Transcript
More Precision capaNCDT // Capacitive displacement sensors and systems
Modular multi-channel measuring system
capaNCDT 6200
-M odular, expandable for up to 4 channels - Ethernet / EtherCAT interface -E asy configuration using the web browser -R esolution up to 0.0005% FSO - Bandwidth: 5kHz - Digital data rate: 4 x 3.9kSa/s - Trigger feature -M ath functions included (e.g thickness, differential measurement) - Synchronous operation supported
System structure The new capaNCDT 6200 is an innovative measuring system that offers excellent performance at a very attractive price. Its modular design ensures that you can easily combine up to 4 channels. The measuring system includes a control unit and a demodulator for each sensor. Its Ethernet interface supports fast and easy configuration through a web browser. The modulator DL6230 is available for high resolution measurements. The compact controller can be used as benchtop unit, it can be mounted to the wall or on a tophat rail. The capaNCDT 6200 is compatible with all Micro-Epsilon sensors.
Accessories: signal output cable power supply cable DIN rail brackets mounting plates for wall mounting
Trigger
Power supply
12...36 V
Signal conditioning · Demodulation · Analog filter adjustable · Zero point adjustable · A/D converter
Signal conditioning · Demodulation · Analog filter adjustable · Zero point adjustable · A/D converter
Power/ internal bus Oscillator
Sync out
Clock/Sync
(only DT6230)
DT62x0
DL62x0
DL62x0
Sensor
Current 4...20mA
Voltage 0...10V
Sensor Preamplifier
Voltage conditioning
Sync in
(only DT6230)
Current 4...20mA
EtherCAT
Microcontroller Interface
Voltage 0...10V
Block diagram
(only DT6230)
A measuring system consists of: control unit DT62x0 demodulator DL62x0 sensor sensor cable power supply cable Ethernet cable EtherCAT cable signal output cable
Ethernet
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Preamplifier
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Web interface The controller is configured by the Ethernet which calls the web interface. Up to 8 channels can be visualised and combined arithmetically.
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Modular multi-channel measuring system
capaNCDT 6200
Options Suitable for articles 2303018 DL6220
2303022 DL6220/ECL2
2303023 DL6220/ECL3
2303029 DL6220/LC
Article number
Description
Explanation
2982044
LC DL62x0 digital
special calibration of linearity on digital output
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2982045
LC DL62x0 analog
special calibration of linearity on analog output
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2982046
ECL2 DL6220
special tuning for double standard cable length (CC =2m / CCm =2.8m / CCg =4m)
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-
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2982047
ECL3 DL6220
special tuning for triple standard cable length (CC =3 m / CCm =4,2 m / CCg =6 m)
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2982048
EMR2 DL6220
extended measuring range (factor: 2) contains LC DL62x0 digital and LC DL62x0 analog
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2982049
RMR1/2 DL6220
reduced measuring range (factor: 1/2) contains LC DL62x0 digital and LC DL62x0 analog
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Suitable for articles 2303019 DL6230
2303024 DL6230/ECL2
2303025 DL6230/ECL3
2303030 DL6230/LC
Article number
Description
Explanation
2982044
LC DL62x0 digital
special calibration of linearity on digital output
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2982045
LC DL62x0 analog
special calibration of linearity on analog output
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2982054
ECL2 DL6230
special tuning for double standard cable length (CC =2m / CCm =2.8m / CCg =4m)
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2982055
ECL3 DL6230
special tuning for triple standard cable length (CC =3m / CCm =4.2m / CCg =6m)
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2982051
EMR2 DL6230
extended measuring range (factor: 2) contains LC DL62x0 digital and LC DL62x0 analog
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2982052
EMR3 DL6230
extended measuring range (factor: 3) contains LC DL62x0 digital and LC DL62x0 analog
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2982053
RMR1/2 DL6230
reduced measuring range (factor: 1/2) contains LC DL62x0 digital and LC DL62x0 analog
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• Articles already contain the option ○ Option available - No option available
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Controller type DT62x0
Demodulator DL6220
Demodulator DL6230
Resolution static
0.004% FSO
0.0005% FSO
Resolution dynamic
0.02% FSO (5kHz)
0.005% FSO (5kHz)
Bandwidth
5 kHz (-3dB)
5 kHz (-3dB)
Bandwidth adjustable
to 20Hz
to 20Hz
Bandwidth digital output
max. 3.906 kSa/s
max. 3.906 kSa/s
Linearity (typ.)
