Transcript
218
Light Sources
TECHNICAL REFERENCE
Oriel Flood Exposure Sources
ARC SOURCES
DEUTERIUM SOURCES
CALIBRATION SOURCES
• High intensity outputs • Highly uniform, large collimated beams • Efficient out of band rejection • Timed exposures
97436 500 W Oriel Flood Exposure Source, 6 x 6 inch Beam Size (9.5 inch high pedestal not shown).
We offer 500 and 1000 W Flood Exposure Sources for the near UV (350 - 450 nm), mid UV (260 - 320 nm) and deep UV (220 260 nm). NUV is designed to expose most photoresists, MUV is used for polymer cross-linking and novel resists, and DUV for deep ultraviolet studies. Our illuminators irradiate samples from 2.13 x 2.13 inches up to 10 x 10 inches (54x54 to 254x254 mm).
ACCESSORIES FOR ORIEL LIGHT SOURCES
PHOTOLITHOGRAPHY INSTRUMENTS
SOLAR SIMULATORS
MONOCHROMATOR AND FIBER ILLUMINATORS
INCANDESCENT SOURCES
Three Spectral Ranges The spectral output of the illuminator is determined by three factors:
• The dichroic mirror • The collimating lens NUV sources run an Hg lamp, use a BK 7 glass lens (which does not transmit below 350 nm), and have the appropriate dichroic mirrors. MUV and DUV sources run an HgXe lamp, use a UV grade fused silica lens (which transmits down to 200 nm), and have the appropriate dichroics. If you need the flexibility to work in all regions, select a DUV source and purchase additional dichroic mirrors for the respective regions. PROPRIETARY BEAM HOMOGENIZER
45° DICHROIC MIRROR
Illuminator Housing Fig. 1 shows the beam path of the housing. An efficient ellipsoidal reflector, coated with AlSiO for the NUV or enhanced Rhodium for MUV and DUV systems, collects up to 70% of the arc lamp output. A 45° primary dichroic mirror spectrally reflects the light after passing through a proprietary design beam homogenizer. A shutter may be opened and closed manually with a switch on the housing side panel or via the 68955 Hand-Held Switch. For automated exposure control, we offer the 68951 Digital Exposure Controller or 68945 Digital Timer (see page 207). Upon request, the housing may also be wired to operate the shutter via a computer logic level.
• The type of lamp
ABSORPTIVE HEAT SINK
What Makes Up an Oriel Flood Exposure System?
Each housing contains three interlock systems. Opening the housing door will trigger an electronic interlock switch to automatically interrupt power to the system. This prevents inadvertent operator exposure to the lamp. A thermal interlock shuts down the system if the temperature exceeds the level for safe operation. A third interlock shuts down the system if the lamp's cooling fan fails. See page 207 for dimensional diagrams of all the illuminator housings.
SHUTTER
45° MIRROR
ELLIPSOIDAL REFLECTOR LAMP
COLLIMATING LENS
Fig. 1 Optical configuration of 97436 500 W Oriel Flood Exposure Source 6 x 6 Beam Size.
Phone: 1-800-222-6440 • Fax: 1-949-253-1680
219
Light Sources 200
Lamp
TECHNICAL REFERENCE
160 140 120 100 80 60 40 20 0.0 200
300
400
500
600
700
800
900
CALIBRATION SOURCES
The MUV and DUV sources operate Hg(Xe) short arc lamps, which are similar to Hg lamps but contain more xenon gas than just the starter gas. The additional xenon enhances the short wave UV making it ideal for use below 350 nm. We supply ozone free Hg(Xe) lamps with the NUV and MUV sources, and UV enhanced models for the DUV models.
SPECTRAL IRRADIANCE (µW cm-2 nm-1) at 50 cm Distance
180
The NUV sources run Hg short arc lamps; these contain a precise amount of mercury and either xenon or argon, which act as a starter gas. Strong mercury lines through the ultraviolet and visible wavelengths dominate their output spectrum. The 365 nm line makes it ideal for use in the NUV.
WAVELENGTH (nm)
Fig. 2 Typical output of 6285 500 W Hg Lamp
Our 69900 Series Power Supplies are ultra stable supplies that send a low level pulse to the ignitor. Once the arc is established, the supply controls the lamp directly. Their highly efficient switch circuitry operates the lamp under extremely tight current control. This results in low ripple and high line voltage regulation.
