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Zr Series Large Size Vacuum Module Ejector System

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October 2018
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Industrial & lab equipment Electrical equipment & supplies Power conditioning Uninterruptible power supplies (UPSs)

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4-5-08-ZR.qxd 09.10.2 10:21 AM Page 1 Large Size Vacuum Module: Series ZR Ejector System/Vacuum Pump System ZA ZX Large suction flow rate, suitable when used with large size pads or multiple pads. ZR Nozzle dia. ø1.0, ø1.3, ø1.5, ø1.8, ø2.0 ZM ZMA Vacuum module suitable for handling workpieces of 0.5 to 5 kg. ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment 937 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 2 Large Size Vacuum Module: Ejector System/Vacuum Pump System Series ZR Vacuum module suitable for handling workpieces of 0.5 to 5 kg. Modular design/Customized application function through selection of modular components. Modules for use with external vacuum supply (from pump or mainline) or as an air driven ejector system. Safe — Vacuum self-holding function by means of double solenoid valves. Compact, Lightweight Manifolding possible Vacuum ejector type complete unit h itc sw re u ss pre l ita dig m ith cuu W va for Ejector unit Pressure switch for vacuum/ Suction filter unit h itc sw ure s s pre um ith W vacu for h itc sw e r u ss pre ut m o u ith W vacu for Fu nc tio (O n pl pti ate on ) oid len so e l ub Do Valve unit ted era op r i A ilot ep On External vacuum supply type complete unit Application Example Escorting printed matter Absorbing and transferring liquid crystal panels Absorbing and transferring thin plates Absorbing and transferring copper plates, Automatic labeling machine, Absorbing and transferring veneers, Automatic screw fastening machine 938 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 3 Large Size Vacuum Module: Series ZR Modular Components Introduction System Component equipment Ejector unit ZR1-W Ejector System Vacuum Pump System P. 940 to 967 P. 968 to 983 Characteristics Nozzle dia. (mm) 1.0 1.3 1.5 1.8 Type S 22 38 54 62 84 Type L 42 52 74 88 105 Air consumption (l/min (ANR)) 46 78 95 150 185 Maximum vacuum pressure S: -84 kPa Exhaust release (Ejector exhaust) Built-in silencer, Manifold exhaust Individual exhaust port Maximum suction flow rate (l/min. (ANR)) 2.0 ZA ZX L: -53 kPa ZR ZM Valve unit ZR1-V Supply valve (Pilot type)/Release valve (Pilot type) Component equipment Function N.C./N.O. Operation Solenoid valve (Double, Single)/Air operated valve ZMA ZQ 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60Hz) Power supply voltage ZH Pressure switch for vacuum Set pressure range ZSE2-0R-15 ZSE30A-00---X505 –101 to 0 kPa/–101 to 10 kPa ZL 12 to 24 VDC (Ripple ±10% or less ) Operating voltage Suction filter unit Operating pressure range ZR1-F Filtration degree ZY Vacuum to 100 kPa Material ZF PVF ZP Function plate RV1 ZR1-RV Symbol RV2 Unit Manifold SP / / RV3 Common specifications ZU 3% or less/variable Hysteresis ZCUK 18 Air supply port Rc Vacuum pad connection port Rc 1 8 Air supply port Rc 1 8 Pilot valve connection port M5 Release valve connection port M5 AMJ AMV AEP HEP Rc 1 2 Common exhaust port Rc 1 8 — External vacuum supply port Related Equipment Refer to pages 945 to 954 for further specifications of each unit. Single unit Single unit Manifold Manifold 939 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 4 Large Size Vacuum Module: Ejector System [Option] Series ZR Ej ec to ru ni tn M ax oz im zle um di Ej a. va ec cu to um re xh pr es C au su an om st re Re d bin r e fe le at r t a io o se n o “T v f ab al su Pi le ve pp lo tv (1 ly )”. al va v lve e So le no id El va ec lve tri ra ca te le Li d gh nt vo ry t/S lta ur ge ge M an vo ua lta lo ge ve su rri pp de re C ss om or bi na O t i on ut pu of ts sw pe U itc cif ni h/ ts ica filt pe tio er cif Le ns ica ad t i w ire ons sp ec R ific ad ele at ju as io st e ns in fl g ow ne r ed at le e How to Order Note for model selection Take function plates into consideration. (Refer to page 943.) Components Ejector unit Supply valve self-holding Pressure switch for vacuum unit ZR1 20 S 1 K1 5 M Z Ejector unit Supply valve N.C. Pressure switch for vacuum unit ZR1 20 L 1 K2 5 M Z Ejector unit Pressure switch for vacuum unit ZR1 20 S 1 Ejector unit Filter unit ZR1 20 L 1 CE compliant Nil — CE Q marked Ejector module nozzle diameter Maximum vacuum pressure 10 1.0 mm 18 1.8 mm S –84 kPa 13 1.3 mm 20 2.0 mm –53 kPa L 15 1.5 mm Ejector exhaust Combination of supply Symbol Type Valve Manifold valve and release valve 1 Built-in silencer Refer to “Table (1)” on 2 Note 1) Port exhaust page 941 for details. Note 2) Common exhaust — 3 Electrical entry Release flow rate adjusting needle Nil Without lock nut With lock nut L Lead wire specifications Digital pressure switch for vacuum (ZSE30A) specifications (D) Nil L Refer to “Table (4)” on page 941 for part no. of lead wire with connector. Pressure switch for vacuum (ZSE2) specifications (E) Nil L C CL CN Note 1) When port exhaust is applied to the manifold, pilot exhaust DC: 1 W is done by common exhaust. Thus, the exhaust port on the manifold base should be open while operating. Nil (With indicator light: 1.05 W) Note 2) When the product is used for the manifold specification and AC common exhaust, the exhaust air of the operating ejector DC: 0.45 W releases may enter the vacuum (V) port of the non∗ Y operating ejector and be released if there are an operating (With indicator light: 0.5 W) and non-operating ejector. Select either the built-in silencer ∗ Only 24 VDC and 12 VDC or port exhaust for the ejector exhaust method. are applicable to 0.45 W. Air operated 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC (50 60 Hz) 110 VAC (50 60 Hz) Note) CE marked products are not available for “D1” and “D2”. Caution When using AC, the DC solenoids are operated via a rectifier. Therefore, make sure to combine the connector assembly equipped with a rectifier with the exclusive solenoids. Using other combinations could lead to burned coils or other malfunctions. Nil No setting Unit specifications Electrical entry Nil Air operated For 24, 12, 6, 5, 3 VDC L Lead wire length 0.3 m Without lead wire (Applicable to only DC) LN Plug LO Without connector connector Lead wire length 0.3 m M type MN Without lead wire (Applicable to only DC) Without connector MO G Grommet Lead wire length 0.3 m (Applicable to only DC) type Lead wire length 0.6 m (Applicable to only DC) H 100, 110 VAC (With rectifier) Plug L Lead wire length 0.3 m connector type M Lead wire length 0.3 m • Refer to “Table (2)” on page 941 for part no. of lead wire with connector. Manual override Light/Surge voltage suppressor Nil Z S Grommet/Lead wire (Length 0.6 m) Grommet/Lead wire (Length 3 m) Lead wire with connector (Length 0.6 m) Lead wire with connector (Length 3 m) With connector/Without lead wire Refer to “Table (3)” on page 941 for part no. of lead wire with connector. Filter specifications (F) Solenoid valve rated voltage Nil 5 6 V S R D1 Note) D2 Note) Without lead wire Lead wire with connector (Length 2 m) Nil B None With light/surge voltage suppressor With surge voltage suppressor ∗ S is not available for AC. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged. Nil D E F Non-locking push type Slotted locking type Combination of switch/filter None Digital pressure switch for vacuum (ZSE30A) + Filter Pressure switch for vacuum (ZSE2) + Filter Filter Digital pressure switch for vacuum (ZSE30A) specifications (D) Nil M P With unit switching function SI unit only With unit switching function (Initial value psi) Note 1) This is no longer sold for use in Japan due to the Weight and Measure Act (implemented October, 1999). Note 2) Fixed unit: kPa Pressure switch for vacuum (ZSE2) specifications (E) Nil No setting Filter specifications (F) Nil No setting Output specifications Digital pressure switch for vacuum (ZSE30A) specifications (D) N P A B C D E F NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output PNP open collector 1 output + Analog voltage output PNP open collector 1 output + Analog current output Pressure switch for vacuum (ZSE2) specifications (E) Nil 55 NPN open collector 1 output PNP open collector 1 output Filter specifications (F) Nil No setting 940 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 5 Large Size Vacuum Module: Ejector System Series ZR ZA ZX Table (1) Combination of Supply Valve and Release Valve Supply valve Release valve Air operated Air operated Solenoid valve Solenoid valve Symbol Double SOL. Double SOL. Double SOL. Double SOL. N.C N.C (VJA3130) (VJA3130) (VJ3233-X17) (VJ3233-X18) (VJ3133) (VJ3233-X17) (VJ3233-X18) (VJ3133) Valve unit components Valve unit function Operation Vacuum Vacuum stop adsorption release Supply valve Release valve Double SOL. N.C. (VJ3233-X17) (VJ3133) N.C. N.C. (VJ3133) (VJ3133) Air operated Air operated (VJA3130) (VJA3130) N.C. (VJ3133) Air operated (VJA3130) N.O. (VJ3133) Double SOL. (VJ3233-X18) — K1 — — ZR ZM — — — — — — — — — — — — — Common with supply valve — ZH — — — Common with supply valve ZU — — Common with supply valve — ZL — Common with supply valve — — ZY ZMA K2 — — K3 — — C1 — — C2 — — C3 C4 — — — — — — — — Nil — ZQ Without valve module ZF Table (2) How to Order Valve Plug Connector Assembly DC VJ10 20 4A 100 VAC (with rectifier) VJ10 36 1A ZP Table (3) Pressure Switch for Vacuum/ Lead Wire with Connector ZS 10 SP 5A ZCUK AMJ Lead wire length 110 VAC (with rectifier) VJ10 36 Nil 30 50 3A Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC(-Q) ................ 1 pc. ∗ VJ10-20-4A-6 ...................................... 3 pcs. AMV 0.6 m 3m 5m AEP HEP How to order When requiring a vacuum switch with a lead wire of 5 m, indicate the part numbers of the vacuum unit switch without a lead wire connector and the 5 m lead wire connector separately. Example) ZR1--CN(-Q) ........... 1 pc. ∗ZS-10-5A-50 .......................................... 1 pc. Related Equipment Table (4) Digital Pressure Switch for Vacuum/ Lead Wire with Connector ZS 38 3 L Lead wire core 3 4 3 cores, 1 output, 2 m (Output specifications: N, P) 4 cores, 2 outputs, 2 m (Output specifications: A, B, C, D, E, F) 941 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 6 Series ZR Ejector System/Combination of Supply Valve and Release Valve Combination Symbol: K1 Combination Symbol: Feature: Double solenoid supply valve allows for self-holding. Pilot pressure supply port (PS) Pilot pressure exhaust port (PE) SOL.c SOL.a Silencer SOL.b Release pressure supply port (PD) Air pressure supply port (PV) Ejector Release valve Supply valve PD PV Vacuum port (V) How to Operate Pilot valve operation 1. Adsorption 2. Vacuum release 3. Operation stop Supply valve Combination Symbol: Note When power supply is cut off while the supply valve is ON, the operational state is held. K2 PS PE Pilot valve operation Operation 1. Adsorption 2. Vacuum release SOL.c Silencer PD PV Supply valve Pilot air Ejector Release valve V Supply valve Ejector Release valve V How to Operate Supply valve Release valve Note SOL.a SOL.c When power supply is ON OFF stopped, all operations OFF ON will be stopped. OFF OFF Combination Symbol: K3 Pilot air Pilot air PS PE Air operated a PD PV Supply valve Pilot valve operation Operation 1. Adsorption 2. Vacuum release Supply valve/Release valve Note Air operated a Be careful for blowing off of workpieces or ON displacement of adsorption position in case of small and/or lightweight workpieces. OFF Combination Symbol: Feature: Operation can be controlled by an external pilot valve. Silencer PD PV Air operated b Release valve Supply valve Ejector V Note The product is used under the environment in which solenoid valves cannot be used or when the centralized control is applied using external pilot air. Release valve Ejector V How to Operate Operation How to Operate Supply valve Release valve Air operated a Air operated b Operation 1. Adsorption ON OFF 2. Vacuum release OFF ON 3. Operation stop OFF OFF C3 Feature: Adsorption of workpieces (when de-energized) and release of PS vacuum (when energized) are PE SOL.a switched by single Silencer solenoid valve. Pilot valve operation Pilot valve operation Silencer PD PV How to Operate 1. Adsorption 2. Vacuum release 3. Operation stop C2 Feature: Adsorption of workpieces and release of vacuum are switched by external PS PE pilot valve. Air operated a SOL.a Pilot valve operation V Supply valve/Release valve Note SOL.a Be careful for blowing off of workpieces or ON displacement of adsorption position in case of small and/or lightweight workpieces. OFF Combination Symbol: Feature: Single solenoid valve is provided for supply valve. Operation Ejector Release valve How to Operate Supply valve Release valve SOL.a SOL.b SOL.c ON OFF OFF OFF ON ON OFF ON OFF Operation C1 Feature: Adsorption of workpieces (when energized) and release of vacuum PS (when de-energized) PE SOL.a are switched by single Silencer solenoid valve. 