≤0.05% FSO
≤0.025% FSO
Max. sensitivity deviation
≤0.1% FSO
≤0.1% FSO
Long term stability
≤0.02% FSO / month
≤0.02% FSO / month
Synchronous operation supported
DT6220 yes (within 4 channel DT6220)
yes (within 4 channel DT6220)
DT6230 yes
yes
Insulator measurement Temperature stability Temperature range (operation)
Sensor Controller
Temperature range (storage) Supply
no
no
200ppm
200ppm
-50 ... + 200 °C
-50 ... + 200 °C
+10 … +60°C
+10 … +60°C
-10 … +75°C
-10 … +75°C
DT6220 24VDC (12…36VDC)
24VDC (15…36VDC)
DT6230 24VDC (15…36VDC)
24VDC (15…36VDC)
per DL62x0 1.8W (typ.); 2.0 W (max.) Power consumption
3.1W (typ.)
DT6230 3.8W (typ.)
3.8W (typ.)
Analog output
Digital interface
1.9W (typ.); 2.2W (max.)
DT6220 3.1W (typ.)
0 … 10V (short circuit proof)
0 … 10V (short circuit proof)
4…20mA (load max. 500Ω)
4…20mA (load max. 500Ω)
DT6220 Ethernet
Ethernet
DT6230 Ethernet + EtherCAT
Ethernet + EtherCAT
Sensors
all sensors
all sensors
Sensor cable standard
CC cable ≤ 1m CCm cable = 1.4m CCg cable = 2m
CC cable ≤ 1m CCm cable = 1.4m CCg cable = 2m
Sensor cable (matched)
double / triple standard cable length
double / triple standard cable length
Trigger
TTL, 5V
TTL, 5V
FSO = Full Scale Output
Controller DT6220 DT6230 34
8
Demodulator DL62x0 DL62x0
DL62x0
DL62x0 25
0.5
0.5
8
8
90
52.3 41.5 8.35 22.5
22.5
0 0
12.5
0 3.6 10.5
0
8 125
Accessories
Cable CCmx,x / CCmx,x/90
Cable CCgx,x / CCgx,x/90
Low-outgassing cable up to 4m length, for applications in clean rooms
Low-outgassing cable up to 4.2m length, for applications in clean rooms, UHV and EUV
Robust cable up to 8m length, for industrial applications
-100°C to +200°C
-20°C to +80°C (permanent) -20°C to +100°C (10,000 h)
Temperature -100°C to +200°C stability Sensor cable with connector type C Outer diameter 3.1mm ±0.1mm
Connector type C/90
Ø5.4
Ø6
Cable with connector type B for sensors CS1 / CS1HP / CS2 / CSE2 / CS3 / CS5 / CS10 8
Cable with connector type C 27 for sensors CS005 / CS028.6/ CS05 / CSE05 / CS08 / CSE1 Version
3.1mm ±0.1mm
3x cable diameter during installation; 7x cable diameter for movement; 12x cable diameter recommend at continous movement
Ø7
Ø9.5
Bending radius
2.1mm ±0.1mm
Standard length 1m
37
13.7 1 x straight / 1 x 90° connector CCgx,xC 17.5 CCx,xC/90 CCmx,xC/90 CCgx,xC/90
2 x straight connector
±0.1 (CC/ CCg) Type Ø3.1CCx,xC CCmx,xC Ø2.1 ±0.1 (CCm ) Standard 1m •
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1.4m
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2m
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8m
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CCgx,xB/90
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6m
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CCmx,xB/90
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4.2m
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4m
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1 x straight / 1 x 90° connector CCx,xB/90
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3m
16
2 x straight connector Ø5,4 CCmx,xB CCgx,xB Ø6
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2.8m
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CCx,xB
16,9
Description
Cable CCx,x / CCx,x/90
13,1
Sensor cable
capaNCDT
Ø4
20
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Connector type C/90
Sensor cable with connector type C
Ø4
8.6
16,9
8
27 37
13,1
Ø7
Ø9.5
Ø6
Ø5.4
Standard length 1m
13.7 17.5
Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm )
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Sensor cable with connector type B
Ø5,4 Ø6
Connector type B/90
Standard length 1m
27
30.5
20.5
Ø7
27 37
Ø9.5
Ø7
Ø9.5
25
37
Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm ) Ø7 Ø10
Accessories
capaNCDT
