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Solid-state Drive (ssd) And Memory System Innovation

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2008/12/8 Ken Takeuchi Toshiba, NAND Flash Circuit Designer: ‘93-’07 University of Tokyo, Associate Professor: ‘07Developed 6 world’s highest density NAND (0.7μm 16Mb, 0.4μm 64Mb, 0.25μm 256Mb, 0.16μm 1Gb, 0.13μm 2Gb, 56nm 8Gb) 150 Patents Worldwide (88 U.S.Patents) ISSCC Takuo Sugano Outstanding Paper Award: ’07 ISSCC Program Committee (Memory): ‘0707 Stanford Univ. MBA: ‘03 Solid-state drive (SSD) and memory system innovation Dec.11, 2008 Ken Takeuchi Dept. of Electrical Engineering and Information Systems, University of Tokyo E-mail : [email protected] http://www.lsi.t.u-tokyo.ac.jp Ken Takeuchi Ken Takeuchi Advanced Flash Memory Devices ISSCC 1999 250nm 256M Flash 1 Ken Takeuchi IEDM 2000 160nm 1G Flash ISSCC 2002 130nm 2G Flash ISSCC 2006 56nm 8G Flash Advanced Flash Memory Devices 2 Outline Outline SSD, Memory System Innovation NAND Overview NAND Circuit Design SSD Overview NAND Controller Design Operating System for SSD Green IT with SSD Summary SSD, Memory System Innovation NAND Overview NAND Circuit Design SSD Overview NAND Controller Design Operating System for SSD Green IT with SSD Summary Advanced Flash Memory Devices 3 Definition of SSD Ken Takeuchi Advanced Flash Memory Devices 4 NAND Flash Memory and SSD Market SSD : Solid- State Drive Mass storage to replace HDD of PC/Enterprise Server. Small, robust, low-power and high performance. SSD consists of NAND Flash Memory and NAND controller(+RAM) PC expected as an emerging application Gartner Dataquest J. Elliott, WinHEC 2007, SS-S499b_WH07. I. Cohen, Flash Memory Summit 2007. Ken Takeuchi Advanced Flash Memory Devices 5 Ken Takeuchi Advanced Flash Memory Devices 6 1 2008/12/8 Memory System Bottleneck SLC NAND as Cache of HDD CPU registers (<1ns) CPU registers (<1ns) SRAM (<1ns) SRAM (<1ns) DRAM (10ns) (10 ) DRAM (10ns) SLC NAND (20us) Big Gap HDD (10ms) HDD (10ms) Ken Takeuchi Advanced Flash Memory Devices 7 Future Memory System Advanced Flash Memory Devices Ken Takeuchi 8 Future Direction: Vertical Integration History of NAND Flash Memory System CPU registers (<1ns) Application Software S/DRAM (<1ns) Future Block Abstracted SSD File System (OS) DRAM (10ns) NAND Controller NAND Controller Bad Block Management Wear-leveling ECC DRAM (10ns) 1bit/cell NAND (20us) NAND Flash Memory 2-4bit/cell NAND (1~10ms) MP3 Player SD Card USB Memory Go vertical integration to improve systemlevel performance. Smart Media SSD K. Takeuchi, ISSCC 2008 Tutorial T-7. Ken Takeuchi Advanced Flash Memory Devices 9 Ken Takeuchi Key Challenge of SSD Advanced Flash Memory Devices 10 Outline SSD, Memory System Innovation NAND Overview NAND Circuit Design SSD Overview NAND Controller Design Operating System for SSD Green IT with SSD Summary Need to improve device reliability such as endurance, data retention, and disturb. Require co-design of NAND and NAND controller circuits to best optimize both NAND and NAND controllers. OS/Computer architecture innovation essential. K. Takeuchi, ISSCC 2008 Tutorial T-7. Ken Takeuchi Advanced Flash Memory Devices 11 Ken Takeuchi Advanced Flash Memory Devices 12 2 2008/12/8 NAND Flash Memory Page & Block of NAND Flash Memory Page : program/read unit Block : Erase unit Bitline Bitline Bitline 43nm 16Gb NAND K. Kanda, ISSCC, 2008. NAND flash memory chip 2 Select-gate 32 Word-lines Memory cell : Floating Gate-FET Memory circuit Source-line 2 Select-gate 32 Word-lines Memory cells are sandwiched by select gates. Contactless structure : ideal 4F2 cell size F.Masuoka, IEDM 1987, pp.552-555. Ken Takeuchi Advanced Flash Memory Devices 13 Ken Takeuchi Advanced Flash Memory Devices Top View of NAND Flash Cell Array MLC vs. SLC Source-line (first metal) Bitline (second metal) 14 SLC : Single-level cell or 1bit/cell MLC : Multi-level cell or >2bit/cell 2bit/cell : Long production record since 2001 3bit/cell or 4bit/cell : Will be commercialized this year. Most existing SSD uses SLC. MLC based SSD is commercialized this year. STI Active area SGD SGD Contact to bitline Word-lines SGS SGS Contact to source-line SLC (Single-level cell) MLC (Multi-level cell) Number of memory cells “1” “0” Number of memory cells “0” “1” “2” “3” Simple structure : High scalability, High yield Vth Vth K. Imamiya, ISSCC 1999, pp.112-113. Ken Takeuchi Advanced Flash Memory Devices 15 NAND Operation Principle Ken Takeuchi Advanced Flash Memory Devices 16 NAND Operation Principle (Cont’) Read Program : Electron injection Bit-line (0.8VÆ0V) Number of memory cells “1” “0” 18V Vread (4.5V) 0V Vth Selected word-line (Read voltage : 0V) 0V 9 Channel-FN tunneling Read voltage Vread (4.5V) Vread (4.5V) Bit-line voltage 9 High reliability 0V 9 Low L currentt consumption ti “1” Erase : Electron ejection “0” Time 9 After precharging, bit-lines are discharged through the memory cell. 20V (~pA/cell) 9 Page based parallel program 0V 0V 20V Typical page size : 2-4kB 9 Unselected cells are biased to the pass voltage, Vread. 9 Small cell read current (~1uA) Æ Slow random access (~50us) 20V 9 Serial access : 30-50ns Æ Fast read = 20-30MB/sec Ken Takeuchi Advanced Flash Memory Devices S. Aritome, IEDM 1990, pp.111-114. 