1. Adsorption 2. Vacuum release Supply valve/Release valve Note SOL.a Be careful for blowing off of workpieces or displacement of adsorption position in case OFF of small and/or lightweight workpieces. ON Combination Symbol: C4 Feature: Adsorption of workpieces and release of vacuum are switched by double solenoid PS valve. PE SOL.a SOL.b Silencer PD PV Caution When pipe connection is made to one port connection (PV port) only, use a function plate (ZR1-RV1). Refer to page 943 for further information. Supply valve Release valve Ejector V How to Operate Pilot valve operation Operation 1. Adsorption 2. Vacuum release Supply valve/Release valve Note SOL.a SOL.b When power supply is stopped, supply valve/ release valve will ON OFF hold the operation. OFF ON 942 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 7 Large Size Vacuum Module: Ejector System Series ZR Function Plate/ZR1-RV A function plate is used when each connecting port for the valve unit is common. If a function plate is not used (standard), make individual pipe connections to PV, PS, and PD ports respectively. Without Function Plate (Standard) Applicable system: Ejector system External vacum supply system Circuit diagram ZA Pilot pressure supply port (PS) Pilot pressure exhaust port (PE) t por PE ust a h x ) re e ase ssu ele pre (R t Pilo ply p u es sur res rt e p D po s ly a P le upp Re es sur ort s e t pr S p Pilo P Silencer SOL.a Release pressure supply port (PD) Air pressure supply port (PV) ply sup ureort s s pre PV p Air Supply valve SOL.b SOL.c Release valve Pressure switch for vacuum Ejector Vacuum port (V) Suction filter Pipe connection ZL ZR1-RV1 PS PE n) (ope SOL.a st P au exh PD PV Pilo g) /plu rt (w ort Vp ly P p p ) u g P re s /plu ply t (w pressu sup por ir ure A S s P s pre ply sup ase ure Rele ess Pipe connection r p t Pilo Supply valve Pressure switch for vacuum Silencer SOL.b SOL.c Release valve ZY ZF Ejector V ZP Suction filter o Dp SP ZCUK When ZR1/RV2 (PV⇔PS/PD) is Selected AMJ Supply air for generating vacuum and releasing vacuum respectively. Circuit diagram AMV AEP ZR1-RV2 ) E st P hau ex sure en t (op por re ssu ply sup re ep leas Re Pilo t pr e re ssu sup ply P P lug) ure (w/p ir press ort A p S PS PE SOL.a pres t Pilo ort Dp ply sup PV ZMA ZU Circuit diagram Since PV, PS and PD ports are made common via the function plate, pipe only to the PV port. ure ZM ZH When ZR1/RV1 (PV⇔PS⇔PD) is Selected ss t pre ZR ZQ With Function Plate/Applicable to Ejector System Only ort Ep ZX port PD PV Supply valve Silencer SOL.b SOL.c Release valve Pressure switch for vacuum HEP Related Equipment Ejector V Suction filter Pipe connection How to Order Function Plate Unit (For Ejector System) ZR1 RV 1 Piping specifications Symbol Indication PV port PS port PD port Common 1 PV ↔ PS ↔ PD Individual Common 2 PV ↔ PS/PD Caution Length of assembling screw varies when adding function plate. Order from the mounting thread parts list for unit combination on page 982. Order a plug (M-5P) separately in order to plug the PD and PS ports that are no longer used due to the addition of function plate. How to order Indicate the model numbers of the vacuum module and the function plate. Example) ZR120S1-K15MZ-EC .................. 1 pc. ∗ ZR1-RV1 ..................................... 1 pc. 943 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 8 Series ZR Construction !2 (1) How to Order Valve Body Assembly ZR1 VD K1 5 M Z Combination of supply valve and release valve Pilot valve L Manual operation Release flow rate adjusting needle Solenoid valve rated voltage With light/surge voltage suppressor Electrical entry ∗ Refer to page 940 for detailed specifications of each code. (2) How to Order Ejector Assembly ZR1 WD 10 S 1 Ejector exhaust Nozzle diameter Component Parts No. q w e r Description Material Manifold base Aluminum Release flow rate adjusting needle Stainless steel Function plate PBT Individual spacer PBT t Note 1) Filter case Polycarbonate 10 13 15 18 20 Note Refer to Note 2) Refer to page 962. Refer to page 962. (ZR1-FC-PC) (Assembly part no.: ZR1-FC-PC-AS) → Refer to page 953 Note 1) Precautions on handling the filter case 1. The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Note 2) Turning the release flow rate adjusting needle 2 full turns from the fully closed position renders the needle valve fully open. Do not turn more than two times since turning excessively may cause the needle fall off. In order to prevent the needle from loosening and falling out, the release flow rate adjusting needle with lock nut is also available. 1.0 mm 1.3 mm 1.5 mm 1.8 mm 2.0 mm 1 2 3 Built-in silencer Port exhaust Common exhaust Maximum vacuum pressure –84 kPa –53 kPa S L (3) How to Order Silencer Element ZR1 SZ 10 Nozzle diameter 10 13 15 18 20 1.0 mm 1.3 mm 1.5 mm 1.8 mm 2.0 mm Replacement Parts No. y u i o !0 !1 !2 Description Pilot valve assembly Valve body assembly Ejector assembly Silencer element Filter element Pressure switch for vacuum Filter switch unit for replacement Material — — — PVF PVF — — Part no. Refer to (5). Refer to (1). Refer to (2). Refer to (3). ZR1-FZ(30 µm) ZSE2-OR-15- ZSE30A-00---X505 ZR1-F-D (4) Pressure Switch for Vacuum + Suction Filter Unit ZR1 F E L D Option (Connector/lead wire specifications) Unit specifications Output specifications How to Order Solenoid Valves/Air Operated Valves Combination of switch/filter ∗ Refer to page 953 for detailed specifications of each code. Air operated ZR1 VJA3130 (5) How to Order Pilot Valves Solenoid valve ZR1 VJ3233 5 M Z X17 X18 Combination Symbol K1 ZR1 VJ3133 Pilot valve Manual operation Solenoid valve rated voltage C4 K3 Electrical entry With light/surge voltage suppressor Components Supply valve Release valve Double solenoid Single solenoid valve N.C. valve N.C. (VJ3233) (VJ3133) Double solenoid Double solenoid valve N.O. valve N.O. (VJ3233) (VJ3233) Air operated Air operated N.C (VJA3130) N.O (VJA3130) Model Refer to “How to Order” below. Supply: ZR1-VJ3233--X17 Release: ZR1-VJ3133- Refer to “How to Order” below. ZR1-VJ3233--X18 ZR1-VJA3130 ∗ Refer to page 940 for detailed specifications of each code. Note) Pilot valve gasket is included. (ZR1-PVG-1 or ZR1-PVG-2) 944 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 9 Large Size Vacuum Module: Ejector System Series ZR Ejector Unit/Series ZR1 Model/Max. Vacuum Pressure –84 kPa (S: Standard type) Nozzle dia. (mm) 1.0 1.3 1.5 1.8 2.0 Model ZR1-W10S ZR1-W13S ZR1-W15S ZR1-W18S ZR1-W20S Maximum suction flow rate (l/min (ANR)) 22 38 54 62 84 Air consumption (l/min (ANR)) 46 78 95 150 185 Mass (With bracket) (kg) 0.132 0.134 0.136 0.154 0.156 ZX Model/Max. Vacuum Pressure –53 kPa (L: Large flow type) Nozzle dia. (mm) 1.0 1.3 1.5 1.8 2.0 Model ZR1-W10L ZR1-W13L ZR1-W15L ZR1-W18L ZR1-W20L Maximum suction flow rate (l/min (ANR)) 42 52 74 88 105 Air consumption (l/min (ANR)) 46 78 95 150 185 Mass (With bracket) (kg) 0.133 0.133 0.135 0.155 0.154 Common Specifications Maximum operating pressure Supply pressure range Standard supply pressure Operating temperature range 0.7 MPa 0.2 to 0.55 MPa 0.45 MPa 5 to 50°C Code 1: Built-in silencer — For unit and manifold Code 2: Individual exhaust — For unit and manifold Bracket (P3270154) Model (Ejector exhaust method)∗ JIS Symbol Standard accessory ∗ How to Order: Code 1 and 2 are the suffixes in the ordering number to indicate the exhaust method. Note) Operation outside of the specified supply pressure and operating temperature range may cause a serious accident or damage. Release pressure supply port(PD) Air pressure supply port(P) Vacuum port (v) ZMA ZQ ZH ZU ZL ZY ZF ZCUK Ejector exhaust AMJ Built-in silencer 1 2 Individual exhaust∗ ∗ Port size: RC 1/8 (Nozzle dia. 1.0 to 1.5 mm) RC 1/4 (Nozzle dia. 1.8, 2.0 mm) 1.0 mm 1.3 mm 1.5 mm 1.8 mm 2.0 mm ZM SP ZR1 W 20 S 1 10 13 15 18 20 ZR ZP How to Order Nozzle diameter ZA AMV AEP HEP Maximum vacuum pressure S L Related Equipment – 84 kPa – 53 kPa 945 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 10 Series ZR Characteristics (Representative value) Ejector Unit/Standard Type (S): Max. Vacuum Pressure –84 kPa Supply pressure (MPa) –50 –40 –30 Suction flow –20 –10 Supply pressure (MPa) –50 –40 –30 Suction flow –30 –20 –10 –10 –80 –80 –60 –50 –40 –30 –70 –60 –50 –40 –30 –20 –20 –10 –10 –60 –50 –40 –30 –20 Suction flow (l /min (ANR)) ZR1-W20S1 Exhaust characteristics –90 –70 –10 Supply pressure (MPa) –90 –70 Suction flow –80 Vacuum pressure (kPa) –40 –20 Suction flow Flow characteristics –90 –80 –70 –60 –50 –40 –30 –20 –10 Supply pressure (MPa) Suction flow (l /min (ANR)) –90 –80 –70 –60 –50 –40 –30 –20 –20 –10 –10 Supply pressure (MPa) –50 –90 Flow characteristics Vacuum pressure (kPa) –60 Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) –70 Vac uum pres Ai sure rc on su m pt io n Vacuum pressure (kPa) –80 –30 Suction flow (l /min (ANR)) ZR1-W15S1 Exhaust characteristics –90 –40 Flow characteristics Vacuum pressure (kPa) –60 Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) –70 Vacu um p ress ure Ai rc on su m pt io n Vacuum pressure (kPa) –80 –50 –60 Suction flow (l /min (ANR)) ZR1-W13S1 Exhaust characteristics –90 –60 –70 Flow characteristics Vacuum pressure (kPa) –10 –70 Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) –20 –80 Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) –30 Suction flow –80 Vacu um p ress ure Ai rc on su m pt io n –40 –90 Vac uum pres sure Ai rc on su m pti on –50 –90 Vacuum pressure (kPa) –60 ZR1-W18S1 Exhaust characteristics Vacuum pressure (kPa) –70 Flow characteristics Vacuum pressure (kPa) Vacuum pressure (kPa) –80 Vacu um p ressu re Ai rc on su m pt ion –90 Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) ZR1-W10S1 Exhaust characteristics At 0.45 MPa Suction flow (l /min (ANR)) 946 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 11 Large Size Vacuum Module: Ejector System Series ZR Ejector Unit/Large Flow Type (L): Max. Vacuum Pressure –53 kPa n tio mp u ns co Air Suction flow –30 –20 –10 –90 –80 –80 –70 –60 –50 –40 –30 –40 –30 Suction flow –70 –60 –50 –20 –20 –10 –10 –90 –80 Vacuum pressure (kPa) –40 –90 Flow characteristics Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) –50 ZR1-W18L1 Exhaust characteristics Va cuu m pre ssu Ai rc re on su m pt io n –60 Vacuum pressure (kPa) pre ssu re –70 Va cu um Vacuum pressure (kPa) –80 Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) –90 Flow characteristics Vacuum pressure (kPa) ZR1-W10L1 Exhaust characteristics At 0.45 MPa ZA –70 ZX –60 –50 ZR –40 ZM –30 –20 ZMA –10 ZQ Suction flow (l /min (ANR)) –40 –30 –20 Suction flow –10 –90 –80 –80 –60 –50 –40 –30 –70 –60 –50 –40 –30 –20 –20 –10 –10 Suction flow ZH Flow characteristics ZU –90 ZL –80 Vacuum pressure (kPa) –50 ZR1-W20L1 Exhaust characteristics –90 –70 Suction flow (l /min (ANR)) Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) –60 Vacuum pressure (kPa) Va cu um –70 Ai rc on su m pt io n Vacuum pressure (kPa) –80 Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) pre ss ure –90 Flow characteristics Va cu um Air pre con ss sum ure p tio n ZR1-W13L1 Exhaust characteristics Supply pressure (MPa) Vacuum pressure (kPa) Supply pressure (MPa) ZY –70 ZF –60 –50 ZP –40 SP –30 –20 ZCUK –10 AMJ Suction flow (l /min (ANR)) ZR1-W15L1 Exhaust characteristics –60 –50 –40 –30 –20 Suction flow –80 –70 –60 –50 –40 –30 –20 –10 –10 Supply pressure (MPa) Suction flow (l /min (ANR)) Suction flow (l /min (ANR)) AMV AEP How to Read Flow Characteristics Graph HEP –90 Vacuum pressure (kPa) Va cu um –70 Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) pre ss ure –80 Ai rc on su m pt io n Vacuum pressure (kPa) –90 Flow characteristics Supply pressure (MPa) Related Equipment Vacuum pressure Supply pressure (MPa) Suction flow Flow characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, the vacuum pressure will also be changed. Normally this relationship is expressed in ejector standard use. In graph, Pmax is max. vacuum pressure and Qmax is maximum suction flow. The values are specified according to catalog use. Changes in vacuum pressure are expressed in the below order. 