Transcript
More Precision capaNCDT // Capacitive displacement sensors and systems
Modular multi-channel measuring system
capaNCDT 6200
-M odular, expandable for up to 4 channels - Ethernet / Ethercat interface -E asy configuration using the web browser -R esolution up to 0.0005% FSO - Bandwidth: up to 20kHz - Digital data rate: 4 x 3.9kSa/s - Trigger feature - Synchronous operation supported
System structure The new capaNCDT 6200 is an innovative measuring system that offers excellent performance at a very attractive price. Its modular design ensures that you can easily combine up to 4 channels. The measuring system includes a control unit and a demodulator for each sensor. Its Ethernet interface supports fast and easy configuration through a web browser. The modulator DL6230 is available for high resolution measurements. The capaNCDT 6222 is used for high speed measurements up to 20kHz. The compact controller can be used as benchtop unit, it can be mounted to the wall or on a tophat rail. The capaNCDT 6200 is compatible with all Micro-Epsilon sensors.
Web interface The controller is configured by the Ethernet which calls the web interface. Up to 8 channels can be visualised and combined arithmetically.
Accessories: signal output cable power supply cable DIN rail brackets mounting plates for wall mounting
Trigger
Power supply
12...36 V
Signal conditioning · Demodulation · Analogue filter adjustable · Zero point adjustable · A/D converter
Signal conditioning · Demodulation · Analogue filter adjustable · Zero point adjustable · A/D converter
Power/ internal bus Oscillator
Sync out
Clock/Sync
(only DT6230)
DT62xx
DL62xx
DL62xx
Sensor
Current 4...20mA
Voltage 0...10V
Sensor Preamplifier
Voltage conditioning
Sync in
(only DT6230)
Current 4...20mA
EtherCAT
Microcontroller Interface
Voltage 0...10V
Block diagram (only DT6230)
A measuring system consists of: control unit DT62xx demodulator DL62xx sensor sensor cable power supply cable Ethernet cable EtherCAT cable signal output cable
Ethernet
14
Preamplifier
15
Controller type DT62x0
Demodulator DL6220
Demodulator DL6230
Resolution static
0.004% FSO
0.0005% FSO
Resolution dynamic
0.02% FSO (5kHz)
0.005% FSO (5kHz)
Bandwidth
5kHz (-3dB)
5kHz (-3dB)
Bandwidth adjustable
5kHz, 20Hz
5kHz, 20Hz
Bandwidth digital output
max. 3.906 kSa/s
max. 3.906 kSa/s
Linearity (typ.)
≤ ±0.05% FSO
≤ ±0.025% FSO
Max. sensitivity deviation
≤ ±0.1% FSO
≤ ±0.1% FSO
Long term stability
≤ 0.02% FSO / month
≤ 0.02% FSO / month
Synchronous operation supported
DT6220 yes (only internal)
yes (only internal)
DT6230 yes
yes
Insulator measurement
no
no
Temperature stability
200ppm
200ppm
Sensor
-50 ... + 200°C
-50 ... + 200°C
Controller
+10 … +60°C
+10 … +60°C
-10 … +75°C
-10 … +75°C
Temperature range (operation) Temperature range (storage) Supply
DT6220 24VDC (12…36VDC)
24VDC (15…36VDC)
DT6230 24VDC (15…36VDC)
24VDC (15…36VDC)
per DL62x0 1.8W (typ.); 2.0W (max.) Power consumption
Analogue output
Digital interface
1.9W (typ.); 2.2W (max.)
DT6220 3.1W (typ.)
3.1W (typ.)
DT6230 3.8W (typ.)
3.8W (typ.)
0 … 10V (short circuit proof)
0 … 10V (short circuit proof)
4…20mA (load max. 500Ω)
4…20mA (load max. 500Ω)
DT6220 Ethernet
Ethernet
DT6230 Ethernet + EtherCAT
Ethernet + EtherCAT
Sensors
all sensors
all sensors
Sensor cable standard
CC cable ≤ 1m CCm cable = 1.4m CCg cable = 2m
CC cable ≤ 1m CCm cable = 1.4m CCg cable = 2m
Sensor cable (matched)
double / triple standard cable length
double / triple standard cable length
Trigger
TTL, 5V
TTL, 5V
Number of channels
max. 4
max. 4
FSO = Full Scale Output
Modular multi-channel measuring system
capaNCDT 6200
Controller type DT6222
Demodulator DL6222
Demodulator DL6222/ECL2
Resolution static
0.004% FSO
0.004% FSO
Resolution dynamic
0.05% FSO (20kHz)
0.1% FSO (20kHz)
Bandwidth
20kHz (-3dB)
20kHz (-3dB)
Bandwidth adjustable
20kHz, 20Hz
20kHz, 20Hz
Bandwidth digital output
max. 3.906kSa/s
max. 3.906kSa/s
Linearity (typ.)