MC2.5 Micrometer for sensor calibration, range 0 - 2.5mm, Resolution 0.1µm. Suitable for sensors CS005 to CS2 MC25D Digital micrometer for sensor calibration, range 0 - 25mm, adjustable offset (zero). Suitable for all sensors. HV/B Vacuum feed through triaxial UHV/B Vacuum feed through triaxial for ultra-high vacuum
6110
6200
6500
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PC6200-3/4 Power-/trigger cable, 4 pin, 3m SCAC3/4 Signal output cable, multi Sensor cable with(necessary connectorfor type B channel applications), 4 pin, 3m Connector type B/90
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1m3m SCAC3/5 Signal output cable, Standard analog,length 5 pin,
Ø7
Ø9.5
Ø7
Ø9.5
CA5 Preamplifier cable 5 pin, 5m
20.5
25
SC6000-1,0 Synchronization cable, 5 pin, 1m
37 Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm )
27
37
30.5
PS2020 Power supply for DIN rail mounting; Input 230VAC (115VAC); Output 24VDC / 2.5 A; L/W/H 120x120x40mm 27
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UHV/B Vacuum feed triax weldable (Art.-no. 0323346)
HV/B Vacuum feed through (Art.-no. 0323050)
25
2
1.75
25
25
ø9.4
ø9.4 ø9.4
ø13.50h6
25
1.75
Weld seam
M9x0.5 M9x0.5
UHV/B Vacuum feed triax screwable (Art.-no. 0323370)
Weld seam
M9x0.5 M9x0.5
WS11
1.75
Max. leak rate 1x10e-9 mbar · l s-1, compatible withWS11 connector type B ø13.50h6
ø9.4
ø34 (flange ø34 standard (flange CF16) standard CF16)
6
25
-1
-9 Max. leak rate 1x10e mbar · l s-1, compatible with connector type B UHV/B Vacuum feed triax screwable (Art.-no. 0323370)
UHV/B Vacuum 13.5 feed triax with flange CF16 (Art.-no. 0323349) 13.5
WS11
Max. leak rate 1x10e mbar · l s , compatible with connector type B ø13.50h6 WS11 -9
-1
Max. leak rate 1x10e-7 feed mbar · triax l s-1, compatible with connector type B UHV/B Vacuum with flange CF16 (Art.-no. 0323349)
6
ø9.4 ø9.4
ø13.50h6
Max. leak rate 1x10e mbar · l s , compatible with connector type B max. 17 -7
25
1.75
9
2
UHV/B Vacuum feed triax weldable (Art.-no. 0323346)
9
max. 17
Ø14
Ø8.8 Ø8.8
34
M10x0.75
Ø14
WS12 WS12
M10x0.75 HV/B Vacuum feed through (Art.-no. 0323050)
M9x0.5 M9x0.5
34
Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B
Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B
SCA3/5 Signal output cable (Art.-no. 2902112)
SCA3/4 Signal output cable (Art.-no. 2902104) Cable length ±1%
approx. 35.6
Ø8.9 Ø7
10 approx. 35.6 100
43.5
Cable length ±1% 100
CA5 Preamplifier cable (Art.-no. 2903180)
SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Cable length ±1%
Cable length ±1%
11
CA5 Preamplifier cable (Art.-no. 2903180)
Cable length ±1%
10 Ø7
approx. 35.6 10 approx. 35.6
Ø8.9
Ø7 Ø7
Ø8.9
approx. 35.6
CA5 Preamplifier cable (Art.-no. 2903180) approx. 35.6
Cable length ±1%
10 approx. 35.6 Ø7
Ø4.9 ±0.25 Ø4.9 ±0.25 Ø4.9 ±0.25
Ø7
Ø8.9
SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Cable length ±1% 10
Ø8.9
Ø7
Ø8.9
Cable length ±1% 10
Ø4.3 ±0.25 Ø4.3 ±0.25
43.5
100
43.5 SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Ø8.9
150
10 approx. 35.6
Ø4.3 ±0.25
11
Ø5.5 ±0.3 Ø5.5 ±0.3
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881)
Ø5.5 ±0.3
Ø11.5
Ø9 Ø9
Ø11.5
approx. 35.6
150
Cable length ±1%
Cable length ±1%
11 Ø9
10
Cable length ±1%
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881)
Ø11.5
approx. 35.6
Ø4.3 ±0.25 Ø4.3 ±0.25 Ø4.3 ±0.25
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881) 10
10
50
150
Cable length ±1%
SCA3/5 Signal output cable (Art.-no. 2902112)
Ø8.9 Ø7
Ø4.3 ±0.25 Ø4.3 ±0.25
approx. 35.6
Cable length ±1%
Ø4.3 ±0.25
Ø7
approx. 35.6
50
SCA3/5 Signal output cable (Art.-no. 2902112)
Ø8.9 Ø7
Ø7 10
10 Ø8.9
Cable length ±1%
50
Cable length ±1%
SCA3/4 Signal output cable (Art.-no. 2902104) Ø7
Ø8.9
Ø8.9
SCA3/4 Signal output cable (Art.-no. 2902104)
Modifications reserved / Y9766319-F051114MLO
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MICRO-EPSILON USA 8120 Brownleigh Dr. · Raleigh, NC 27617 / USA Phone +1/919/787-9707 · Fax +1/919/787-9706
[email protected] · www.micro-epsilon.com