1. When ejector suction port is covered and made airtight, suction flow becomes 0 and vacuum pressure is at maximum value (Pmax). 2. When suction port is opened gradually, air can flow through, (air leakage), suction flow increases, but vacuum pressure decreases. (condition P1 and Q1) 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near 0 (atmospheric pressure). Based on the above, when vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near 0. In the case when ventirative or leaky work should be adsorbed, please note that vacuum pressure will not rise. 947 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 12 Ejector exhaust Series ZR Ejector Unit um cu Va re ssu pre r i A P ply sup ort Vp Nozzle Dia./ø1.0, ø1.3, ø1.5, ø1.8, ø2.0 t por Circuit diagram Nozzle dia./ø1.0, ø1.3, ø1.5 mm 10 ZR1-W 13 15 EXH. Silencer Adapter B For port exhaust ∗2 EXH. Port exhaust ∗2 Ejector indication Rc 1/8 exhaust port (EXH.) Ejector ∗1 ∗1 ∗2 Rc 1/8 Vacuum port(V) Air pressure supply port (P) Release pressure supply port (PD) 26.5 ∗2 ∗1 Remove the plug from PD port at external release. Rc 1/8 V port (Vacuum port) Bracket B Ejector Bracket B ∗2 M5 PD port (Release pressure supply port) Rc 1/8 Air pressure supply port(P) Spacer B 1.2 (Mounting hole) 84 (Nozzle size: ø1.5) ∗1 74 (Nozzle size: ø1.0, ø1.3 port exhaust) Silencer Adapter E Note) ∗1 Dimensions for mounting bracket B ∗2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting. Bracket B part no.: P3270154#1 (Standard accessory) Spacer B part no. : P3270157#1 Nozzle dia./ø1.8, ø2.0 mm ZR1-W 18 20 ∗2 Adapter B For port exhaust ∗2 Ejector indication Rc 1/4 exhaust port (EXH.) ∗2 Circuit diagram ∗1 ∗1 EXH. Silencer EXH. Port exhaust 28.5 2 x 4, 6 (Mounting hole) ∗1 ∗1 Ejector ∗1 Rc 1/8 Vacuum port(V) Air pressure supply port (P) Release pressure supply port (PD) Silencer 2 x 3, 4 (Mounting hole) Bracket B Bracket B Ejector ∗2 ∗1 ∗1 Remove the plug from PD port at external release. ∗2 M5 Release pressure supply port (PD) Rc 1/8 Vacuum port(V) 1.2 Rc 1/8 Air pressure supply port(P) Spacer B 109 (port exhaust) 114 (Built-in silencer) Adapter E 948 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 13 Large Size Vacuum Module: Ejector System Series ZR Pressure Switch Unit for Vacuum/Pressure Switch for Vacuum: ZSE2-0R- Quick response: 10 mS Compact size: 39H x 20W x 15D (except the connecting portion) Improved wiring: Connector style Uses a carrier diffusion semiconductor pressure sensor Pressure detector Specifications Pressure switch for vacuum part no. ZSE2-0R-15 ZSE2-0R-55 Air Fluid Setting pressure range –101 to 0 kPa Hysteresis 3% F.S. or less (Fixed) Temperature characteristics (Based on 25°C) ± 3% F.S. or less Operating voltage 12 to 24 VDC (Ripple ±10% or less) NPN Open collector 30 V, 80 mA PNP Open collector 80 mA Output Lights up when ON Indicator light Current consumption 17 mA or less (when 24 VDC is ON) Proof pressure (Max. operating pressure) 0.5 MPa∗ Operating temperature range 5 to 50°C (A carrier diffusion semiconductor pressure sensor is used.) ∗ When using ejector system, instantaneous pressure up to 0.5 MPa will not damage the switch. Note) Operation outside of the maximum operating pressure and operating temperature range may cause a serious accident or damage. ZX ZR ZM ZMA Wiring Sensor chip ZA Switch Switch ZQ Connection with PLC at negative COM terminal ZSE2 connection ZH Brown Brown Black Black Load PLC input terminal ZU Blue Blue ZL Main circuit of switch Main circuit of switch ZY ZF How to Order ZSE2 0R ZP 15 L Output specifications 15 55 NPN Open collector 30V 80mA PNP Open collector 80mA SP ZCUK Piping specifications Nil L C CL CN Lead wire length 0.6 m Grommet type Lead wire length 3 m Lead wire length 0.6 m Connector type Lead wire length 3 m W/o lead wire AMJ AMV AEP HEP With Connector/How to Order Related Equipment Without lead wire (housing and 3 sockets) ........................... ZS-10-A With lead wire .......................................................................... ZS-10-5ALead wire length Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. Nil 30 50 0.6 m 3m 5m Example) ZSE2-0R-15CN ............................. 1 pc. ZS-10-5A-50 .................................. 1 pc. ∗ Refer to Best Pneumatics No. 6 for detailed specifications of pressure switches for vacuum. 949 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 14 Series ZR Pressure Switch Unit for Vacuum/Pressure Switch for Vacuum: ZSE2-0R- Guidelines for Use of Pressure Switch Unit for Vacuum When pads and switches are common to one vacuum source, sometimes there is a possibility, depending on the number of adsorption and non-adsorption applications at each point in time, that the switches will not work within the range of set pressures due to pressure variations from the vacuum source. In particular, when small diameter nozzles are used for adsorption, the switches are greatly influenced by pressure variations. In order to remedy this situation, the following circuit is recommended. System circuit for work adsorption Ejector style Vacuum regulator Vacuum source Tank Throttle valve Vacuum pump style Pressure switch for vacuum Vacuum line Pad Work • Adjust the throttle valve to reduce the pressure fluctuation between absorption and nonabsorption. • Stabilize the source pressure by providing a tank and a vacuum regulator. • If a vacuum switch valve is inserted into individual lines and false absorption occurs, each valve should be turned OFF to minimize the influences on other pads. Pressure Switch for Vacuum: ZSE2-0R- SET H 9 L 25 ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN Pressure setting trimmer Indicator light (Red) SET L 2 x M2.5 x 41L Mounting thread 25 2 x M2.5 x 41L Mounting thread 31 40 16 Vacuum supply port 3.3 9 18 16 11 20 18 13 20 9 11 13 3 3 49.5 40 600(3000) 600(3000) 31 42 H 9 Indicator light (Red) 15 Pressure setting trimmer 15 ZSE2-0R- ZSE2-0R-L Vacuum supply port 3.3 950 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 15 Large Size Vacuum Module: Ejector System Hysteresis is the actual pressure variance from set pressure occuring when the output signal turns from ON to OFF. The set pressure is the pressure selected to switch from OFF to ON mode. High vacuum Pressure setting trimmer • When using the switch to confirm correct absorption, the vacuum pressure is set to the minimum value to reliably absorb. If the value is set below the minimum, the switch will be turned ON even when adsorption has failed or is insufficient. If the pressure is set too high, the switch may not operate stably even though it may absorb correctly. SET ZR Setting pressure Supply pressure Setting pressure Indicator light ZA ZX Hysteresis • Pressure trimmer selects the ON pressure. Clockwise rotation increases high vacuum set point. Hysteresis High vacuum How to Set Vacuum Pressure Series ZR Reliable adsorption ZM ZMA Unstable adsorption No adsorption ZQ Atmospheric pressure Atmospheric pressure ZH ZU How to Use Connector 1. Attaching and detaching connectors • When assembling the connector to the switch housing, push the connector straight onto the pins until the level locks into the housing slot. • When removing the connector from the switch housing, push the lever down to unlock it from the slot and then withdraw the connector straight off of the pins. Hook + \r O 0.2 to 0.33 mm 2 Lead wire Max. covering dia. Socket Connector ø1.7 mm DC polarity indication Lever Pin Slot Housing Precautions 2. Crimping of lead wires and sockets Strip 3.2 to 3.7 mm at the end of the lead wires, insert the ends of core wires evenly into the sockets, and then crimp with a crimping tool. When this is done, take care that the coverings of the lead wires do not enter the core wire crimping area. (Crimping tool: model no. DXT170-75-1) Socket Covering Core wire retainer crimping area Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions. Covering 3. Attaching and detaching of socket to connector with lead wire • Attaching Insert the sockets into the square holes of the connector (with +, 1, 2, – indication), and continue to push the sockets all the way end. (When they are pushed in their hooks open and they are locked automatically.) Then confirm that they are locked by pulling lightly on the lead wires. • Detaching To detach a socket from a connector, pull out the lead wire while pressing the socket's hook with a stick having a thin tip (about 1 mm). If the socket will be used again, first spread the hook outward. ZY ZF ZP SP Mounting Core wire Lead wire Hook ZL Warning ZCUK 1. Do not give an excessive impact load. AMJ Do not drop, bump or apply excessive impact (1000 m/s2) when handling. AMV Even if the switch body is not damaged, the switch may suffer internal damage AEP that will lead to malfunction. 2. Hold the product from the body side HEP when handling. When raising and moving the product, Related do not raise it by holding the lead wire Equipment only, but hold the body. It may cause malfunction due to broken contacts. Connector Lead wire Socket Hook 951 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 16 Series ZR Vacuum Pressure Switch Unit/Digital Pressure Switch for Vacuum: ZSE30A-00---X505 Refer to the separate catalog (CAT.ES100-70) for details. How to Order ZSE30A 00 N M X505 Output specifications Symbol N P A B C D E F Output Analog output Type Point Voltage Current — NPN 1 — — PNP 1 — — NPN 2 — — PNP 2 — — NPN 1 — NPN 1 — PNP 1 — PNP 1 Option 2 (Operating manual specifications) Nil Operating manual (Leaflet) Y Without operating manual Option 1 (Connector/Lead wire specifications) Nil Without lead wire L Lead wire with connector (Length 2 m) Display unit Nil M P Specifications 3-step setting 1 With unit display switching function Fixed SI unit With unit display switching function (Initial value psi) 2 3 Adjust to set-value with buttons. Finish setting Push Push Power-saving function Switch output Maximum load current Maximum applied voltage Residual voltage Response time Short circuit protection Repeatability Hysteresis mode Window comparator mode Hysteresis Power consumption is reduced by turning off the monitor. (Reduce power consumption by up to 20%.) Rated pressure range Set pressure range Withstand pressure Minimum unit setting Applicable fluid Power supply voltage Current consumption Note 1) 0.0 to –101.0 kPa 10.0 to –105.0 kPa 500 kPa 0.1 kPa Air, Non-corrosive gas, Non-flammable gas 12 to 24 VDC ±10% (with power supply polarity protection) 40 mA (at no load) NPN or PNP open collector 1 output NPN or PNP open collector 2 outputs (selectable) 80 mA 28 V (at NPN output) 1 V or less (with load current of 80 mA) 2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms) Yes ±0.2% F.S. ±1 digit Variable (0 to variable) Voltage output Current output Linearity Output impedance Environment resistance Analog output 1 to 5 V ±2.5% F.S. ±1% F.S. or less Approx. 