17 Ken Takeuchi Advanced Flash Memory Devices 18 3 2008/12/8 NAND Operation Principle (Cont’) Outline Page based parallel programming SSD, Memory System Innovation NAND Overview NAND Circuit Design SSD Overview NAND Controller Design Operating System for SSD Green IT with SSD Summary Bit-line Row decoder Page Page : 2-4KBytes ・・・ Page P buffer b ff Page buffer Memory cell array T.Tanaka, Symp. on VLSI Circuits 1990, pp.105-106. All memory cells in a page are programmed at the same time. Program speed = Page size / Programming time = 8KByte / 800us = 10MByte/sec (56nm MLC) Ken Takeuchi K. Takeuchi, ISSCC 2006,pp.144-145. Advanced Flash Memory Devices 19 NAND Circuit Design Ken Takeuchi Advanced Flash Memory Devices 20 Random Access : High Speed Programming Bit-by-bit Program Verify Scheme Program pulse Program Algorithm Random Access High Speed Programming High Speed Read Program pulse No 21 Program pulse Program voltage, Vpgm increases by ⊿Vpgm. Verify read Constant electric field across the tunnel oxide. ⊿Vpgm Tpulse Tvfy Programming time, Tprog = (Tpulse+Tvfy)×Npulse Number of memory cells “1” “2” “0” “3” Vth Vth shift is constant at ⊿Vpgm. Program characteristics Npulse = ⊿Vth0/⊿Vpgm Npulse (Time) SLC “1”-program & ”1”verify “1”-program & ”1”verify “3”-program & ”3”verify (⊿Vth0/⊿Vpgm) cycles Y1 Y2 2‐level cell MLC “2”-program & ”2”verify Slowest cell ⊿Vth0 22 Random Access : High Speed Programming (Cont’) Constant tunnel current. 1 cycle Advanced Flash Memory Devices Ken Takeuchi Problems of MLC programming Word-line waveform # off program pulses: l N Npulse l cycles l ・・・ Page buffer Incremental Program Voltage Scheme Fastest cell Page During the verify-read, the program data in the page buffer is updated so that the program pulse is applied ONLY to insufficiently programmed cells. T.Tanaka, Symp. on VLSI Circuits 1992, pp.20-21. Random Access : High Speed Programming (Cont’) Vth Verify‐read End Advanced Flash Memory Devices Verify voltage 0V FN tunneling Bit-line Yes High Speed Programming High Speed Read Achieve both fast programming and precise Vth control. 0V All cells programmed ? Sequential Access Ken Takeuchi 18V 0V Data load Y1 Y2 4‐level cell Two bits in a cell are assigned to two column addresses. 3 operations (“1”-, “2”- and “3”-program) required. Long programming. G. Hemink, Symp. on VLSI Technologies 1995, pp.129-130. K. D. Suh, ISSCC 1995, pp.128-129. Ken Takeuchi Advanced Flash Memory Devices 23 Ken Takeuchi Advanced Flash Memory Devices 24 4 2008/12/8 Random Access : High Speed Programming (Cont’) Random Access : High Speed Programming (Cont’) Solution : Multi-page Cell Architecture Program Voltage Optimization 1st page program X1 Number of memory cells “0” “1” X1 X2 X2 1st page data : “1” “0” Vth 2-level cell 2nd page program Number of memory cells “0” “1” “2” Two bits in a cell are assigned to two row addresses. In average, 1.5 operations. Twice faster than conventional scheme. “3” Vth 1st page data : “1” 2nd page data : “0” “0” “1” 4-level cell “1” “0” WL0, 31 : Higher capacitive coupling with word-lines. Initial program voltage is set lower. Optimized program voltage accelerates the programming. K. Takeuchi, Symp. on VLSI Circuits 1997, pp. 67-68. Advanced Flash Memory Devices Ken Takeuchi 25 Random Access : High Speed Programming (Cont’) T. Hara, ISSCC 2005, pp. 44-45. Advanced Flash Memory Devices Ken Takeuchi 26 Random Access : High Speed Programming (Cont’) Problems : FG-FG interference Solution : FG-FG Coupling Compensation [3-step programming] [Programming order] Step 1 Step2 Step3 p Step 1. The memory cell is ROUGHLY programmed. Cells are programmed BELOW the target Vth. Step 2. Neighboring cells are programmed. Step 3. The memory cell is PRECISELY programmed. FG-FG coupling shifts the Vth of a memory cell as the neighboring cell are programmed. To tighten the Vth distribution, ⊿Vpgm is decreased, causing a slow programming. The Vth modulation becomes significant as the memory cell is scaled down. J.D. Lee, EDL 2002, pp. 264-266. FG-FG coupling is suppressed by 90%. Large ⊿Vpgm enables a fast programming. N. Shibata, Symp. on VLSI Circuits 2007, pp.190-191. M. Ichige, Symp. on VLSI Technologies 2003, pp.89-90. Advanced Flash Memory Devices Ken Takeuchi 27 Random Access : High Speed Read Solution : Multi-page Cell Architecture Number of memory cells “1” “2” “0” “3” Vth ① ② MLC SLC “1”-read “2”-read Y1 Y2 2-level cell “3” X1 Vth Y1 Y2 4-level cell 1st page data : “1” “0” “0” X2 2nd page data d t : Two bits in a cell are assigned to two column addresses. 3 operations (“1”-, “2”- and “3”-read) required. Long random read. ① ③ 1st page read : ②, ③ Æ EXOR 2nd page read : ① “3”-read 4-level cell “0” “1” ② X1 X2 “1” 2-level cell ③ “1”-read 28 Random Access : High Speed Read (Cont’) Problems of MLC read Number of memory cells “1” “2” “0” Advanced Flash Memory Devices Ken Takeuchi Two bits in a cell are assigned to two row addresses. In average, 1.5 operations. Twice faster than conventional scheme. K. Takeuchi, Symp. on VLSI Circuits 1997, pp. 67-68. S. Lee, ISSCC 2004, pp.52-53. Ken Takeuchi Advanced Flash Memory Devices 29 Ken Takeuchi Advanced Flash Memory Devices 30 5 2008/12/8 Parallel Operation : Increase Page Size Sequential Access : High Speed Programming Page size trend Parallel Operation By increasing the word-line length, the page size has been extended to increase the write and read throughput. Increase page size Multi-page operation Multi-chip operation (Interleaving) 9000 Bit-line 8000 Page size e (Byte) 7000 T be To b discussed di d in i “NAND C Controller t ll Circuit Ci it Design” D i ” section ti Pipeline Operation Page 6000 ・・・ 5000 4000 Page buffer 3000 2000 Write/Read Cache Cache