Transcript
MB-UV-PRESS
(Manual)
THIN FILM TECHNOLOGY
LAMINATION TOOL FOR GLASS-2-GLASS ENCAPSULATION
• Control unit with human machine interface (HMI) • Non-contact, gas pressurized lamination • Mechanical pressing with adjustable force • Black anodized, vacuum process chamber • Available as fully glovebox integrated & standalone unit for square substrates up to 8’’ x 8’’ • High intensity UV sources with exceptional uniformity (optional) • Mask alignment
www.mbraun.com
MB-UV-PRESS The basic function of the MB-UV-Press is to encapsulate rigid substrates with a cover glass using a combination of mechanical alignment, vacuum processes, gas pressurized processes and high intensity UV-Curing.
MB-UV-PRESS-Manual-E2013/08 by Chris Bartlett • © M. Braun GmbH • Subject to be changed without notice!
Unlike other design principles like mechanical stage or membrane pressing the MBRAUN process uses a so called non-contact, gas pressurized principle to laminate the glasses. Using this process setup the glasses are aligned under vacuum, brought in contact and pressed with gas pressure. Whilst pressing, the shutter from the UV-source opens and the resin is cured. The simultaneous application of pressure and curing is most-effective in creating highly uniform, repeatable and bubble free sealing. The tool consists of three main components – a vacuum chamber; an alignment stage and an optional high intensity UV-source including a high end shutter/reflector system. In the standard setup a vacuum chuck allows reaching vacuum conditions of down to 500 mbar. If higher vacuum conditions are required to encapsulate the device a edge-gripping chuck is available upon request. The UV system has to fulfil demanding requirements like high UV intensity whilst ensuring a low heat load onto the substrate and high homogeneity of the intensity across the entire substrate area. A specifically designed source featuring the latest innovations in UV-technology addresses all these demands. The MB-UV-Press system is available as a bench top (stand alone) system and as a fully glovebox integrated tool. Both setups feature a black anodized, gas tight process chamber to minimize reflections and can accommodate samples up to 8’’x 8’’. Various substrate sizes can be encapsulated simply by changing the alignment masks inside the process chamber.
Low pressure chuck with mechanical gripping
MB-UV-PRESS TECHNICAL DATA: Vacuum Process Chamber Dimensions.............................. 500 x 500 x 150 mm (outside dimensions) Substrate size.......................... Maximum 200 x 200 x 1.1 mm Vacuum chamber………….….. Black anodized aluminium to minimize reflections; electro-pneumatic open/close mechanism Upper stage…………………… Vacuum chuck with electro pneumatic drives; optional edge gripping chuck for high vacuum applications Lower stage…………………… Quartz window with substrate adaptor mask to accommodate all glass sizes up to 200 x 200 mm(1) Cell gap................................... 10-15 µm (after lamination) Vacuum level………………….. ~ 500 mbar for the vacuum chuck; ~ 1mbar for the edge gripping chuck Substrate positioning…………. Mechanical alignment (± 150µm) Process control………………... PLC controlled (1) Protection for masking active area available
UV Source (optional) Irradiation method…………….. Fixed lamp batch irradiation UV intensity (max.)…………… .420 mW/ cm² (power output adjustable between 30 – 100 %) UV uniformity………………….. ± 15% (measured over an area of 200 x 200 mm) UV inspection measuring…….. Integrated in the UV unit Lamp type……………………... Medium pressure mercury arc lamp; available with metal dopings (Fe, Ga/In, Pb) depending on the absorption spectra of the UV-resin Cooling method……………….. Air cooled ELC® ………………………….. Electronic lamp control to adjust the UV output between 30-100%; network fluctuations of ±10 % are levelled out and do not affect the UV output FLC®………………………….... Fast lamp change for fast and easy lamp replacement URS®…………………………... Cold mirror reflector technology (optimized by ray tracing simulation) to minimize the heat load onto the substrate; IR is absorbed whilst UV is reflected; shutter and reflector combined in one unit
M. Braun Inertgas-Systeme GmbH (Headquarters) Dieselstr. 31 · 85748 Garching · Germany Phone: +49 89 32669-0 · Fax: +49 89 32669-105 Web: www.mbraun.com · E-mail:
[email protected]
M. Braun Incorporated
14 Marin Way · Stratham, NH · 03885 · USA Phone: +1 603 773-9333 · Fax: +1 603 773-0008 Web: www.mbraun.com · E-mail:
[email protected]