1 kΩ Note 2) Output current (Rated pressure range) 4 to 20 mA ±2.5% F.S. ±1% F.S. or less Linearity Maximum load impedance: Power supply voltage 12 V: 300 Ω, Power supply voltage 24 V: 600 Ω Load impedance Minimum load impedance: 50 Ω Display 4-digit, 7-segment, 2-color LCD (Red/Green) Sampling cycle: 5 times/sec. Display accuracy ±2% F.S. ±1 digit (Ambient temperature of 25°C) Indicator light Lights up when switch output is turned ON. (OUT1: Green, OUT2: Red) Enclosure IP40 Operating temperature range Operating: 0 to 50°C, Stored: –10 to 60°C (No freezing or condensation) Operating/Stored: 35 to 85% RH (No condensation) Operating humidity range 1000 VAC for 1 minute between live parts and case Withstand voltage 50 MΩ or more between live parts and case (at 500 VDC Mega) Insulation resistance 10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or Vibration resistance 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each Impact resistance 100 m/s2, in X, Y, Z directions, for 2 hours each Temperature characteristics ±2% F.S. (Based on 25°C) Oilproof heavy-duty vinyl cable, 3 cores ø3.5, 2 m Lead wire 4 cores Conductor area: 0.15 mm2 (AWG26) Insulator O.D.: 1.0 mm Standards CE Marking, UL/CSA, RoHS compliance Output voltage (Rated pressure range) Note 1) When analog voltage output is selected, analog current output cannot be used together. Note 2) When analog current output is selected, analog voltage output cannot be used together. 952 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 17 Large Size Vacuum Module: Ejector System Series ZR Pressure Switch for Vacuum + Suction Filter Unit: ZR1-F Specification Combination unit of vacuum pressure switch for vacuum pressure detection and suction filter to protect the unit from dust and contamination. Unit no. ZR1-F Vacuum to 100 kPa Operating pressure range Suction Operating temperature range 5 to 50°C filter Filtration degree 30 µm Filtration material PVF Refer to page 949 and 952 regarding pressure switch for vacuum. Pressure switch for vacuum Bracket A (P3270153) Standard option Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Suction filter Pressure switch for vacuum Weight (with bracket A) (kg) ZSE2 0.15 ZSE30A 0.23 — 0.15 How to Order F Nil 1. The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. D E F Combination of pressure switch/filter None Digital pressure switch for vacuum (ZSE30A) + Filter Pressure switch for vacuum (ZSE2) + Filter Filter ∗The filter mounted on the product is a simplified one. When used in an environment with a lot of dust, the built-in filter is likely to be clogged soon. The use with the ZFA, ZFB and ZFC series is recommended. Output specifications Digital pressure switch for vacuum (ZSE30A) specifications (D) N P A B C D E F How to Replace Elements When an element becomes clogged, adsorption performance and response times are degraded. Stop operation and replace element. (Element no. ZR1-FZ). Please ensure that gasket is in slot before re-installation. NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output PNP open collector 1 output + Analog voltage output PNP open collector 1 output + Analog current output Pressure switch for vacuum (ZSE2) specifications (E) Nil 55 NPN open collector 1 output PNP open collector 1 output Filter specifications (F) O-ring Nil Nil L Nil L C CL CN ZR1-FC-PC-AS Filter block Gasket slot Grommet/Lead wire (Length 0.6 m) Grommet/Lead wire (Length 3 m) Lead wire with connector (Length 0.6 m) Lead wire with connector (Length 3 m) With connector/Without lead wire Refer to “Table (1)” for part numbers for lead wire with connector. Filter specifications (F) Nil No setting ZY ZF ZP SP ZCUK AMJ Unit specifications Nil M P ZL No setting Digital pressure switch for vacuum (ZSE30A) specifications (D) With unit switching function SI unit only With unit switching function (Initial value psi) Note 1) This is no longer sold for use in Japan due to the Weight and Measure Act (implemented October, 1999). Note 2) Fixed unit: kPa AMV AEP HEP Related Equipment No setting Filter specifications (F) Nil Filter gasket Without lead wire Lead wire with connector (Length 2 m) Refer to “Table (2)” for part numbers for lead wire with connector. Pressure switch for vacuum (ZSE2) specifications (E) Nil Pressure switch for vacuum ZU Digital pressure switch for vacuum (ZSE30A) specifications (D) Pressure switch for vacuum (ZSE2) specifications (E) Filter case (ZR1-FC-PC) Filter element (ZR1-FZ) ZMA ZH Lead wire specifications Caution ZM ZQ ZR1 Filter case ZX ZR Combination of Pressure Switch for Vacuum and Suction Filter Combination symbol E D F ZA No setting How to order When requiring a switch with lead wire of 5 m, indicate separately the model numbers of a pressure switch unit for vacuum without a lead wire connector and the 5 m lead wire connector. Ex.) ZR1--CN ......... 1 pc. ZS-10-5A-50 ................................. 2 pcs. (1) Lead wire length for (2) Lead wire length for digital pressure switch for vacuum pressure switch for vacuum connector assembly connector assembly ZS 10 5A Lead wire length Nil 30 50 0.6 m 3m 5m ZS 38 3 L Lead wire core 3 cores, 1 output, 2 m (Output specifications: N, P) 4 cores, 2 outputs, 2 m 4 (Output specifications: A, B, C, D, E, F) 3 953 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 18 Series ZR Pressure Switch for Vacuum + Suction Filter Unit: ZR1-F Dimensions: ZR1-F Circuit diagram 2 x Slitted hole (Mounting hole)∗1 ∗2 10 Vacuum pressure setting trimmer 8 57 ∗1 67 ∗1 SET 43 23 Thickness 1.2 L Vacuum pressure supply port(PV) M 31 Pressure switch for vacuum 28 10 x4 .5 ∗2 23 10 2 ZR1-FE ∗2 Indicator light (Red) Vacuum port 4.6 ∗1 Suction filter 8 2 x 4.6 ∗1 5.6 ∗1 ∗81 3∗1 (Mounting hole) 23 (600) Pressure switch for vacuum 6.5 8 79 70 9 16 84 3 Bracket A 4 ∗1 Bracket A 2 x 4.2 (Mounting hole) 9 11 PD Rc1/8 Vacuum port (V) Filter block Adapter F 30 PV Suction filter 83 ∗1 Rc 1/8 Vacuum pressure supply port(PV) M5 Release pressure supply port (PD) Remove tha plug from PD port at external release. Spacer A is used to leave space for maintenance (for replacement of filter element etc.) on side mounting. ∗1 ∗1 63 1.2 Release pressure supply port (PD) ZR1-FD S 7.2 ∗1 Digital pressure switch for vacuum Suction filter 85 ∗1 81 56 (75.8) Attachment D PV PD 3 78.8 (2000) Filter block D Note) ∗ 1 Dimensions for mounting bracket A ∗ 2 Dimensions for mounting spacer A Bracket A part no. : P3270153#1 (Standard accessory) Spacer A part no. : P3270156#1 954 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 19 Large Size Vacuum Module: Ejector System Series ZR Suction Filter: ZR1-FX Specification ZR1-FX is to be used alone and cannot be combined with other units. Model Operating pressure range Operating temperature range Filtration efficiency Element Mass (With bracket) ZR1-FX Vacuum to 0.5 MPa 5 to 50°C 30 µm PVF 0.1 kg ZA Note) If not operated within the specified range of pressure and temperature, trouble may be caused. ZX ZR ZM ZMA ZQ Filter case Caution ZH 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. ZU ZL ZY ZF ZP Dimensions: ZR1-FX SP Circuit diagram ZCUK ∗1 ∗1 Vacuum release pressure port (PD) ∗1 AMJ AMV ∗1 Suction filter AEP ∗1 HEP (Mounting hole) Related Equipment M5 Vacuum release pressure port (PD) Rc 1/8 IN port Remove the plug from PD port at external release. Bracket C Bracket C 1.2 ∗1 ∗1 Rc 1/8 Out port ∗1 Note) ∗1 Dimensions for mounting bracket C Bracket C part no. : P3270155#1 (Standard accessory) 955 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 20 Ejector exhaust Series ZR mV cuu Va Ejector System Complete Unit re t ssu por pre E ot ust P l i P ha ex pen) (o e r su e res ort p sur se p res V lea PD ir p ply P e r A Re pply u ss ort sup rt su pre p po ot PS Pil pply su rt po Ejector + Valve + Pressure Switch for Vacuum + Filter Circuit diagram Pilot pressure supply port (PS) Pilot pressure exhaust port (PE) Silencer SOL.a Release pressure supply port (PD) Air pressure supply port (PV) Nozzle dia./ø1.0, ø1.3, ø1.5 Ejector Release valve Supply valve 10 ZR113 1-K1M-E- 15 For port exhaust ∗2 Thickness 1.2 ∗1 ∗1 Spacer A is used to leave space for maintenance (for replacement of filter element etc.) on side mounting. H SET L SOL.b 2 B VJ3233-X17 SOL.a B A B A 2 x Slotted holes∗1 (Mounting holes) ∗2 ∗2 A Rc 1/8 exhaust port (EXH.) Vacuum port (V) Suction filter Indicator lilght (Red) Vacuum pressure setting trimmer Ejector indication Spacer A Pressure switch for vacuum SOL.b SOL.c Manual override 1 2 x 4.6 ∗ (Mounting hole) ∗1 57.5 ∗1 ∗1 ∗1 ∗1 Release flow adjusting needle Filter block 2 x ø4.2 (Mounting hole) A Spacer A ∗1 Rc 1/8 PV port Air pressure supply port(PV) 84 Valve unit ∗2 Suction filter M5 Pilot pressure exhaust port (PE) M5 Release pressure supply port (PD) M5 Pilot pressure supply port (PS) ∗2 Light 1.2 Manual override Pressure switch for vacuum Silencer (600) Interface A Interface B 1 84 (Nozzle size: ø1.5) ∗ 74 (Nozzle size: ø1.0, ø1.3, port exhaust) (300) 8∗1 Adapter C Ejector Bracket A Bracket A Rc 1/8 Vacuum port (V) A: Release flow rate adjusting needle with lock nut 10 ZR113 1-K1M-D- 15 For port exhaust S S A A A B B B B A B B A (Needle fully open) Exhaust (EXH.) port Rc 1/8 A 7.2 ∗1 9 73 Digital pressure switch for vacuum - + - + - + 60 ∗1 (79.8) ∗1 85 ∗1 PE A PD PS PV 143 (2000) 956 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 21 Large Size Vacuum Module: Ejector System Nozzle dia./ø1.8, ø2.0 Note) ∗1 Dimensions for mounting bracket A ∗2 Dimensions for mounting spacer A Bracket A part no. : P3270153#1 (Standard accessory) Spacer A part no. : P3270156#1 For port exhaust 2 H SET ZA L SOL.b PRESS. 2.5 to 7kgf/cm B VJ3233-X17 SOL.a B A B A: Release flow rate adjusting needle with lock nut A Rc 1/4 exhaust port (EXH.) A ZR118 1-K1M-E- 20 Series ZR 59.5 ZX ZR 9 (Needle fully open) ZM ZMA ZQ Interface A Interface B ZH 109 (Port exhaust) ∗1 114 (Built-in silencer) Manual override A ZU ZL ZY ZF ZP Dimensions not indicated are identical to the left drawing. SP ZR118 20 1-K1M-D- ZCUK For port exhaust Exhaust (EXH.) port Rc 1/4 A B AMV S B A B A AMJ AEP 75.3 HEP 7.2 ∗1 A B S B A B A Related Equipment PV 147 85 ∗1 A (79.8) ∗1 PD PS 60 ∗1 PE 109 ∗1 (Port exhaust) 114 ∗1 (Built-in silencer) 109 Digital pressure switch for vacuum (2000) 957 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 22 Ejector exhaust Series ZR mV cuu Va Ejector System rt po with Valve ure rt ess po t pr st PE o l i P hau ex re ssu preport e s lea PD re Re pply ssu ort su pre PS p t o Pil pply su Circuit diagram re ssu pre PV Air pply su rt po Pilot pressure supply port (PS) Pilot pressure exhaust port (PE) SOL.a Release pressure supply port (PD) Air pressure supply port (PV) Nozzle dia./ø1.0, ø1.3, ø1.5 10 ZR1 13 15 Supply valve 1-K1M- ∗2 Adapter B For port exhaust SOL.c Silencer SOL.b Ejector Release valve Vacuum port (V) ∗2 Ejector indication ∗1 Rc 1/8 exhaust port (EXH.)∗ ∗1 ∗1 A B A A 2 VJ3233-X17 SOL.b B PRESS. 2.5 to 7kgf/cm SOL.a B Manual override 26.5 2 x ø 4.6 (Mounting hole) ∗1 ∗1 ∗1 (300) Spacer A Silencer Light 2 x 3.4 (Mounting hole) Release flow adjusting needle Valve unit A Thickness 1.2 ∗1 Rc 1/8 Air pressure supply port(PV) Spacer B ∗2 M5 Release pressure supply port (PD) M5 Pilot pressure supply port (PS) 84 (Nozzle size: ø1.5) 74 (Nozzle size: ø1.0, ø1.3) M5 Pilot pressure exhaust port (PE) ∗1 Interface A Interface B Manual override Adapter C Bracket B Nozzle dia./ø1.8, ø2.0 Ejector 1.2 Bracket B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting. Vacuum port (V) A: Release flow rate adjusting needle with lock nut ZR118 20 1-K1M- For port exhaust Rc 1/4 exhaust port (EXH.) 9 (Needle fully open) A A SOL.b PRESS. 2.5 to 7kgf/cm 2 B VJ3233-X17 SOL.a B A B Note) ∗1 Dimensions for mounting bracket B ∗2 Dimensions for mounting spacer B Bracket B part no. : P3270154#1 (Standard accessory) Spacer B part no. : P3270157#1 28.5 ∗1 A 109 (Port exhaust) 114 (Built-in silencer) Manual override Dimensions not indicated are identical to the top drawing. 