Page Copy 1000 0 0.25um 0.16um 0.13um 90nm 70nm 50nm 43nm Design rule But, the large page size also causes problems. Noise issue due to the large RC delay of a word-line Advanced Flash Memory Devices Ken Takeuchi 31 Parallel Operation : Increase Page Size (Cont’) Ken Takeuchi Advanced Flash Memory Devices 32 Parallel Operation : Increase Page Size (Cont’) Solution : Raise neighboring SG BEFORE bit-line discharge Problems : SG-WL noise [Conventional read/verify-read] Bit-line SG-WL capacitive coupling SGD 1.5V Selected WL31 WL bounce WL0 Read failure SGS Bit-line precharge Bit-line discharge K. Takeuchi, ISSCC 2006,pp.144-145. Ken Takeuchi Advanced Flash Memory Devices 33 Parallel Operation : Increase Page Size (Cont’) Problems : WL-WL noise K. Takeuchi, ISSCC 2006,pp.144-145. Ken Takeuchi Advanced Flash Memory Devices Parallel Operation : Increase Page Size (Cont’) Solution K. Takeuchi, ISSCC 2006,pp.144-145. Ken Takeuchi Advanced Flash Memory Devices 34 35 K. Takeuchi, ISSCC 2006,pp.144-145. Ken Takeuchi Advanced Flash Memory Devices 36 6 2008/12/8 Parallel Operation : Multi-page Operation Pipeline Operation : Write/Read Cache Multi-page operation Pipelining of data-in/out & cell read/write Operate multi-page simultaneously to increase the write/read throughput. [Multi-page operation] Implement data cache in NAND Input /output data to the data cache during cell read/program [Write Cache Example : 0.13um 1Gbit NAND] 0.25um 256Mb NAND Data Cache K. Imamiya, ISSCC 1999, pp.112-113. Advanced Flash Memory Devices Ken Takeuchi 37 Outline Advanced Flash Memory Devices Random access OS changes such as directory entry and file system metadata Application S/W change 50% of data is < 4KB. R d Random access mainly i l decides the performance of PC. [Data transfer size in PC application] K.Grimsrud, IDF2006, MEMS004. Sequential access Boot Hibernation 39 Ken Takeuchi Advanced Flash Memory Devices SSD Performance (Cont’) 40 SSD Performance (Cont’) Sequential access Random access Read 38 SSD Performance SSD, Memory System Innovation NAND Overview NAND Circuit Design SSD Overview NAND Controller Design Operating System for SSD Green IT with SSD Summary Ken Takeuchi H. Nakamura, ISSCC 2002, pp.106-107. Advanced Flash Memory Devices Ken Takeuchi NAND : Single chip operation Write NAND (SLC) 25us 300us 1ms NAND (MLC) 50us 800us 1ms HDD 3ms 3ms N.A. NAND : 4 chip interleaving Read Write Read  Write NAND (SLC) 25MB/sec 20MB/sec 100MB/sec 80MB/sec NAND (MLC) 20MB/sec 10MB/sec 80MB/sec 40MB/sec HDD 80MB/sec 80MB/sec ‐ ‐ Erase [Block diagram of SSD w w. interleaving function] Erase are hidden by operating the erase during the idle period. SSD (SLC) : Comparable read and write performance with HDD. SSD (MLC) : Comparable read performance. By introducing 8chip interleaving, the write performance can be comparable with HDD. Read : SSD with SLC and MLD has a great advantage over HDD. Write : SSD still has a performance advantage. Write performance can be an issue in the future if the NAND performance degrades by scaling the memory cell or increasing the number of bits per cell. C. Park, NVSMW 2006, pp.17-20. Ken Takeuchi Advanced Flash Memory Devices 41 Ken Takeuchi Advanced Flash Memory Devices 42 7 2008/12/8 SSD Performance (Cont’) Garbage Collection & Slow Random Write Slow random write problem Page : program/read unit System performance degradation of a large block Block : Erase unit 70nm 8G MLC (ISSCC2005) Bitline [Frequent block copy] 56nm 8G MLC (ISSCC2006) (This work) Old block 32WLs Bitline 32WLs ① Cell read New block Bitline 2 Select-gate 32 Word-lines 4KB page (max) 8KB page (max) 512KB block 1MB block Page buffer ② Data-out, ECC, Data-in System performance degradation 2 Select-gate 32 Word-lines Source-line ③ Cell program Block copy time In case a part of the block is over-written, a block copy operation is performed. = (T_Cell read+T_Data_out+TECC+T_Cell program) ×(# of pages per block) Fast block copy required = 125ms Ken Takeuchi Advanced Flash Memory Devices 43 Pipeline Operation : Cache Page Copy Step2 Old block Page i Step3 Old block Old block Page i+1 Cell Read New block New block Page buffer Page buffer NAND controller Data-out NAND ECC controller Cell read New block Page buffer NAND controller Data-out NAND ECC controller 44 43nm NAND (All bit-line architecture) 56nm NAND (Alternate bit-line architecture) New block Cell program Page buffer K. Takeuchi, ISSCC 2006,pp.144-145. Advanced Flash Memory Devices All bit-line architecture # of pages in a block is half. Block copy time is also half. Step4 Old block Ken Takeuchi Smaller Block Size: All Bit-line Architecture Solution : Fast block copy Step1 NAND controller Step 4 : Pipelining of programming Page i and data out / ECC of Page i+1. Fast block copy Ken Takeuchi Advanced Flash Memory Devices 45 R. Cernea, ISSCC 2008,pp.420-421. K. Kanda, ISSCC 2008, pp.430-431. K. Takeuchi, ISSCC 2006, pp.144-145. K. Takeuchi, ISSCC 2006,pp.144-145. Advanced Flash Memory Devices Ken Takeuchi Solution for Slow Random Write 46 SSD Power Consumption Fast pipeline block copy operation Smaller block size (All bit-line architecture) Page based data allocation Not to overwrite an old page but write data to an empty page. Change the logical-physical address table table. Power consumption NAND : Single chip operation NAND (SLC) NAND : 4 chip interleaving Read Write Read  Write 20mA 20mA 80mA 80mA NAND (MLC) 20mA 20mA 80mA 80mA HDD >300mA >300mA ‐ ‐ In SSD, additional current (~100mA) are