Transcript
W W W . M K S I N S T . C O M
Power Solutions
Optima® OPT-100 DC PLASMA GENERATOR 10 kW DC POWER FOR PLASMA APPLICATIONS Today’s advanced sputtering processes require speed, control, accuracy, improved reliability and sophisticated arc management. Building on the production-proven DCG series, the Optima® is the next generation of MKS high performance DC Plasma power supply systems for Physical Vapor Deposition (PVD) processes. Single 10kW output as well as dual 5kW output are available. Process reliability and performance are provided by a variety of output regulation modes, user-adjustable settings and control options. MKS Optima DC generators meet the demanding power requirements for a variety of thin film applications including; semiconductor, data storage, solar cell and industrial coatings.
Features & Benefits • • • • • • •
DSP-Based Control ±0.1% Linearity and Accuracy <4mJ Micro Arc Energy 3U Rack Height Forced Air Cooling Interface Flexibility Multiple Run Modes
Enabling • Higher Yields • Flexible Operation
Specifications and Ordering Information Power Output 10kW Power Modules 5kW, 10kW, Dual 5kW Maximum Output Voltage 800V nominal (higher voltages also available) Power & Current Limits Power 10.5kW for 10kW output; proportional at other power levels Current 5A to 40A; depending on configuration Regulation Modes Volts, Amps, Watts Output Control Modes Ramping, Run Time, Joule, Sequence, Constant Run Load Regulation ±0.1% for 2:1 load impedance range Line Regulation ±0.1% for either a ±10% line voltage change or ±2% line frequency change Linearity/Accuracy Independent of Regulation Mode ±0.1%: 10-100% of rated output In Watts Mode ±0.25%: 1-10% of rated output Arc Control Proportional Arc Detection Standard: Senses hard arcs within 20µsec, independent of set point. Bipolar Passive Arc Control BPAC: Senses micro arcs instantaneously ArcKill™ Option Senses arcs within 50nsec Power on Delay After Arc Standard: Programmable from 200µs to 50msec. ArcKill™ option: <100µs Arc Energy Standard: <0.4J for hard arc, <4mJ for micro arc Input Voltage & Current AC Input (3-phase) 10kW & Dual 5kW Line to Line Nom/Max 180 - 230 V 35A/45A 360 - 440 V 19A/25A 440 - 504 V 16A/20A Frequency 50 to 60Hz ±2% Line-to-Output Efficiency >90% Input Power Factor 0.8 at maximum power output Front Panels Fully Functional Provides complete control and monitoring from the master unit Remote Provides complete remote control and monitoring functions Blank Three LEDs indicate AC On, DC On, and Fault. Available for master or slave units. Dimensions* (H x W x D) 5.22” x 18.9” x 24.8” (132.5 x 480 x 631 mm.) *including rack mount & handles Cooling System Forced air; front panel & right side in, rear panel out Weight 10kW/Dual 5kW: 48 lbs (22.5 kg) Safety Compliance Tested to and complies with the European Council Directives, EMC and Low Voltage - 89/336/EEC and 73/23/EEC. NRTL Listed to UL61010-1 and CSA C22.2 No. 61010-1 Shock Resistance (certified to meet) IEC 68-2-29 test Eb for bump; IEC 68-2-6 test Fc for vibration; IEC 68-2-31 test Ec for topple Environmental Conditions Temperature Operational: 10 to 40°C, Non-Operational: -25 to 70°C Relative Humidity Operational: 20 to 90%, Non-Operational: 5 to 100% Maximum Operating Altitude 3500 meters above sea level I/O Control 15-pin and 37-pin analog, DeviceNet™, Profibus® Master Std. Connectors Digital Interface 9-pin Type D with RS-232-422, ENI protocol Output UHF female, Terminal Block AC Input 3 phase and ground terminal strip Interlock 2 terminal PC header (mating connector supplied) Standard Rack Mounting EIA or JIS 19”
Please contact your local MKS office for price and availability information.
OPT-100 - 11/15 © 2007 MKS Instruments, Inc. All rights reserved.
MKS Instruments, Inc. Global Headquarters
MKS Instruments, Inc. Power Solutions
2 Tech Drive, Suite 201 Andover, MA 01810
100 Highpower Road Rochester, NY 14623
Tel: 978.645.5500 Tel: 800.227.8766 (in USA) Web: www.mksinst.com
Tel: 585.427.8300
MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark and Optima® is a registered trademark of MKS Instruments, Inc, Andover, MA. DeviceNet™ is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL. Profibus® is a registered trademark of Profibus Organization.