958 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 23 ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment 959 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 09.10.2 10:21 AM Series Page 24 ZR Ejector exhaust 4-5-08-ZR.qxd um cu Va Ejector System ort Vp without Valve Circuit diagram EXH. Silencer ly pp su e r ssu ort pre P p Air EXH. Port exhaust Pressure switch for vacuum Ejector Vacuum port (V) Nozzle dia./ø1.0, ø1.3, ø1.5 Air pressure supply port (P) 10 ZR113 1-E 15 Suction filter Release pressure supply port (PD) ∗2 Indicator lilght (Red) Vacuum pressure setting trimmer Ejector indication For port exhaust ∗2 2 x Slotted holes ∗1 (Mounting holes) ∗2 Spacer A 57.5 ∗1 ∗1 L SET H Rc 1/8 Exhaust port (EXH.) Thickness 1.2 Adapter E ∗ ∗ ∗ ∗ ∗ Spacer A is used to leave space for maintenance (for replacement of filter element etc.) on side mounting. (Mounting hole) ∗ Pressure switch for vacuum Silencer (600) ∗ Suction filter ∗1 84 (Nozzle size: ø1.5) 74 (Nozzle size: ø1.0, ø1.3, port exhaust) Rc 1/8 Vacuum port (V) Filter block Bracket A Spacer A ∗∗12 ∗2 ∗1 2 x 4.2 (Mounting hole) ∗1 Ejector Bracket A 1.2 Rc 1/8 Air pressure supply port (P) 84 M5 Release pressure supply port (PD) Remove tha plug from PD port at external release. 10 ZR1 13 -D 15 7.2 ∗1 For port exhaust S S Exhaust (EXH.) port Rc 1/8 73.3 Suction filter Digital pressure switch for vacuum PD 3 96 81 (75.8) 56 P 84 ∗1 (Nozzle size: ø1.5) 74 ∗1 (Nozzle size: ø1.0, ø1.3, port exhaust) Attachment D (2000) Filter block D 960 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 25 Large Size Vacuum Module: Ejector System Nozzle dia./ø1.8, ø2.0 Series ZR Note) ∗ 1 Dimensions for mounting bracket A ∗ 2 Dimensions for mounting spacer A Bracket A part no.: P3270153#1 (Standard accessory) Spacer A part no.: P3270156#1 ZR118 20 1-E For port exhaust ZA Rc 1/4 Exhaust port (EXH.) SET H ZX L ZR 59.5 ZM ZMA 109 (Port exhaust) ∗1 114 (With built-in silencer) ZQ ∗1 ZH ZU ZL ZY ZF ZP SP ZCUK 18 ZR120-D AMJ AMV 7.2 ∗1 For port exhaust Exhaust (EXH.) port Rc 1/4 HEP S S AEP Related Equipment 75 Digital pressure switch for vacuum PD 3 100 (75.8) 56 109 ∗1 (Port exhaust) 114 ∗1 (Built-in silencer) P Attachment D (2000) Filter block D Dimensions not indicated are identical to the top drawing. 961 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Series Page 26 ZR Ejector System/Manifold Specifications Specifications Max. number of units Max. 6 stations Port size Port 1 8 (Rc, NPTF, G) Common air pressure supply port (PV) Common pilot pressure supply port (PS) M5 Common release pressure supply port (PD) M5 1 2 (Rc, NPTF, G) Common exhaust port (EXH) Basic mass for one station is 0.28 kg. Additional mass per one station is 0.12 kg. Mass (1) When using 3 or more stations with ZR120 manifold, utilize PV port as supply port on both sides. (2) When using 3 or more stations with ZR120 3 manifold, utilize EXH port as exhaust port on both sides. Manifold Air Supply Manifold Port Supply port location Left PS PV PD PV Right PS PD L (Left side) R (Right side) B (Both sides) Air supply to port BLANK plug attached to port Note) BLANK plug is attached on all ports of valve unit. Individual Spacer Part no. Port PV PS PD PE ZR1-R1 Individual spacer is used when the connecting port of each unit is not common for the manifold connecting port. Mixed specifications of common and individual unit connecting ports for each unit is possible on manifolds with this individual spacer. How to Order Manifold ZZR1 06 Stations 01 1 ·· ·· · · 06 6 Function Possible to set the air supply pressure individually Possible to set the pilot valve air supply pressure individually Possible to set the release valve supply pressure individually Possible to set the pilot valve exhaust individually R ZR1 RV 1 ZR1 R1 1 1 Port location R L B Right side Left side Both sides R16 Arrangement (Right valve station which is looked from Symbol Symbol PV port PS port PD port Refer to About ∗ Viewed from the ,, valve side is first station.) 1 Common individual spacer. front side of valve Thread type unit, confirm the Individual 2 Common 1 1 station only Nil Rc port location on the ·· ·· Arrangement right and/or left side. Note ) · · F G 6 (Right valve 6 stations only T NPTF station which is A All stations Note ) The thread ridge shape is compatible with the G looked from valve thread standard (JIS B 0203), but other shapes ∗ When the spacers are are not conforming to ISO16030 and ISO1179. side is first station.) attached to the specified 1 1 station only locations, specify all spacers. Example 1) ·· ·· ....................... Example 2) Attached to the · · ZZR106-R 1 pc. (Manifold base only) 6 ∗ ZR120S1-K15MZ-EC ...5 pcs. (Unit) 6 stations only first and third ∗ ZR1-BM1 ...................... 1 pc. (Blank plate) stations A All stations ...................... ∗ ZR1-R1-3 1 pc. (Individual spacer) ∗ZR1-RV1-1 ∗ When the spacers ∗ZR1-RV1-3 are attached to the ∗ZR1-R1-A··3 • With reference from valve side, the third station from right side specified locations, specify all spacers. Example) Attached Caution when ordering manifold to the first and third The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted. stations When it is not added, the manifold base and ejector are shipped separately. ∗ZR1-R1-1 ∗ZR1-R1-3 About individual spacers • In the right table, ports with the symbol mean that they are manifold supply, while others are individual supply from the valve unit. • Symbols in the right table are printed on the surface of individual spacers. Piping specifications Part no. ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 Symbol R1 R2 R3 R4 R5 R6 R7 R8 Part no. ZR1-R9 -R10 -R11 PD -R12 PD PE -R13 PS -R14 PE PS -R15 PS PD -R16 PS PD PE PE R9 R10 R11 R12 R13 R14 R15 R16 Symbol PV PV PV PV PV PS PV PS PV PS PV PS PE PD PD ZR1 BM1 Refer to Example 1). PE PE PD PD PE 962 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 27 Large Size Vacuum Module: Ejector System Series ZR Manifold/System Circuit Example When not using individual spacer When using individual spacer Ejector 1 Ejector 2 ZA ZX (PE) (PE) ZR ZM ZMA ZQ ZH ZU Individual Spacer ZR1-R1-1 ZL PV: Air pressure supply port PS: Pilot pressure supply port PD: Release pressure supply port PE: Pilot pressure exhaust port EXH: Common exhaust port V: Vacuum Port PV: Air pressure supply port PS: Pilot pressure supply port PD: Release pressure supply port PE: Pilot pressure exhaust port EXH: Common exhaust port V: Vacuum Port ZY ZF ZP SP PV PD EXH PS PV PD EXH PS PS PE Sol.c Sol.a Pressure switch for vacuum Ejector Supply valve Release valve Sol.c Sol.a Pressure switch for vacuum Ejector Supply valve Release valve V PS PE Sol.c Sol.a Pressure switch for vacuum PD PV Supply valve Sol.c Ejector Sol.a Pressure switch for vacuum Sol.b PD PV Ejector Supply valve Release valve Related Equipment Silencer Silencer Sol.b HEP Suction filter Suction filter PS PE AEP Silencer Sol.b PD PV V AMJ AMV PS PE Silencer Sol.b PD PV ZCUK Release valve V V Suction filter Suction filter PV PD EXH PS PV PD EXH PS ZR1-R1-1 963 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Series Page 28 ZR ) t (V por ) uum c a t (V V por uum Vac Com EXH mon por exhau t st C Co supommo supp mmon v ply n p ly PV acuu PS ilot por pres port m pre t ssur C sur e om e sup mon ply rele PD as por e pr t ess ure 4 stations manifold: Ordering number example ZZR104- ···········1pc. (Manifold base) ∗ ZR12 ···········1pc. (Port exhaust type) ∗ ZR11-EC ···········1pc. (Single unit) ∗ ZR11-K1M ···········1 pc. (Single unit) ∗ ZR11-K1M-D ···1pc. (Single unit) ∗ ZR1-RV1-4 ···········1pc. (Function plate) ∗ ZR1-R1-4 ···········1pc. (Individual spacer) 82 96 (2000) 62 5 Digital pressure switch for vacuum 3 Individual spacer Function plate S A A A A B B Adapter B Silencer case (Built-in silencer) A: Release flow rate adjusting needle with lock nut SET H L 31 4 L2 L1 B A B Pitch P = 33 B 32.4 B A 4 x 5.7 (Mounting hole) Suction filter Adapter D 9 Individual spacer Pressure switch for vacuum Pressure setting trimmer (Needle fully open) 19 Silencer case (Common exhaust) 28 52 20 Exhaust (EXH) port Rc 1/8 20 22.5 31 37 28 31 Silencer case (Port exhaust) 49 61 74 80 Pilot valve for release (SOL.c) (300) Pilot valve for supply (SOL.a) Manual override Non-locking push type Manual override Non-locking push type Pilot pressure exhaust (PE) port M5 (600) Pilot valve for supply (SOL.b) Ejector unit Release pressure supply (PD) port M5 PV PV PV PV Pilot pressure supply (PS) port M5 Air pressure supply (PV) port Rc 1/8 3 13.5 35.5 52 42 33 28 17 12 A PS PS PD 1.5 PD PS PV Common exhaust (EXH) port 1/2 (Rc, NPTF, G) Common release pressure supply (PD) port 2 x M5 1 4.5 80 81.5 80.8 PD 56.5 PD 50 PD 31.5 16.5 PE 109 EXH PE 2.5 Release pressure supply (PD) port M5 Release flow rate adjusting needle Air pressure supply (PV) port Rc 1/8 7.5 7.5 Common pilot supply (PS) port 2 x M5 Common air pressure supply (PV) port 1/8 (Rc, NPTF, G) ∗ 1 The common exhaust port (EXH.) is also used as the pilot pressure exhaust (PE) port of the pilot valve. Use while the port is open to the atmosphere. (mm) Stations Symbol L1 L2 1 2 3 4 5 6 52 71 85 104 118 137 151 170 184 203 217 236 964 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 29 Large Size Vacuum Module: Ejector System Series ZR Circuit diagram ZA Function plate ZR1-RV1-4 PS X PE X X X X ZR ZM Silencer SOL.C SOL.A ZX PV PD EXH PS Individual spacer ZR1-R1-4 Pressure switch for vacuum SOL.B PD X PV X X X X ZQ Ejector Suction filter Supply valve Release valve ZMA V ZH ZU PS X PE X ZL SOL.C SOL.A SOL.B ZY PD X PV X ZF Supply valve Release valve V ZP SP Individual spacer ZR1-R1-2 ZCUK PV – + – + – + – + – + – + V X X X X PD AMJ AMV Vacuum (V) port Rc 1/8 AEP HEP 70.5 PV X V V 35.5 V Pitch P = 33 V Pitch P = 33 35.5 PV PD EXH PS 16.5 12 PD X Related Equipment PV: Air pressure supply port PS: Pilot pressure supply port PD: Release pressure supply port PE: Pilot pressure exhaust port EXH: Exhaust port V: Vacuum Port 965 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Series Page 30 ZR ) t (V por ) uum c a t (V V por uum Vac Com EXH mon por exhau t st C Co supommo supp mmon v ply n p ly PV acuu PS ilot por pres port m pre t ssur C sur e om e sup mon ply rele PD as por e pr t ess ure 4 stations manifold: Ordering number example ZZR104- ···········1pc. (Manifold base) ∗ ZR12 ···········1pc. (Port exhaust type) ∗ ZR11-EC ···········1pc. (Single unit) ∗ ZR11-K1M ···········1 pc. (Single unit) ∗ ZR11-K1M-D ···1pc. (Single unit) ∗ ZR1-RV1-4 ···········1pc. (Function plate) ∗ ZR1-R1-4 ···········1pc. (Individual spacer) Function plate Individual spacer Digital pressure switch for vacuum 82 100 (2000) 62 4 x 5.7 (Mounting hole) 3 A A S A Adapter B A B Silencer case (Built-in silencer) L2 L1 B A B A B A: Release flow rate adjusting needle with lock nut B Pitch P = 33 B 32.4 19 5 SET H L 31 4 9 (Needle fully open) Suction filter Adapter D 19 Pressure switch for vacuum Pressure setting trimmer Silencer case (Common exhaust) 28 52 Individual spacer 20 Pilot valve for release (SOL.c) Pilot valve for supply (SOL.a) 28 31 Pilot valve for supply (SOL.b) Exhaust (EXH) port Rc 1/4 20 24.5 35 41 53 65 74 Silencer case (Port exhaust) 84 Pilot pressure exhaust (PE) port M5 (600) Manual override Non-locking push type Manual override Non-locking push type (300) Release pressure supply (PD) port M5 Ejector unit PS PV 13.5 35.5 PV PV PV Pilot pressure supply (PS) port M5 3 1.5 4.5 Common release pressure supply (PD) port 2 x M5 1 2.5 M5 Release flow rate adjusting needle Air pressure supply (PV) port Rc 1/8 (mm) L1 L2 PS 1 2 3 4 5 6 52 71 85 104 118 137 151 170 184 203 217 236 80 81.5 PV Release pressure supply (PD) port Air pressure supply (PV) port Rc 1/8 Stations PD 56.5 A PD PD PS 52 42 33 28 17 12 PD 50 31.5 16.5 80.8 PD Symbol 109 EXH PE PE Common exhaust (EXH) port 1/2 (Rc, NPTF, G) 7.5 7.5 Common pilot supply (PS) port 2 x M5 Common air pressure supply (PV) port 1/8 (Rc, NPTF, G) ∗ 1 The common exhaust port (EXH.) is also used as the pilot pressure exhaust (PE) port of the pilot valve. Use while the port is open to the atmosphere. 