≤ ±0.1% FSO
≤ ±0.2% FSO
Max. sensitivity deviation
≤ ±0.1% FSO
≤ ±0.1% FSO
Long term stability
≤ 0.02% FSO / month
≤ 0.02% FSO / month
Synchronous operation supported (multiple controllers)
no
no
Insulator measurement
no
no
Temperature stability
200ppm
Temperature range (operation)
200ppm
Sensor -20 ... +200°C
-20 ... +200°C
Controller +10 ... +60°C
+10 ... +60°C
Temperature range (storage)
-10 … +75°C
-10 … +75°C
Supply
24VDC (12…36VDC)
24VDC (12…36VDC)
DT6222 2.8W (typ.)
Power consumption
2.8W (typ.)
per DL6222 1.2W (typ.); 1.4W (max.)
1.2W (typ.); 1.4W (max.)
0 … 10V (short circuit proof)
0 … 10V (short circuit proof)
4…20mA (load max. 500Ω)
4…20mA (load max. 500Ω)
Digital interface
Ethernet
Ethernet
Sensors
all sensors
all sensors
Analogue output
Sensor cable standard
CCm1,4x; CCg2,0x
CCm2,8x; CCg4,0x
Sensor cable (matched)
≤ 2.8m (with CCmxx) ≤ 4.0m (with CCgxx)
≤ 2.8m (with CCmxx) ≤ 4.0m (with CCgxx)
Trigger
TTL, 5V
TTL, 5V
Number of channels
max. 4
max. 4
FSO = Full Scale Output
Controller DT62xx 34
8
Demodulator DL62xx DL62xx
DL62xx
DL62xx 25
0.5
0.5
8
8
90
52.3 41.5 8.35 22.5
22.5
0 12.5
0
0 0 3.6 10.5
16
8 125
17
Options Suitable for articles 2303018 DL6220
2303022 DL6220/ECL2
2303023 DL6220/ECL3
2303029 DL6220/LC
Article number
Description
Explanation
2982044
LC DL62x0 digital
special calibration of linearity on digital output
○
○
○
•
2982045
LC DL62x0 analogue
○
○
○
•
2982046
ECL2 DL6220
-
•
-
•
2982047
ECL3 DL6220
-
-
•
•
2982048
EMR2 DL6220
○
○
○
•
2982049
RMR1/2 DL6220
special calibration of linearity on analogue output special tuning for double standard cable length (CC =2m / CCm =2.8m / CCg =4m) special tuning for triple standard cable length (CC =3 m / CCm =4,2 m / CCg =6 m) extended measuring range (factor: 2) contains LC DL62x0 digital and LC DL62x0 analogue reduced measuring range (factor: 1/2) contains LC DL62x0 digital and LC DL62x0 analogue
○
○
○
•
Suitable for articles 2303019 DL6230
2303024 DL6230/ECL2
2303025 DL6230/ECL3
2303030 DL6230/LC
Article number
Description
Explanation
2982044
LC DL62x0 digital
special calibration of linearity on digital output
○
○
○
•
2982045
LC DL62x0 analogue
○
○
○
•
2982054
ECL2 DL6230
-
•
-
•
2982055
ECL3 DL6230
-
-
•
•
2982051
EMR2 DL6230
○
○
○
•
2982052
EMR3 DL6230
○
○
○
•
2982053
RMR1/2 DL6230
special calibration of linearity on analogue output special tuning for double standard cable length (CC =2m / CCm =2.8m / CCg =4m) special tuning for triple standard cable length (CC =3m / CCm =4.2m / CCg =6m) extended measuring range (factor: 2) contains LC DL62x0 digital and LC DL62x0 analogue extended measuring range (factor: 3) contains LC DL62x0 digital and LC DL62x0 analogue reduced measuring range (factor: 1/2) contains LC DL62x0 digital and LC DL62x0 analogue
○
○
○
•
Suitable for articles 2303035 DL6222
2303036 DL6222/ECL2
2303038 DL6222/LC
Article number
Description
Explanation
2982045
LC DL62x0 analogue
special calibration of linearity on analogue output
○
○
•
2982059
ECL2 DL6222
special tuning for double standard cable length