Table 1 Probe Specifications For These Flood Spectral Model Exposure Sources Region
Peak Wavelength Sensitivity
Sensor Area (mm)
NUV
320 - 475 (nm) 400 nm
33 x 33
Optional Accessories
2,5 x 10-7 to 8,75 x 10-1
84415
NUV
326 - 401 (nm) 365 nm
33 x 33
Digital Exposure Controller and Digital Timer
5,2 x 10-7 to 1,8 x 10+0
84414
MUV
185 - 320 (nm) 280 nm
8,3 x 10-8 to 8,3 x 10-4
60 x 43
84413
DUV
185 - 320 (nm) 240 nm
8,3 x 10-8 to 8,3 x 10-4
60 x 43
Filters and Filter Mounting Hardware
Safety Considerations These sources, particularly the DUV and MUV systems, emit dangerous levels of UV radiation. Always wear protective clothing, gloves and a faceshield when working around these sources (see page 246 for UV safety equipment).
Power Meter and Probes
PHOTOLITHOGRAPHY INSTRUMENTS ACCESSORIES FOR ORIEL LIGHT SOURCES
Email:
[email protected] • Web: newport.com
SOLAR SIMULATORS
You may wish to monitor the intensity and uniformity of your output beam, especially if you have chosen not to purchase a Digital Exposure Controller. Also, during installation of a new lamp, you should align your lamp for optimal irradiance. In order to do this, you need a power meter and probe for your specific wavelength region, to determine when you have the lamp in the correct position.You may wish to monitor the intensity and uniformity of your output beam, especially if you have chosen not to purchase a Digital Exposure Controller. Also, during installation of a new lamp, you should align your lamp for optimal irradiance. In order to do this, you need a power meter and probe for your specific wavelength region, to determine when you have the lamp in the correct position.
MONOCHROMATOR AND FIBER ILLUMINATORS
These sources produce a specific broadband spectral output. Optional narrowband filter assemblies enable you to isolate specific, narrowband outputs, such as 365 nm (i-line), and 436 nm (g-line). For 500 W Sources, purchase the 87032 Filter Mount; 1000 W sources include the filter mount.
INCANDESCENT SOURCES
The 68951 is a light intensity controller and digital timer in one. It interfaces with the power supply to provide a constant level of output to within ±1%. The Digital Timer portion of the 68951 (which is also available as a stand alone device under model 68945) controls the split-blade shutter and is recommended for accurate and consistent timed exposures. For complete details on both instruments, refer to page 207.
ARC SOURCES
84416
DEUTERIUM SOURCES
Power Supply
220
Light Sources
TECHNICAL REFERENCE
Ordering Information Flood Exposure Sources
Lamp Type CALIBRATION SOURCES
500 W Hg
DEUTERIUM SOURCES
500 W Hg(Xe)
Beam Size in. (mm)
Collimation Angle
2.13 x 2.13 (54 x 54)
± 4.6°
2 (51)
266 mW cm-2
97434
4.25 x 4.25 (108 x 108)
± 2.6°
3 (76)
76 mW cm-2
97435
6.0 x 6.0 (152 x 152)
± 1.8°
4 (101)
38 mW cm-2
97436
8.0 x 8.0 (203 x 203)
± 1.4°
5.5 (140)
22 mW cm-2
97437
2.13 x 2.13 (54 x 54)
± 4.6°
2 (51)
28 mW cm-2
97530
121 mW cm-2
97531
4.25 x 4.25 (108 x 108)
± 2.6°
3 (76)
8 mW cm-2
97532
35 mW cm-2
97533
6.0 x 6.0 (152 x 152)
± 1.8°
4 (101)
4 mW cm-2
97534
17 mW cm-2
97535
8.0 x 8.0 (203 x 203)
± 1.4°
5.5 (140)
3 mW cm-2
97536
9 mW cm-2
97537
2.13 x 2.13 (54 x 54)
± 6.6°
2 (51)
59 mW cm-2
92511
224 mW cm-2
92512
305 mW cm-2
92510
4.25 x 4.25 (108 x 108)
± 3.8°
3 (76)
17 mW cm-2
92521
64 mW cm-2
92522
87 mW cm-2
92520
6.0 x 6.0 (152 x 152)
± 2.5°
4 (101)
8,4 mW cm-2
92531
34 mW cm-2
92532
43 mW cm-2
92530
8.0 x 8.0 (203 x 203)
± 2.0°
5.5 (140)
4,9 mW cm-2
92541
18 mW cm-2
92542
25 mW cm-2
92540
10.0 x 10.0 (254 x 254)
± 1.6°
7 (178)
3,5 mW cm-2
92551
12 mW cm-2
92552
17 mW cm-2
92550
220 - 260 nm
260 - 320 nm
350 - 450 nm
Typical Output Model
Typical Output Model
Typical Output Model
Note: These figures are nominal. They are based on integrated spectral radiometric measurements of similar sources. These do not necessarily correspond with measurements by various broadband instruments with varying spectral response. Beam Uniformity: ± 5% over the specified area. This is measured at a plane at the recommended working distance from the collimating lens. Uniformity will degrade somewhat at other distances.