966 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 31 Large Size Vacuum Module: Ejector System Series ZR Circuit diagram ZA ZX ZR PV PD EXH PS Individual spacer (ZR1-R1-4) Function plate (ZR1-RV1-4) ZM X X X X PS X PE SOL.C SOL.A Pressure switch for vacuum SOL.B X X X X PD X PV ZMA Silencer ZQ Ejector ZH Supply valve Release valve V Suction filter PS X PE X ZU ZL SOL.C SOL.A ZY SOL.B ZF PD X PV X Supply valve Release valve V ZP SP ZCUK Individual spacer (ZR1-R1-2) AMJ PV V X X AMV X X AEP PD HEP 110.5 105.5 PV X V Related Equipment V 35.5 V Pitch P = 33 PV PD EXH PS 16.5 12 70.5 PD X V Pitch P = 33 35.5 Vacuum (V) port Rc 1/8 PV: Air pressure supply port PS: Pilot pressure supply port PD: Release pressure supply port PE: Pilot pressure exhaust port EXH: Common exhaust port V: Vacuum Port 967 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 32 Large Size Vacuum Module: Vacuum Pump System [Option] Series ZR C Re omb fer ina to tion “Ta o ble f su (1) pply Pi ”. s lo wit tv ch al va v lve e So an le dr no ele id as El ev va ec alv lve e tri ra ca te le Li d gh nt v ry ol t/S ta ur ge ge M an vo ua lta lo ge ve su rri pp de re C om ss or bi na O tio ut n pu of ts sw pe U itc cif ni h/ ts ica filt pe tio er cif Le ns ica ad t i w ire ons sp ec R ific ad ele at ju as io st e ns in fl g ow ne r ed at le e How to Order Note for model selection Take function plates into consideration. (Refer to page 971.) Components Pressure switch for vacuum Valve unit Suction filter ZR100 K1 CE compliant Nil — Q CE marked 5 M Z Release flow rate adjusting needle Nil L Combination of vacuum valve and release valve Refer to “Table (1)” in page 969 for details. Without lock nut With lock nut Lead wire specifications Digital pressure switch for vacuum (ZSE30A) specifications (D) Solenoid valve rated voltage Caution When using AC, the DC solenoids are operated via a rectifier. Therefore, make sure to combine the connector assembly equipped with a rectifier with the exclusive solenoids. Using other combinations could lead to burned coils or other malfunctions. Nil 5 6 V S R D1 Note) D2 Note) Nil L Air operated 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC ( 50 60Hz) 110 VAC ( 50 60Hz) Refer to “Table (4)” on page 969 for part no. of lead wire with connector. Pressure switch for vacuum (ZSE2) specifications (E) Nil L C CL CN Note) CE marked products are not available for “D1” and “D2”. Pilot valve DC: 1 W Nil (With indicator light: 1.05 W) AC DC: 0.45 W Y∗ (With indicator light: 0.5 W) ∗ Only 24 VDC and 12 VDC are applicable to 0.45 W. Without lead wire Lead wire with connector (Length 2 m) Grommet/Lead wire (Length 0.6 m) Grommet/Lead wire (Length 3 m) Lead wire with connector (Length 0.6 m) Lead wire with connector (Length 3 m) With connector/Without lead wire Refer to “Table (3)” on page 969 for part no. of lead wire with connector. Filter specifications (F) Electrical entry Air operated Nil For 24, 12, 6, 5, 3 VDC Lead wire length 0.3 m L Without lead wire (Applicable to only DC) LN Plug Without connector LO connector Lead wire length 0.3 m M type Without lead wire (Applicable to only DC) MN Without connector MO Grommet Lead wire length 0.3 m (Applicable to only DC) G type Lead wire length 0.6 m (Applicable to only DC) H 100, 110 VAC (With rectifier) Plug Lead wire length 0.3 m L connector Lead wire length 0.3 m M type Nil No setting Unit specifications Digital pressure switch for vacuum (ZSE30A) specifications (D) Nil M P With unit switching function SI unit only With unit switching function (Initial value psi) Note 1) This is no longer sold for use in Japan due to the Weight and Measure Act (implemented October, 1999). Note 2) Fixed unit: kPa Pressure switch for vacuum (ZSE2) specifications (E) Nil No setting Filter specifications (F) • Refer to “Table (2)” on page 969 for part no. of lead wire with connector. Nil No setting Output specifications Digital pressure switch for vacuum (ZSE30A) specifications (D) Light/Surge voltage suppressor Nil Z S Manual override None With light/surge voltage suppressor With surge voltage suppressor ∗ DC voltage: Be much careful about polarity, because it is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged. AC voltage: S is not available for AC. Nil B Nil D E F Non-locking push type Locking slotted type Combination of switch/filter None Digital pressure switch for vacuum (ZSE30A) + Filter Pressure switch for vacuum (ZSE2) + Filter Filter N P A B C D E F NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output PNP open collector 1 output + Analog voltage output PNP open collector 1 output + Analog current output Pressure switch for vacuum (ZSE2) specifications (E) Nil 55 NPN open collector 1 output PNP open collector 1 output Filter specifications (F) Nil No setting 968 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 33 Large Size Vacuum Module: Vacuum Pump System Series ZR ZA ZX Table (1) Valve Unit/Combination of Vacuum Switch Valve and Release Valve Supply valve Release valve Air operated Air operated Solenoid valve Solenoid valve Symbol Double SOL. Double SOL. Double SOL. Double SOL. N.C N.C (VJA3130) (VJA3130) (VJ3233-X17) (VJ3233-X18) (VJ3133) (VJ3233-X17) (VJ3233-X18) (VJ3133) Valve unit components Valve unit function Operation Vacuum Vacuum stop adsorption release Supply valve Release valve Double SOL. N.C. (VJ3233-X17) (VJ3133) N.C. N.C. (VJ3133) (VJ3133) Air operated Air operated (VJA3130) (VJA3130) N.C. (VJ3133) Air operated (VJA3130) N.O. (VJ3133) Double SOL. (VJ3233-X18) — K1 — — ZR ZM — — — — — — — — — — — — — Common with supply valve — ZH — — — Common with supply valve ZU — — — Common with supply valve — ZL — — Common with supply valve — — ZY ZMA K2 — — K3 — — C1 — — C2 — — C3 — — C4 — — — — — Nil ZQ Without valve module ZF Table (2) How to Order Valve Plug Connector Assembly ZP Table (3) Pressure Switch for Vacuum/ Lead Wire with Connector DC VJ10 20 4A 100 VAC (with rectifier) VJ10 36 1A ZS 10 SP 5A ZCUK AMJ Lead wire length 110 VAC (with rectifier) VJ10 36 Nil 30 50 3A Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR100-K15MZ-EC (-Q) .................. 1 pc. ∗ VJ10-20-4A-6 .................................. 3 pcs. AMV 0.6 m 3m 5m AEP HEP How to order When requiring a vacuum switch with a lead wire of 5 m, indicate the part numbers of the vacuum unit switch without a lead wire with connector and the 5 m lead wire connector separately. Example) ZR100--CN (-Q) ............... 1 pc. ∗ ZS-10-5A-50 ...................................... 1 pc. Related Equipment Table (4) Digital Pressure Switch for Vacuum/ Lead Wire with Connector ZS 38 3 L Lead wire core 3 4 3 cores, 1 output, 2 m (Output specifications: N, P) 4 cores, 2 outputs, 2 m (Output specifications: A, B, C, D, E, F) 969 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Series Page 34 ZR Vacuum Pump System / Combination of supply valve and release valve Combination Symbol : K1 Combination Symbol : Feature : Double solenoid vacuum valve allows for self-holding. Pilot pressure supply port (PS) Pilot pressure exhaust port (PE) C1 Feature: Adsorption of workpieces (when energized) and release of vacuum (when de-energized) are switched by single solenoid valve. PS PE SOL.c SOL.a SOL.a SOL.b Release pressure supply port (PD) PD Vacuum pressure supply port (PV) Release valve Supply valve Vacuum port (V) PV Supply valve Release valve How to Operate Pilot valve operation Supply valve Release valve SOL.a SOL.b SOL.c Operation 1. Adsorption ON OFF OFF 2. Vacuum release OFF ON ON 3. Operation stop OFF ON OFF Combination Symbol : Note When power supply is cut off while the supply valve is ON, the operational state is held. K2 PS PE Pilot valve operation Supply valve/Release valve Note SOL.a Be careful for blowing off of workpieces or displacement of adsorption position in case 1. Adsorption ON of small and/or lightweight workpieces. 2. Vacuum release OFF Operation Combination Symbol : Feature: Single solenoid valve is provided for vacuum valve. C2 Feature: Adsorption of workpieces and release of vacuum are switched by an external pilot valve. PS PE SOL.c SOL.a V How to Operate Air operated a Pilot air PD PV Supply valve PD Release valve V PV Supply valve How to Operate Pilot valve operation Supply valve Release valve Note SOL.a SOL.c Operation When power supply is 1. Adsorption ON OFF stopped, all operations 2. Vacuum release OFF ON will be stopped. 3. Operation stop OFF OFF Combination Symbol : K3 Pilot air Pilot valve operation Supply valve/Release valve Note Air operated a Be careful for blowing off of workpieces or displacement of adsorption position in case 1. Adsorption ON of small and/or lightweight workpieces. 2. Vacuum release OFF Operation C3 Feature: Adsorption of workpieces (when de-energized) and release of vacuum (when energized) are switched by the single solenoid Pilot air PS PS PE PE Air operated a Air operated b PD PV Supply valve Release valve Supply valve Release valve Air operated a Air operated b Operation 1. Adsorption ON OFF 2. Vacuum release OFF ON 3. Operation stop OFF OFF SOL.a PD V How to Operate Pilot valve operation V How to Operate Combination Symbol : Feature: Operation can be controlled by an external pilot valve. Release valve Note The product is used under the environment in which solenoid valves cannot be used or when the centralized control is applied using external pilot air. PV Supply valve Release valve V How to Operate Pilot valve operation Supply valve/Release valve Note SOL.a Be careful for blowing off of workpieces or displacement of adsorption position in case 1. Adsorption OFF of small and/or lightweight workpieces. 2. Vacuum release ON Operation Combination Symbol : C4 Feature: Adsorption of workpieces and release of vacuum are switched by double solenoid valve. PS PE SOL.a SOL.b PD Caution When pipe connection is made to two port connections (PV port, PD port) only, use a function plate (ZR1-RV3). Refer to page 971 for further information. PV Supply valve Release valve V How to Operate Pilot valve operation Supply valve/Release valve Note SOL.a SOL.b When power supply is stopped vacuum valve/vacuum release 1. Adsorption ON OFF valve will hold the operation. 2. Vacuum release OFF ON Operation 970 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 35 Large Size Vacuum Module: Vacuum Pump System Series ZR Function Plate : ZR1-RV3 A function plate is used when each connecting port for the valve unit is common. If a function plate is not used (standard), make individual pipe connections to PV, PS, and PD ports respectively. Without Function Plate (Standard) Applicable system: Ejector system External vacuum supply system Example of circuit diagram Pilot pressure supply port (PS) Pilot pressure exhaust port (PE) ZA SOL.c SOL.a ) pen ure rt (o ess E po r p t tP Pilohaus ex re ssu preport e s lea PD Re pply re su ssu ort pre PS p t o l Pi pply su SOL.b ZX Pressure switch for vacuum Release pressure supply port (PD) ZR Vacuum pressure supply port (PV) Release valve Supply valve Vacuum port (V) ZM Suction filter re ssu pre rt um PV po u c Va pply su ZMA ZQ Pipe connection ZH With Function Plate/Applicable to Vacuum Pump System Only ZU When ZR1-RV3 (PV/PS⇔PD) is Selected ZL Since compressed air is necessary to operate pilot valve in vacuum pump system, supply air to PD port (or PS port). Example of circuit diagram ZY ZR1-RV3 PS PE ZF SOL.c SOL.a ure r ess po t pr st PE o l i u P ha ex e sur res t e pD por s a le P ly Re pply upp su re s ssu /plug) e r t p (w Pilo port PS ) pen t (o SOL.b Pressure switch for vacuum ZP PD SP PV Supply valve Release valve V ZCUK Suction filter re ssu pre rt um PV po u c Va pply su AMJ AMV Pipe connection AEP HEP How to Order Function Plate Unit (For Pump System) ZR1 Related Equipment RV 3 Piping specifications Symbol Symbol PV port PS/PD port 3 PV/PS PD Individual Common How to order Indicate the model numbers of the vacuum module and the function plate. Example) ZR100-K15MZ-E 1 ∗ ZR1-RV3 Caution Length of assembling screw varies when adding function plate. Order from the mounting thread parts list for unit combination on page 983. Order a plug (M-5P) separately in order to plug the PD and PS ports that are no longer used due to the addition of function plate. 