-
•
•
2982061
EMR2 DL6222
extended measuring range (factor: 2)
○
○
•
2982062
RMR1/2 DL6222
reduced measuring range (factor: 1/2)
○
○
•
• Articles already contain the option ○ Option available - No option available
Accessories
20
Sensor cable Description Temperature stability Outer diameter
capaNCDT
Cable CCx,x / CCx,x/90
Cable CCmx,x / CCmx,x/90
Cable CCgx,x / CCgx,x/90
Low-outgassing cable up to 4m length, for applications in clean rooms
Low-outgassing cable up to 4.2m length, for applications in clean rooms, UHV and EUV
Robust cable up to 8m length, for industrial applications
-100°C to +200°C
-100°C to +200°C
-20°C to +80°C (permanent) -20°C to +100°C (10,000 h)
3.1mm ±0.1mm
2.1mm ±0.1mm
3.1mm ±0.1mm
Bending radius 3x cable diameter during installation; 7x cable diameter for movement; 12x cable diameter recommend at continous movement Connector type C/90 Sensor cable with connector type C Ø4
8
Cable with connector type B for sensors CS1 / CS1HP / CS2 / CSE2 / CS3 / CS5 / CS10
Type Standard 1m
27 CCx,xC 37
2 x straight connector CCmx,xC
• Ø3.1 ±0.1 (CC/ CCg)
1.4m Ø2.1 ±0.1 (CCm )
•
•
17.5
•
•
2m
1 x straight / 1 x 90° connector 8.6 CCgx,xC CCx,xC/90 CCmx,xC/90 CCgx,xC/90 13.7
•
•
• 16
•
•
8m
CCx,xB/90
•
•
CCmx,xB/90
CCgx,xB/90
•
•
•
•
•
•
• •
•
• •
•
•
•
• •
6m
Ø5,4 Ø6
•
•
4.2m
1 x straight / 1 x 90° connector
CCgx,xB
•
•
4m
CCmx,xB
•
•
3m
• •
•
2.8m
2 x straight connector CCx,xB
16,9
Version
13,1
Cable with connector type C for sensors CS005 / CS02 / CS05 / CSE05 / CS08 / CSE1
Ø7
Ø9.5
Ø6
Ø5.4
Standard length 1m
•
• •
• •
• •
Connector type C/90
Sensor cable with connector type C
Ø4
8.6
16,9
8
27 37
13,1
Ø7
Ø9.5
Ø6
Ø5.4
Standard length 1m
13.7 17.5
Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm )
16
Sensor cable with connector type B
Ø5,4 Ø6
Connector type B/90
Standard length 1m
27
37
30.5
20.5
Ø7
27
Ø9.5
Ø7
Ø9.5
25
37
Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm ) Ø7 Ø10
Accessories
capaNCDT
MC2.5 Micrometer for sensor calibration, range 0 - 2.5mm, Resolution 0.1µm. Suitable for sensors CS005 to CS2 MC25D Digital micrometer for sensor calibration, range 0 - 25mm, adjustable offset (zero). Suitable for all sensors. HV/B Vacuum feed through triaxial UHV/B Vacuum feed through triaxial for ultra-high vacuum cable with connector PC6200-3/4Sensor Power-/trigger cable, 4 pin, 3mtype B
6110
6200
6500
• • • •
• • • • • •
• • • •
•
• •
Connector type B/90
Standard length 1m
27 5 pin, 5m CA5 Preamplifier cable 37
• 20.5
Ø7
SC6000-1,0 Synchronization cable, 5 pin, 1m
25
Ø9.5
Ø7
Ø9.5
SCAC3/5 Signal output cable, analog, 5 pin, 3m
27
30.5
SCAC3/4 Signal output cable, (necessary for multi channel applications), 4 pin, 3m
PS2020 Power supply for DIN rail mounting; Input 230VAC (115VAC); Output 24VDC / 2.5 A; L/W/H 120x120x40mm 37 Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm ) Ø7 Ø10
•
•
21
UHV/B Vacuum feed triax weldable (Art.-no. 0323346)
HV/B Vacuum feed through (Art.-no. 0323050)
25
2
-9
-1
UHV/B Vacuum feed triax screwable (Art.-no. 0323370)
