Transcript
MSA-100-3D Micro System Analyzer
Complex motion patterns of micro structures as MEMS, precision mechanics and biological systems require acquisition and analysis of the complete motion vector with high resolution both for out-of-plane and in-plane components. The MSA-100-3D effectively meets this requirement by a revolutionary new approach in laser Doppler vibrometry deriving genuine real-time 3D vibration data in one common data set.
Two configurations of the Micro System Analyzer are available. The MSA-100-3D measures 3D vibration data on spot locations. The MSA-100-3DSV features a software-controlled high-precision XY stage and allows automated full-field scanning measurements. Meaningful visualization of 3D deflection shapes and extensive data analysis is provided by Polytec’s PSV Software.
Features and Benefits ■■ Real-time measurement with high bandwidth ■■ Sub-pm displacement resolution reveals important details ■■ Single-Point and full-field scanning measurements ■■ Frequency range up to 25 MHz ■■ Small spot size of <4 μm for high lateral resolution ■■ Large stand-off distance of 38 mm ■■ Probe station compatible
MSA-100-3D Micro System Analyzer 3D Vibration Measurement for MEMS & Microsystems Preliminary Datasheet
Technical Data Principal Configurations Sensor head unit
MSA-100-3D
MSA-100-3DSV
Single-Point 3D Vibrometer
Scanning 3D Vibrometer
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Frontend unit /
Microscope optics for best lateral resolution with spot size <4 μm Focus block with 50 mm travel range for traversing the sensor head unit in the Z axis Integrated LED sample illumination
Installed in a system cabinet for 19” electrical equipment: ■■ MSA-F-100-3D Vibrometer front end with digital decoder technology ■■ MSA-W-100-3D Data Management System
Data management system Stand
Rigid stand for interfacing the sensor head unit to an optical table or breadboard
Prober compatibility
Compatible to manual, automatic and vacuum probestations
xy Stage
Manual stage (optional)
A-PST-A010 Precision XY stage: ■■ Travel range: 50 mm x 50 mm ■■ Tip/tilt adjustment ■■ Unidirectional repeatability: typ. 0.3 μm ■■ Load capacity: max. 30N
Software
VibSoft-1004 Software Package for data acquisition and analysis
PSV Scanning Vibrometer Software for data acquisition and analysis
For available accessories visit our website www.polytec.com
Sensor Head Unit Configuration
Single measurement beam, three direction sensitive detectors
Laser source
DPSS, 532 nm, visible green laser beam
Laser output power
<5 mW visible output power
Laser safety class
Class 2M
Stand-off distance
38 mm
Spot diameter
<4 µm
Depth of focus
±10 µm
Weight
12.5 kg ; 16 kg with focusing unit and mounting adapter
Camera
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Laser Radiation Do not stare into the beam or view directly with optical instruments Class 2M Laser Product According to IEC/EN 60825-1 (2008) Complies with 21 CFR 1040.10 and 1040.11 except for deviations pursuant to Laser Notice no. 50, dated 24 June 2007 P 5 mW/cw; = 532 nm
Two integrated digital cameras for displaying measurement and large overview area MAIN (measurement area): field of view (mm²) = 0.94 x 0.71, resolution (px) = 1,296 x 966 AUX (overview area): field of view (mm²) = 3.7 x 2.7, resolution (px) =782 x 582
Front End Configurations
MSA-100-3D-M
MSA-100-3D-V
fmax
2.5 MHz
25 MHz
Number of ranges
13 velocity ranges
13 velocity ranges
vmax
0.001 m/s … 10 m/s, range dependent
0.001 m/s … 10 m/s, range dependent
Velocity resolution, typical value1
0.005 (µm/s)/√Hz … 1 (µm/s)/√Hz range dependent, frequency dependent
0.005 (µm/s)/√Hz …. 2 (µm/s)/√Hz range dependent, frequency dependent
1 The typical value refers to the center of the operating frequency range
Technical specifications are subject to change without notice. OM_DS_MSA-100-3D_2014_04_500_E
General Specifications Configuration
100 VAC ... 240 VAC ±10%, 50/60 Hz; overall max. 800 W
Environmental conditions
Operating temperature: +18 °C ... +28 °C (64.4 °F ... 82.4 °F); Storage temperature: –10 °C ... +65 °C (14 °F ... 149 °F); Relative humidity: max. 80%, non-condensing
Polytec GmbH (Germany) Polytec-Platz 1-7 76337 Waldbronn Tel. +49 7243 604-0
[email protected] Polytec GmbH (Germany) Vertriebs- und Beratungsbüro Schwarzschildstraße 1 12489 Berlin Tel. +49 30 6392-5140
Polytec, Inc. (USA) North American Headquarters 16400 Bake Parkway Suites 150 & 200 Irvine, CA 92618 Tel. +1 949 943-3033
[email protected] Central Office 1046 Baker Road Dexter, MI 48130 Tel. +1 734 253-9428 East Coast Office 25 South Street, Suite A Hopkinton, MA 01748 Tel. +1 508 417-1040
Polytec Ltd. (Great Britain) Lambda House Batford Mill Harpenden, Herts AL5 5BZ Tel. +44 1582 711670
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Polytec Japan Arena Tower, 13th floor 3-1-9, Shinyokohama Kohoku-ku, Yokohama-shi Kanagawa 222-0033 Tel. +81 45 478-6980
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Polytec France S.A.S. Bâtiment Orion – 1er étage 39, rue Louveau 92320 Châtillon Tel. +33 1 496569-00
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Polytec South-East Asia Pte Ltd Blk 4010 Ang Mo Kio Ave 10 #06-06 TechPlace 1 Singapore 569626 Tel. +65 64510886
[email protected]
www.polytec.com