1 971 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Series Page 36 ZR Valve Unit : ZR1-V Specifications Valve unit part no. ZR1-V Supply valve Release valve Components Operating method Pilot operated Pilot operated Combination of supply valve and release valve Refer to the combination of supply valve and release valve below. PV port supply pressure –0.1 to 0.6 MPa PD port supply pressure 0.05 to 0.6 MPa PS port supply pressure 0.25 to 0.6 MPa Main valve effective area (mm2) 8.2 0.96 Main valve effective area (Cv) 0.45 0.053 Maximum operating frequency 5 Hz Operating temperature range 5 to 50°C Standard accessory - Bracket B Solenoid Valve/Specifications Solenoid Rated voltage 24, 12, 6, 5, 3 VDC, 100∗, 110∗ VAC (50 60 Hz) 100, 110 VAC-L/M plug connector (With rectifier) 3, 5, 6, 12, 24 VDC-L/M plug connector, Grommet Available, Not available (at grommet) Non-locking push type, Locking slotted type Electrical entry Light/Surge voltage suppressor Manual operation ∗ Applicable to plug connector; connector assembly with rectifier is attached. Combination of Supply Valve and Release Valve Combination symbol K1 K2 K3 C1 C2 C3 C4 Vacuum switch valve Release valve Double SOL. (VJ3233-X17) N.C. (VJ3133) N.C. (VJ3133) N.C. (VJ3133) Air operated VJA3130 Air operated VJA3130 N.C. (VJ3133) Air operated VJA3130 N.C. (VJ3133) Double SOL. (VJ3233-X18) Mass (kg) 0.245 0.213 0.194 0.187 0.174 0.184 0.214 ∗ Weight includes Bracket B. (Solenoid valve: 24 VDC, M plug connector type) How to Order Refer to page 968 for further part no. information. ZR1 V K1 5 M Z L Combination of vacuum valve and release valve Release flow rate adjusting needle Pilot valve Solenoid valve rated voltage Electrical entry Manual override With light/surge voltage suppressor Vacuum Pressure Switch Unit/Digital Pressure Switch for Vacuum : ZSE30A-00- - -X505 Specifications Rated pressure range Set pressure range Withstand pressure Applicable fluid Power supply voltage Current consumption Hysteresis Switch output 0.0 to –101.0 kPa 10.0 to –105.0 kPa 500 kPa Air, Non-corrosive gas, Non-flammable gas 12 to 24 VDC ±10% (with power supply polarity protection) 40 mA (at no load) NPN or PNP open collector 1 output NPN or PNP open collector 2 outputs (selectable) Environment resistance Hysteresis mode Variable (0 to variable) Window comparator mode 4-digit, 7-segment, 2-color LCD (Red/Green) Sampling cycle: 5 times/sec. Display ±2% F.S. ±1 digit (Ambient temperature of 25°C) Display accuracy IP40 Enclosure Operating: 0 to 50°C, Stored: –10 to 60°C (No freezing or condensation) Operating temperature range Operating/Stored: 35 to 85% RH (No condensation) Operating humidity range 1000 VAC for 1 minute between live parts and case Withstand voltage Temperature characteristics ±2% F.S. (Based on 25°C) Note 1) When analog voltage output is selected, analog current output cannot be used together. Note 2) When analog current output is selected, analog voltage output cannot be used together. Refer to page 952 for further specifications. 972 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 37 Large Size Vacuum Module: Vacuum Pump System Series ZR Vacuum Pressure Switch : ZSE2-0RSpecifications Pressure switch for vacuum part no. Fluid Setting pressure range Hysteresis Temperature characteristics (25˚C standard) Operating voltage Output Indicator light Current consumption Proof pressure (Max. operating pressure) Operating temperature range Refer to page 949 for further specifications. ZSE2-0R-15 ZSE2-0R-55 Air 0 to –101 kPa ZA NPN Open collector 30 V, 80 mA PNP Open collector 80 mA Lights up when ON 17 mA or less (when 24 VDC is ON) 0.5 MPa ∗ ∗ When using the ejector system, instantaneous pressure up to 0.5 MPa will not damage the switch. Note) Operation outside of the maximum operating pressure and operating temperature range may cause a serious accident or damage. ZX ZR ZM ZMA ZQ Pressure Switch for Vacuum/Suction Filter Unit : ZR1-F ZH Specifications ZR1-F Unit no. Operating pressure range Vacuum to 0.5 MPa Suction Operating temperature range filter Filtration efficiency Filter media PVF Refer to pages 949 and 952 regarding pressure switch for vacuum. Pressure switch for vacuum Bracket A Standard option Note) Operation outside of the operating pressure and operating temperature range may cause a serious accident or damage. ZU ZL ZY ZF ZP SP Filter case ZCUK Caution Refer to page 953 for further specifications. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. Do not expose it to direct sunlight. AMJ AMV AEP HEP Suction Filter : ZR1-FX Related Equipment Specifications Model Operating pressure range Operating temperature range Filtration efficiency Filter media Mass (with bracket) ZR1-FX Vacuum to 0.5 MPa PVF 0.1 kg Note) Operation outside of the operating pressure and operating temperature range may cause a serious accident or damage. Filter case Caution Refer to page 955 for further specifications. The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. Do not expose it to direct sunlight. 973 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Series Page 38 ZR Construction Table (1) How to Order Pilot Valves Components Parts No. (1) Description Material Aluminum Manifold base Release flow rate adjusting needle Stainless steel PBT Function plate PBT Individual spacer Note Symbol Refer to Note 2) Refer to page 978. Refer to page 978. ZR1-FC-PC Polycarbonate (Assembly part no.:ZR1-FC-PC-AS) Filter case Note 1) Precautions on handling the filter case 1. The case is made of polycarbonate. Therefore, do not contact it or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Note 2) Turning the release flow rate adjusting needle 4 full turns from the fully closed position renders the needle valve fully open. Do not turn more than four times since turning excessively may cause the needle fall off. In order to prevent the needle from loosening and falling out, a release flow rate adjusting needle with lock nut is available. Replacement Parts No. Description Pilot valve assembly Valve body assembly Filter element Pressure switch for vacuum Filter switch unit for replacement Material — — PVF — — Part No. Refer to Table (1) Refer to Table (2) ZR1-FZ (30 µm) ZSE2-OR-15ZSE30A-00- -X505 ZR1-F -D How to Order Solenoid Valves/Air Operated Valves Air operated C4 K3 Model Refer to “How to Order” below. Supply:ZR1-VJ3233-X17 Release:ZR1-VJ3133Refer to “How to Order” below. Supply:ZR1-VJ3233-X18 Release:ZR1-VJ3233-X18 ZR1-VJA3130 Table (2) How to Order Valve Body Assembly ZR1 VD K1 5 M Z L Combination of supply valve and release valve Pilot valve Manual override Solenoid valve rated voltage Electrical entry With light/surge voltage suppressor Release flow rate adjusting needle Nil Without lock nut With lock nut L Refer to page 968 for further symbol specifications. Table (3) Pressure Switch for Vacuum + Suction Filter Unit ZR1 VJA3130 Solenoid valve ZR1 VJ3233 K1 Components Supply valve Release valve Double solenoid Single solenoid valve N.C. valve N.C. (VJ3233) (VJ3133) Double solenoid Double solenoid valve N.O. valve N.O. (VJ3233) (VJ3233) Air operated Air operated N.C (VJA3130) N.O (VJA3130) 5 M Z X17 X18 ZR1 VJ3133 Manual override Pilot valve ZR1 F D Option (Connector/lead wire specifications) Unit specifications Output specifications Solenoid valve rated voltage Electrical entry With light/surge voltage suppressor Combination of switch/filter Refer to page 953 for further symbol specifications. Refer to page 968 for further symbol specifications. Note) Pilot valve gasket is included. (ZR1-PVG-1 or ZR1-PVG-2) 974 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 39 Large Size Vacuum Module: Vacuum Pump System Series ZR m cuu Va port V ure en) ess t (op t pr E por Pilo aust P exh Complete Unit Valve + Pressure Switch for Vacuum + Filter Unit re ssu pre ort re ase PD p ssu e l pre rt Re pply uum PV po e r c su a u ess ort V supply t pr S p Pilopply P su Circuit diagram Pilot pressure supply port (PS) Pilot pressure exhaust port (PE) SOL.c Pressure switch for vacuum Type K1 Vacuum valve: Double SOL. Release valve: Single SOL. (N.C.) Release pressure supply port (PD) ZR100-K1 M Vacuum pressure supply port (PV) Release valve Supply valve -E - SOL.a SOL.b ZA Vacuum port (V) ZX Suction filter Indicator lilght (Red) ∗2 ∗2 ZR 2 x Slotted holes (Mounting holes)∗1 ∗2 A : Release flow rate adjusting needle with lock nut ZM Spacer A Vacuum pressure setting trimmer ∗1 ∗1 ZMA 9 (Needle fully open) Thickness 1.2 ∗1 Manual override ∗1 ∗1 8∗1 8∗1 ∗1 Spacer A is used to leave space for 2 x 4.6 maintenance (for replacement of filter (Mounting hole)∗1 element etc.) on side mounting. (300) Light ZF Suction filter M5 Pilot pressure exhaust (PE) M5 Release pressure supply port (PD) ZP M5 Pilot pressure supply por (PS) Filter block Spacer A Valve unit SP 84 2 x 4.2 (Mounting hole) A ZCUK ∗2 1.2 Rc 1/8 Vacuum pressure supply port (PV) ∗2 Release flow adjusting needle AMJ 4∗1 Adapter G Bracket A Bracket A Rc 1/8 Vacuum port (V) 7.2 ∗1 AMV AEP A B B Related Equipment S B HEP A -D A ZR100-K1 M ZU ZY (600) Manual override ZH ZL Pressure switch for vacuum Interface A Interface B ZQ - + Digital pressure switch for vacuum - + - + PE 60 (79.8) 85 A PD PS PV 129 (2000) Note) ∗ 1 Dimensions for mounting bracket A ∗ 2 Dimensions for mounting spacer A Bracket A part no.: P3270153#1 (Standard accessory) Spacer A part no. : P3270156#1 975 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Series Page 40 ZR m cuu Va port V Vacuum Pump System ure en) ess t (op t pr E por Pilo aust P exh Valve Unit e sur res e p port s ure a D le ress Re pply P m p ort re t Vacuu PV p su u s ly r p es o sup t pr S p Pilopply P su Type K1 Type K2 ZR1-VK1 M - ZR1-VK2 M Circuit diagram Adapter B Pilot pressure supply port (PS) Pilot pressure exhaust port (PE) Circuit diagram ∗2 16∗2 PS PE Release pressure supply port (PD) ∗1 1.2∗2 SOL.b SOL.a SOL.c ∗1 SOL.c SOL.a - PD Air pressure supply port (PV) Release valve Supply valve Vacuum port (V) PV Release valve Supply valve Manual override 8∗1 16∗1 V Rc 1/8 Vacuum port (V) ∗1 (300) 2 x 4.6 (Mounting hole) Interface A Interface B Manual override Adapter C Light 2 x 3.4 (Mounting hole) M5 Pilot pressure exhaust port (PE) M5 Release pressure supply port (PD) Spacer B Release flow adjusting needle M5 Pilot pressure supply port (PS) ∗1 ∗2 Valve unit Rc 1/8 Vacuum pressure supply port (PV) ∗1 ∗2 A Bracket B 1.2 Bracket B A : Release flow rate adjusting needle with lock nut Type K3 ZR1-VK3- 9 Pilot air (Needle fully open) Pilot air Circuit diagram PS PE Note) ∗ 1 Dimensions for mounting bracket B ∗ 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of solenoid valve etc.) on side mounting of used on surface mounting. Bracket B part no.: P3270154#1 (Standard accessory) Spacer B part no. : P3270157#1 Air operated a Air operated b PD PV Release valve Supply valve Supply valve V Release valve Manual override A Dimensions not indicated are identical to type K2. 976 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 41 Large Size Vacuum Module: Vacuum Pump System Series ZR m cuu Va port V Vacuum Pump System Valve Unit ure en) ess t (op t pr PE por o l i t P aus exh re ssu pre ort re ase PD p ssu e l pre rt Re pply uum PV po e r c su a u ess ort V supply t pr S p Pilopply P su Type C1 Type C3 ZR1-VC1 M - Circuit diagram - ZX Circuit diagram SOL.a ZR 16∗2 1∗2 Adapter B PS PE 1.2∗2 Manual override Release pressure supply port (PD) ZM SOL.a ∗1 ∗1 Pilot pressure supply port (PS) Pilot pressure exhaust port (PE) ZA ZR1-VC3 M ZMA PD Air pressure supply port (PV) Supply valve Release valve Vacuum port (V) PV Supply valve 8∗1 16∗1 Release valve V Interface C Interface D Manual override Blanking plate ZH 2 x 3.4 (Mounting hole) M5 Pilot pressure exhaust port (PE) M5 Release pressure supply port (PD) M5 Pilot pressure supply port (PS) ZU Adapter C Light ZQ 1∗1 (300) 2 x 4.6 (Mounting hole) ZL Spacer B Release flow adjusting needle ZY Rc 1/8 Vacuum port (V) 68∗2 ∗1 Valve unit Rc 1/8 Vacuum pressure supply port (PV) ZF A ∗2 ∗1 1.2 Bracket B ZP Bracket B SP A : Release flow rate adjusting needle with lock nut Type C2 9 ZR1-VC2- (Needle fully open) Circuit diagram PS PE Note) ∗ 1 Dimensions for mounting bracket B ∗ 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of solenoid valve etc.) on side mounting of used on surface mounting. Bracket B part no.: P3270154#1 (Standard accessory) Spacer B part no. : P3270157#1 ZCUK Type C4 AMJ ZR1-VC4 M - AMV Circuit diagram AEP PS PE SOL.a SOL.b HEP Air operated a Pilot air PV Supply valve PD PV Supply valve Release valve Related Equipment PD Release valve V V Pilot valve Manual override A Dimensions not indicated are identical to drawings above. 