side macro inspection *1: Please ask us regarding transmission outside of vision range and 1064nm. *2: W.D. is measured from the object surface with 1.1mm thick cover glass. *3: Because of a shift in parfocal position when used in conjunction with cover-less objective lens, parfocal distance is corrected by correction rings and washers. 8 Please refer to individual product brochures for further details. Please refer to individual product brochures for further details. 9 NEXIV Series CNC Video Measuring Systems Wide variety of stage strokes and magnifications are available for various customer requirements. Confocal NEXIV Series Simultaneous wide-area height measurements with confocal optics and 2D measurement with 15× brightfield zoom optics. Main Body (Type / Stage Stroke) Main Body (Type /Stage Stroke) Wide FOV Type Standard Type High Accuracy Type VMA VMR / VMZ-R VMR-H Model VMA-6555 Series VMA-4540 Series VMA-2520 Series Model VMR: VMR-1515/VMR-10080/VMR-12072 VMZ-R: VMZ-R3020/VMZ-R4540/VMZ-R6555 Model VMZ-K3040 VMR-H3030 XY Stroke (mm) Magnification (Type S) Magnification (Type H) 300×400 650×550 1.5× / 3× / 7.5× 15× / 30× 1.5× / 3× / 7.5× 15× / 30× 150 150 20 30 1.5+2.5L / 1000 1.5+2.5L / 1000 1+L / 1000 1+L / 1000 Z-axis Stroke (mm) Max. guaranteed loading capacity (kg) Max. permissible error U1X, U1Y (μm) iNEXIV VMA-4540 NEXIV VMZ-R3020 Type NEXIV VMZ-R4540 Max. permissible error of Z axis (μm) NEXIV VMR-H3030 Wide FOV Standard High Accuracy 250×200 450×400 650×550 150×150 300×200 450×400 650×550 1000×800 1200×720 300×300 XY Stroke (mm) Wide FOV Head Zoom Heads FOV Type S Stardard Head High-Magnification Head Z-axis Stroke (mm) Max. guaranteed loading capacity (kg) 200 200 15 20 200 30 150 20 200 20 200 40 200 50 150 40 150 40 150 30 Type H Max. permissible errors (μm) EUX, MPE: 2+8L/1000 2+6L/1000 2+6L/1000 1.5+4L/1000 1.2+4L/1000 1.2+4L/1000 1.2+4L/1000 2+4L/1000 2.2+4L/1000 0.6+2L/1000 Max. permissible errors in Z axis (μm) EUZ, MPE:*1 VMZ-K6555 W(mm)× D (mm) 8 6 4 3 2.0 1.5 1.6 1.2 1.26 0.95 1.00 0.75 0.8 0.6 0.63 0.47 0.53 0.40 0.4 0.3 0.30 0.23 0.27 0.20 0.20 0.15 0.11 0.08 0.100 0.05 0.074 0.04 1.5× W.D. 24mm 3× 24mm 15× 20mm 7.5× 5mm 30× 5mm 3+L/50 3+L/100 3+L/100 1.5+L/150 1.2+5L/1000 1.2+5L/1000 1.2+5L/1000 1.5+L/150 1.5+L/150 0.9+L/150 Confocal Optics Brightfield Optics Both brightfield and 3D images are available L = Length in mm *1: with Laser AF or Touch Probing Confocal NEXIV incorporates confocal optics for fast and accurate evaluation of fine three-dimensional geometries. Confocal Optics are designed for wide FOV height measurement. Zoom Heads Type A Type 1–4 Wide FOV and long working distance enables comfortable operation. Laser AF and Touch Probe can be attached as optional accessories. *Touch Probe is an option only for VMA series. FOV W(mm)× 13.3 9.33 10.0 7.01 D(mm) 7.8 5.8 Type TZ Equipped with top, bottom, and oblique ring lights with adjustable angles. TTL (Through The Lens) Laser AF is a standard tool that can scan surfaces at 1000 points/second. 4.7 3.5 2.6 2.33 1.9 1.75 Equipped with 1-120x ultra high zoom ratio with 8 steps. Suitable for measurements of small targets up to several micrometers. 1.33 1.165 0.622 0.582 0.311 0.291 0.155 0.146 0.070 0.073 0.039 1.00 0.875 0.467 0.437 0.233 0.218 0.117 0.109 0.068 0.055 0.029 Type 2 50mm Type 4 30mm HighMagnification Head Brightfield observation can sometimes be difficult due to blurred lines along sample structure. These lines can be clearly observed and measured using Confocal optics. Top layers of both thin transparent film and metal surface can be easily detected using Confocal optics. SEM image Film Metal Surface Brightfield Image Difficult to detect thin layer films Type 1 Type 3 Type TZ Please refer to individual product brochures for further details. Confocal Image Confocal Image Top and bottom layers are accurately detected 9.8mm Top detected 10 3D view Thin Transparent Samples (Metal Surface Film / Semiconductor Resist) W.D. 73.5mm Contour High Contrast and Multileveled Sample (PCBs) Brightfield Image Wide FOV Head Type A Stardard Head Brightfield Bottom detected Please refer to individual product brochures for further details. 