Replacement Lamps
Meter
Model
Spectral Range
Peak Wavelength
Model
Model
Description
320 - 475 nm
400 nm
84416
87032
326 - 401 nm
365 nm
84415
Filter Mount Assembly (for 500 W Flood Exposure Sources)
185 - 320 nm
280 nm
84414
87038
g-line (436 nm)
84413
87066
i-line (365 nm)
82000
Flood Source 1 Year Extended Care Plan
68951
Digital Exposure Controller
68945
Digital Timer
68955
Remote Switch
ACCESSORIES FOR ORIEL LIGHT SOURCES
PHOTOLITHOGRAPHY INSTRUMENTS
MONOCHROMATOR AND FIBER ILLUMINATORS
Availability – Guaranteed on select items @ newport.com
SOLAR SIMULATORS
INCANDESCENT SOURCES
ARC SOURCES
1000 W Hg(Xe)
Spectral Region
Working Distance in. (mm)
Lamp Type
Model
Description
6285
500 W Hg
84410
Power Meter
66142
500 W Hg(Xe)
Accessories
6293
1000 W Hg(Xe)
6295NS
1000 W Hg(Xe), OF
For 500 W sources, you will also need the 87032 Filter Mounting Assembly; 1000 W sources include a filter mount.
Calibrated Probes
185 - 320 nm
240 nm
Phone: 1-800-222-6440 • Fax: 1-949-253-1680
Light Sources
221
Oriel Flood Exposure Sources Drawings TECHNICAL REFERENCE
Here we show dimensional drawings of the Flood Exposure Sources described on the previous page. 2.13X2.13 INCH SYSTEMS
4.25X4.25 INCH SYSTEMS 21.95 (558)
18.66
CALIBRATION SOURCES
12.0
(474)
(305)
8.70 (221)
(696)
25.36
WARNING! ULTRAVIOL
ET LIGHT This illuminator HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperatures time for lamp . before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSION area.
(644)
HAZARD HIGH VOLTAGE
WARNING! ULTRAVIOL
ET LIGHT This illuminator HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very Allow adequate
high temperature time for lamp s. before opening to cool door.
Operate
OZONE
in well ventilated
WARNING!
LAMP EXPLOSIO area. N HAZARD HIGH VOLTAGE
7.75
HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLET DELAYED Exposure SEVERE may LIGHT. Use protective EYE cause AND SKIN eye and BURNS. skin covering.
LAMP ON
WARNING!
LAMP ON/OFF
HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLE DELAYED Exposure SEVERE may cause T LIGHT. Use protective EYE AND SKIN BURNS. eye and skin covering.
SHUTTE SHUTTE R OPEN/CL OSE
REPLAC
(197)
R OPEN LAMP RESET
E LAMP
DEUTERIUM SOURCES
27.41
LAMP HOURS
7.73
LAMP ON LAMP ON/OFF
SHUTTE SHUTTE R OPEN/C LOSE
REPLAC
(196)
R OPEN LAMP RESET
E LAMP
9.50
LAMP HOURS
9.50
WORK PLANE 7.76 1.25 MIN. (197) 2.50 MAX.