977 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Series Page 42 ZR Manifold Specifications/Vacuum Pump System Specifications Max. number of units 6 stations Port size Port 1 8 (Rc, NPTF, G) Common vacuum pressure supply port (PV) Common pilot pressure supply port (PS) M5 Common release pressure supply port (PD) M5 1 2 (Rc, NPTF, G) Common exhaust port (EXH) Mass Basic mass for one station is 0.275 kg. Additional mass per one station is 0.12 kg. Note) When using 3 or more stations with ZR100 manifold, utilize PV port as suction on both sides. Manifold Vacuum/Air Supply Manifold Port Supply port location Left PS PV PD PV Right PS PD L (Left side) R (Right side) B (Both sides) Vacuum supply to PV port. Air supply to port. BLANK plug attached to port. Note) BLANK plug is attached on all ports of valve unit. Individual Spacer Part no. Port PV PS PD PE ZR1-R1 How to Order Manifold Function Possible to set the external vacuum pressure individually Possible to set the pilot valve air supply pressure individually Possible to set the release valve supply pressure individually Possible to set the pilot valve exhaust individually Individual spacer is used when the connecting port of each unit is not common for the manifold connecting port. Mixed specifications of common and individual unit connecting ports for each unit is possible on manifolds with this individual spacer. ZZR1 06 ZR1 RV3 Stations 01 1 06 Port location R Right side L Left side B Both sides 6 Thread type Nil F T Rc G Note) NPTF ∗ Viewed from the front side of valve unit, confirm the port location on the right and/or left side. Note ) The thread ridge shape is compatible with the G thread standard (JIS B 0203), but other shapes are not conforming to ISO16030 and ISO1179. Example 1) ZZR106-R ....................... 1 pc. (Manifold base only) ∗ZR100-K15MZ-EC ........ 5 pcs. (Unit) ∗ZR1-BM1 ...................... 1 pc. (Blank plate) ∗ZR1-R1-3 ...................... 1 pc. (Individual spacer) 1 ZR1 R1 1 Arrangement Arrangement R16 (Right valve station which is looked from valve side is first station.) 1 Refer to (About individual spacer.) 1 station only 6 6 stations only All stations A ∗ When the spacers are attached to the specified locations, specify all spacers. Example 2) Attached to the first and third stations ∗ZR1-RV3-1 ∗ZR1-RV3-3 ∗ZR1-RV3-A ··· 2 The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted. When it is not added, the manifold base and ejector are shipped separately. 1 1 station only 6 6 stations only A All stations ∗ When the spacers are attached to the specified locations, specify all spacers. Example 3) Attached to the first and third stations ∗ZR1-R1-1 ∗ZR1-R1-3 Fill the number ZR1 BM1 With reference from valve side, the third station from right side Caution when ordering manifold (Right valve station which is looked from valve side is first station.) Refer to Example 1). About individual spacers Manifold supply or valve unit supply can be selectable for each port. In the right table, ports with the symbol mean that they are manifold supply, while others are individual supply from the valve unit. Symbols in the right table are printed on the surface of individual spacers. Part no. ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 Symbol R1 R2 R3 R4 R5 R6 R7 R8 Part no. PE PD PD PS PS PS PS PE PE PD PD PE ZR1-R9 -R10 -R11 -R12 -R13 -R14 -R15 -R16 R9 R10 R11 R12 R13 R14 R15 R16 Symbol PV PV PV PV PV PS PV PS PV PS PV PS PE PD PD PE PE PD PD PE 978 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 43 Large Size Vacuum Module: Vacuum Pump System Series ZR Manifold/System Circuit Example When not using individual spacer When using individual spacer Vacuum module 1 Vacuum module 2 ZA ZX ZR ZM ZMA ZQ ZH ZU Individual Spacer R1 PV: Vacuum pressure supply port PS: Pilot pressure supply port PD: Release pressure supply port PE: Pilot pressure exhaust port EXH: Common exhaust port V: Vacuum Port ZL PV: Vacuum pressure supply port PS: Pilot pressure supply port PD: Release pressure supply port PE: Pilot pressure exhaust port EXH: Common exhaust port V: Vacuum Port ZY ZF ZP SP PS PE Pressure switch for vacuum Sol.b PD PV Supply valve Release valve V Sol.c HEP Supply valve Release valve V PS PE Pressure switch for vacuum Sol.b PD PV Supply valve Release valve Related Equipment Suction filter Sol.c Sol.a AEP Pressure switch for vacuum Sol.b Sol.a PD PV Suction filter PS PE AMJ AMV PS PE Sol.c Sol.a ZCUK PV PD EXH PS PV PD EXH PS V Sol.c Sol.a Pressure switch for vacuum Sol.b PD PV Supply valve Release valve V Suction filter Suction filter Individual spacer PV PD EXH PS PV PD EXH PS ZR1-R1-1 979 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Series Page 44 ZR m cuu Va port m V cuu Va port V Vacuum Pump System Manifold C EXomm H on po e rt xha us t Com C pre mo supomm ssu n va ply on p re s cuu upp m PS ilot ly P por pre Vp t ssu ort p Comm re res on sur re e s lea upp se ly P Dp ort Function plate Digital pressure switch for vacuum Individual spacer 79 82 (2000) 62 3 4 x 5.7 (Mounting hole) A A S A Adapter B A 4 A B L2 L1 B (Needle fully open) A B Pitch P = 33 B 31 Adapter D SET H L 9 B A : Release flow rate adjusting needle with lock nut B 32.4 19 5 Suction filter 19 Pressure switch for vacuum Pressure setting trimmer 28 52 Individual spacer 20 31 Pilot valve for release (SOL.c) 20 32 44 74 63 Pilot valve for supply (SOL.b) Manual override Non-locking push type (300) Pilot valve for supply (SOL.a) Manual override Non-locking push type (600) Pilot pressure exhaust (PE) port M5 Release pressure supply (PD) port M5 PD 80.8 PD PS PV A PV 13.5 35.5 52 42 33 28 17 12 PS PD PV PV Pilot pressure supply (PS) port M5 80 81.5 PD 50 31.5 16.5 PE 109 EXH PE PD PS PV Common release pressure supply (PD) port 3 Air pressure supply (PV) port Rc 1/8 1.5 4.5 1 2.5 Common exhaust (EXH) port 1/2 (Rc, NPTF, G) 2 x M5 Release pressure supply (PD) port M5 Air pressure supply (PV) port Rc 1/8 Release flow rate adjusting needle 7.5 7.5 Common pilot supply (PS) port 2 x M5 Common air pressure supply (PV) port 1/8 (Rc, NPTF, G) ∗ 1 The common exhaust port (EXH.) is also used as the pilot pressure exhaust (PE) port of the pilot valve. Use while the port is open to the atmosphere. (mm) Stations Symbol L1 L2 1 2 3 4 5 6 52 71 85 104 118 137 151 170 184 203 217 236 980 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 45 Large Size Vacuum Module: Vacuum Pump System Series ZR PV PD EXH PS Circuit diagram Individual spacer (ZR1-R1-4) Function plate (ZR1-RV3-4) ZA X X X X PS X PE SOL.C Pressure switch for vacuum SOL.B SOL.A PD PV X X X X ZX ZR ZM Release valve Vacuum switch valve V ZMA Suction filter PS X PE X ZQ SOL.C SOL.A ZH SOL.B PD X PV X ZU Release valve Vacuum switch valve V ZL ZY ZF Individual spacer ZR1-R1-2 ZP PV V X X SP PD X X ZCUK Individual spacer ZR1-R1-1 PV -+ -+ -+ - + - + X - + Vacuum (V) port Rc 1/8 PD AMJ V X X AMV X X AEP X 16.5 12 V 35.5 V Pitch P = 33 EXH PS PD 70.5 PV HEP Related Equipment V Pitch P = 33 35.5 PV : Vacuum pressure supply port PS : Common pilot pressure supply port PD : Common release pressure supply port PE : Pilot valve exhaust port EXH : Common exhaust port V : Vacuum Port 981 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Series Page 46 ZR Ejector System Mounting Thread Parts List for Unit Combination Manifold Specifications Without Manifold Components Valve unit + Ejector unit + Pressure switch for vacuum/Filter unit Mounting Thread Parts List for Unit Combination No. 1 Components Valve unit + Ejector unit 2 3 4 5 6 7 8 Components Ejector unit + Pressure switch for vacuum/Filter unit 9 10 Note 1) 11 Components Ejector unit Combination specifications Standard (without options) With individual spacer With function plate With individual spacer + with function plate Individual, common and port exhaust style for nozzle size 10, 13 Common and port exhaust style for nozzle size 15 Individual exhaust style for nozzle size 15 Common and port exhaust style for nozzle size 18, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 [For ZSE30A spec.] For nozzle size 18, 20 [For ZSE30A spec.] For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 [For ZSE30A spec.] For nozzle size 18, 20 [For ZSE30A spec.] For nozzle size 10, 13, 15 + with function plate [For ZSE30A spec.] For nozzle size 18, 20 + with function plate [For ZSE30A spec.] For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate When the ejector is compatible with silencer exhaust or port exhaust When the ejector is compatible with common exhaust Mounting thread Quantity 6 M2.5 x 0.45 x 33 6 M2.5 x 0.45 x 37 6 M2.5 x 0.45 x 38 6 M2.5 x 0.45 x 41 M2 x 0.4 x 13 2 M2 x 0.4 x 23 M2 x 0.4 x 48 M2 x 0.4 x 53 M2.5 x 0.45 x 41 M2.5 x 0.45 x 17 M2.5 x 0.45 x 21 M2.5 x 0.45 x 66 M2.5 x 0.45 x 70 M2.5 x 0.45 x 82 M2.5 x 0.45 x 86 M2.5 x 0.45 x 35 M2.5 x 0.45 x 39 M2.5 x 0.45 x 5 M2.5 x 0.45 x 8 M3 x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 M3 x 0.35 x 84 M3 x 0.35 x 88 M3 x 0.35 x 89 M3 x 0.35 x 93 M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 2 2 2 2 2 2 4 4 4 4 6 6 6 6 2 2 2 2 4 4 4 4 4 4 4 4 6 6 6 6 M12 x 12 1 Unnecessary Note 1) • Screw M12 x 12 screws (Hexagon socket head set screws) in until the head aligns with the manifold base surface. • The manifold base not assembled with the unit does not include M12 x 12 screws (Hexagon socket head set screws). Please order them separately. Note 2) When the valve unit is assembled from a single unit function to a manifold function, 3 pcs. of M-5P for PS, PD, PE ports and 1 pc. of R1/8 for PV port are required. Precautions Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions. Caution Refer to the Vacuum Equipment Model Selection on page 825 for precautions on matching with vacuum circuit. 982 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-5-08-ZR.qxd 09.10.2 10:21 AM Page 47 Large Size Vacuum Module: Vacuum Pump System Series ZR Vacuum Pump System Mounting Thread Parts List for Unit Combination Manifold Specifications Components Without Manifold Valve unit + Pressure switch for vacuum / Filter unit ZA ZX ZR Mounting Thread Parts List for Unit Combination No. 1 Components Valve unit 3 7 11 12 13 14 15 16 Components Pressure switch for vacuum / Filter unit Note 1) Combination specifications Standard (Without options) With individual spacer With function plate With individual spacer + with function plate For vacuum switch and adapter A Standard (Without options) With individual spacer Standard (Without options) Standard (Without options) [For ZSE30A spec.] Standard (Without options) Standard (Without options) With function plate Standard (Without options) With function plate Standard (Without options) [For ZSE30A spec.] With function plate [For ZSE30A spec.] Standard (Without options) With function plate Standard Mounting thread Quantity 6 M2.5 x 0.45 x 33 6 M2.5 x 0.45 x 37 6 M2.5 x 0.45 x 38 6 M2.5 x 0.45 x 41 2 M2.5 x 0.45 x 41 6 M2.5 x 0.45 x 5 6 M2.5 x 0.45 x 8 4 M2.5 x 0.45 x 49 4 M2.5 x 0.45 x 65 6 M2.5 x 0.45 x 18 2 M2.5 x 0.45 x 33 2 M2.5 x 0.45 x 38 4 M3 x 0.35 x 54 4 M3 x 0.35 x 59 4 M3 x 0.35 x 70 4 M3 x 0.35 x 75 6 M3 x 0.35 x 19 6 M3 x 0.35 x 24 1 M12 x 12 Note 1) • Screw M12 x 12 screws (Hexagon socket head set screws) in until the head aligns with the manifold base surface. • The manifold base not assembled with the unit does not include M12 x 12 screws (Hexagon socket head set screws). Please order them separately. Note 2) When the valve unit is assembled from a single unit function to a manifold function, 3 pcs. of M-5P for PS, PD, PE ports and 1 pc. of R1/8 for PV port are required. ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment 983 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Zr Series Large Size Vacuum Module Ejector System

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