consumed in the NAND controller, RAM and IO. Actual Power Consumption Old page C. Park, NVSMW 2006, pp.17-20. New page In all modes, the power consumption of SSD is smaller than HDD. D. Barnetson, Electonic Journal 192th Technical Symposium, 2008, pp.91-102. Ken Takeuchi Advanced Flash Memory Devices 47 Ken Takeuchi Advanced Flash Memory Devices 48 8 2008/12/8 SSD Reliability SSD Reliability (Cont’) SSD is robust. No mechanical parts. Need to be careful in PC/server application Portable consumer electronics application (Digital still cameras, MP3 players, Camcorders) Effective data retention time << 10years Data quickly transferred to PC or DVD through USB drive and memory cards. Most probably data backup in PC PC/Enterprise server application Higher reliability required w.o. backup Need longer data retention time : 5-10 years Ken Takeuchi Advanced Flash Memory Devices Failure mechanism of NAND Program disturb During programming, electrons are injected to unselected memory cells. Read disturb During read, read electrons are injected to unselected memory cells. Write/Erase endurance & Data retention As the Write/Erase cycles increase, damage of the tunnel oxide causes a leakage of stored charge. 49 Ken Takeuchi SSD Reliability (Cont’) 50 SSD Reliability (Cont’) “Classic” program disturb Program inhibit Bitline (Vcc) Advanced Flash Memory Devices “Modern” program disturb Program Bitline (0V) Vcc Vpgm (18V) Vpass (10V) Vpgm disturb cell Vpass disturb cell 10V 18V D ~8V S Vpass (10V) 0V Vcc J. D. Lee, NVSMW 2006, pp. 31-33. K.T.Park, SSDM 2006, pp.298-299. D 0V S Hot carriers generated at the select gate edge inject into the memory cell causing a Vth shift. The Vth shift can be reduced by increasing SG-WL space. Both selected and unselected cells suffer from the disturb. K. D. Suh, ISSCC 1995, pp.128-129. Ken Takeuchi Advanced Flash Memory Devices 51 Ken Takeuchi SSD Reliability (Cont’) Advanced Flash Memory Devices 52 SSD Reliability (Cont’) “Modern” program disturb (Cont’) Read disturb Bitline (0.8VÆ0V) Vread (4.5V) 4.5V Selected word-line (0V) D 0V S Vread (4.5V) Vread (4.5V) Select Tr. Dummy Tr. WL0 0V The Vth shift can be reduced by adding dummy WL. Weak program bias condition Unselected word-lines suffer from the read disturb. K.T.Park, SSDM 2006, pp.298-299. Ken Takeuchi Advanced Flash Memory Devices 53 Ken Takeuchi Advanced Flash Memory Devices 54 9 2008/12/8 SSD Reliability (Cont’) SSD Reliability (Cont’) Write/Erase Endurance & Data Retention Program disturb and read disturb summary Program disturb and read disturb is a “bit error” not a “burst error”. Endurance : how many times data are written Data retention : how long the data remains valid Clear correlation between endurance and data retention Page assignment of MLC X1 Two bits in MLC are assigned to different pages. Even if one MLC cell fails, one bit in two pages fails. X1 X2 Damages to the tunnel oxide during write and erase cause the data retention problems. Traps are generated during write and erase. The unlucky cell with traps results in a leakage path, causing the charge transfer. The leakage current is called SILC (Stress Induced Leakage Current). X2 2-level cell ECC(Error correcting code) effectively corrects the bit error. 4-level cell K. Takeuchi, Symp. on VLSI Circuits 1997, pp. 67-68. Existing ECC corrects 4-12bit errors per 512Byte sector. K. Prall, NVSMW 2007, pp. 5-10. Ken Takeuchi Advanced Flash Memory Devices 55 Ken Takeuchi To guarantee data retention, Write/Erase cycles are limited to 100K (SLC) or 10K (MLC). Advanced Flash Memory Devices 56 SSD Reliability (Cont’) Outline 100K (SLC) or 10K(MLC) W/E cycles acceptable? SSD, Memory System Innovation NAND Overview NAND Circuit Design SSD Overview NAND Controller Design Operating System for SSD Green IT with SSD Summary W/E cycles estimation for PC 32GB SSD Usage scenario : 2~5GB/day (#) Service for 5years 100% efficient wear leveling g (365 days/year) x 5years / (32GB / 2~5GB/day) = 114~285 W/E cycles 114~285 cycles are far below the NAND limitation of 100K for SLC or 10K for MLC. Actual W/E cycles are higher for the file management such as garbage collection. (#) W.Akin, IDF 2007_4, MEMS003. Y.Kim, Flash Memory Summit 2007. Ken Takeuchi Advanced Flash Memory Devices 57 Ken Takeuchi SSD SW Architecture Advanced Flash Memory Devices 58 HW Architecture OS File system Block diagram (Single channel) Low level driver ATA I/F SSD NAND Controller Host I/F Flash Translation Layer (FTL) Bad block management Wear-leveling Address translation from logical address to physical address of NAND Interleaving ECC HDD-like architecture : DRAM buffer to hide NAND random access High power consumption High cost NAND I/F NAND Flash Memory C. Park, NVSMW 2006, pp.17-20. Ken Takeuchi Advanced Flash Memory Devices 59 Ken Takeuchi Advanced Flash Memory Devices 60 10 2008/12/8 HW Architecture (Cont’) High Speed Technology Interleaving : Sequential Parallel Write Block diagram (Multi-channel) DRAM eliminated : Random access of NAND is faster than HDD. Low p power consumption p Low cost Multi-channel Parallel operation High bandwidth 2-channel 4-way interleaving Max write throughput : 80MB/sec for MLC. HW driven automatic operation. C. Park, NVSMW 2006, pp.17-20. Advanced Flash Memory Devices Ken Takeuchi C. Park, NVSMW 2006, pp.17-20. 