9.00
(241)
(229)
6.00 7.75 (152)
6.25
(152)
7.75
8X8 INCH SYSTEMS (197)
(557)
7.75
(751)
(197)
(197)
12.19
11.91
(310)
(303)
MONOCHROMATOR AND FIBER ILLUMINATORS
7.75
29.56
7.75
21.93
(197)
INCANDESCENT SOURCES
6X6 INCH SYSTEMS
7.75
MOUNTING SLOTS 0.281 (7.13) DIA.
MOUNTING HOLES 0.281 (7.13) DIA.
MOUNTING HOLES 0.281 (7.13) DIA.
(159)
8.41 (214)
(197)
6.00 (197)
WORK PLANE 2.00 MIN. 9.37 (238) 4.00 MAX.
9.00 (229)
LAMP ON LAMP ON/OFF
SHUTTER SHUTTER OPEN/CL OSE
REPLACE
OPEN LAMP RESET LAMP LAMP HOURS
LAMP ON
WARNING! ULTRAVIOLE
LAMP ON/OFF
SHUTTE SHUTTE R OPEN/C LOSE
REPLAC
T LIGHT This illuminator HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSION area.
R OPEN LAMP RESET
E LAMP LAMP HOURS
HAZARD HIGH VOLTAGE
WARNING! ULTRAVIOL
ET LIGHT This illuminator HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperature time for lamp s. before opening to cool door. Operate
OZONE
in well ventilated
LAMP EXPLOSIO
area.
N HAZARD HIGH VOLTAGE
33.22
29.23 (742) WARNING! HIGH
This illuminator INTENSITY INVISIBLE emits DELAYED Exposure ULTRAVIOLE SEVERE may cause T LIGHT. Use protective EYE AND SKIN BURNS. eye and skin covering.
12.0
WARNING! HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLET DELAYED Exposure SEVERE may LIGHT. Use protective EYE cause AND SKIN eye and BURNS. skin covering.
(305)
6.00 (152)
9.0 (229)
9.50 (241)
WORK PLANE 3.00 MIN. 11.23 5.50 (285) MAX.
6.00 8.75 (152)
6.36
(222)
(162)
6.00 (152)
8.33 (212)
Fig. 3 Dimensional diagram of 500 W Flood Exposure Housings.
Email:
[email protected] • Web: newport.com
8.06 (205)
MOUNTING HOLES 0.281 (7.13) DIA.
ACCESSORIES FOR ORIEL LIGHT SOURCES
7.75
WORK PLANE 4.0 MIN. 12.0 7.0 MAX. (305)
PHOTOLITHOGRAPHY INSTRUMENTS
MOUNTING HOLES 0.281 (7.13) DIA.
SOLAR SIMULATORS
(844)
(197)
ARC SOURCES
(241)
Light Sources
TECHNICAL REFERENCE
222
A 11.0 (279)
10.6
CALIBRATION SOURCES
2X2 4X4
WARNING! ULTRAVIOLET
C
D
26.20 7.25
E MIN. MAX. 7.25 11.06 1.25 2.0
(665)
(184)
(281)
A
B
(184)
(32)
F 8.87
20.5
(51)
(225)
(521)
8.12
2.0
4.0
10.99
19.0
(758)
(206)
(51)
(102)
(279)
(483)
(276)
(216)
HAZARD HIGH VOLTAGE
WARNIN G! HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLET DELAYED Exposure SEVERE may LIGHT. Use protective EYE cause AND SKIN eye and BURNS. skin covering.
C
G REPLACE
E (WORK PLANE)
11.90
LAMP ON SHUTTER SHUTTER OPEN/CLO SE
OPEN LAMP RESET LAMP
(302)
LAMP HOURS
D 11.00 12.31 (279)
12.75 (324)
F
ARC SOURCES
(313)
6x6 INCH HOUSING
INCANDESCENT SOURCES
35.46 11.0 10.63
16.50
(270)
MONOCHROMATOR AND FIBER ILLUMINATORS SOLAR SIMULATORS PHOTOLITHOGRAPHY INSTRUMENTS ACCESSORIES FOR ORIEL LIGHT SOURCES
(901)
(279) (419)
WARNING! ULTRAVIO
LET
This illuminator LIGHT HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperature time for lamp s. before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSIO area.
N HAZARD HIGH VOLTAGE
19.0 (482) WARNING! HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLE DELAYED Exposure SEVERE may T LIGHT. Use protective EYE cause AND SKIN eye and BURNS. skin covering.