11 Measuring Microscopes Focused on high-precision and easy operability, a wide range of MM-products are available. 50×50mm / Stage Size/ Loading Capacity Profile Projectors Compact Model Basic Model Large-Stage Model MM-200 MM-400 MM-800 50×50mm / 5kg Stage Size/ Loading Capacity 100×100mm / 15kg 150×100mm / 15kg 200×150mm / 20kg 250×150mm / 20kg Max. Workpiece Height X-Y-Z CCD Desktop Model Large-Screen Model V-12B V-20B 5kg 100×100mm / 15kg 150×100mm / 15kg 200×150mm / 20kg 250×150mm / 20kg 225×100mm / 30kg 300×200mm / 20kg Optical Head Nikon's profile projectors apply the principles of optics to the inspection of manufactured parts by projecting magnified silhouettes on a screen. 110mm 150mm 200mm Monocular Screen Image Binocular Projection Lens 2-axis 3-axis Magnification 150mm 305mm 500mm Erect 5×/10×/20×/25×/50×/100×/200× Inverted 5×/10×/20×/50×/100× 30.5mm 50mm FOV (with 10× lens)*1 Digital Protractor * Obj. Magnification 100mm*2 Max. Workpiece Height 1×/3×/5×/10× Digital Counter 1×/3×/5×/10×/20×/50×/100× *For simple video head only : Available / : Not available : Available / *1: Actual FOV = Effective diameter of screen / Lens magnification *2: Maximum sample height is 70mm when 200×150mm stage is installed. : Not available Data Processing Systems for Measuring Microscopes and Profile Projectors MM Type Universal Type With Nikon's optical technology Offers a line-up compatible with and newly developed stages, dimensional measurement and high-precision measurement can be achieved. various observation methods. Data Processing Software Data Processor Metrology Software E-MAX DP-E1A U-DP Newly Developed High-Precision Stages Focusing Aid (FA) Provides the user with various advanced measurements and processing functions. Effectively used with a measuring microscope /profile projector, it quickly The browsered geometric dimensioning software can be effortlessy connected The coarse/fine changeover lever and the RESET and The newly developed Split-Prism FA Automated edge detection with sub-pixel processing enables more precise and calculates and processes measurement data. Feature Oriented Operation of via Ethernet or Wifi to electronic devices. Interactive navigation enables immediate repeatable measurements. the DP-E1A allows the user to conduct operation, while the simple screen measurements with the graphics, providing a seamless measuring environment. layout enables easy measurement results confirmation. SEND buttons are located near the X- and Y-axis knobs. X-axis Knob Y-axis Knob delivers sharp patterns to allow accurate focusing during Z-axis measurements. Objective FA patterns are clearly visible because they are split vertically. Front Focus Focused Rear Focus Connected with profile projector, data processing functions only 12 Please refer to individual product brochures for further details. Please refer to individual product brochures for further details. Connected with profile projector, retrofit counter and DP units are required. [Operating environment] OS: Windows ®7 Required memory: 2GB (min.) Recommended browsers: Windows® Internet Explorer Ver6.0.2.9 or later 13 Autocollimators Optical Flat / Optical Parallel / Standard 300mm Scale Autocollimator is an easy-to-use but precise metrology instrument for angularity, parallelism, perpendicularity, straightness of precision components machine guideway and many other applications. Brightfield Type Darkfield Type 6B-LED 6D-LED 30 0 10 20 30 0 20 20 10 30 10 1div = 1min 30 20 30 0 10 10 0 20 20 30 a 0 Diameter Optimal for measuring small, flat mirrors. Observation Method Thickness Flatness Glass (ø60mm) 15mm 0.1µm Glass (ø130mm) 27mm 0.1µm 6B-LED: Brightfield, 6D-LED: Darkfield Readout System Adjustment in viewfield and reading on micrometer 30 minutes of arc (both vertical and horizontal axes) Minimum Range 0.5 seconds of arc Measuring Range Both planes of the optical parallel have been precisely finished flat and parallel. It is used to check the flatness and parallel levels of a workpiece by observing intereference fringes by placing the optical parallel in contact with the workpiece. b 1div = 1min 0 Utilizes hallmark Nikon optics to illuminate surface details. 