61 High Reliability Technology Advanced Flash Memory Devices Ken Takeuchi 62 High Reliability Technology (Cont’) Wear-leveling Problem Write/Erase cycle of NAND is limited to 100K for SLC and 10K for MLC. Solution Write data to be evenly distributed over the entire storage. Count # of Write/Erase cycles of each NAND block. Based on the Write/Erase count, NAND controller re-map the logical address to the different physical address. Wear-leveling is done by the NAND controller (FTL), not by the host system. Block : Erase unit Example of wear-leveling If the block is occupied with old data, data is programmed to a new block. If there is no free block, the invalid block are erased. Old file Bitline Block 1 Block 2 Bl k 3 Block Block 4 Block 5 Block 6 Block 7 Block 8 Block 9 Block 1 Block 2 Bl k 3 Block Block 4 Block 5 Block 6 Block 7 Block 8 Block 9 Rewrite old file Block 4 Æ Invalid Bitline Empty block New File Bitline Ken Takeuchi Advanced Flash Memory Devices 63 High Reliability Technology (Cont’) Write new file to an empty block Advanced Flash Memory Devices Ken Takeuchi 64 High Reliability Technology (Cont’) Dynamic wear-leveling Static data Data that does not change such as system data (OS, application SW). Dynamic data Data that are rewritten often such as user data. Write/Erase count Dynamic wear-leveling Wear-level only over empty and dynamic data. Static wear-leveling Wear-level over all data including static data. Red : Static data such as system data. Blue : Dynamic data such as user data Physical block address Block with static data is NOT used for wear-leveling. Write and erase concentrate on the dynamic data block. N.Balan, MEMCON2007. SiliconSystems, SSWP02. Ken Takeuchi Advanced Flash Memory Devices 65 Ken Takeuchi Advanced Flash Memory Devices 66 11 2008/12/8 High Reliability Technology (Cont’) High Reliability Technology (Cont’) Bad Block Management Program/Erase characteristics vs. endurance Static wear-leveling Write/Erase count Red : Static data such as system data. Blue : Dynamic data such as user data Physical block address Wear-level more effectively than dynamic wear-leveling. Search for the least used physical block and write the data to the location. If that location Is empty, the write occurs normally. Contains static data, the static data moves to a heavily N.Balan, MEMCON2007. used block and then the new data is written. SiliconSystems, SSWP02. Ken Takeuchi Advanced Flash Memory Devices As the Write/Erase cycles increases, erase failure occurs, resulting in a bad block. The NAND controller detects and isolates the bad block. Y.R. Kim, Flash Memory Summit 2007. 67 Ken Takeuchi Advanced Flash Memory Devices High Reliability Technology (Cont’) ECC (Error Correcting Code) To overcome read disturb, program disturb and data retention failure, ECC have to be applied. Since failure pattern is random, BCH is sufficient. Existing NAND controller can correct 4-12bit error per 512Byte sector. NAND with embedded ECC is also published. Ken Takeuchi 68 Outline SSD, Memory System Innovation NAND Overview NAND Circuit Design SSD Overview NAND Controller Design Operating System for SSD Green IT with SSD Summary R. Micheloni, ISSCC2006, pp.142-143. Advanced Flash Memory Devices 69 Why OS? Ken Takeuchi Advanced Flash Memory Devices 70 New Memory System: NAND/HDD Combo Motivation Multi-drive of NAND/HDD NAND as a cache Intel Robson Microsoft Ready Boost Existing OS is optimized for magnetic drives. Current SSD based PC uses the conventional OS and just replace HDD with SSD. To achieve the best performance and reliability of SSD, OS especially file system should be optimized. Windows 7 will treat SSD differently from HDD. H. Pon, NVSMW 2007. SanDisk Vaulter Disk NAND : OS data HDD : User data http://www.sandisk.com/Assets/File/pdf/ oem/Vaulter_brochure.pdf Temporary solution until NAND cost becomes comparable with HDD cost. Ken Takeuchi Advanced Flash Memory Devices 71 Ken Takeuchi Advanced Flash Memory Devices 72 12 2008/12/8 MLC/SLC Hybrid SSD Performance Optimization Future Direction : Hybrid SSD with SLC and MLC Concept : Right device for the right use. Enjoy the Benefit of both SLC and MLC. SLC : Fast and highly reliable but low capacity. Use SLC as a cache or system data storage. MLC : Large capacity but slow. Use MLC as user data storage. OS support essential: SSD does NOT know the contents of the file. Sector size optimization Minimum write/read unit of NAND is a page. Typical page size is 4-8KByte. A page is written only ONCE to avoid the Page program disturbance. With current OS having 512Byte sector, one sector write wastes >80% of data in a page. Toshiba LBA LBA-NAND NAND http://www1.toshiba.com/taec/index.jsp Samsung Combo SSD J. Elliott, WinHEC2007. SATA-III MLC 48/64/128/256/512GB SATA-II (Multi Level Cell) 32/48/64/128/256GB SATA-II SATA-III 16/32/48/64/96/128GB 56/112/224/336/448GB ・・・ SATA-II 1 sector write 28/56/112/168/224GB SATA-III SATA-II Combo (SLC+MLC) 32/64/128/192/256GB Spansion MirroBit Eclipse http://www.spansion.com/products/MirrorBit_Eclipse.html 14/28/56/84/112GB SATA-II 16/32/64/96/128GB SATA-II SATA-I PATA (Single Level Cell) 4/8/16/32GB R/W Speed: 57/32 2006 LBD(Long Block Data) sector standard (Windows Vista) : 4KByte sector size fits better with SSD. SLC 8/16/32/48/64GB 8/16/32/48/64GB Remaining portion becomes garbage. 