ø13.50h6
ø9.4
ø13.50h6 Max. leak rate 1x10e-9 mbar · l s-1, compatible withWS11 connector type B Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B
1.75
ø9.4
WS11
ø9.4
Weld seam
25
ø9.4
Weld seam
1.75
25
M9x0.5 M9x0.5
ø34 (flange ø34standard (flange standard CF16) CF16)
6
-1
25
25
UHV/B Vacuum 13.5 feed triax with flange CF16 (Art.-no. 0323349) 13.5
ø9.4
1.75
Max. leak rate 1x10e mbar · l s , compatible with connector type B UHV/B Vacuum feed triax screwable (Art.-no. 0323370)
Max. leak rate 1x10e feed mbar · triax l s , compatible with connector type B UHV/B Vacuum with flange CF16 (Art.-no. 0323349)
6
WS11
Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B ø13.50h6 WS11
-7 Max. leak rate 1x10e mbar · l s-1, compatible with connector type B max. 17
-7
ø9.4
9 9
ø13.50h6
25
1.75
Ø14
Ø8.8 Ø8.8
max. 17
2
Ø14
WS12 WS12
34
M10x0.75
M9x0.5 M9x0.5
UHV/B Vacuum feed triax weldable (Art.-no. 0323346)
M10x0.75 HV/B Vacuum feed through (Art.-no. 0323050)
M9x0.5 M9x0.5
34
Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B
SCA3/5 Signal output cable (Art.-no. 2902112)
SCA3/4 Signal output cable (Art.-no. 2902104) Cable length ±1%
approx. 35.6
Ø8.9 Ø7
10 approx. 35.6 100
43.5
Cable length ±1% 100
CA5 Preamplifier cable (Art.-no. 2903180)
SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Cable length ±1%
Cable length ±1%
11
CA5 Preamplifier cable (Art.-no. 2903180)
Cable length ±1%
10 Ø7
approx. 35.6 10 approx. 35.6
Ø8.9
Ø7 Ø7
Ø8.9
approx. 35.6
CA5 Preamplifier cable (Art.-no. 2903180) approx. 35.6
Cable length ±1%
10 approx. 35.6 Ø7
Ø4.9 ±0.25 Ø4.9 ±0.25 Ø4.9 ±0.25
Ø7
Ø8.9
SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Cable length ±1% 10
Ø8.9
Ø7
Ø8.9
Cable length ±1% 10
Ø4.3 ±0.25 Ø4.3 ±0.25
43.5
100
43.5 SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Ø8.9
150
10 approx. 35.6
Ø4.3 ±0.25
11
Ø5.5 ±0.3 Ø5.5 ±0.3
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881)
Ø5.5 ±0.3
Ø11.5
Ø9 Ø9
Ø11.5
approx. 35.6
150
Cable length ±1%
Cable length ±1%
11 Ø9
10
Cable length ±1%
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881)
Ø11.5
approx. 35.6
Ø4.3 ±0.25 Ø4.3 ±0.25 Ø4.3 ±0.25
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881) 10
10
50
150
Cable length ±1%
SCA3/5 Signal output cable (Art.-no. 2902112)
Ø8.9 Ø7
Ø4.3 ±0.25 Ø4.3 ±0.25
approx. 35.6
Cable length ±1%
Ø4.3 ±0.25
Ø7
approx. 35.6
50
SCA3/5 Signal output cable (Art.-no. 2902112)
Ø8.9 Ø7
Ø7 10
10 Ø8.9
Cable length ±1%
50
Cable length ±1%
SCA3/4 Signal output cable (Art.-no. 2902104) Ø7
Ø8.9
Ø8.9
SCA3/4 Signal output cable (Art.-no. 2902104)
Modifications reserved / Y9761319-G011046GKE
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MICRO-EPSILON Headquarters Koenigbacher Str. 15 ∙ 94496 Ortenburg / Germany Tel. +49 (0) 8542 / 168-0 ∙ Fax +49 (0) 8542 / 168-90
[email protected] ∙ www.micro-epsilon.com
Micro-Epsilon UK Ltd. No.1 Shorelines Building · Shore Road · Birkenhead · CH41 1AU Phone +44 (0) 151 355 6070 · Fax +44 (0) 151 355 6075
[email protected] · www.micro-epsilon.co.uk