LAMP ON LAMP ON/OFF
SHUTTE SHUTTE R OPEN/C LOSE
REPLAC
11.50
R OPEN LAMP RESET
E LAMP
(292)
LAMP HOURS
12.00 (305)
MOUNTING HOLES 0.281 (7.13) DIA.
12.75
11.0
(324)
(279)
12.31
15.37
(313)
(390)
G
29.83 10.88 8.50
This illuminator LIGHT HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATUR at very high E Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSION area.
LAMP ON/OFF
DEUTERIUM SOURCES
1000 W SYSTEMS BEAM SIZES
B
(269)
** MOUNTING SLOTS 0.281 (7.13) DIA.
Fig. 4 Dimensional diagram of 2 x 2 to 6 x 6 inch 1000 W Flood Exposure Housings.
Phone: 1-800-222-6440 • Fax: 1-949-253-1680
WORK PLANE 3.00 MIN. 7.34 5.50 MAX (186) *
Light Sources
223
TECHNICAL REFERENCE
8x8 INCH HOUSING 38.34 (974)
11.0 (279)
10.50 19.13
(267)
(486)
CALIBRATION SOURCES
WARNING! ULTRAVIOLE
T LIGHT This illuminator HIGH INTENSITY INVISIBLE emits DELAYED Exposure mayULTRAVIOLET LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATUR at very high E Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated LAMP EXPLOSION area.
20.38
HAZARD HIGH VOLTAGE
(518)
LAMP ON LAMP ON/OFF
SHUTTER SHUTTER OPEN/CLO SE
REPLACE
OPEN LAMP RESET LAMP LAMP HOURS
DEUTERIUM SOURCES
15.50
WARNIN G! HIGH INTENSITY This illuminator INVISIBLE emits ULTRAVIOLET DELAYED Exposure SEVERE may LIGHT. Use protective EYE cause AND SKIN eye and BURNS. skin covering.
(394)
15.50 (394)
14.00 (356)
MOUNTING HOLES 0.281 (7.13) DIA.
WORK PLANE 4.00 MIN. 7.00 MAX. *
12.00 16.26
(305)
12.00
(413)
(305)
**
ARC SOURCES
* THE DISTANCE FROM THE VERTEX OF THE LENS TO THE WORK PLANE. ** THE DISTANCE FROM THE CENTER OF THE BEAM PATH TO THE CENTER OF THE MOUNTING HOLE.
10x10 INCH HOUSING
47.33 (1202)
10.50
18.50
(267)
(470)
INCANDESCENT SOURCES
11.0 (279)
MONOCHROMATOR AND FIBER ILLUMINATORS
WARNING! ULTRAVIOLE
T LIGHT This illuminator HIGH INTENSITY INVISIBLE emits ULTRAVIOLE DELAYED Exposure may T LIGHT. cause SEVERE Use protective EYE AND SKIN BURNS. eye and skin covering. Lamps runTEMPERATURE at very high Allow adequate temperatures. time for lamp before opening to cool door. Operate OZONE in well ventilated area. LAMP EXPLOSION HAZARD HIGH VOLTAGE
LAMP ON LAMP ON/OFF
SHUTTER SHUTTER OPEN/CLO SE
REPLACE
OPEN LAMP RESET LAMP LAMP HOURS
32.19 (818)
SOLAR SIMULATORS
18.0
WARNING! HIGH
This illuminator INTENSITY INVISIBLE emits DELAYED Exposure ULTRAVIOL SEVERE may cause ET LIGHT. Use protective EYE AND SKIN BURNS. eye and skin covering.
(457)
16.0 (406)
12.0 (305)
MOUNTING SLOTS 0.281 (7.13) DIA.
PHOTOLITHOGRAPHY INSTRUMENTS
WORK PLANE 5.00 MIN. 9.5 8.50 MAX. (241) * 15.6 (396)
18.0
8.16
(457)
(207)
**
MOUNTING HOLES 0.281 (7.13) DIA.
Email:
[email protected] • Web: newport.com
WEB
See our website for more info
ACCESSORIES FOR ORIEL LIGHT SOURCES
Fig. 5 Dimensional diagram of 8 x 8 and 10 x 10 inch 1000 W Flood Exposure Housings.