64/45 100/80 2007 2008 160/160 800/800 2009 Ken Takeuchi 1300/1300 2010 Advanced Flash Memory Devices 73 Ken Takeuchi Advanced Flash Memory Devices Page Size Trend Frequent Garbage Collection System performance degradation of a large block 70nm 8G MLC (ISSCC2005) As the page size increases as NAND is shrinking, larger sector size such as 64KByte or 128KByte is required. [Frequent block copy] 56nm 8G MLC (ISSCC2006) (This work) Old block 32WLs 1200 9000 32WLs 8000 ① Cell read 1000 512KB block 1MB block Page size (Byte e) 8KB page (max) ③ Cell program Page buffer ② Data-out, ECC, Data-in System performance degradation Block size (KBy yte) 7000 New block 4KB page (max) 6000 5000 4000 3000 400 200 0 0 0.25um 0.16um 0.13um 90nm 70nm 50nm 43nm 0.25um 0.16um 0.13um 90nm Design rule = 125ms 50nm 43nm K. Takeuchi, ISSCC 2006,pp.144-145. Advanced Flash Memory Devices 75 Advanced Flash Memory Devices Ken Takeuchi Reliability Optimization SMART Decrease write/erase cycles of NAND, extending the NAND lifetime. Control the file allocation to store frequently rewritten file in DRAM and not to access NAND. Enhanced Write Filter (EWF) is located between file system and low level driver interfacing with SSD. OS/Application SW support essential: Again, SSD does NOT know the contents of the file. (Self-Monitoring, Analysis and Reporting Technology) Monitor the storage and report/predict the failure. SMART for HDD is NOT smart because it is very difficult to predict the mechanical failure. (Google report, report http://209.85.163.132/papers/disk_failures.pdf) http://209 85 163 132/papers/disk failures pdf) SMART for SSD can be really smart. Product lifetime can be predicted because the failure rate is highly correlated with the write/erase cycles. Predict the SSD lifetime by monitoring the write/erase cycles and replace SSD before the fatal failure occurs. Enhance Write Filter SSD Low-level Driver http://www.tdk.co.jp/tefe02/ew_007.pdf http://msdn2.microsoft.com/en-us/library/ms912909.aspx Advanced Flash Memory Devices 76 Reliability Optimization (Cont’) Enhanced Write Filter (Windows Embedded) Ken Takeuchi 70nm Design rule ×(# of pages per block) Fast block copy required File System 600 1000 = (T_Cell read+T_Data_out+TECC+T_Cell program) Application 800 2000 NAND controller Block copy time Ken Takeuchi 74 77 Ken Takeuchi Advanced Flash Memory Devices 78 13 2008/12/8 Outline Green IT : Power Crisis of Data Center Data through internet is increasing drastically. In the U.S, power consumption at the data center doubled during last 5 years. (5 nuclear power plants!) In 2025, the data increases by 200 times and the power consumption increases by 12 times. SSD, Memory System Innovation NAND Overview NAND Circuit Design SSD Overview NAND Controller Design Operating System for SSD Green IT with SSD Summary Ken Takeuchi Advanced Flash Memory Devices Data Center Power increase of HDD 79 Replace HDD with SSD Ken Takeuchi Advanced Flash Memory Devices 80 Problems of NAND Flash Memory Reliability Low write/erase cycles: Currently <10K cycles (MLC) and decreasing as scaling down memory cells. Æ >100K cycles required Power Consumption p Because of the scaling, the parasitic capacitance increases and the power consumption doubles. Æ Low power memory device required SSD (NAND Flash) Capacity HDD Currently Gbyte Æ TByte required Ken Takeuchi Advanced Flash Memory Devices 81 Operation Current Trend of NAND Advanced Flash Memory Devices 82 Fe(Ferroelectric)-NAND Flash Memory NAND Flash Memory w. Ferroelectric Transistor Scalable below 20nm Low voltage/power operation: 20VÆ5V Write/Erase cycles: 10K cyclesÆ100M cycles Æ Most suitable for data server application In the scaled VLSIs, most power is consumed to charge and discharge signal-lines. Inter signal-line capacitance, Cwire-wire drastically increases to keep the low signal-line resistance. 100 Operation current [mA A] Ken Takeuchi 8080 6060 2020 00 10 10 Pt SrBi2Ta2O9 Hf-Al-O M F I Cwire-wire Cwire-wire 4040 n+ 20 20 30 40 50 60 30 40 size 50 [nm] 60 Feature 70 70 Cwire-wire Cwire-wire n+ p-Si MFIS Structure (Metal-FerroelectricInsulator-Semiconductor) S. Sakai, NVSMW 2008, pp.103-104. K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Ken Takeuchi Advanced Flash Memory Devices 83 Ken Takeuchi Advanced Flash Memory Devices 84 14 2008/12/8 Operation Principle of Fe-NAND Flash Scalable below 20nm Ferro electricity is maintained in 20nm size. Low voltage operation BL M F I SGD FeFET WL0 SrBi2Ta2O9 (SBT) 5V 0V BL TEM Photograph M F I n+ Sr n n+ n+ Bi n+ p-well Si p-well Si Ta 5V 0V O WL31 Program Erase SGS a = 0.5506 nm b = 0.5534 nm c = 2.498 nm SrBi2Ta2O9 ~ 400nm Hf-Al-O ~ 10nm IL Si c Source Line IL: Interfacial layer major component – SiO2 b a S. Sakai, NVSMW 2008, pp.103-104. Ken Takeuchi Advanced Flash Memory Devices 85 10 Year Data Retention S. Sakai, NVSMW 2008, pp.103-104. Ken Takeuchi Advanced Flash Memory Devices 86 Excellent W/E Cycles up to 100M 1.1 Fe-NAND Vth (V) -4 Drain Cu urrent, Id (A) 10 On states 1st 2nd 3rd 4th -8 10 10 -10 10 10 -12 10 -14 Pt SrBi2Ta2O9 M F I -6 10 37.0 days Hf-Al-O n+ n+ n 33 5 d 33.5 days 1.0 0.9 Erased Programmed 0.8 0.7 0.6 0.5 0 5 3 10 p-Si 10 years 4 5 6 7 8 10 10 10 10 10 Number of Cycles S. Sakai, NVSMW 2008, pp.103-104. Off states 0 10 2 10 10 4 6 8 10 NAND 10 Time, t (s) Buffer layer improves Si‐ interface characteristics. Y.R. Kim, Flash Memory Summit 2007. Ken Takeuchi Advanced Flash Memory Devices 87 Co-design of NAND and Controller Circuits Ken Takeuchi Advanced Flash Memory Devices 88 Co-design of NAND and Controller Circuits By co-designing both NAND and NAND controller circuits, the power consumption of SSD is reduced by 60%. 