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Product Information MicroTech II Beam Delivery System™ JPSA’s Microtech II Beam Delivery System (BDS) is a low cost, yet full featured, compact UV laser beam delivery and microscope camera system. Designed for university and industrial process development, the MicroTech II is easy to use, mounts on a standard optical breadboard, and incorporates new features which make it even more useful: Fully enclosed optical path to eliminate dust (optionally, can be purged to remove UV absorbing oxygen), precision dovetail rails for accurate optical positioning and an adjustable mask holder/turning mirror assembly. Applications include lithography, annealing, selective material removal, 3-D micromachining, high precision drilling, cutting, marking, surface scanning and patterning. The MBDII offers the features, precision and high performance of larger, more complex and more costly systems. Its unique design allows the user to achieve professional, repeatable and high precision results quickly and easily. The Microtech II includes the on-target camera mounted to a Z-axis crossed roller stage for coarse and fine focus adjustments, a variable attenuator, a mask holder, field lens and high performance doublet objective. Options include a high-resolution inspection camera, JPSA motion control software, air-bearing stages, additional stages of motion, specially coated optics, and a vast array of lasers ideally suited for your application. ● High Quality: precision opto-mechanical assembly ensures accurate repeatability ● Process Diagnostics: Real time on-target viewing of the machining process ● Versatile: 2.5X to 40X demagnification and micron resolution optics available ● Low Cost: The MicroTech II, with JPSA X-Y stages and motion control and a fully refurbished laser system (includes the JPSA 12 month warranty) provides the performance of systems costing twice as much ● Uniform Beam Profile: A collection of imaging and non-imaging homogenizers are available for the most demanding applications ● Reliable: Non-contact technique provides 24/7 maintenance-free operation
VUV BDS Chamber permits maximum flexibility for a wide range of applications
For a free evaluation on how the MicroTech BDS can be used in your R&D project, please contact us by phone 603.518.3200, or visit us online at www.jpsalaser.com JP Sercel Associates ● 220 Hackett Hill Road ● Manchester, NH 03102 USA ● Tel. 603.518.3200 ● www.jpsalser.com
Specifications MicroTech II Beam Delivery System™
Standard Components
Options
● High stiffness mounting system
● Automated X-Y part handling stages (Contact JPSA for resolution and travel requirements)
● Table top design for mounting on a standard optical table ● High accuracy JPSA crossed-roller micrometer-adjust MICROTECH™ camera stage alignment assembly, optics vertical adjustment of ± 40mm (coarse) / 20mm (fine) range ● Mask holder and mask set ● Rectangular variable aperture (RVA) for slit and rectangular apertures. ● Variable attenuator, manual version, single plate type (1 wave length, 248nm) ● 248nm optics kit (one field lens, one imaging high resolution doublet lens, and three 45 turning mirrors)
● Motorized Z theta part handling stage option. 10mm Z-axis and 350 degree theta motion Includes motion card and drive box upgrade. ● 193nm optics kit Includes mirrors variable attenuator and laser optics ● VUV 193nm purge N2 kit. Includes flow and pressure regulation and distribution with sealed beam delivery components ● All granite frame system for the ultimate in stability ● Custom Weldment platform to support Microtech II, granite frame and Automated X-Y part handling stages ● Part fixture with ceramic vacuum chuck
● Three turning mirror blocks (TMB) for optics kit
● Upgrade to motorized RVA 2 axis micro stepper drive
● Inspection system includes - OXC “on-target” real-time corrected CCD viewing system, 0.7X to 5.5X zoom range, 570 TV lines - Video illumination: dimmer controlled LED light units - High resolution monitor - Cross-hair generator
● High-resolution inspection camera at up to 2000X magnification for sub-micron positioning accuracy ● Gas regulators and gas safety cabinets ● New and reconditioned excimer lasers
JP Sercel Associates ● 220 Hackett Hill Road ● Manchester, NH 03102 USA ● Tel. 603.518.3200 ● www.jpsalaser.com