20 10 30 10 1div = 1min 0 The optical flat is used to check the flatness level of a surface provided with mirror-smooth finish. Flatness level can be measured by observing inteference fringes by placing the optical flat in contact with the workpiece. 30 10 1div = 1min 0 20 Optical Parallel Optical Flat Plane Mirror C LED Illuminator AC-L1 Both sides are perfectly parallel, permitting its use as a reference for non-reflective surface. Also useful for measuring extremely small angles where a smaller mirror is desirable. LED illumination unit for retrofitting onto Autocollimator 6B/6D illumination unit. Diameter 30mm Thickness Flatness 12mm / 12.12mm / 12.25mm / 12.37mm within 0.1µm Parallelism within 0.2µm *Optical flats and parallels with greater precision are available by custom orders. Standard 300mm Scale Gauges stage travel accuracy up to 300mm. Both 10mminterval sensor patterns and calibrations are provided. Made of low heat-expansion glass, for minimizing influence of heat. *Within 1µm against compensation values. *Wooden case provided. Outer Diameter Thickness Parallelism Power Source 30mm 12mm AA batteries×2, AC adaptor 2 seconds of arc DIGIMICRO With built-in photoelectric digital length measuring systems, DIGIMICRO offers flawless contact measuments of dimension, thickness, and depth. Main Unit Measuring Range Accuracy (20°C) Measuring Force Mainunit MF-501 + Counter TC-101A + Stand MS-11C MF-1001 0–100mm 3µm MF-501 0–50mm 1µm MH-15M 0–15mm 0.7µm Downward direction 1.225 to 1.813N (variable to about 0.441N), lateral 0.637 to 1.225N Downward direction 1.127 to 1.617N (variable to about 0.294N), lateral 0.637 to 1.225N Upward direction 0.245N, downward 0.637N, lateral 0.441N Operating Temperature 14 Mainunit MF-1001 + Counter MFC-101A + Stand MS-21 Please refer to individual product brochures for further details. *With lifting release 0 to 40˚C Please refer to individual product brochures for further details. 15 Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. November 2016 ©2014-2016 NIKON CORPORATION N.B. Export of the products* in this catalog is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedures shall be required in case of export from Japan. *Products: Hardware and its technical information (including software) ISO 14001 Certified for NIKON CORPORATION NIKON CORPORATION Shinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, Japan phone: +81-3-6433-3701 fax: +81-3-6433-3784 ISO 9001 Certified for NIKON CORPORATION Microscope Solutions Business Unit Industrial Metrology Business Unit http://www.nikon.com/industrial-metrology/ NIKON INSTECH CO., LTD. Shinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290 phone: +81-3-6433-3980 fax: +81-3-6433-3784 NIKON METROLOGY, INC. 12701 Grand River Avenue, Brighton, MI 48116 U.S.A. phone: +1-800-552-6648 fax: +1-810-220-4300 E-mail: [email protected] http://www.nikonmetrology.com/ NIKON METROLOGY EUROPE NV Geldenaaksebaan 329, 3001 Leuven, Belgium phone: +32-16-74-01-00 fax: +32-16-74-01-03 NIKON INSTRUMENTS KOREA CO., LTD. NIKON METROLOGY UK LTD. NIKON SINGAPORE PTE LTD. E-mail: [email protected] KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415 SINGAPORE phone: +65-6559-3651 fax: +65-6559-3668 NIKON MALAYSIA SDN. BHD. MALAYSIA phone: +60-3-7809-3688 fax: +60-3-7809-3633 PT. NIKON INDONESIA INDONESIA phone: +62-21-574-6262 fax: +62-21-574-6363 Nikon Sales (Thailand) Co., Ltd. THAILAND phone: +66-2633-5100 fax: +66-2633-5191 Email: [email protected] http://www.nikonmetrology.com/ NIKON INDIA PRIVATE LIMITED NIKON INSTRUMENTS (SHANGHAI) CO., LTD. NIKON CANADA INC. CHINA phone: +86-21-6841-2050 fax: +86-21-6841-2060 (Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026 (Guangzhou branch) phone: +86-20-3882-0550 fax: +86-20-3882-0580 Printed in Japan (1611-03) Am/M INDIA phone: +91-124-4688500 fax: +91-124-4688527 CANADA phone: +1-905-602-9676 fax: +1-905-602-9953 NIKON INSTRUMENTS S.p.A. ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93 Code No. 2CE-IHWH-5 UNITED KINGDOM phone: +44-1332-811-349 fax: +44-1332-639-881 NIKON METROLOGY SARL FRANCE phone: +33-1-60-86-09-76 fax: +33-1-60-86-57-35 E-mail: [email protected] NIKON METROLOGY GMBH GERMANY phone: +49-6023-91733-0 fax: +49-6023-91733-229 E-mail: [email protected]