100 CE2, R/B2 NAND Chip1 NAND Controller CE3, R/B3 NAND Chip2 NAND Chip3 CE4, R/B4 NAND Chip4 Operation current [mA] O CE1, R/B1 Power Detect ((PD)) ALE, CLE, RE, WE, WP, IO 系列1 Conventional Selective BL precharge 系列2 Selective BL precharge 系列3 6060 4040 NAND Flash Memory 23% reduction 8080 & Advanced SL program 48% reduction – Selective bit-line precharge scheme – Advanced source-line program 2020 00 10 10 20 20 30 40 50 60 30 40 size 50 [nm] 60 Feature 70 70 Current waveform of NAND Chip1 Time Current waveform of NAND Chip2 • Low Power Circuit Technology • Low Noise Circuit Technology – Intelligent interleaving Time Current waveform of NAND Chip3 Time Current waveform of NAND Chip4 Time NAND Controller Ken Takeuchi K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Advanced Flash Memory Devices 89 K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Ken Takeuchi Advanced Flash Memory Devices 90 15 2008/12/8 NAND Bit-line Capacitance Trend SSD Write Performance • Interleaving: write N NAND chips in parallel Performance_SSD = N × Performance_NAND • Inter bit-line capacitance, CBL-BL drastically increases to keep the low bit-line resistance. Channel 1 NAND Chip1 NAND Chip15 NAND Chip16 CBL-BL ・・ NAND Controller NAND Chip2 Channel 4 CBL-BL CBL-BL CBL-BL NAND Chip2 NAND Chip15 Bit-line capacitance [a.u.] 10 NAND Chip1 NAND Chip16 8 6 • Limitation of N N × I_NAND < Icc_constraint • Key NAND design issue: Decrease I_NAND to maximize N 4 2 0 10 10 20 30 20 40 50 60 30 40 size 50[nm] 60 Feature 70 43nm 16Gb NAND 70 K. Kanda, ISSCC, 2008. K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Advanced Flash Memory Devices Ken Takeuchi 91 Advanced Flash Memory Devices Ken Takeuchi Multi-level Cell Program Current & Performance Trend NAND operation current 8080 6060 100 100 Bit-by-bit Program Algorithm 8080 Data load 6060 4040 Number of memory cells “A” “B” Erased state 2020 20 20 30 40 50 60 30 40 size 50 [nm] 60 Feature 70 70 No 0 010 10 20 20 30 40 50 60 30 40 size 50 [nm] 60 Feature “A”-program & ”A”verify Verify‐read “C”-program & ”C”verify Yes End K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. 93 Conventional Verify Read K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Number of memory cells “1” “0” Bit-line * Additional Transistor Vth Bit-line * N2 * PRE2 * * N3 N1 PRE1 N3 Read voltage Bit-line voltage Vread (4.5V) “1” “0” Time Vread (4.5V) 0V Ken Takeuchi 94 • During verify, precharge bit-line based on the program data in the page buffer. • Skip unnecessary bit-line precharge and save current during verify. Page Buffer • Area overhead < 1% Vread (4.5V) Selected word-line (Read voltage : 0V) Advanced Flash Memory Devices Ken Takeuchi Selective Bit-line Precharge Scheme • All bit-lines are precharged irrespective of the program data. • Page based program Æ 8KByte(Page size) bit-lines are precharged. Æ Total bit-line capacitance > 200nF! Bit-line Bit line (0.8VÆ0V) “B”-program & ”B”verify All cells programmed ? • Low power circuit of NAND required. Advanced Flash Memory Devices Vth 70 70 C_bit‐line↑ Æ I_NAND ↑ Æ N ↓ Æ Performance_SSD↓ Ken Takeuchi “C” VA VB VC 1st page program 2nd page program Program pulse 4040 2020 00 10 10 SSD performance SSD Perforrmance [MByte/sec] Operattion current [mA] 100 92 PRE1 PRE2 “High” “A”-verify “High” “B”-verify “High” “Low” “C”-verify “Low” “High” Latch1 IO CSL N1 Latch2 N2 /IO K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Advanced Flash Memory Devices 95 Ken Takeuchi Advanced Flash Memory Devices 96 16 2008/12/8 1st Page Program (“A”-verify) Number of memory cells “A” “B” Erased state 2nd Page Program (“B”-verify) Number of memory cells “A” “B” Erased state “C” Vth Vth VA VB VC 1st page program 2nd page program 1st [Conventional]                        [Proposed] [Conventional]                     [Proposed] Bit-line Bit-line precharge Time Bit-line discharge Bit-line discharge Bit-line precharge 97 100 23% reduction Operation current [[mA] VB VC 2nd page program Bit-line Word-line Time Bit-line Bit-line discharge precharge 8080 98 100 100 Conventional 系列1 Selective BL precharge 系列2 Bit-line Bit-line discharge precharge 4040 2020 00 10 10 VC 8080 6060 4040 50% improved Conventional 系列1 2020 20 20 30 40 50 60 30 40 size 50 [nm] 60 Feature 70 70 系列2 Selective BL precharge 0 010 10 20 20 30 40 50 60 30 40 size 50 [nm] 60 Feature 70 70 Time Advanced Flash Memory Devices Ken Takeuchi Time • 23% current reduction. • 50% performance improvement. “C” “B”-program complete / incomplete “C”-program complete Program inhibit “C”-program incomplete VC Bit-line Bit-line discharge precharge Result – Selective BL precharge [Conventional]                           [Proposed] Bit-line Word-line VB Advanced Flash Memory Devices Ken Takeuchi 6060 “B”-program complete / incomplete “C”-program complete / incomplete Program inhibit Time Bit-line Bit-line discharge precharge Vth VA 1st page program Word-line VB Time 2nd Page Program (“C”-verify) Number of memory cells “A” “B” Erased state Bit-line Word-line VA Advanced Flash Memory Devices Ken Takeuchi “B”-program complete “C”-program complete / incomplete Program inhibit “B”-program incomplete Bit-line Word-line VA VB VC page program 2nd SSD Performance [MBy yte/sec] Bit-line Word-line VA page program “B”-program complete / incomplete “C”-program complete / incomplete Program inhibit “A”-program complete Program inhibit “A”-program incomplete “A”-program complete / incomplete Program inhibit “C” 99 Advanced Flash Memory Devices Ken Takeuchi 100 Capacitance Comparison Source-line Program (VLSI’99) • Save current during program pulse. • Bias 2.5V from a low capacitance source-line. • Low voltage swing for a high capacitance bit-line Bit-line Bit-line Bit-line [Conventional] [Source-line program] Bit-line (2.5V) Bit-line (1V) SGD (4.5V) Vpgm (18V) SGD (0VÆ0.7V) V Vpgm (18V) Vpass (10V) Vpass (10V) Inhibit voltage Vpass (10V) SGS (0V) Source-line (1V) 2 SG, 64 CG Cbit-line = Cwire(bitline) + Cjunction Csource-line = Cwire(source-line) + Cjunction Inhibit voltage Cwire(bitline) >> Cjunction, Cwire(source-line) Demonstrated in 0.25um NAND Vpass (10V) SGS (4.5VÆ0V) Cbit-line >> Csource-line Source-line (2.5V) K. Takeuchi, Symposium on VLSI Circuits, pp.37-38, 1999. Ken Takeuchi Advanced Flash Memory Devices 2 SG, 64 CG Source-line K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. 101 Ken Takeuchi Advanced Flash Memory Devices 102 17 2008/12/8 Read Operation Advanced Source-line Program • Total source-line capacitance in a chip exceeds 20nF for sub-50nm NAND. • Hierarchical source-line structure • Only metal layout change; No area overhead • All Source-line switch: ON • Minimize the source-line resistance. • Suppress the source-line noise. Sub-array Sub-array Sub-array Sub-array Bit-line Bit-line Bit-line Bit-line Bit-line Bit-line Row decoder Row decoder Row decoder Row decoder Row decoder Row decoder Row decoder Row decoder Row decoder Row decoder Local source-line Source-line decoder Switch Local source-line Local source-line Source-line decoder Source-line decoder Local source-line ON Global source-line Global source-line K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Advanced Flash Memory Devices 103 Advanced Flash Memory Devices Ken Takeuchi Program Operation • 60% current reduction. • 250% performance improvement. Sub-array Sub-array 100 系列1 Conventional 系列2 Selective BL precharge 系列3 Selective BL precharge 8080 Bit line Bit-line 6060 Bit-line Row decoder Local source-line Source-line decoder ON Local source-line 6060 48% reduction 00 10 10 OFF 105 Conventional 系列1 Selective BL precharge 系列2 Selective BL precharge 系列3 2020 20 20 30 40 50 60 30 40 size 50 [nm] 60 Feature 70 70 K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Advanced Flash Memory Devices Ken Takeuchi 250% improved 4040 2020 Source-line decoder Global source-line 8080 & Advanced SL program 4040 Row decoder Row decoder 100 100 23% reduction Operation current [[mA] Bit-line Row decoder 104 Result – Advanced SL program • Only one of 16 sub-arrays activated • Source-line capacitance: 90% reduced Row decoder ON K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. SSD Performance [MBy yte/sec] Ken Takeuchi Source-line decoder 00 10 10 & Advanced SL program 20 40 50 60 70 70 K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Advanced Flash Memory Devices Ken Takeuchi Intelligent Interleaving 106 Control Circuit • Introduce Power Detect (PD) signal. • When a NAND starts bit-line precharge & charge pump ramp-up, PD becomes low. • NAND controller issues a write command when PD is high and NAND is ready. • Disperse the current peak and avoid the power supply noise. Bit-line precharge & charge pump ramp-up cause >100mA current peak. CE1 R/B1 CE1, NAND Chip1 CE2, R/B2 CE3, R/B3 Time NAND Chip2 Time NAND Controller NAND Chip3 NAND Chip1 NAND Chip2 NAND Chip3 CE4, R/B4 NAND Chip4 Time NAND Chip4 ● 30 30 40 size 50 [nm] 60 Feature 20 Power Detect (PD) Time ● PD R/B1 Program_Enable1 (Chip1) PD R/B3 Program_Enable3 (Chip3) PD R/B2 Program_Enable2 (Chip2) PD R/B4 Program_Enable4 (Chip4) ● ● ALE, CLE, RE, WE, WP, IO [Current waveform during program and verify] ● ● K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Ken Takeuchi Advanced Flash Memory Devices 107 Ken Takeuchi Advanced Flash Memory Devices 108 18 2008/12/8 Current Waveform Summary: Co-design of NAND and Controller Circuits • Co-design of NAND and NAND controller. Current waveform of NAND Chip1 – To improve SSD speed, decrease the NAND current and maximize # of NAND operated in parallel. Time Current waveform of NAND Chip2 Time Current waveform of NAND Chip3 • Two low power circuit technologies proposed. Time Current waveform of NAND Chip4 ● – – – – Time ● ● Power Detect (PD)-signal R/B1 (chip1) Selective bit-line precharge g scheme Advanced source-line program 60% current reduction. 250% SSD performance improvement. R/B2 (chip2) R/B3 (chip3) • Intelligent interleaving realizes highly reliable and high-speed SSD. R/B4 (chip4) ● ● ● K. Takeuchi, Symposium on VLSI CIrcuits, 2008, pp.124-125. Ken Takeuchi Advanced Flash Memory Devices 109 Ken Takeuchi 3D-integrated SSD Advanced Flash Memory Devices 110 Summary First demonstration of 3D-integrated SSD. With smart Mix & Match, the power decreases by 70%. New Memory System SLC/MLC Hybrid SSD solves the system bottleneck. DRAM MPU Core Logic Flash ROM Analog Cache SoC Emerging Market: Power Crisis at data center 3D SiP 3D-SiP Analog SSD is expected to save power at data center. Logic Flash DRAM ROM Device, circuit and OS innovation required. Co-design of NAND and NAND controller circuits OS optimization such as sector size optimization Fe(Ferroelectric)-NAND flash memory device 3D-integrated SSD circuits Cache MPU Core To be presented at ISSCC in Feb. 2009@San Francisco. 13.2. “A 1.8V 30nJ Adaptive Program-Voltage (20V) Generator for 3D-Integrated NAND Flash SSD” Ken Takeuchi Advanced Flash Memory Devices 111 Ken Takeuchi Advanced Flash Memory Devices 112 Thank you! E-mail : [email protected] http://www.lsi.t.u-tokyo.ac.jp Ken Takeuchi Advanced Flash Memory Devices 113 19